JPH0741156Y2 - Ｉｃ測定装置 - Google Patents

Ｉｃ測定装置

Info

Publication number
JPH0741156Y2
JPH0741156Y2 JP1988084624U JP8462488U JPH0741156Y2 JP H0741156 Y2 JPH0741156 Y2 JP H0741156Y2 JP 1988084624 U JP1988084624 U JP 1988084624U JP 8462488 U JP8462488 U JP 8462488U JP H0741156 Y2 JPH0741156 Y2 JP H0741156Y2
Authority
JP
Japan
Prior art keywords
tester
prober
data
wafer
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988084624U
Other languages
English (en)
Japanese (ja)
Other versions
JPH026278U (ko
Inventor
雄治 宮城
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1988084624U priority Critical patent/JPH0741156Y2/ja
Publication of JPH026278U publication Critical patent/JPH026278U/ja
Application granted granted Critical
Publication of JPH0741156Y2 publication Critical patent/JPH0741156Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
JP1988084624U 1988-06-27 1988-06-27 Ｉｃ測定装置 Expired - Lifetime JPH0741156Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988084624U JPH0741156Y2 (ja) 1988-06-27 1988-06-27 Ｉｃ測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988084624U JPH0741156Y2 (ja) 1988-06-27 1988-06-27 Ｉｃ測定装置

Publications (2)

Publication Number Publication Date
JPH026278U JPH026278U (ko) 1990-01-16
JPH0741156Y2 true JPH0741156Y2 (ja) 1995-09-20

Family

ID=31309305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988084624U Expired - Lifetime JPH0741156Y2 (ja) 1988-06-27 1988-06-27 Ｉｃ測定装置

Country Status (1)

Country Link
JP (1) JPH0741156Y2 (ko)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5967645A (ja) * 1982-10-12 1984-04-17 Hitachi Ltd 半導体装置の欠陥救済装置
JPS6049643A (ja) * 1983-08-29 1985-03-18 Tokyo Seimitsu Co Ltd ウエハ検査装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5967645A (ja) * 1982-10-12 1984-04-17 Hitachi Ltd 半導体装置の欠陥救済装置
JPS6049643A (ja) * 1983-08-29 1985-03-18 Tokyo Seimitsu Co Ltd ウエハ検査装置

Also Published As

Publication number Publication date
JPH026278U (ko) 1990-01-16

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