JPH09503587A - 窒素酸化物を検出するためのセンサー - Google Patents
窒素酸化物を検出するためのセンサーInfo
- Publication number
- JPH09503587A JPH09503587A JP7511152A JP51115295A JPH09503587A JP H09503587 A JPH09503587 A JP H09503587A JP 7511152 A JP7511152 A JP 7511152A JP 51115295 A JP51115295 A JP 51115295A JP H09503587 A JPH09503587 A JP H09503587A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- oxide
- layer
- metal oxide
- conversion layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—Specially adapted to detect a particular component
- G01N33/0037—Specially adapted to detect a particular component for NOx
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
- G01N31/005—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods investigating the presence of an element by oxidation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
- Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/17—Nitrogen containing
- Y10T436/177692—Oxides of nitrogen
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.とくにセラミックの基板(10)上に設けられ、その電気抵抗が試験ガス 中の窒素酸化物(NO,NO2,N204)の濃度に関する情報を提供する、半導 電性金属酸化物層(3)を有し、 −金属酸化物層(3)上に設けられた、試験ガス中の可燃性成分の酸化を惹起し 、試験ガスに含まれている一酸化窒素(NO)を二酸化窒素(NO2)または四 酸化二窒素(N204)に変換する材料からなり、変換された窒素酸化物は引き続 き金属酸化物層(3)に到達する変換層(4)を有し、 −ならびに金属酸化物層(3)および変換層(4)を加熱する加熱装置(5)を 有する、試験ガス中の窒素酸化物(NO,NO2,N204)を検出するためのセ ンサーにおいて、 変換層がそれぞれセラミック基礎材料上に構成する2つの部分層(4,6)を有 し、これらの層に互いに異なる濃度でそれぞれ、白金族の貴金属の触媒有効分量 が添加されていることを特徴とする窒素酸化物を検出するためのセンサー。 2.変換層(4,6)のセラミック基礎材料が、二酸化チタン(TiO2)お よび/または酸化ジルコニウム(Zr02)および/または二酸化ケイ素(Si O2)および/または酸化アルミニウム(Al2O3) であることを特徴とする請求項1記載のセンサー。 3.金属酸化物層(3)が、半導電性金属酸化物、殊に酸化インジウム(In2 O3)または酸化スズ(Sn02)からなり、この酸化物に5×10-2モル%の 濃度で導電率を高めるドーピング元素が混合されていることを特徴とする請求項 1記載のセンサー。 4.ドーピング元素がタンタル(Ta)、ニオブ(Nb)、アンチモン(Sb )、タングステン(W)であり、酸化インジウム(In2O3)の場合にはスズ( Sn)、チタン(Ti)またはセリウム(Ce)であることを特徴とする請求項 3記載のセンサー。 5.金属酸化物層(3)が付加的に少なくとも1種のIIa族の2価元素およ び/またはIIIa族の3価元素および/または希土類の3価元素を酸化物とし て0.001〜45重量%の濃度で含有することを特徴とする請求項1記載のセ ンサー。 6.付加的元素がマグネシウム(Mg)、バリウム(Ba)、カルシウム(C a)、ストロンチウム(Sr)、亜鉛(Zn)、または酸化アルミニウム(Al2 03)であることを特徴とする請求項5記載のセンサー。 7.金属酸化物層(3)が、白金(Pt)および/またはロジウム(Rh)の 添加物を有するパラジウム(Pd)および/またはこれからなる合金を0.00 1〜5モル%の濃度で含有することを特徴とする請求 項1記載のセンサー。 8.変換層(4)が0.01〜20重量%の濃度で白金(pt)および/また はロジウム(Rh)、および/またはパラジウム(Pd)またはこれからなる合 金を含有することを特徴とする請求項1記載のセンサー。 9.変換層(4)上に多孔性層(7)が設けられ、その上側に加熱装置(5) が配置されていることを特徴とする請求項1記載のセンサー。 10.変換層(4)と金属酸化物層(3)の間に、同様に酸化アルミニウム(A l203)および/または二酸化チタン(TiO2)および/または酸化ジルコニ ウム(ZrO2)および/または二酸化ケイ素(SiO2)から構成されているが 、変換層(4)に比して少ない貴金属分量を有する中間変換層(6)が配置され ていることを特徴とする請求項1記載のセンサー。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4334672.3 | 1993-10-12 | ||
DE4334672A DE4334672C2 (de) | 1993-10-12 | 1993-10-12 | Sensor zum Nachweis von Stickoxid |
PCT/DE1994/001051 WO1995010774A1 (de) | 1993-10-12 | 1994-09-14 | Sensor zum nachweis von stickoxid |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH09503587A true JPH09503587A (ja) | 1997-04-08 |
JP3606874B2 JP3606874B2 (ja) | 2005-01-05 |
Family
ID=6499913
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51115295A Expired - Fee Related JP3606874B2 (ja) | 1993-10-12 | 1994-09-14 | 窒素酸化物を検出するためのセンサー |
Country Status (6)
Country | Link |
---|---|
US (1) | US5624640A (ja) |
EP (1) | EP0723662B1 (ja) |
JP (1) | JP3606874B2 (ja) |
KR (1) | KR100337102B1 (ja) |
DE (2) | DE4334672C2 (ja) |
WO (1) | WO1995010774A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013228283A (ja) * | 2012-04-26 | 2013-11-07 | Ngk Spark Plug Co Ltd | ガスセンサ評価方法およびガスセンサ評価装置 |
JP2017156346A (ja) * | 2016-02-29 | 2017-09-07 | 株式会社東芝 | 分子検出装置および分子検出方法 |
KR20230017053A (ko) * | 2021-07-27 | 2023-02-03 | 한국생산기술연구원 | 이산화질소 가스 센서 |
Families Citing this family (40)
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GB9408542D0 (en) * | 1994-04-29 | 1994-06-22 | Capteur Sensors & Analysers | Gas sensing resistors |
DE4431456C2 (de) * | 1994-09-03 | 1996-07-11 | Bosch Gmbh Robert | In Dick- oder Dünnschichttechnik hergestellter Gassensor |
US5965802A (en) * | 1996-11-07 | 1999-10-12 | Honda Giken Kogyo Kabushiki Kaisha | NOx sensor for exhaust gas, and process for producing the same |
DE19732601C2 (de) * | 1997-07-29 | 1999-11-04 | Heraeus Electro Nite Int | Katalytisches Schichtsystem |
KR20010033717A (ko) * | 1997-12-31 | 2001-04-25 | 알프레드 엘. 미첼슨 | 질소 산화물 검출을 위한 금속 산화물 센서 |
US6113859A (en) * | 1998-02-04 | 2000-09-05 | Korea Institute Of Science And Technology | Bar-type NOx gas sensor having WO3 sensing film |
JP3686272B2 (ja) * | 1998-12-21 | 2005-08-24 | 株式会社日立製作所 | 空燃比センサ及びこれを用いたエンジン燃焼制御システム |
DE19916798C2 (de) * | 1999-04-14 | 2001-10-18 | Daimler Chrysler Ag | Dünnschicht-Halbleiter-Gassensor und Verfahren zum Nachweis von Gasen |
JP2004536301A (ja) * | 2001-07-16 | 2004-12-02 | センサー テック インコーポレイテッド | 気相物質の定性および定量分析のためのセンサ装置および方法 |
DE10139615A1 (de) * | 2001-08-11 | 2003-02-20 | Bosch Gmbh Robert | Vorrichtung zur Bestimmung einer Partikelkonzentration eines Abgasstroms |
US8485983B2 (en) * | 2003-04-21 | 2013-07-16 | The Research Foundation Of State University Of New York | Selective nanoprobe for olfactory medicine |
US7394118B2 (en) * | 2004-03-09 | 2008-07-01 | University Of Southern California | Chemical sensor using semiconducting metal oxide nanowires |
US20080017510A1 (en) * | 2004-05-26 | 2008-01-24 | Nair Balakrishnan G | NOx Gas Sensor Method and Device |
DE102004028701B3 (de) * | 2004-06-14 | 2005-11-24 | Siemens Ag | Gassensor zur Bestimmung von Ammoniak |
DE102005015569A1 (de) * | 2005-04-05 | 2006-10-12 | Robert Bosch Gmbh | Keramisches Widerstands- oder Sensorelement |
EP1722223A1 (en) * | 2005-05-10 | 2006-11-15 | Eidgenossisch Technische Hochschule Zürich | Metal oxide membrane with a gas-selective compound |
US7611612B2 (en) * | 2005-07-14 | 2009-11-03 | Ceramatec, Inc. | Multilayer ceramic NOx gas sensor device |
US20080020504A1 (en) * | 2006-07-24 | 2008-01-24 | Honeywell International, Inc. | Sensors for detecting NOx in a gas and methods for fabricating the same |
JP2010519514A (ja) * | 2007-02-16 | 2010-06-03 | セラマテック・インク | 選択性および検出感度の改善されたNOxセンサー |
KR100898268B1 (ko) * | 2007-10-24 | 2009-05-18 | 한국에너지기술연구원 | 친수성 젖음벽을 구비한 기액 흡수평형 측정 장치 |
US20090159447A1 (en) * | 2007-12-20 | 2009-06-25 | General Electric Company | Gas sensor and method of making |
WO2009087656A1 (en) * | 2008-01-07 | 2009-07-16 | Council Of Scientific & Industrial Research | Combustible gas sensor |
DE102008005640A1 (de) | 2008-01-23 | 2009-07-30 | Daimler Ag | Verfahren zur Ermittlung der Stickstoffdioxidkonzentration in Abgasen |
DE102008036370A1 (de) | 2008-08-05 | 2010-02-18 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Sensor-integrierte Vorrichtung |
WO2010025745A1 (de) * | 2008-09-03 | 2010-03-11 | Testo Ag | Verfahren zur messwerterfassung und messwertanzeige |
EP2572187B1 (en) * | 2010-05-19 | 2020-07-08 | The Regents of The University of California | Metal and metal oxide co-functionalized single-walled carbon nanotubes for high performance gas sensors, method for their preparation and use |
US9678058B2 (en) | 2010-09-03 | 2017-06-13 | Anastasia Rigas | Diagnostic method and breath testing device |
US9389212B2 (en) * | 2011-02-28 | 2016-07-12 | Honeywell International Inc. | NOx gas sensor including nickel oxide |
WO2015179751A1 (en) | 2012-03-14 | 2015-11-26 | Anastasia Rigas | Breath analyzer and breath test methods |
CH705070B1 (fr) * | 2011-07-15 | 2022-01-14 | Swatch Group Res & Dev Ltd | Capteur d'hydrogène à couche active et procédé de fabrication de capteurs d'hydrogène. |
US9164080B2 (en) | 2012-06-11 | 2015-10-20 | Ohio State Innovation Foundation | System and method for sensing NO |
KR101401713B1 (ko) * | 2013-02-25 | 2014-06-27 | 주식회사 현대케피코 | 입자상 물질 센서 |
CN104185365B (zh) * | 2013-05-23 | 2018-06-26 | 比亚迪股份有限公司 | 一种线路板及其制备方法 |
DE102013210150A1 (de) | 2013-05-31 | 2014-12-04 | Robert Bosch Gmbh | Verfahren und Vorrichtung zur Erhöhung der Sicherheit beim Gebrauch von Batteriezellen |
CN103884743B (zh) * | 2014-04-16 | 2016-04-06 | 吉林大学 | 一种基于CuO-NiO核壳结构的异质结NO2气体传感器及其制备方法 |
CN104459041A (zh) * | 2014-11-28 | 2015-03-25 | 苏州东辰林达检测技术有限公司 | 一种氮氧化物检测试剂及其制备方法 |
US20190317036A1 (en) * | 2016-10-18 | 2019-10-17 | Carrier Corporation | Gas sensor |
DE102016125354B4 (de) * | 2016-12-22 | 2022-03-24 | Heraeus Nexensos Gmbh | Gas-Messvorrichtung und Gas-Messverfahren |
DE102018115623A1 (de) * | 2018-06-28 | 2020-01-02 | CPK Automotive GmbH & Co. KG | Verfahren zur Messung von Stickoxiden und Vorrichtung zur Durchführung des Verfahrens |
EP3705879A1 (en) * | 2019-03-06 | 2020-09-09 | Sensirion AG | Resistive metal oxide gas sensor |
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-
1993
- 1993-10-12 DE DE4334672A patent/DE4334672C2/de not_active Expired - Fee Related
-
1994
- 1994-09-14 KR KR1019960701947A patent/KR100337102B1/ko not_active IP Right Cessation
- 1994-09-14 DE DE59408526T patent/DE59408526D1/de not_active Expired - Lifetime
- 1994-09-14 US US08/628,664 patent/US5624640A/en not_active Expired - Lifetime
- 1994-09-14 JP JP51115295A patent/JP3606874B2/ja not_active Expired - Fee Related
- 1994-09-14 EP EP94926095A patent/EP0723662B1/de not_active Expired - Lifetime
- 1994-09-14 WO PCT/DE1994/001051 patent/WO1995010774A1/de active IP Right Grant
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013228283A (ja) * | 2012-04-26 | 2013-11-07 | Ngk Spark Plug Co Ltd | ガスセンサ評価方法およびガスセンサ評価装置 |
JP2017156346A (ja) * | 2016-02-29 | 2017-09-07 | 株式会社東芝 | 分子検出装置および分子検出方法 |
KR20230017053A (ko) * | 2021-07-27 | 2023-02-03 | 한국생산기술연구원 | 이산화질소 가스 센서 |
Also Published As
Publication number | Publication date |
---|---|
WO1995010774A1 (de) | 1995-04-20 |
DE4334672C2 (de) | 1996-01-11 |
KR960705207A (ko) | 1996-10-09 |
EP0723662A1 (de) | 1996-07-31 |
US5624640A (en) | 1997-04-29 |
DE59408526D1 (de) | 1999-08-26 |
DE4334672A1 (de) | 1995-04-13 |
EP0723662B1 (de) | 1999-07-21 |
KR100337102B1 (ko) | 2002-11-23 |
JP3606874B2 (ja) | 2005-01-05 |
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