JPS5565162A - Wafer prober - Google Patents
Wafer proberInfo
- Publication number
- JPS5565162A JPS5565162A JP13855878A JP13855878A JPS5565162A JP S5565162 A JPS5565162 A JP S5565162A JP 13855878 A JP13855878 A JP 13855878A JP 13855878 A JP13855878 A JP 13855878A JP S5565162 A JPS5565162 A JP S5565162A
- Authority
- JP
- Japan
- Prior art keywords
- test
- chip
- shift
- wafer
- order
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To automize the test of chip at an arbitrary point, by storing the test order of IC in the chips located in many numbers on the wafer to the memory and performing the test for circuit operation through relative shift of the test needles and wafer with the information.
CONSTITUTION: The chip arrangement on the wafer 9 to be tested is stored in the RAM 19 with the tape reader 20 or fish line sensor 15 to start the test in matching with the chip 24 taking the test head at the start point. When the test is finished by taking the shift by 8-chips share of 01 row to Y direction, and the shift is made sequentially toward the X direction as 02, 03.... This shift is made with the X and Y direction control unit based on the storage information from the memory. Thus, the chip in the specific area only is tested not by the chip arrangement, and the test can be made in arbitrary order not on the sequence of order, allowing to make unnecessary the fish lines conventionally used.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53138558A JPS5950942B2 (en) | 1978-11-10 | 1978-11-10 | wafer prober |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP53138558A JPS5950942B2 (en) | 1978-11-10 | 1978-11-10 | wafer prober |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5565162A true JPS5565162A (en) | 1980-05-16 |
JPS5950942B2 JPS5950942B2 (en) | 1984-12-11 |
Family
ID=15224941
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP53138558A Expired JPS5950942B2 (en) | 1978-11-10 | 1978-11-10 | wafer prober |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5950942B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58169924A (en) * | 1982-03-30 | 1983-10-06 | Fujitsu Ltd | Test device for ic wafer |
JPS593537U (en) * | 1982-06-30 | 1984-01-11 | 株式会社東京精密 | Semiconductor device inspection equipment probe card |
JPS6275302A (en) * | 1985-09-30 | 1987-04-07 | Hitachi Electronics Eng Co Ltd | Wafer-measuring apparatus |
JPH02291951A (en) * | 1989-05-01 | 1990-12-03 | Figaro Eng Inc | Manufacture of gas sensor |
JPH0513047U (en) * | 1992-04-09 | 1993-02-19 | 株式会社東京精密 | Semiconductor element inspection equipment |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51127262U (en) * | 1975-04-09 | 1976-10-14 | ||
JPS53124080A (en) * | 1977-04-05 | 1978-10-30 | Nec Corp | Package mounted ic test equipment |
-
1978
- 1978-11-10 JP JP53138558A patent/JPS5950942B2/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51127262U (en) * | 1975-04-09 | 1976-10-14 | ||
JPS53124080A (en) * | 1977-04-05 | 1978-10-30 | Nec Corp | Package mounted ic test equipment |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58169924A (en) * | 1982-03-30 | 1983-10-06 | Fujitsu Ltd | Test device for ic wafer |
JPS593537U (en) * | 1982-06-30 | 1984-01-11 | 株式会社東京精密 | Semiconductor device inspection equipment probe card |
JPH0333061Y2 (en) * | 1982-06-30 | 1991-07-12 | ||
JPS6275302A (en) * | 1985-09-30 | 1987-04-07 | Hitachi Electronics Eng Co Ltd | Wafer-measuring apparatus |
JPH02291951A (en) * | 1989-05-01 | 1990-12-03 | Figaro Eng Inc | Manufacture of gas sensor |
JPH0513047U (en) * | 1992-04-09 | 1993-02-19 | 株式会社東京精密 | Semiconductor element inspection equipment |
Also Published As
Publication number | Publication date |
---|---|
JPS5950942B2 (en) | 1984-12-11 |
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