JPH0566021B2 - - Google Patents

Info

Publication number
JPH0566021B2
JPH0566021B2 JP63112264A JP11226488A JPH0566021B2 JP H0566021 B2 JPH0566021 B2 JP H0566021B2 JP 63112264 A JP63112264 A JP 63112264A JP 11226488 A JP11226488 A JP 11226488A JP H0566021 B2 JPH0566021 B2 JP H0566021B2
Authority
JP
Japan
Prior art keywords
suction
wafer
pressing means
hand
pressing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63112264A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01282834A (ja
Inventor
Fujio Terai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP63112264A priority Critical patent/JPH01282834A/ja
Publication of JPH01282834A publication Critical patent/JPH01282834A/ja
Publication of JPH0566021B2 publication Critical patent/JPH0566021B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP63112264A 1988-05-09 1988-05-09 ウェハ移載用の吸着ハンド Granted JPH01282834A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63112264A JPH01282834A (ja) 1988-05-09 1988-05-09 ウェハ移載用の吸着ハンド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63112264A JPH01282834A (ja) 1988-05-09 1988-05-09 ウェハ移載用の吸着ハンド

Publications (2)

Publication Number Publication Date
JPH01282834A JPH01282834A (ja) 1989-11-14
JPH0566021B2 true JPH0566021B2 (zh) 1993-09-20

Family

ID=14582351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63112264A Granted JPH01282834A (ja) 1988-05-09 1988-05-09 ウェハ移載用の吸着ハンド

Country Status (1)

Country Link
JP (1) JPH01282834A (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2817945B2 (ja) * 1989-05-01 1998-10-30 株式会社ニデック ウェーハ搬送装置
JP2656861B2 (ja) * 1991-02-04 1997-09-24 日本電信電話株式会社 着脱移送装置
SG125948A1 (en) * 2003-03-31 2006-10-30 Asml Netherlands Bv Supporting structure for use in a lithographic apparatus

Also Published As

Publication number Publication date
JPH01282834A (ja) 1989-11-14

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