JPH06151382A - ドライエッチング方法 - Google Patents

ドライエッチング方法

Info

Publication number
JPH06151382A
JPH06151382A JP4301396A JP30139692A JPH06151382A JP H06151382 A JPH06151382 A JP H06151382A JP 4301396 A JP4301396 A JP 4301396A JP 30139692 A JP30139692 A JP 30139692A JP H06151382 A JPH06151382 A JP H06151382A
Authority
JP
Japan
Prior art keywords
etching
film
thin film
gas
alsicu
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4301396A
Other languages
English (en)
Japanese (ja)
Inventor
Masaru Hori
勝 堀
Haruo Okano
晴雄 岡野
Michinari Aoyama
道成 青山
Masao Ito
雅男 伊藤
Kei Hattori
圭 服部
Fumihiko Higuchi
文彦 樋口
Yoshifumi Tawara
好文 田原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Tokyo Electron Ltd
Original Assignee
Toshiba Corp
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Electron Ltd filed Critical Toshiba Corp
Priority to JP4301396A priority Critical patent/JPH06151382A/ja
Priority to KR1019930023938A priority patent/KR100239026B1/ko
Priority to US08/151,185 priority patent/US5411631A/en
Priority to TW082110552A priority patent/TW248608B/zh
Publication of JPH06151382A publication Critical patent/JPH06151382A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
    • H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
    • H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
    • H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP4301396A 1992-11-11 1992-11-11 ドライエッチング方法 Pending JPH06151382A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP4301396A JPH06151382A (ja) 1992-11-11 1992-11-11 ドライエッチング方法
KR1019930023938A KR100239026B1 (ko) 1992-11-11 1993-11-11 드라이에칭방법
US08/151,185 US5411631A (en) 1992-11-11 1993-11-12 Dry etching method
TW082110552A TW248608B (OSRAM) 1992-11-11 1993-12-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4301396A JPH06151382A (ja) 1992-11-11 1992-11-11 ドライエッチング方法

Publications (1)

Publication Number Publication Date
JPH06151382A true JPH06151382A (ja) 1994-05-31

Family

ID=17896364

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4301396A Pending JPH06151382A (ja) 1992-11-11 1992-11-11 ドライエッチング方法

Country Status (4)

Country Link
US (1) US5411631A (OSRAM)
JP (1) JPH06151382A (OSRAM)
KR (1) KR100239026B1 (OSRAM)
TW (1) TW248608B (OSRAM)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1154456A (ja) * 1997-07-25 1999-02-26 Samsung Electron Co Ltd 半導体装置の製造方法
KR100843236B1 (ko) * 2007-02-06 2008-07-03 삼성전자주식회사 더블 패터닝 공정을 이용하는 반도체 소자의 미세 패턴형성 방법
JP2008526025A (ja) * 2004-12-22 2008-07-17 ラム リサーチ コーポレーション 基板最適化のためのプラズマ処理ステップ交互実行方法及び装置
JP2012204510A (ja) * 2011-03-24 2012-10-22 Ulvac Japan Ltd シリコン基板のエッチング方法、及びシリコン基板のエッチング装置

Families Citing this family (46)

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DE69424388T2 (de) * 1993-12-23 2000-08-31 Stmicroelectronics, Inc. Verfahren und Dielektrikumstruktur zur Erleichterung der Metallüberätzung ohne Beschädigung des Zwischendielektrikums
US5702564A (en) * 1995-01-03 1997-12-30 Advanced Micro Devices, Inc. Method of etching conductive lines without undercutting
US5667630A (en) * 1995-04-28 1997-09-16 Vanguard International Semiconductor Corporation Low charge-up reactive ion metal etch process
US6004884A (en) * 1996-02-15 1999-12-21 Lam Research Corporation Methods and apparatus for etching semiconductor wafers
US5952244A (en) * 1996-02-15 1999-09-14 Lam Research Corporation Methods for reducing etch rate loading while etching through a titanium nitride anti-reflective layer and an aluminum-based metallization layer
US5700740A (en) * 1996-03-25 1997-12-23 Taiwan Semiconductor Manufacturing Company Ltd Prevention of corrosion of aluminum interconnects by removing corrosion-inducing species
US5772906A (en) * 1996-05-30 1998-06-30 Lam Research Corporation Mechanism for uniform etching by minimizing effects of etch rate loading
JP3112832B2 (ja) * 1996-05-30 2000-11-27 日本電気株式会社 半導体装置の製造方法
US5846443A (en) * 1996-07-09 1998-12-08 Lam Research Corporation Methods and apparatus for etching semiconductor wafers and layers thereof
US5770523A (en) * 1996-09-09 1998-06-23 Taiwan Semiconductor Manufacturing Company, Ltd. Method for removal of photoresist residue after dry metal etch
US5883007A (en) * 1996-12-20 1999-03-16 Lam Research Corporation Methods and apparatuses for improving photoresist selectivity and reducing etch rate loading
US5980768A (en) * 1997-03-07 1999-11-09 Lam Research Corp. Methods and apparatus for removing photoresist mask defects in a plasma reactor
US5846884A (en) * 1997-06-20 1998-12-08 Siemens Aktiengesellschaft Methods for metal etching with reduced sidewall build up during integrated circuit manufacturing
US6087266A (en) * 1997-06-27 2000-07-11 Lam Research Corporation Methods and apparatus for improving microloading while etching a substrate
WO1999009587A2 (en) * 1997-08-13 1999-02-25 Applied Materials, Inc. Method of etching copper for semiconductor devices
US6008140A (en) 1997-08-13 1999-12-28 Applied Materials, Inc. Copper etch using HCI and HBr chemistry
US6090304A (en) * 1997-08-28 2000-07-18 Lam Research Corporation Methods for selective plasma etch
WO1999026277A1 (en) 1997-11-17 1999-05-27 Mattson Technology, Inc. Systems and methods for plasma enhanced processing of semiconductor wafers
TWI246633B (en) 1997-12-12 2006-01-01 Applied Materials Inc Method of pattern etching a low k dielectric layen
US6143476A (en) * 1997-12-12 2000-11-07 Applied Materials Inc Method for high temperature etching of patterned layers using an organic mask stack
JP2985858B2 (ja) * 1997-12-19 1999-12-06 日本電気株式会社 エッチング方法
JP4013308B2 (ja) * 1998-01-21 2007-11-28 ヤマハ株式会社 配線形成方法
JP3293564B2 (ja) * 1998-08-20 2002-06-17 株式会社村田製作所 電子デバイスの作製方法
US6869885B1 (en) * 1999-12-17 2005-03-22 Koninklijke Philips Electronics N.V. Method for a tungsten silicide etch
US6491835B1 (en) * 1999-12-20 2002-12-10 Applied Materials, Inc. Metal mask etching of silicon
KR100422021B1 (ko) * 2001-06-16 2004-03-12 (주)울텍 전이금속박막 건식 식각 공정
US20030013314A1 (en) * 2001-07-06 2003-01-16 Chentsau Ying Method of reducing particulates in a plasma etch chamber during a metal etch process
JP2003309107A (ja) * 2002-04-12 2003-10-31 Tokyo Electron Ltd 積層膜のエッチング方法
US6943350B2 (en) * 2002-08-27 2005-09-13 Kla-Tencor Technologies Corporation Methods and apparatus for electron beam inspection of samples
JP2004219261A (ja) * 2003-01-15 2004-08-05 Fuji Photo Film Co Ltd 薄膜の解析方法
US20050106888A1 (en) * 2003-11-14 2005-05-19 Taiwan Semiconductor Manufacturing Co. Method of in-situ damage removal - post O2 dry process
US7208420B1 (en) 2004-07-22 2007-04-24 Lam Research Corporation Method for selectively etching an aluminum containing layer
FR2925763A1 (fr) * 2007-12-24 2009-06-26 Commissariat Energie Atomique Procede de fabrication de billes metalliques par plasma a partir d'une couche comportant plusieurs elements
US10697155B2 (en) * 2010-07-29 2020-06-30 Jerry L. McKinney Wastewater re-use systems
CN102376627B (zh) * 2010-08-10 2013-11-06 中芯国际集成电路制造(上海)有限公司 接触孔的形成方法
US9576811B2 (en) 2015-01-12 2017-02-21 Lam Research Corporation Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch)
US9806252B2 (en) 2015-04-20 2017-10-31 Lam Research Corporation Dry plasma etch method to pattern MRAM stack
US9870899B2 (en) 2015-04-24 2018-01-16 Lam Research Corporation Cobalt etch back
US9972504B2 (en) 2015-08-07 2018-05-15 Lam Research Corporation Atomic layer etching of tungsten for enhanced tungsten deposition fill
US10229837B2 (en) 2016-02-04 2019-03-12 Lam Research Corporation Control of directionality in atomic layer etching
US10727073B2 (en) 2016-02-04 2020-07-28 Lam Research Corporation Atomic layer etching 3D structures: Si and SiGe and Ge smoothness on horizontal and vertical surfaces
US10566212B2 (en) 2016-12-19 2020-02-18 Lam Research Corporation Designer atomic layer etching
US10559461B2 (en) 2017-04-19 2020-02-11 Lam Research Corporation Selective deposition with atomic layer etch reset
US10832909B2 (en) 2017-04-24 2020-11-10 Lam Research Corporation Atomic layer etch, reactive precursors and energetic sources for patterning applications
KR20240029787A (ko) 2018-03-30 2024-03-06 램 리써치 코포레이션 내화성 금속들 및 다른 고 표면 결합 에너지 재료들의 원자 층 에칭 및 평활화 (smoothing)
CN115706011A (zh) * 2021-08-11 2023-02-17 江苏鲁汶仪器股份有限公司 一种IC生产中AlSiCu连接层的干法刻蚀方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4030967A (en) * 1976-08-16 1977-06-21 Northern Telecom Limited Gaseous plasma etching of aluminum and aluminum oxide
JPS5913592B2 (ja) * 1979-06-22 1984-03-30 三菱電機株式会社 エツチング方法
JPS5666040A (en) * 1979-11-05 1981-06-04 Mitsubishi Electric Corp Etching method of titanium film
JPS56137637A (en) * 1980-03-31 1981-10-27 Chiyou Lsi Gijutsu Kenkyu Kumiai Etching of aluminum film
JPS5720450A (en) * 1980-07-11 1982-02-02 Toshiba Corp Forming method for pattern of semiconductor device
US4351696A (en) * 1981-10-28 1982-09-28 Fairchild Camera & Instrument Corp. Corrosion inhibition of aluminum or aluminum alloy film utilizing bromine-containing plasma
US4370195A (en) * 1982-03-25 1983-01-25 Rca Corporation Removal of plasma etching residues
JPH0770513B2 (ja) * 1985-05-13 1995-07-31 株式会社日立製作所 エッチングの方法およびエッチング装置
US4678540A (en) * 1986-06-09 1987-07-07 Tegal Corporation Plasma etch process
JPH01152646A (ja) * 1987-12-09 1989-06-15 Seiko Epson Corp 半導体装置の製造方法
JPH03104886A (ja) * 1989-09-19 1991-05-01 Oki Electric Ind Co Ltd アルミニウム合金のドライエッチング方法
NL8902744A (nl) * 1989-11-07 1991-06-03 Koninkl Philips Electronics Nv Werkwijze voor het aanbrengen van sporen uit aluminium of een aluminiumlegering op een substraat.
JPH04103130A (ja) * 1990-08-22 1992-04-06 Fujitsu Ltd 半導体装置の製造方法
JP3210359B2 (ja) * 1991-05-29 2001-09-17 株式会社東芝 ドライエッチング方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1154456A (ja) * 1997-07-25 1999-02-26 Samsung Electron Co Ltd 半導体装置の製造方法
JP2008526025A (ja) * 2004-12-22 2008-07-17 ラム リサーチ コーポレーション 基板最適化のためのプラズマ処理ステップ交互実行方法及び装置
KR100843236B1 (ko) * 2007-02-06 2008-07-03 삼성전자주식회사 더블 패터닝 공정을 이용하는 반도체 소자의 미세 패턴형성 방법
JP2012204510A (ja) * 2011-03-24 2012-10-22 Ulvac Japan Ltd シリコン基板のエッチング方法、及びシリコン基板のエッチング装置

Also Published As

Publication number Publication date
KR100239026B1 (ko) 2000-01-15
US5411631A (en) 1995-05-02
TW248608B (OSRAM) 1995-06-01

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