JPH07153896A - 樹脂封止型半導体装置及びその製造方法 - Google Patents

樹脂封止型半導体装置及びその製造方法

Info

Publication number
JPH07153896A
JPH07153896A JP5320842A JP32084293A JPH07153896A JP H07153896 A JPH07153896 A JP H07153896A JP 5320842 A JP5320842 A JP 5320842A JP 32084293 A JP32084293 A JP 32084293A JP H07153896 A JPH07153896 A JP H07153896A
Authority
JP
Japan
Prior art keywords
semiconductor element
bed
opening
resin
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5320842A
Other languages
English (en)
Japanese (ja)
Inventor
Kazuichi Yonenaka
一市 米中
Kazuto Kobayashi
和人 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP5320842A priority Critical patent/JPH07153896A/ja
Priority to EP94118690A priority patent/EP0655782A3/en
Priority to KR1019940031641A priority patent/KR950015726A/ko
Priority to CN94118876A priority patent/CN1111823A/zh
Priority to TW083111396A priority patent/TW301783B/zh
Publication of JPH07153896A publication Critical patent/JPH07153896A/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/411Chip-supporting parts, e.g. die pads
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/40Leadframes
    • H10W70/411Chip-supporting parts, e.g. die pads
    • H10W70/417Bonding materials between chips and die pads
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/075Connecting or disconnecting of bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/30Die-attach connectors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/073Connecting or disconnecting of die-attach connectors
    • H10W72/07321Aligning
    • H10W72/07327Aligning involving guiding structures, e.g. spacers or supporting members
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/073Connecting or disconnecting of die-attach connectors
    • H10W72/07351Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting
    • H10W72/07353Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting changes in shapes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/30Die-attach connectors
    • H10W72/331Shapes of die-attach connectors
    • H10W72/334Cross-sectional shape, i.e. in side view
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/551Materials of bond wires
    • H10W72/552Materials of bond wires comprising metals or metalloids, e.g. silver
    • H10W72/5522Materials of bond wires comprising metals or metalloids, e.g. silver comprising gold [Au]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/931Shapes of bond pads
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/736Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked lead frame, conducting package substrate or heat sink

Landscapes

  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Lead Frames For Integrated Circuits (AREA)
  • Die Bonding (AREA)
JP5320842A 1993-11-29 1993-11-29 樹脂封止型半導体装置及びその製造方法 Pending JPH07153896A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP5320842A JPH07153896A (ja) 1993-11-29 1993-11-29 樹脂封止型半導体装置及びその製造方法
EP94118690A EP0655782A3 (en) 1993-11-29 1994-11-28 Synthetic resin sealed semiconductor device and its manufacturing process.
KR1019940031641A KR950015726A (ko) 1993-11-29 1994-11-29 수지밀봉형 반도체장치 및 그 제조방법
CN94118876A CN1111823A (zh) 1993-11-29 1994-11-29 树脂封装半导体器件及其制造方法
TW083111396A TW301783B (https=) 1993-11-29 1994-12-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5320842A JPH07153896A (ja) 1993-11-29 1993-11-29 樹脂封止型半導体装置及びその製造方法

Publications (1)

Publication Number Publication Date
JPH07153896A true JPH07153896A (ja) 1995-06-16

Family

ID=18125857

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5320842A Pending JPH07153896A (ja) 1993-11-29 1993-11-29 樹脂封止型半導体装置及びその製造方法

Country Status (5)

Country Link
EP (1) EP0655782A3 (https=)
JP (1) JPH07153896A (https=)
KR (1) KR950015726A (https=)
CN (1) CN1111823A (https=)
TW (1) TW301783B (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008034416A (ja) * 2006-07-26 2008-02-14 Denso Corp 半導体装置
JP2009176825A (ja) * 2008-01-22 2009-08-06 Asmo Co Ltd 樹脂封止型半導体装置
JP2009295712A (ja) * 2008-06-04 2009-12-17 Denso Corp 基板および電子装置の製造方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19639181B4 (de) * 1996-09-24 2006-08-17 Infineon Technologies Ag Mikroelektronisches Bauelement mit einem Zuleitungsrahmen und einem integrierten Schaltkreis
US7034382B2 (en) 2001-04-16 2006-04-25 M/A-Com, Inc. Leadframe-based chip scale package
JP2006013170A (ja) * 2004-06-25 2006-01-12 Matsushita Electric Works Ltd 電子部品並びに電子部品の製造方法
CN101233608B (zh) * 2005-08-04 2011-02-02 日立化成工业株式会社 连接构造体的制造方法
JP2012089563A (ja) * 2010-10-15 2012-05-10 Sanken Electric Co Ltd 半導体モジュール
CN102157484B (zh) * 2011-02-28 2015-05-06 日月光半导体制造股份有限公司 导线架与芯片封装体

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5295173A (en) * 1976-02-06 1977-08-10 Hitachi Ltd Lead frame
US4884124A (en) * 1986-08-19 1989-11-28 Mitsubishi Denki Kabushiki Kaisha Resin-encapsulated semiconductor device
JPH02172267A (ja) * 1988-12-26 1990-07-03 Hitachi Ltd リードフレーム
JPH0319261A (ja) * 1989-06-15 1991-01-28 Matsushita Electron Corp 半導体用リードフレーム
JPH05102207A (ja) * 1991-10-11 1993-04-23 Dainippon Printing Co Ltd リードフレーム
JPH0621317A (ja) * 1992-07-02 1994-01-28 Seiko Epson Corp 半導体パッケージの製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008034416A (ja) * 2006-07-26 2008-02-14 Denso Corp 半導体装置
JP2009176825A (ja) * 2008-01-22 2009-08-06 Asmo Co Ltd 樹脂封止型半導体装置
JP2009295712A (ja) * 2008-06-04 2009-12-17 Denso Corp 基板および電子装置の製造方法

Also Published As

Publication number Publication date
EP0655782A3 (en) 1995-10-18
EP0655782A2 (en) 1995-05-31
CN1111823A (zh) 1995-11-15
TW301783B (https=) 1997-04-01
KR950015726A (ko) 1995-06-17

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