JPS5354428A - Inspection method of semiconductor memory divice - Google Patents

Inspection method of semiconductor memory divice

Info

Publication number
JPS5354428A
JPS5354428A JP12991176A JP12991176A JPS5354428A JP S5354428 A JPS5354428 A JP S5354428A JP 12991176 A JP12991176 A JP 12991176A JP 12991176 A JP12991176 A JP 12991176A JP S5354428 A JPS5354428 A JP S5354428A
Authority
JP
Japan
Prior art keywords
semiconductor memory
inspection method
memory cell
measured
divice
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12991176A
Other languages
Japanese (ja)
Other versions
JPS5816559B2 (en
Inventor
Osamu Matsuoka
Atsushi Nigorikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP51129911A priority Critical patent/JPS5816559B2/en
Publication of JPS5354428A publication Critical patent/JPS5354428A/en
Publication of JPS5816559B2 publication Critical patent/JPS5816559B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: A signal selecting a measured memory cell is transmitted, in parallel, to the memory cell part which consists of the more number of memory cells than that of measured cells to obtain the corresponding mask instruction signal, so that the identification of whether the inspection result of the output signal from the measured memory cell is proper or not can be masked.
COPYRIGHT: (C)1978,JPO&Japio
JP51129911A 1976-10-27 1976-10-27 Testing device and method for semiconductor storage devices Expired JPS5816559B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51129911A JPS5816559B2 (en) 1976-10-27 1976-10-27 Testing device and method for semiconductor storage devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51129911A JPS5816559B2 (en) 1976-10-27 1976-10-27 Testing device and method for semiconductor storage devices

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP59167342A Division JPS60167200A (en) 1984-08-10 1984-08-10 Method for inspecting semiconductor memory
JP59167341A Division JPS60167199A (en) 1984-08-10 1984-08-10 Inspection device for semiconductor memory

Publications (2)

Publication Number Publication Date
JPS5354428A true JPS5354428A (en) 1978-05-17
JPS5816559B2 JPS5816559B2 (en) 1983-03-31

Family

ID=15021430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51129911A Expired JPS5816559B2 (en) 1976-10-27 1976-10-27 Testing device and method for semiconductor storage devices

Country Status (1)

Country Link
JP (1) JPS5816559B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5413231A (en) * 1977-07-01 1979-01-31 Takeda Riken Ind Co Ltd Memory tester
JPS57164500A (en) * 1981-04-02 1982-10-09 Nec Corp Testing device of semiconductor memory
EP0168246A2 (en) * 1984-07-10 1986-01-15 Nec Corporation Improved active pull-up circuit

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5145948A (en) * 1974-10-17 1976-04-19 Tokyo Shibaura Electric Co

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5145948A (en) * 1974-10-17 1976-04-19 Tokyo Shibaura Electric Co

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5413231A (en) * 1977-07-01 1979-01-31 Takeda Riken Ind Co Ltd Memory tester
JPS57164500A (en) * 1981-04-02 1982-10-09 Nec Corp Testing device of semiconductor memory
JPS6321999B2 (en) * 1981-04-02 1988-05-10 Nippon Electric Co
EP0168246A2 (en) * 1984-07-10 1986-01-15 Nec Corporation Improved active pull-up circuit

Also Published As

Publication number Publication date
JPS5816559B2 (en) 1983-03-31

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