JPH0438355Y2 - - Google Patents

Info

Publication number
JPH0438355Y2
JPH0438355Y2 JP1986175401U JP17540186U JPH0438355Y2 JP H0438355 Y2 JPH0438355 Y2 JP H0438355Y2 JP 1986175401 U JP1986175401 U JP 1986175401U JP 17540186 U JP17540186 U JP 17540186U JP H0438355 Y2 JPH0438355 Y2 JP H0438355Y2
Authority
JP
Japan
Prior art keywords
photomask
alignment
alignment mark
marks
boundary line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986175401U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6380546U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986175401U priority Critical patent/JPH0438355Y2/ja
Publication of JPS6380546U publication Critical patent/JPS6380546U/ja
Application granted granted Critical
Publication of JPH0438355Y2 publication Critical patent/JPH0438355Y2/ja
Expired legal-status Critical Current

Links

JP1986175401U 1986-11-17 1986-11-17 Expired JPH0438355Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986175401U JPH0438355Y2 (OSRAM) 1986-11-17 1986-11-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986175401U JPH0438355Y2 (OSRAM) 1986-11-17 1986-11-17

Publications (2)

Publication Number Publication Date
JPS6380546U JPS6380546U (OSRAM) 1988-05-27
JPH0438355Y2 true JPH0438355Y2 (OSRAM) 1992-09-08

Family

ID=31114693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986175401U Expired JPH0438355Y2 (OSRAM) 1986-11-17 1986-11-17

Country Status (1)

Country Link
JP (1) JPH0438355Y2 (OSRAM)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5116878A (en) * 1974-08-01 1976-02-10 Fujitsu Ltd Hoto masukuno seizohoho

Also Published As

Publication number Publication date
JPS6380546U (OSRAM) 1988-05-27

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