JPH0572015B2 - - Google Patents
Info
- Publication number
- JPH0572015B2 JPH0572015B2 JP63308264A JP30826488A JPH0572015B2 JP H0572015 B2 JPH0572015 B2 JP H0572015B2 JP 63308264 A JP63308264 A JP 63308264A JP 30826488 A JP30826488 A JP 30826488A JP H0572015 B2 JPH0572015 B2 JP H0572015B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- thin film
- substrate
- sputtering
- coercive force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 claims description 32
- 239000011651 chromium Substances 0.000 claims description 29
- 238000004544 sputter deposition Methods 0.000 claims description 24
- 239000010409 thin film Substances 0.000 claims description 24
- 229910052804 chromium Inorganic materials 0.000 claims description 12
- 239000010408 film Substances 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 229910052715 tantalum Inorganic materials 0.000 claims description 9
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 6
- 229910000531 Co alloy Inorganic materials 0.000 claims description 4
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- 239000010941 cobalt Substances 0.000 claims description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 description 9
- 239000000956 alloy Substances 0.000 description 9
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 229910001362 Ta alloys Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910018104 Ni-P Inorganic materials 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 229910018536 Ni—P Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30826488A JPH02154323A (ja) | 1988-12-06 | 1988-12-06 | 磁気記録媒体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30826488A JPH02154323A (ja) | 1988-12-06 | 1988-12-06 | 磁気記録媒体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02154323A JPH02154323A (ja) | 1990-06-13 |
| JPH0572015B2 true JPH0572015B2 (ko) | 1993-10-08 |
Family
ID=17978919
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30826488A Granted JPH02154323A (ja) | 1988-12-06 | 1988-12-06 | 磁気記録媒体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02154323A (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04134718A (ja) * | 1990-09-27 | 1992-05-08 | Mitsubishi Kasei Corp | 磁気記録媒体 |
| JP2760906B2 (ja) * | 1991-03-08 | 1998-06-04 | 日立金属株式会社 | 磁気記録媒体およびその製造方法 |
| JPH10228621A (ja) * | 1997-02-17 | 1998-08-25 | Fujitsu Ltd | 磁気記録媒体及び磁気ディスク装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61227231A (ja) * | 1985-03-30 | 1986-10-09 | Unitika Ltd | 磁気記録体の製造方法 |
| JPS6273415A (ja) * | 1985-09-23 | 1987-04-04 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 磁気記録媒体 |
| JPH02161617A (ja) * | 1988-03-15 | 1990-06-21 | Ulvac Corp | 面内記録型磁気記録体の製造方法 |
-
1988
- 1988-12-06 JP JP30826488A patent/JPH02154323A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61227231A (ja) * | 1985-03-30 | 1986-10-09 | Unitika Ltd | 磁気記録体の製造方法 |
| JPS6273415A (ja) * | 1985-09-23 | 1987-04-04 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 磁気記録媒体 |
| JPH02161617A (ja) * | 1988-03-15 | 1990-06-21 | Ulvac Corp | 面内記録型磁気記録体の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02154323A (ja) | 1990-06-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |