JPH0553072B2 - - Google Patents

Info

Publication number
JPH0553072B2
JPH0553072B2 JP61082704A JP8270486A JPH0553072B2 JP H0553072 B2 JPH0553072 B2 JP H0553072B2 JP 61082704 A JP61082704 A JP 61082704A JP 8270486 A JP8270486 A JP 8270486A JP H0553072 B2 JPH0553072 B2 JP H0553072B2
Authority
JP
Japan
Prior art keywords
polysilicon
layer
silicide layer
polysilicon layer
fuse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61082704A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62238658A (ja
Inventor
Masakatsu Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP8270486A priority Critical patent/JPS62238658A/ja
Publication of JPS62238658A publication Critical patent/JPS62238658A/ja
Publication of JPH0553072B2 publication Critical patent/JPH0553072B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
JP8270486A 1986-04-09 1986-04-09 半導体集積回路装置の製造方法 Granted JPS62238658A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8270486A JPS62238658A (ja) 1986-04-09 1986-04-09 半導体集積回路装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8270486A JPS62238658A (ja) 1986-04-09 1986-04-09 半導体集積回路装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62238658A JPS62238658A (ja) 1987-10-19
JPH0553072B2 true JPH0553072B2 (enExample) 1993-08-09

Family

ID=13781786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8270486A Granted JPS62238658A (ja) 1986-04-09 1986-04-09 半導体集積回路装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62238658A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04365351A (ja) * 1991-06-13 1992-12-17 Nec Corp 半導体集積回路装置
US5708291A (en) * 1995-09-29 1998-01-13 Intel Corporation Silicide agglomeration fuse device
KR100718614B1 (ko) 2003-10-24 2007-05-16 야마하 가부시키가이샤 용량 소자와 퓨즈 소자를 구비한 반도체 장치 및 그 제조방법
JP5581520B2 (ja) * 2010-04-08 2014-09-03 ルネサスエレクトロニクス株式会社 半導体装置およびその製造方法
US10229878B2 (en) 2014-08-08 2019-03-12 Renesas Electronics Corporation Semiconductor device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5860560A (ja) * 1981-10-07 1983-04-11 Toshiba Corp 半導体装置の冗長回路およびそのフユ−ズ部切断方法
JPS6015966A (ja) * 1983-07-07 1985-01-26 Fujitsu Ltd 半導体記憶装置

Also Published As

Publication number Publication date
JPS62238658A (ja) 1987-10-19

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees