JPH0514322B2 - - Google Patents
Info
- Publication number
- JPH0514322B2 JPH0514322B2 JP58119236A JP11923683A JPH0514322B2 JP H0514322 B2 JPH0514322 B2 JP H0514322B2 JP 58119236 A JP58119236 A JP 58119236A JP 11923683 A JP11923683 A JP 11923683A JP H0514322 B2 JPH0514322 B2 JP H0514322B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- magnetic
- gap
- predetermined pattern
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004020 conductor Substances 0.000 claims description 24
- 239000010409 thin film Substances 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 9
- 238000000059 patterning Methods 0.000 claims description 3
- 239000010408 film Substances 0.000 description 19
- 229910000889 permalloy Inorganic materials 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000000206 photolithography Methods 0.000 description 8
- 239000011347 resin Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 6
- 239000000956 alloy Substances 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000010936 titanium Substances 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 229910000640 Fe alloy Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11923683A JPS6010409A (ja) | 1983-06-29 | 1983-06-29 | 薄膜磁気ヘツドの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11923683A JPS6010409A (ja) | 1983-06-29 | 1983-06-29 | 薄膜磁気ヘツドの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6010409A JPS6010409A (ja) | 1985-01-19 |
| JPH0514322B2 true JPH0514322B2 (nl) | 1993-02-24 |
Family
ID=14756329
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11923683A Granted JPS6010409A (ja) | 1983-06-29 | 1983-06-29 | 薄膜磁気ヘツドの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6010409A (nl) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0810485B2 (ja) * | 1989-03-20 | 1996-01-31 | 株式会社日立製作所 | 磁気ディスク装置及びこれに搭載する薄膜磁気ヘッドとその製造方法並びに情報の書込み・読出方法 |
| US5452164A (en) * | 1994-02-08 | 1995-09-19 | International Business Machines Corporation | Thin film magnetic write head |
| JP2784431B2 (ja) * | 1994-04-19 | 1998-08-06 | インターナショナル・ビジネス・マシーンズ・コーポレイション | 薄膜磁気書込みヘッド、読取り／書込み磁気ヘッド、ディスク駆動装置及び薄膜磁気書込みヘッドの製造方法 |
| US5798897A (en) * | 1996-10-21 | 1998-08-25 | International Business Machines Corporation | Inductive write head with insulation stack configured for eliminating reflective notching |
| US5805391A (en) * | 1996-10-28 | 1998-09-08 | International Business Machines Corporation | Write head with recessed stitched yoke on a planar portion of an insulation layer defining zero throat height |
| JPH11288503A (ja) | 1998-04-02 | 1999-10-19 | Tdk Corp | 薄膜磁気ヘッドおよびその製造方法 |
| JPH11353614A (ja) | 1998-06-08 | 1999-12-24 | Nec Corp | 薄膜磁気ヘッド及びこれを用いた磁気記憶装置 |
| JPH11353616A (ja) | 1998-06-11 | 1999-12-24 | Tdk Corp | 薄膜磁気ヘッドおよびその製造方法 |
| JP3755560B2 (ja) | 1998-06-30 | 2006-03-15 | 富士通株式会社 | 磁気ヘッド及びその製造方法 |
| US6510024B2 (en) | 1998-06-30 | 2003-01-21 | Fujitsu Limited | Magnetic head and method of manufacturing the same |
| JP3292148B2 (ja) | 1998-07-15 | 2002-06-17 | 日本電気株式会社 | 薄膜磁気ヘッド、その製造方法及び磁気記憶装置 |
| US6317288B1 (en) | 1998-08-28 | 2001-11-13 | Tdk Corporation | Thin-film magnetic head and method of manufacturing same |
| JP3781399B2 (ja) | 1998-12-08 | 2006-05-31 | Ｔｄｋ株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
| JP3784182B2 (ja) | 1998-12-11 | 2006-06-07 | Ｔｄｋ株式会社 | 薄膜磁気ヘッドの製造方法 |
| JP3530064B2 (ja) | 1999-03-29 | 2004-05-24 | Ｔｄｋ株式会社 | 薄膜磁気ヘッドおよびその製造方法ならびに薄膜磁気ヘッド用素材およびその製造方法 |
| JP3856587B2 (ja) | 1999-04-06 | 2006-12-13 | Ｔｄｋ株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
| JP3856591B2 (ja) | 1999-04-28 | 2006-12-13 | Ｔｄｋ株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
| JP3421635B2 (ja) | 1999-06-04 | 2003-06-30 | ティーディーケイ株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
| JP3522593B2 (ja) | 1999-06-15 | 2004-04-26 | Ｔｄｋ株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
| JP3527138B2 (ja) | 1999-06-17 | 2004-05-17 | Ｔｄｋ株式会社 | 薄膜磁気ヘッドおよびその製造方法ならびに薄膜コイル素子およびその製造方法 |
| US7012784B2 (en) | 1999-07-08 | 2006-03-14 | Tdk Corporation | Thin-film magnetic head and method of manufacturing same |
| JP3859398B2 (ja) | 1999-07-08 | 2006-12-20 | Ｔｄｋ株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
| JP3490643B2 (ja) | 1999-07-14 | 2004-01-26 | Ｔｄｋ株式会社 | 薄膜磁気ヘッドの製造方法 |
| JP2001034911A (ja) | 1999-07-16 | 2001-02-09 | Tdk Corp | 薄膜磁気ヘッドおよびその製造方法 |
| JP3530084B2 (ja) | 1999-09-07 | 2004-05-24 | Ｔｄｋ株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
| JP3560872B2 (ja) | 1999-10-12 | 2004-09-02 | Ｔｄｋ株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
| US7002776B2 (en) | 1999-12-06 | 2006-02-21 | Tdk Corporation | Thin film magnetic head and method of manufacturing same |
| US6687096B2 (en) | 2000-06-21 | 2004-02-03 | Tdk Corporation | Thin-film magnetic head and method of manufacturing same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5778613A (en) * | 1980-10-30 | 1982-05-17 | Canon Inc | Thin film magnetic head and its manufacture |
-
1983
- 1983-06-29 JP JP11923683A patent/JPS6010409A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5778613A (en) * | 1980-10-30 | 1982-05-17 | Canon Inc | Thin film magnetic head and its manufacture |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6010409A (ja) | 1985-01-19 |
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