JPH0644098Y2 - 半導体ウェハーの洗浄用バブラー - Google Patents

半導体ウェハーの洗浄用バブラー

Info

Publication number
JPH0644098Y2
JPH0644098Y2 JP1989021644U JP2164489U JPH0644098Y2 JP H0644098 Y2 JPH0644098 Y2 JP H0644098Y2 JP 1989021644 U JP1989021644 U JP 1989021644U JP 2164489 U JP2164489 U JP 2164489U JP H0644098 Y2 JPH0644098 Y2 JP H0644098Y2
Authority
JP
Japan
Prior art keywords
bubbler
filter
liquid
main pipe
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989021644U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02113332U (US07321065-20080122-C00160.png
Inventor
征一郎 相合
Original Assignee
黒谷 信子
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 黒谷 信子 filed Critical 黒谷 信子
Priority to JP1989021644U priority Critical patent/JPH0644098Y2/ja
Priority to DE3942351A priority patent/DE3942351A1/de
Priority to US07/452,746 priority patent/US5014727A/en
Priority to KR1019900000022A priority patent/KR900013593A/ko
Priority to GB9001127A priority patent/GB2228424B/en
Publication of JPH02113332U publication Critical patent/JPH02113332U/ja
Application granted granted Critical
Publication of JPH0644098Y2 publication Critical patent/JPH0644098Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/102—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration with means for agitating the liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/20—Mixing gases with liquids
    • B01F23/23—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids
    • B01F23/231—Mixing gases with liquids by introducing gases into liquid media, e.g. for producing aerated liquids by bubbling
    • B01F23/23105—Arrangement or manipulation of the gas bubbling devices
    • B01F23/2312—Diffusers
    • B01F23/23125—Diffusers characterised by the way in which they are assembled or mounted; Fabricating the parts of the diffusers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S134/00—Cleaning and liquid contact with solids
    • Y10S134/902—Semiconductor wafer

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP1989021644U 1989-02-27 1989-02-27 半導体ウェハーの洗浄用バブラー Expired - Lifetime JPH0644098Y2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP1989021644U JPH0644098Y2 (ja) 1989-02-27 1989-02-27 半導体ウェハーの洗浄用バブラー
DE3942351A DE3942351A1 (de) 1989-02-27 1989-12-21 Vorrichtung zur blasenbildung fuer die verwendung beim waschen von halbleitermaterialien
US07/452,746 US5014727A (en) 1989-02-27 1989-12-21 Bubbler device for washing semiconductor materials
KR1019900000022A KR900013593A (ko) 1989-02-27 1990-01-04 반도체 웨이퍼(wafer)의 세정용 발포기
GB9001127A GB2228424B (en) 1989-02-27 1990-01-18 Bubbler device for washing semiconductor materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989021644U JPH0644098Y2 (ja) 1989-02-27 1989-02-27 半導体ウェハーの洗浄用バブラー

Publications (2)

Publication Number Publication Date
JPH02113332U JPH02113332U (US07321065-20080122-C00160.png) 1990-09-11
JPH0644098Y2 true JPH0644098Y2 (ja) 1994-11-14

Family

ID=12060766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989021644U Expired - Lifetime JPH0644098Y2 (ja) 1989-02-27 1989-02-27 半導体ウェハーの洗浄用バブラー

Country Status (5)

Country Link
US (1) US5014727A (US07321065-20080122-C00160.png)
JP (1) JPH0644098Y2 (US07321065-20080122-C00160.png)
KR (1) KR900013593A (US07321065-20080122-C00160.png)
DE (1) DE3942351A1 (US07321065-20080122-C00160.png)
GB (1) GB2228424B (US07321065-20080122-C00160.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101297111B1 (ko) * 2011-12-20 2013-08-21 비나텍주식회사 셀 세척 시스템 및 세척 방법

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JPH0521413A (ja) * 1991-07-10 1993-01-29 Matsushita Electric Ind Co Ltd 半導体基板洗浄装置及び半導体基板洗浄方法
US5339842A (en) * 1992-12-18 1994-08-23 Specialty Coating Systems, Inc. Methods and apparatus for cleaning objects
DE4316096C1 (de) * 1993-05-13 1994-11-10 Wacker Chemitronic Verfahren zur naßchemischen Behandlung scheibenförmiger Werkstücke
US5464480A (en) * 1993-07-16 1995-11-07 Legacy Systems, Inc. Process and apparatus for the treatment of semiconductor wafers in a fluid
US5911837A (en) * 1993-07-16 1999-06-15 Legacy Systems, Inc. Process for treatment of semiconductor wafers in a fluid
JPH0756015A (ja) * 1993-08-18 1995-03-03 Sony Corp カラーフィルタの製造方法
FR2716267B1 (fr) * 1994-02-11 1996-03-22 Daniel Crespel Dispositif de dégraissage notamment pour fibres optiques.
US5419353A (en) * 1994-05-04 1995-05-30 Chen; Hong-Wel Object cleaning and washing device
US5505219A (en) * 1994-11-23 1996-04-09 Litton Systems, Inc. Supercritical fluid recirculating system for a precision inertial instrument parts cleaner
US6532976B1 (en) 1995-07-10 2003-03-18 Lg Semicon Co., Ltd. Semiconductor wafer cleaning apparatus
DE19541436C2 (de) * 1995-11-07 1998-10-08 Steag Micro Tech Gmbh Anlage zur Behandlung von Gegenständen in einem Prozeßtank
KR100211074B1 (ko) * 1996-03-13 1999-07-15 구본준 웨이퍼 습식 처리장치
DE19644253A1 (de) 1996-10-24 1998-05-07 Steag Micro Tech Gmbh Vorrichtung zum Behandeln von Substraten
US5815942A (en) * 1996-12-13 1998-10-06 Kabushiki Kaisha Toshiba Vapor drying system and method
US5800626A (en) * 1997-02-18 1998-09-01 International Business Machines Corporation Control of gas content in process liquids for improved megasonic cleaning of semiconductor wafers and microelectronics substrates
US5849091A (en) * 1997-06-02 1998-12-15 Micron Technology, Inc. Megasonic cleaning methods and apparatus
US5904156A (en) * 1997-09-24 1999-05-18 International Business Machines Corporation Dry film resist removal in the presence of electroplated C4's
US6199568B1 (en) * 1997-10-20 2001-03-13 Dainippon Screen Mfg. Co., Ltd. Treating tank, and substrate treating apparatus having the treating tank
US5971368A (en) * 1997-10-29 1999-10-26 Fsi International, Inc. System to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized
US6273107B1 (en) * 1997-12-05 2001-08-14 Texas Instruments Incorporated Positive flow, positive displacement rinse tank
US6039055A (en) * 1998-01-08 2000-03-21 International Business Machines Corporation Wafer cleaning with dissolved gas concentration control
JP3533332B2 (ja) * 1998-05-20 2004-05-31 Ｔｄｋ株式会社 電子部品の製造方法および水処理装置
US6235641B1 (en) 1998-10-30 2001-05-22 Fsi International Inc. Method and system to control the concentration of dissolved gas in a liquid
US6372051B1 (en) * 1998-12-04 2002-04-16 Texas Instruments Incorporated Positive flow, positive displacement rinse tank
GB2346093A (en) * 1999-01-27 2000-08-02 Addavita Ltd Gas diffuser for an air lift pump
JP2000271471A (ja) * 1999-03-24 2000-10-03 Nippon M K S Kk 液体ソース供給システム及びその洗浄方法、気化器
US6274506B1 (en) 1999-05-14 2001-08-14 Fsi International, Inc. Apparatus and method for dispensing processing fluid toward a substrate surface
US6406551B1 (en) 1999-05-14 2002-06-18 Fsi International, Inc. Method for treating a substrate with heat sensitive agents
US6217667B1 (en) 1999-09-24 2001-04-17 Semitool, Inc. Method for cleaning copper surfaces
US6530388B1 (en) 2000-02-15 2003-03-11 Quantum Global Technologies, Llc Volume efficient cleaning systems
US7328712B1 (en) 2000-02-15 2008-02-12 Quantum Global Technologies Cleaning bench for removing contaminants from semiconductor process equipment
US6926016B1 (en) 2001-02-15 2005-08-09 Quantum Global Technologies, Llc System for removing contaminants from semiconductor process equipment
US6911097B1 (en) * 2000-07-31 2005-06-28 Taiwan Semiconductor Manufacturing Company Photoresist stripper using nitrogen bubbler
SE517821C2 (sv) * 2000-09-29 2002-07-16 Tetra Laval Holdings & Finance Metod och anordning för att kontinuerligt avlufta en vätska
KR100481309B1 (ko) * 2002-06-27 2005-04-07 삼성전자주식회사 반도체 기판의 건조장비
JP2004121962A (ja) * 2002-10-01 2004-04-22 National Institute Of Advanced Industrial & Technology ナノバブルの利用方法及び装置
US20040238119A1 (en) * 2003-05-26 2004-12-02 Ching-Yu Chang [apparatus and method for etching silicon nitride thin film ]
WO2006099619A2 (en) * 2005-03-17 2006-09-21 Noah Precision, Llc Temperature control unit for bubblers
CN101983560A (zh) * 2010-11-19 2011-03-09 宋剑 水产养殖水下增氧盘
DE112012006759T5 (de) 2012-07-31 2015-08-20 Sanyo Electric Co., Ltd. Verfahren der Herstellung einer Solarzelle
WO2014020693A1 (ja) * 2012-07-31 2014-02-06 三洋電機株式会社 太陽電池の製造方法
GB201316716D0 (en) * 2013-09-20 2013-11-06 Alphasonics Ultrasonic Cleaning Systems Ltd Ultrasonic cleaning apparatus and method
JP2017140605A (ja) * 2016-02-12 2017-08-17 光洋機械産業株式会社 洗浄方法及びこの洗浄方法に用いられる洗浄装置
JP6707412B2 (ja) * 2016-07-22 2020-06-10 東京エレクトロン株式会社 基板液処理装置、基板液処理方法および記憶媒体
CN114951126A (zh) * 2022-06-17 2022-08-30 徐州徐工精密工业科技有限公司 一种机械设备零部件生产清洗装置

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GB660666A (en) * 1948-11-19 1951-11-07 Activated Sludge Ltd Improvements in or relating to means for diffusing gases into liquids
US3396950A (en) * 1967-01-16 1968-08-13 Elmer R. Wood Diffuser for sewage treatment
DE1694552A1 (de) * 1967-03-09 1970-10-15 Kanegafuchi Spinning Co Ltd Poroeser Feststoffkoerper und Verfahren zu seiner Herstellung
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101297111B1 (ko) * 2011-12-20 2013-08-21 비나텍주식회사 셀 세척 시스템 및 세척 방법

Also Published As

Publication number Publication date
JPH02113332U (US07321065-20080122-C00160.png) 1990-09-11
KR900013593A (ko) 1990-09-06
GB2228424B (en) 1992-11-18
GB2228424A (en) 1990-08-29
GB9001127D0 (en) 1990-03-21
DE3942351A1 (de) 1990-08-30
US5014727A (en) 1991-05-14

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