JPH026278U - - Google Patents
Info
- Publication number
- JPH026278U JPH026278U JP8462488U JP8462488U JPH026278U JP H026278 U JPH026278 U JP H026278U JP 8462488 U JP8462488 U JP 8462488U JP 8462488 U JP8462488 U JP 8462488U JP H026278 U JPH026278 U JP H026278U
- Authority
- JP
- Japan
- Prior art keywords
- tester
- ics
- wafer
- performs
- repair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008439 repair process Effects 0.000 claims description 5
- 238000007689 inspection Methods 0.000 claims 4
- 238000005259 measurement Methods 0.000 claims 1
- 239000000523 sample Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988084624U JPH0741156Y2 (ja) | 1988-06-27 | 1988-06-27 | Ic測定装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988084624U JPH0741156Y2 (ja) | 1988-06-27 | 1988-06-27 | Ic測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH026278U true JPH026278U (ko) | 1990-01-16 |
JPH0741156Y2 JPH0741156Y2 (ja) | 1995-09-20 |
Family
ID=31309305
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988084624U Expired - Lifetime JPH0741156Y2 (ja) | 1988-06-27 | 1988-06-27 | Ic測定装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0741156Y2 (ko) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5967645A (ja) * | 1982-10-12 | 1984-04-17 | Hitachi Ltd | 半導体装置の欠陥救済装置 |
JPS6049643A (ja) * | 1983-08-29 | 1985-03-18 | Tokyo Seimitsu Co Ltd | ウエハ検査装置 |
-
1988
- 1988-06-27 JP JP1988084624U patent/JPH0741156Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5967645A (ja) * | 1982-10-12 | 1984-04-17 | Hitachi Ltd | 半導体装置の欠陥救済装置 |
JPS6049643A (ja) * | 1983-08-29 | 1985-03-18 | Tokyo Seimitsu Co Ltd | ウエハ検査装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0741156Y2 (ja) | 1995-09-20 |
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