JPH0745499Y2 - 基板搬送装置 - Google Patents

基板搬送装置

Info

Publication number
JPH0745499Y2
JPH0745499Y2 JP8636487U JP8636487U JPH0745499Y2 JP H0745499 Y2 JPH0745499 Y2 JP H0745499Y2 JP 8636487 U JP8636487 U JP 8636487U JP 8636487 U JP8636487 U JP 8636487U JP H0745499 Y2 JPH0745499 Y2 JP H0745499Y2
Authority
JP
Japan
Prior art keywords
substrate
storage case
pair
end side
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP8636487U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63194856U (US06826419-20041130-M00005.png
Inventor
光夫 中崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP8636487U priority Critical patent/JPH0745499Y2/ja
Publication of JPS63194856U publication Critical patent/JPS63194856U/ja
Application granted granted Critical
Publication of JPH0745499Y2 publication Critical patent/JPH0745499Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Pile Receivers (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP8636487U 1987-06-03 1987-06-03 基板搬送装置 Expired - Lifetime JPH0745499Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8636487U JPH0745499Y2 (ja) 1987-06-03 1987-06-03 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8636487U JPH0745499Y2 (ja) 1987-06-03 1987-06-03 基板搬送装置

Publications (2)

Publication Number Publication Date
JPS63194856U JPS63194856U (US06826419-20041130-M00005.png) 1988-12-15
JPH0745499Y2 true JPH0745499Y2 (ja) 1995-10-18

Family

ID=30942600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8636487U Expired - Lifetime JPH0745499Y2 (ja) 1987-06-03 1987-06-03 基板搬送装置

Country Status (1)

Country Link
JP (1) JPH0745499Y2 (US06826419-20041130-M00005.png)

Also Published As

Publication number Publication date
JPS63194856U (US06826419-20041130-M00005.png) 1988-12-15

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