JPS5565162A - Wafer prober - Google Patents

Wafer prober

Info

Publication number
JPS5565162A
JPS5565162A JP13855878A JP13855878A JPS5565162A JP S5565162 A JPS5565162 A JP S5565162A JP 13855878 A JP13855878 A JP 13855878A JP 13855878 A JP13855878 A JP 13855878A JP S5565162 A JPS5565162 A JP S5565162A
Authority
JP
Japan
Prior art keywords
test
chip
shift
wafer
order
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13855878A
Other languages
Japanese (ja)
Other versions
JPS5950942B2 (en
Inventor
Shinichi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON PRECISION SAAKITSUTSU KK
Nippon Precision Circuits Inc
Original Assignee
NIPPON PRECISION SAAKITSUTSU KK
Nippon Precision Circuits Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIPPON PRECISION SAAKITSUTSU KK, Nippon Precision Circuits Inc filed Critical NIPPON PRECISION SAAKITSUTSU KK
Priority to JP53138558A priority Critical patent/JPS5950942B2/en
Publication of JPS5565162A publication Critical patent/JPS5565162A/en
Publication of JPS5950942B2 publication Critical patent/JPS5950942B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To automize the test of chip at an arbitrary point, by storing the test order of IC in the chips located in many numbers on the wafer to the memory and performing the test for circuit operation through relative shift of the test needles and wafer with the information.
CONSTITUTION: The chip arrangement on the wafer 9 to be tested is stored in the RAM 19 with the tape reader 20 or fish line sensor 15 to start the test in matching with the chip 24 taking the test head at the start point. When the test is finished by taking the shift by 8-chips share of 01 row to Y direction, and the shift is made sequentially toward the X direction as 02, 03.... This shift is made with the X and Y direction control unit based on the storage information from the memory. Thus, the chip in the specific area only is tested not by the chip arrangement, and the test can be made in arbitrary order not on the sequence of order, allowing to make unnecessary the fish lines conventionally used.
COPYRIGHT: (C)1980,JPO&Japio
JP53138558A 1978-11-10 1978-11-10 wafer prober Expired JPS5950942B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP53138558A JPS5950942B2 (en) 1978-11-10 1978-11-10 wafer prober

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53138558A JPS5950942B2 (en) 1978-11-10 1978-11-10 wafer prober

Publications (2)

Publication Number Publication Date
JPS5565162A true JPS5565162A (en) 1980-05-16
JPS5950942B2 JPS5950942B2 (en) 1984-12-11

Family

ID=15224941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53138558A Expired JPS5950942B2 (en) 1978-11-10 1978-11-10 wafer prober

Country Status (1)

Country Link
JP (1) JPS5950942B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58169924A (en) * 1982-03-30 1983-10-06 Fujitsu Ltd Test device for ic wafer
JPS593537U (en) * 1982-06-30 1984-01-11 株式会社東京精密 Semiconductor device inspection equipment probe card
JPS6275302A (en) * 1985-09-30 1987-04-07 Hitachi Electronics Eng Co Ltd Wafer-measuring apparatus
JPH02291951A (en) * 1989-05-01 1990-12-03 Figaro Eng Inc Manufacture of gas sensor
JPH0513047U (en) * 1992-04-09 1993-02-19 株式会社東京精密 Semiconductor element inspection equipment

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51127262U (en) * 1975-04-09 1976-10-14
JPS53124080A (en) * 1977-04-05 1978-10-30 Nec Corp Package mounted ic test equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51127262U (en) * 1975-04-09 1976-10-14
JPS53124080A (en) * 1977-04-05 1978-10-30 Nec Corp Package mounted ic test equipment

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58169924A (en) * 1982-03-30 1983-10-06 Fujitsu Ltd Test device for ic wafer
JPS593537U (en) * 1982-06-30 1984-01-11 株式会社東京精密 Semiconductor device inspection equipment probe card
JPH0333061Y2 (en) * 1982-06-30 1991-07-12
JPS6275302A (en) * 1985-09-30 1987-04-07 Hitachi Electronics Eng Co Ltd Wafer-measuring apparatus
JPH02291951A (en) * 1989-05-01 1990-12-03 Figaro Eng Inc Manufacture of gas sensor
JPH0513047U (en) * 1992-04-09 1993-02-19 株式会社東京精密 Semiconductor element inspection equipment

Also Published As

Publication number Publication date
JPS5950942B2 (en) 1984-12-11

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