JPH0329083Y2 - - Google Patents
Info
- Publication number
- JPH0329083Y2 JPH0329083Y2 JP1985074144U JP7414485U JPH0329083Y2 JP H0329083 Y2 JPH0329083 Y2 JP H0329083Y2 JP 1985074144 U JP1985074144 U JP 1985074144U JP 7414485 U JP7414485 U JP 7414485U JP H0329083 Y2 JPH0329083 Y2 JP H0329083Y2
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- workpiece
- robot
- swing arm
- work
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 23
- 238000001514 detection method Methods 0.000 claims description 7
- 230000032258 transport Effects 0.000 claims 1
- 239000000969 carrier Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000005498 polishing Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
Landscapes
- Feeding Of Workpieces (AREA)
- Specific Conveyance Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985074144U JPH0329083Y2 (ko) | 1985-05-21 | 1985-05-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985074144U JPH0329083Y2 (ko) | 1985-05-21 | 1985-05-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61191847U JPS61191847U (ko) | 1986-11-29 |
JPH0329083Y2 true JPH0329083Y2 (ko) | 1991-06-21 |
Family
ID=30614163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985074144U Expired JPH0329083Y2 (ko) | 1985-05-21 | 1985-05-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0329083Y2 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016128179A (ja) * | 2015-01-09 | 2016-07-14 | 株式会社アマダホールディングス | 板材ストック装置 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002321132A (ja) * | 2001-04-23 | 2002-11-05 | Fujikoshi Mach Corp | ワークの搬送装置 |
JP4621261B2 (ja) * | 2008-02-01 | 2011-01-26 | 株式会社住友金属ファインテック | 両面研摩装置 |
JP2023123192A (ja) * | 2022-02-24 | 2023-09-05 | 三菱マテリアルテクノ株式会社 | 移載装置、研磨設備、及び移載方法 |
JP2023123191A (ja) * | 2022-02-24 | 2023-09-05 | 三菱マテリアルテクノ株式会社 | 搬送装置、研磨装置、及び搬送方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58223561A (ja) * | 1982-06-16 | 1983-12-26 | Disco Abrasive Sys Ltd | ポリツシングマシン |
JPS59156665A (ja) * | 1984-02-03 | 1984-09-05 | Supiide Fuamu Kk | 平面研削装置 |
-
1985
- 1985-05-21 JP JP1985074144U patent/JPH0329083Y2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58223561A (ja) * | 1982-06-16 | 1983-12-26 | Disco Abrasive Sys Ltd | ポリツシングマシン |
JPS59156665A (ja) * | 1984-02-03 | 1984-09-05 | Supiide Fuamu Kk | 平面研削装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016128179A (ja) * | 2015-01-09 | 2016-07-14 | 株式会社アマダホールディングス | 板材ストック装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS61191847U (ko) | 1986-11-29 |
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