JPH09196933A - プローブとプローブの作製方法、及びプローブユニット、並びにこれを用いた情報記録再生装置 - Google Patents

プローブとプローブの作製方法、及びプローブユニット、並びにこれを用いた情報記録再生装置

Info

Publication number
JPH09196933A
JPH09196933A JP8025902A JP2590296A JPH09196933A JP H09196933 A JPH09196933 A JP H09196933A JP 8025902 A JP8025902 A JP 8025902A JP 2590296 A JP2590296 A JP 2590296A JP H09196933 A JPH09196933 A JP H09196933A
Authority
JP
Japan
Prior art keywords
cantilever
tip
probe
substrate
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8025902A
Other languages
English (en)
Japanese (ja)
Inventor
Tsutomu Ikeda
勉 池田
Yasuhiro Shimada
康弘 島田
Takayuki Yagi
隆行 八木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP8025902A priority Critical patent/JPH09196933A/ja
Priority to EP97100739A priority patent/EP0785410B1/en
Priority to DE69721093T priority patent/DE69721093T2/de
Priority to US08/786,181 priority patent/US5959957A/en
Publication of JPH09196933A publication Critical patent/JPH09196933A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1409—Heads
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
    • G01Q60/04—STM [Scanning Tunnelling Microscopy] combined with AFM [Atomic Force Microscopy]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/14—Particular materials
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B9/00—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor
    • G11B9/12—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor
    • G11B9/14—Recording or reproducing using a method not covered by one of the main groups G11B3/00 - G11B7/00; Record carriers therefor using near-field interactions; Record carriers therefor using microscopic probe means, i.e. recording or reproducing by means directly associated with the tip of a microscopic electrical probe as used in Scanning Tunneling Microscopy [STM] or Atomic Force Microscopy [AFM] for inducing physical or electrical perturbations in a recording medium; Record carriers or media specially adapted for such transducing of information
    • G11B9/1418—Disposition or mounting of heads or record carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/873—Tip holder

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP8025902A 1996-01-19 1996-01-19 プローブとプローブの作製方法、及びプローブユニット、並びにこれを用いた情報記録再生装置 Pending JPH09196933A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP8025902A JPH09196933A (ja) 1996-01-19 1996-01-19 プローブとプローブの作製方法、及びプローブユニット、並びにこれを用いた情報記録再生装置
EP97100739A EP0785410B1 (en) 1996-01-19 1997-01-17 Probe, method of manufacturing the probe, probe unit, and information recording/reproducing apparatus using the probe unit
DE69721093T DE69721093T2 (de) 1996-01-19 1997-01-17 Sonde, Verfahren zu deren Herstellung sowie Sondeneinheit und Informationsaufzeichnungs-/-wiedergabevorrichtung damit
US08/786,181 US5959957A (en) 1996-01-19 1997-01-21 Probe and a cantilever formed with same material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8025902A JPH09196933A (ja) 1996-01-19 1996-01-19 プローブとプローブの作製方法、及びプローブユニット、並びにこれを用いた情報記録再生装置

Publications (1)

Publication Number Publication Date
JPH09196933A true JPH09196933A (ja) 1997-07-31

Family

ID=12178728

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8025902A Pending JPH09196933A (ja) 1996-01-19 1996-01-19 プローブとプローブの作製方法、及びプローブユニット、並びにこれを用いた情報記録再生装置

Country Status (4)

Country Link
US (1) US5959957A (enExample)
EP (1) EP0785410B1 (enExample)
JP (1) JPH09196933A (enExample)
DE (1) DE69721093T2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007510896A (ja) * 2003-11-04 2007-04-26 スイスプローブ アーゲー カンチレバー組立品

Families Citing this family (23)

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JP3978818B2 (ja) * 1997-08-08 2007-09-19 ソニー株式会社 微小ヘッド素子の製造方法
JPH11265520A (ja) * 1998-03-17 1999-09-28 Hitachi Ltd 近接場光ヘッド、近接場光ヘッドの加工方法および光記録再生装置
US6466537B1 (en) * 1998-03-20 2002-10-15 Seiko Instruments Inc. Recording apparatus
US6167748B1 (en) * 1998-08-31 2001-01-02 Lockheed Martin Energy Research Corporation Capacitively readout multi-element sensor array with common-mode cancellation
US6414501B2 (en) 1998-10-01 2002-07-02 Amst Co., Ltd. Micro cantilever style contact pin structure for wafer probing
JP2002005810A (ja) * 2000-06-16 2002-01-09 Canon Inc プローブ及びその製造方法、表面観察装置、露光装置、情報処理装置
CN1308918C (zh) 2002-01-07 2007-04-04 希捷科技有限公司 在数据存储介质上记录信息的写入头、磁盘驱动器存储系统和方法
KR100499029B1 (ko) * 2002-10-22 2005-07-01 한국전자통신연구원 광 정보 저장장치의 헤드에 적용 가능한 캔티레버형근접장 탐침 구조 및 그 제작 방법
US7619429B2 (en) * 2003-10-20 2009-11-17 Industrial Technology Research Institute Integrated probe module for LCD panel light inspection
US7317324B2 (en) 2003-11-04 2008-01-08 Canon Kabushiki Kaisha Semiconductor integrated circuit testing device and method
KR100595523B1 (ko) 2004-07-20 2006-07-03 엘지전자 주식회사 캔틸레버 전사를 이용한 나노 정보 저장장치 및 그 제조방법
US7288425B2 (en) * 2004-08-11 2007-10-30 Hewlett-Packard Development Company, L.P. Hybrid cantilever and tip
JP4326016B2 (ja) * 2004-08-27 2009-09-02 パイオニア株式会社 プローブ、該プローブの製造方法、並びに記録装置及び再生装置
ATE490215T1 (de) * 2005-10-27 2010-12-15 Lg Electronics Inc Nanodatenschreib- und lesevorrichtung mit cantileverstruktur und herstellungsverfahren dafür
US20090170209A1 (en) * 2007-12-29 2009-07-02 Music Germlin, Inc Hydrogel chemical sensor
FR2935537B1 (fr) * 2008-08-28 2010-10-22 Soitec Silicon On Insulator Procede d'initiation d'adhesion moleculaire
FR2943177B1 (fr) 2009-03-12 2011-05-06 Soitec Silicon On Insulator Procede de fabrication d'une structure multicouche avec report de couche circuit
FR2947380B1 (fr) 2009-06-26 2012-12-14 Soitec Silicon Insulator Technologies Procede de collage par adhesion moleculaire.
US8740209B2 (en) * 2012-02-22 2014-06-03 Expresslo Llc Method and apparatus for ex-situ lift-out specimen preparation
CN102556954A (zh) * 2012-02-24 2012-07-11 江苏大学 一种超高密度信息存储用纳机电探针的制备方法
JP2017181135A (ja) * 2016-03-29 2017-10-05 株式会社日立ハイテクサイエンス 走査型プローブ顕微鏡及びそのプローブ接触検出方法
JP6448594B2 (ja) * 2016-09-13 2019-01-09 株式会社東芝 導電性プローブ、電気特性評価システム、走査型プローブ顕微鏡、導電性プローブ製造方法、及び、電気特性測定方法
WO2018089022A1 (en) * 2016-11-11 2018-05-17 Aaron Lewis Enhancing optical signals with probe tips optimized for chemical potential and optical characteristics

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US3664874A (en) * 1969-12-31 1972-05-23 Nasa Tungsten contacts on silicon substrates
US4614119A (en) * 1985-03-08 1986-09-30 The Foxboro Company Resonant hollow beam and method
US5248079A (en) * 1988-11-29 1993-09-28 Li Chou H Ceramic bonding method
US5221415A (en) * 1989-01-17 1993-06-22 Board Of Trustees Of The Leland Stanford Junior University Method of forming microfabricated cantilever stylus with integrated pyramidal tip
US5015850A (en) * 1989-06-20 1991-05-14 The Board Of Trustees Of The Leland Stanford Junior University Microfabricated microscope assembly
JP2741629B2 (ja) * 1990-10-09 1998-04-22 キヤノン株式会社 カンチレバー型プローブ、それを用いた走査型トンネル顕微鏡及び情報処理装置
CA2057619C (en) * 1990-12-17 1997-08-19 Takayuki Yagi Cantilever probe and apparatus using the same
JP3000492B2 (ja) * 1991-04-22 2000-01-17 キヤノン株式会社 情報処理装置
JP2923813B2 (ja) * 1991-06-11 1999-07-26 キヤノン株式会社 カンチレバー型変位素子、及びこれを用いた走査型トンネル顕微鏡、情報処理装置
EP0530473B1 (en) * 1991-07-15 1996-03-13 Matsushita Electric Industrial Co., Ltd. Cantilever for atomic force microscope and method of manufacturing the same
JP3261544B2 (ja) * 1991-10-03 2002-03-04 キヤノン株式会社 カンチレバー駆動機構の製造方法、プローブ駆動機構の製造方法、カンチレバー駆動機構、プローブ駆動機構、及びこれを用いたマルチプローブ駆動機構、走査型トンネル顕微鏡、情報処理装置
JP3218414B2 (ja) * 1992-07-15 2001-10-15 キヤノン株式会社 微小ティップ及びその製造方法、並びに該微小ティップを用いたプローブユニット及び情報処理装置
JPH06132579A (ja) * 1992-09-01 1994-05-13 Canon Inc 変位素子及びそれを用いたプローブ、同プローブを有する機器
JPH08297129A (ja) * 1995-04-26 1996-11-12 Nikon Corp 原子間力顕微鏡用カンチレバー及びその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007510896A (ja) * 2003-11-04 2007-04-26 スイスプローブ アーゲー カンチレバー組立品
JP4839220B2 (ja) * 2003-11-04 2011-12-21 ナノ ワールド アーゲー カンチレバー組立品
US8109135B2 (en) 2003-11-04 2012-02-07 Nano World Ag Cantilever assembly

Also Published As

Publication number Publication date
DE69721093T2 (de) 2003-10-30
EP0785410B1 (en) 2003-04-23
DE69721093D1 (de) 2003-05-28
US5959957A (en) 1999-09-28
EP0785410A3 (enExample) 1997-08-20
EP0785410A2 (en) 1997-07-23

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