JPH0318435Y2 - - Google Patents

Info

Publication number
JPH0318435Y2
JPH0318435Y2 JP1985138465U JP13846585U JPH0318435Y2 JP H0318435 Y2 JPH0318435 Y2 JP H0318435Y2 JP 1985138465 U JP1985138465 U JP 1985138465U JP 13846585 U JP13846585 U JP 13846585U JP H0318435 Y2 JPH0318435 Y2 JP H0318435Y2
Authority
JP
Japan
Prior art keywords
wafer
gripper
holding
plate
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985138465U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6247542U (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985138465U priority Critical patent/JPH0318435Y2/ja
Publication of JPS6247542U publication Critical patent/JPS6247542U/ja
Application granted granted Critical
Publication of JPH0318435Y2 publication Critical patent/JPH0318435Y2/ja
Expired legal-status Critical Current

Links

JP1985138465U 1985-09-10 1985-09-10 Expired JPH0318435Y2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985138465U JPH0318435Y2 (ko) 1985-09-10 1985-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985138465U JPH0318435Y2 (ko) 1985-09-10 1985-09-10

Publications (2)

Publication Number Publication Date
JPS6247542U JPS6247542U (ko) 1987-03-24
JPH0318435Y2 true JPH0318435Y2 (ko) 1991-04-18

Family

ID=31043472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985138465U Expired JPH0318435Y2 (ko) 1985-09-10 1985-09-10

Country Status (1)

Country Link
JP (1) JPH0318435Y2 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003024673A1 (fr) * 2001-09-12 2003-03-27 Takehide Hayashi Main de robot a fonction de positionnement pour tranche en semiconducteur et substrat de verre a cristaux liquides

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0666375B2 (ja) * 1987-03-30 1994-08-24 株式会社日立製作所 ウエハ搬送方法
JP4600193B2 (ja) * 2005-07-20 2010-12-15 株式会社安川電機 リング搬送システム
JP5549655B2 (ja) * 2011-09-26 2014-07-16 株式会社安川電機 ハンドおよびロボット
JP7059472B1 (ja) * 2020-12-09 2022-04-26 田中精密工業株式会社 積層鉄心の加熱装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4938345A (ko) * 1972-08-25 1974-04-10
JPS59201782A (ja) * 1983-04-23 1984-11-15 大日本スクリ−ン製造株式会社 ウエハ等の薄板物搬送装置
JPS61267622A (ja) * 1985-05-20 1986-11-27 Canon Inc ウエハ搬送装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6079742U (ja) * 1983-11-09 1985-06-03 日立電子エンジニアリング株式会社 角マスクチヤツク機構
JPS61142450U (ko) * 1985-02-25 1986-09-03
JPS61199049U (ko) * 1985-06-04 1986-12-12

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4938345A (ko) * 1972-08-25 1974-04-10
JPS59201782A (ja) * 1983-04-23 1984-11-15 大日本スクリ−ン製造株式会社 ウエハ等の薄板物搬送装置
JPS61267622A (ja) * 1985-05-20 1986-11-27 Canon Inc ウエハ搬送装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003024673A1 (fr) * 2001-09-12 2003-03-27 Takehide Hayashi Main de robot a fonction de positionnement pour tranche en semiconducteur et substrat de verre a cristaux liquides

Also Published As

Publication number Publication date
JPS6247542U (ko) 1987-03-24

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