JPH0437590B2 - - Google Patents
Info
- Publication number
- JPH0437590B2 JPH0437590B2 JP57175072A JP17507282A JPH0437590B2 JP H0437590 B2 JPH0437590 B2 JP H0437590B2 JP 57175072 A JP57175072 A JP 57175072A JP 17507282 A JP17507282 A JP 17507282A JP H0437590 B2 JPH0437590 B2 JP H0437590B2
- Authority
- JP
- Japan
- Prior art keywords
- protrusion
- semiconductor substrate
- capacitor
- recess
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate
Landscapes
- Semiconductor Memories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57175072A JPS5965466A (ja) | 1982-10-05 | 1982-10-05 | 半導体記憶装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57175072A JPS5965466A (ja) | 1982-10-05 | 1982-10-05 | 半導体記憶装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5965466A JPS5965466A (ja) | 1984-04-13 |
| JPH0437590B2 true JPH0437590B2 (enrdf_load_stackoverflow) | 1992-06-19 |
Family
ID=15989735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57175072A Granted JPS5965466A (ja) | 1982-10-05 | 1982-10-05 | 半導体記憶装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5965466A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61222255A (ja) * | 1985-03-28 | 1986-10-02 | Fujitsu Ltd | 半導体記憶装置の製造方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6037619B2 (ja) * | 1976-11-17 | 1985-08-27 | 株式会社東芝 | 半導体メモリ装置 |
| JPS5521102A (en) * | 1978-08-01 | 1980-02-15 | Toshiba Corp | Semiconductor memory cell |
| JPS5834949B2 (ja) * | 1980-12-01 | 1983-07-29 | 三菱電機株式会社 | 半導体メモリ装置 |
-
1982
- 1982-10-05 JP JP57175072A patent/JPS5965466A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5965466A (ja) | 1984-04-13 |
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