JP2004536453A5 - - Google Patents
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- Publication number
- JP2004536453A5 JP2004536453A5 JP2003514274A JP2003514274A JP2004536453A5 JP 2004536453 A5 JP2004536453 A5 JP 2004536453A5 JP 2003514274 A JP2003514274 A JP 2003514274A JP 2003514274 A JP2003514274 A JP 2003514274A JP 2004536453 A5 JP2004536453 A5 JP 2004536453A5
- Authority
- JP
- Japan
- Prior art keywords
- magnetostrictive
- barber pole
- dielectric
- depositing
- strip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 238000000151 deposition Methods 0.000 claims 11
- 239000000758 substrate Substances 0.000 claims 8
- 238000000034 method Methods 0.000 claims 7
- 239000004020 conductor Substances 0.000 claims 6
- 238000005530 etching Methods 0.000 claims 4
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 3
- 229910052710 silicon Inorganic materials 0.000 claims 3
- 239000010703 silicon Substances 0.000 claims 3
- 230000008021 deposition Effects 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 150000004767 nitrides Chemical class 0.000 claims 2
- 239000012212 insulator Substances 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/908,834 US6850057B2 (en) | 2001-07-19 | 2001-07-19 | Barber pole structure for magnetoresistive sensors and method of forming same |
| PCT/US2002/022626 WO2003008987A1 (en) | 2001-07-19 | 2002-07-16 | Barber pole structure for magnetorestrictive sensors |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004536453A JP2004536453A (ja) | 2004-12-02 |
| JP2004536453A5 true JP2004536453A5 (enExample) | 2006-01-05 |
Family
ID=25426296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003514274A Ceased JP2004536453A (ja) | 2001-07-19 | 2002-07-16 | 磁歪センサ用のバーバー・ポール構造 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6850057B2 (enExample) |
| EP (1) | EP1407282A1 (enExample) |
| JP (1) | JP2004536453A (enExample) |
| WO (1) | WO2003008987A1 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7265543B2 (en) * | 2003-04-15 | 2007-09-04 | Honeywell International Inc. | Integrated set/reset driver and magneto-resistive sensor |
| US7206693B2 (en) * | 2003-04-15 | 2007-04-17 | Honeywell International Inc. | Method and apparatus for an integrated GPS receiver and electronic compassing sensor device |
| US7239000B2 (en) * | 2003-04-15 | 2007-07-03 | Honeywell International Inc. | Semiconductor device and magneto-resistive sensor integration |
| US7126330B2 (en) * | 2004-06-03 | 2006-10-24 | Honeywell International, Inc. | Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device |
| US7420365B2 (en) * | 2006-03-15 | 2008-09-02 | Honeywell International Inc. | Single chip MR sensor integrated with an RF transceiver |
| EP2360489B1 (en) * | 2010-02-04 | 2013-04-17 | Nxp B.V. | Magnetic field sensor |
| IT1403433B1 (it) | 2010-12-27 | 2013-10-17 | St Microelectronics Srl | Sensore magnetoresistivo con capacita' parassita ridotta, e metodo |
| IT1403434B1 (it) | 2010-12-27 | 2013-10-17 | St Microelectronics Srl | Sensore di campo magnetico avente elementi magnetoresistivi anisotropi, con disposizione perfezionata di relativi elementi di magnetizzazione |
| US20140347047A1 (en) * | 2011-02-22 | 2014-11-27 | Voltafield Technology Corporation | Magnetoresistive sensor |
| US20130113473A1 (en) * | 2011-11-04 | 2013-05-09 | Sae Magnetics (H.K.) | Magnetic sensor with shunting layers and manufacturing method thereof |
| US9817087B2 (en) * | 2012-03-14 | 2017-11-14 | Analog Devices, Inc. | Sensor with magnetroesitive and/or thin film element abutting shorting bars and a method of manufacture thereof |
| EP2813859B1 (en) | 2013-06-12 | 2016-03-23 | Nxp B.V. | Manufacturing magnetic sensor elements monolithically integrated at a semiconductor chip comprising an integrated circuit |
| US9013838B1 (en) | 2013-10-01 | 2015-04-21 | Allegro Microsystems, Llc | Anisotropic magnetoresistive (AMR) sensors and techniques for fabricating same |
| US8848320B1 (en) | 2013-10-01 | 2014-09-30 | Allegro Microsystems, Llc | Anisotropic magnetoresistive (AMR) sensors and techniques for fabricating same |
| US8885302B1 (en) | 2013-10-01 | 2014-11-11 | Allegro Microsystems, Llc | Anisotropic magnetoresistive (AMR) sensors and techniques for fabricating same |
| US11719772B2 (en) * | 2020-04-01 | 2023-08-08 | Analog Devices International Unlimited Company | AMR (XMR) sensor with increased linear range |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4847584A (en) * | 1988-10-14 | 1989-07-11 | Honeywell Inc. | Magnetoresistive magnetic sensor |
| JPH03219682A (ja) * | 1990-01-24 | 1991-09-27 | Fujitsu Ltd | 磁気抵抗素子 |
| JPH03219683A (ja) * | 1990-01-25 | 1991-09-27 | Fujitsu Ltd | 磁気抵抗素子 |
| JPH04255276A (ja) * | 1991-02-07 | 1992-09-10 | Fujitsu Ltd | 磁気抵抗素子 |
| DE4436876A1 (de) | 1994-10-15 | 1996-04-18 | Lust Antriebstechnik Gmbh | Sensorchip |
| DE19740408A1 (de) | 1996-09-09 | 1998-03-12 | H Schiebel Elektronische Gerae | Magnetfeldsensor |
| JPH10275314A (ja) * | 1997-04-01 | 1998-10-13 | Nec Corp | 磁気抵抗効果型ヘッド |
| JP2001156357A (ja) * | 1999-09-16 | 2001-06-08 | Toshiba Corp | 磁気抵抗効果素子および磁気記録素子 |
-
2001
- 2001-07-19 US US09/908,834 patent/US6850057B2/en not_active Expired - Lifetime
-
2002
- 2002-07-16 WO PCT/US2002/022626 patent/WO2003008987A1/en not_active Ceased
- 2002-07-16 JP JP2003514274A patent/JP2004536453A/ja not_active Ceased
- 2002-07-16 EP EP02753386A patent/EP1407282A1/en not_active Withdrawn
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