JPH0451995Y2 - - Google Patents

Info

Publication number
JPH0451995Y2
JPH0451995Y2 JP1985074145U JP7414585U JPH0451995Y2 JP H0451995 Y2 JPH0451995 Y2 JP H0451995Y2 JP 1985074145 U JP1985074145 U JP 1985074145U JP 7414585 U JP7414585 U JP 7414585U JP H0451995 Y2 JPH0451995 Y2 JP H0451995Y2
Authority
JP
Japan
Prior art keywords
robot
wafer
arm
wafers
storage member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985074145U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61191886U (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985074145U priority Critical patent/JPH0451995Y2/ja
Publication of JPS61191886U publication Critical patent/JPS61191886U/ja
Application granted granted Critical
Publication of JPH0451995Y2 publication Critical patent/JPH0451995Y2/ja
Expired legal-status Critical Current

Links

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  • Specific Conveyance Elements (AREA)
JP1985074145U 1985-05-21 1985-05-21 Expired JPH0451995Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985074145U JPH0451995Y2 (ko) 1985-05-21 1985-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985074145U JPH0451995Y2 (ko) 1985-05-21 1985-05-21

Publications (2)

Publication Number Publication Date
JPS61191886U JPS61191886U (ko) 1986-11-29
JPH0451995Y2 true JPH0451995Y2 (ko) 1992-12-07

Family

ID=30614165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985074145U Expired JPH0451995Y2 (ko) 1985-05-21 1985-05-21

Country Status (1)

Country Link
JP (1) JPH0451995Y2 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0622258B2 (ja) * 1987-07-24 1994-03-23 日立電子エンジニアリング株式会社 ウエハ表面検査装置
US5054988A (en) * 1988-07-13 1991-10-08 Tel Sagami Limited Apparatus for transferring semiconductor wafers
JP2000042953A (ja) * 1998-07-29 2000-02-15 Janome Sewing Mach Co Ltd 水平多関節ロボット

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58155195A (ja) * 1982-03-05 1983-09-14 株式会社小松製作所 ロボツトア−ム装置
JPS5924292B2 (ja) * 1976-10-15 1984-06-08 カヤバ工業株式会社 車高調整式シヨツクアブソ−バ
JPS59156688A (ja) * 1983-02-21 1984-09-05 ダイキン工業株式会社 三点把持形ハンド

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5924292U (ja) * 1982-08-05 1984-02-15 東京エレクトロン株式会社 腕状機構

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5924292B2 (ja) * 1976-10-15 1984-06-08 カヤバ工業株式会社 車高調整式シヨツクアブソ−バ
JPS58155195A (ja) * 1982-03-05 1983-09-14 株式会社小松製作所 ロボツトア−ム装置
JPS59156688A (ja) * 1983-02-21 1984-09-05 ダイキン工業株式会社 三点把持形ハンド

Also Published As

Publication number Publication date
JPS61191886U (ko) 1986-11-29

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