JPH05119706A - Ｌｅｄ表示装置の製造方法 - Google Patents

Ｌｅｄ表示装置の製造方法

Info

Publication number
JPH05119706A
JPH05119706A JP3308492A JP30849291A JPH05119706A JP H05119706 A JPH05119706 A JP H05119706A JP 3308492 A JP3308492 A JP 3308492A JP 30849291 A JP30849291 A JP 30849291A JP H05119706 A JPH05119706 A JP H05119706A
Authority
JP
Japan
Prior art keywords
film
led chip
display device
wire
bonding pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3308492A
Other languages
English (en)
Inventor
Kotaro Yoneda
公太郎 米田
Akihito Nogata
彰人 野方
Jun Takemura
純 竹村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stanley Electric Co Ltd
Original Assignee
Stanley Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stanley Electric Co Ltd filed Critical Stanley Electric Co Ltd
Priority to JP3308492A priority Critical patent/JPH05119706A/ja
Publication of JPH05119706A publication Critical patent/JPH05119706A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144—Gold (Au) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484—Connecting portions
    • H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
    • H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/485—Material
    • H01L2224/48505—Material at the bonding interface
    • H01L2224/48599—Principal constituent of the connecting portion of the wire connector being Gold (Au)
    • H01L2224/486—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/48638—Principal constituent of the connecting portion of the wire connector being Gold (Au) with a principal constituent of the bonding area being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/48644—Gold (Au) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8338—Bonding interfaces outside the semiconductor or solid-state body
    • H01L2224/83399—Material
    • H01L2224/834—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2224/83438—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/83444—Gold [Au] as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/8538—Bonding interfaces outside the semiconductor or solid-state body
    • H01L2224/85399—Material
    • H01L2224/854—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/85438—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/85444—Gold (Au) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92—Specific sequence of method steps
    • H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
    • H01L2224/9222—Sequential connecting processes
    • H01L2224/92242—Sequential connecting processes the first connecting process involving a layer connector
    • H01L2224/92247—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/11—Device type
    • H01L2924/12—Passive devices, e.g. 2 terminal devices
    • H01L2924/1204—Optical Diode
    • H01L2924/12041—LED

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Led Device Packages (AREA)

Abstract

(57)【要約】 【目的】この発明は、表示品位を向上させ、かつ耐消費
電力を軽減可能なＬＥＤ表示装置の製造方法を目的にし
ている。 【構成】ガラス基板２上にＩＴＯ膜１を所定手段で成膜
する第１工程と、ＩＴＯ膜１をフォトリソ工程で所定パ
ターンにパターン化する第２の工程と、印刷法を用い
て、ダイボンドエリア及びワイヤーボンディングパッド
部分にのみＡｕペースト３を塗布後焼成してＡｕ膜３１
を成膜する第３の工程と、メタライズ基板の所定位置に
ＬＥＤチップ４を導電性接着剤で固定する第４の工程
と、ＬＥＤチップ４のボンディングパッド６とＡｕ膜３
１上とをＡｕワイヤー５でワイヤーボンディングする第
５の工程とから成るものである。

Description

【発明の詳細な説明】
【０００１】
【産業上の利用分野】この発明は、ガラスを用いたＬＥ
Ｄ表示装置全般に利用されるＬＥＤ表示装置の製造方法
に関するものである。
【０００２】
【従来の技術】従来この種ＬＥＤ表示装置の製造方法
は、刊行物に記載された公知例がない。
【０００３】
【発明が解決しようとする課題】しかし、従来の技術で
は、Ａ．不透明なメタライズ配線が気になり、表示品位
を低下させるという問題点がある。
【０００４】Ｂ．従来のＬＥＤの電流制限抵抗の耐消費
電力を軽減できないという問題点がある。
【０００５】そこで、本発明は上記従来の技術の問題点
に鑑み案出されたもので、表示品位を向上させ、かつ耐
消費電力を軽減可能なＬＥＤ表示装置の製造方法の提供
を目的としている。
【０００６】
【課題を解決するための手段】上記目的を達成するため
に、本発明におけるＬＥＤ表示装置の製造方法において
は、ガラス基板上にＩＴＯ膜を所定手段で成膜する第１
工程と、ＩＴＯ膜をフォトリソ工程で所定パターンにパ
ターン化する第２の工程と、印刷法を用いて、ダイボン
ドエリア及びワイヤーボンディングパッド部分にのみＡ
ｕペーストを塗布後焼成してＡｕ膜を成膜する第３の工
程と、メタライズ基板の所定位置にＬＥＤチップを導電
性接着剤で固定する第４の工程と、ＬＥＤチップのボン
ディングパッドとＡｕ膜上とをＡｕワイヤーでワイヤー
ボンディングする第５の工程とから成るものである。
【０００７】
【作用】透明導電膜としてＩＴＯを用いることにより、
ＬＥＤチップ実装部と基板側のメタライズ部以外は透明
に保つことができることになる。
【０００８】また、ＩＴＯ自体が抵抗を持っているの
で、従来のＬＥＤの電流制限抵抗の耐消費電力を軽減す
る働きをする。
【０００９】
【実施例】実施例について図１を参照して説明すると、
第１の工程Ａは、所望のガラス基板２上に、例えば、１
０Ω／□〜１００Ω／□程度の透明導電膜のＩＴＯ膜１
がスパッタ蒸着又は真空蒸着により成膜されている。
【００１０】前記ガラス基板２は、特に材質は問わない
が、アルカリイオンを含むソーダーガラス等の場合は、
その析出を防ぐためにガラス基板２とＩＴＯ膜１との間
にＳｉＯ2 膜を成膜される。
【００１１】このＩＴＯ膜１は、ＬＥＤの電流制限抵抗
の全部又は一部の役割もはたすものである。
【００１２】第２の工程Ｂは、ＩＴＯ膜１を通常のフォ
トリソ工程で、所定のパターンにパターン化されてい
る。
【００１３】第３の工程Ｃは、印刷法を用いて、次工程
のＬＥＤチップ４をダイボンドするエリア及びワイヤー
ボンディングパッド６部分にのみＡｕペースト３を塗布
し、その後、Ａｕペースト３を約５００°Ｃ〜６００°
Ｃで焼成し、密着の良い例えば、０．３μｍ〜３μｍ程
度のＡｕ膜３１に成膜されている。
【００１４】第４の工程Ｄは、上記第１〜３の工程で成
膜されたメタライズ基板の所定の位置にＬＥＤチップ４
をＡｇペースト等の導電性接着剤（図示省略）を用いて
固定されている。
【００１５】第５の工程Ｅは、ＬＥＤチップ４のボンデ
ィングパッド６とメタライズされたＡｕ膜３１上とをＡ
ｕワイヤー５を用いてワイヤーボンディングされてい
る。
【００１６】
【発明の効果】本発明は上述の通り構成されているの
で、次に記載する効果を奏する。 Ａ．従来は不透明なメタライズ配線が気になり、表示品
位を低下させていたが、透明誘電膜に１０Ω／□〜１０
０Ω／□のＩＴＯを用いることにより、ＬＥＤチップ実
装部と基板側のメタライズ部以外は透明に保つことがで
き、かつ表示品位を向上させることができる。
【００１７】Ｂ．ＩＴＯ自体は抵抗を持っているので、
ＬＥＤの電流制限抵抗の耐消費電力を軽減できる。
【図面の簡単な説明】
【図１】本発明のＬＥＤ表示装置の製造工程図である。
【符号の説明】
１ 透明導電膜 ２ ガラス基板 ３ Ａｕペースト ３１ Ａｕ膜 ４ ＬＥＤチップ ５ Ａｕワイヤー ６ ボンディングパッド Ａ 第１工程 Ｂ 第２工程 Ｃ 第３工程 Ｄ 第４工程 Ｅ 第５工程

Claims (1)

    【特許請求の範囲】
  1. 【請求項１】ガラス基板上にＩＴＯ膜を所定手段で成膜
    する第１工程と、 ＩＴＯ膜をフォトリソ工程で所定パターンにパターン化
    する第２の工程と、 印刷法を用いて、ダイボンドエリア及びワイヤーボンデ
    ィングパッド部分にのみＡｕペーストを塗布後焼成して
    Ａｕ膜を成膜する第３の工程と、 メタライズ基板の所定位置にＬＥＤチップを導電性接着
    剤で固定する第４の工程と、 ＬＥＤチップのボンディングパッドとＡｕ膜上とをＡｕ
    ワイヤーでワイヤーボンディングする第５の工程とから
    成るＬＥＤ表示装置の製造方法。
JP3308492A 1991-10-28 1991-10-28 Ｌｅｄ表示装置の製造方法 Pending JPH05119706A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3308492A JPH05119706A (ja) 1991-10-28 1991-10-28 Ｌｅｄ表示装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3308492A JPH05119706A (ja) 1991-10-28 1991-10-28 Ｌｅｄ表示装置の製造方法

Publications (1)

Publication Number Publication Date
JPH05119706A true JPH05119706A (ja) 1993-05-18

Family

ID=17981665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3308492A Pending JPH05119706A (ja) 1991-10-28 1991-10-28 Ｌｅｄ表示装置の製造方法

Country Status (1)

Country Link
JP (1) JPH05119706A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1437215A1 (fr) * 2003-01-10 2004-07-14 Glaverbel Vitrage comportant un élément lumineux
WO2005104625A1 (de) 2004-04-21 2005-11-03 Schott Ag Beleuchtungsschichtsystem und verfahren zur herstellung desselben
EP1799019A1 (de) 2005-12-15 2007-06-20 Döppner Bauelemente GmbH & Co. KG Elektrischer Anschluss für einen Sockel
CN105129259A (zh) * 2015-05-15 2015-12-09 友达光电股份有限公司 微组件的传送方法以及显示面板的制作方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1437215A1 (fr) * 2003-01-10 2004-07-14 Glaverbel Vitrage comportant un élément lumineux
WO2005104625A1 (de) 2004-04-21 2005-11-03 Schott Ag Beleuchtungsschichtsystem und verfahren zur herstellung desselben
EP1799019A1 (de) 2005-12-15 2007-06-20 Döppner Bauelemente GmbH & Co. KG Elektrischer Anschluss für einen Sockel
US7513777B2 (en) 2005-12-15 2009-04-07 Doeppner Bauelemente Gmbh & Co. Kg Electrical base connection with transparent conductive layer
CN105129259A (zh) * 2015-05-15 2015-12-09 友达光电股份有限公司 微组件的传送方法以及显示面板的制作方法

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