JPS593537U - 半導体素子検査装置の測子カ−ド - Google Patents
半導体素子検査装置の測子カ−ドInfo
- Publication number
- JPS593537U JPS593537U JP9914782U JP9914782U JPS593537U JP S593537 U JPS593537 U JP S593537U JP 9914782 U JP9914782 U JP 9914782U JP 9914782 U JP9914782 U JP 9914782U JP S593537 U JPS593537 U JP S593537U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- probe card
- inspection equipment
- device inspection
- equipment probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
め要約のデータは記録されません。
Description
図は本考案の構成を示す説明図。
１・・・プローバ制御部、２・・・測子のついたカード
、５・・・読出し専用メモリＲＯＭ０
、５・・・読出し専用メモリＲＯＭ０
Claims (1)
- 半導体素子の検査装置において、被測定物の移動方向・
量・順序の指令等を記憶させた読出し専用メモリをその
一部に保有してなる半導体素子検査装置の測子カード。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9914782U JPS593537U (ja) | 1982-06-30 | 1982-06-30 | 半導体素子検査装置の測子カ−ド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9914782U JPS593537U (ja) | 1982-06-30 | 1982-06-30 | 半導体素子検査装置の測子カ−ド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS593537U true JPS593537U (ja) | 1984-01-11 |
| JPH0333061Y2 JPH0333061Y2 (ja) | 1991-07-12 |
Family
ID=30235088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9914782U Granted JPS593537U (ja) | 1982-06-30 | 1982-06-30 | 半導体素子検査装置の測子カ−ド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS593537U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6298234U (ja) * | 1985-12-10 | 1987-06-23 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5565162A (en) * | 1978-11-10 | 1980-05-16 | Nippon Precision Saakitsutsu Kk | Wafer prober |
| JPS568836A (en) * | 1979-07-03 | 1981-01-29 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacturing system for semiconductor device |
-
1982
- 1982-06-30 JP JP9914782U patent/JPS593537U/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5565162A (en) * | 1978-11-10 | 1980-05-16 | Nippon Precision Saakitsutsu Kk | Wafer prober |
| JPS568836A (en) * | 1979-07-03 | 1981-01-29 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacturing system for semiconductor device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6298234U (ja) * | 1985-12-10 | 1987-06-23 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0333061Y2 (ja) | 1991-07-12 |
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