JPS61199049U - - Google Patents
Info
- Publication number
- JPS61199049U JPS61199049U JP8401585U JP8401585U JPS61199049U JP S61199049 U JPS61199049 U JP S61199049U JP 8401585 U JP8401585 U JP 8401585U JP 8401585 U JP8401585 U JP 8401585U JP S61199049 U JPS61199049 U JP S61199049U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- arm
- jig
- sandwich
- arms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 3
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8401585U JPS61199049U (ko) | 1985-06-04 | 1985-06-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8401585U JPS61199049U (ko) | 1985-06-04 | 1985-06-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61199049U true JPS61199049U (ko) | 1986-12-12 |
Family
ID=30633163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8401585U Pending JPS61199049U (ko) | 1985-06-04 | 1985-06-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61199049U (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6247542U (ko) * | 1985-09-10 | 1987-03-24 | ||
| JP2010098130A (ja) * | 2008-10-16 | 2010-04-30 | Hirata Corp | エンドイフェクタ |
-
1985
- 1985-06-04 JP JP8401585U patent/JPS61199049U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6247542U (ko) * | 1985-09-10 | 1987-03-24 | ||
| JP2010098130A (ja) * | 2008-10-16 | 2010-04-30 | Hirata Corp | エンドイフェクタ |