JPH1140824A5 - - Google Patents

Info

Publication number
JPH1140824A5
JPH1140824A5 JP1998122633A JP12263398A JPH1140824A5 JP H1140824 A5 JPH1140824 A5 JP H1140824A5 JP 1998122633 A JP1998122633 A JP 1998122633A JP 12263398 A JP12263398 A JP 12263398A JP H1140824 A5 JPH1140824 A5 JP H1140824A5
Authority
JP
Japan
Prior art keywords
substrate
shows
layer
bolometer
patterning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1998122633A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1140824A (ja
Filing date
Publication date
Priority claimed from EP97870044A external-priority patent/EP0867701A1/en
Application filed filed Critical
Publication of JPH1140824A publication Critical patent/JPH1140824A/ja
Publication of JPH1140824A5 publication Critical patent/JPH1140824A5/ja
Pending legal-status Critical Current

Links

JP10122633A 1997-03-28 1998-03-27 赤外線輻射検出器、特に赤外線検出ボロメータ、の製造法 Pending JPH1140824A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
BE97870044-1 1997-03-28
EP97870044A EP0867701A1 (en) 1997-03-28 1997-03-28 Method of fabrication of an infrared radiation detector and more particularly an infrared sensitive bolometer

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007029141A Division JP2007165927A (ja) 1997-03-28 2007-02-08 基板上に積層する多結晶シリコンゲルマニウム層中の内部応力を制御する方法

Publications (2)

Publication Number Publication Date
JPH1140824A JPH1140824A (ja) 1999-02-12
JPH1140824A5 true JPH1140824A5 (enExample) 2006-11-02

Family

ID=8230989

Family Applications (2)

Application Number Title Priority Date Filing Date
JP10122633A Pending JPH1140824A (ja) 1997-03-28 1998-03-27 赤外線輻射検出器、特に赤外線検出ボロメータ、の製造法
JP2007029141A Pending JP2007165927A (ja) 1997-03-28 2007-02-08 基板上に積層する多結晶シリコンゲルマニウム層中の内部応力を制御する方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2007029141A Pending JP2007165927A (ja) 1997-03-28 2007-02-08 基板上に積層する多結晶シリコンゲルマニウム層中の内部応力を制御する方法

Country Status (4)

Country Link
US (5) US6194722B1 (enExample)
EP (3) EP0867701A1 (enExample)
JP (2) JPH1140824A (enExample)
DE (1) DE69811968T2 (enExample)

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