JPH0413847B2 - - Google Patents

Info

Publication number
JPH0413847B2
JPH0413847B2 JP61194833A JP19483386A JPH0413847B2 JP H0413847 B2 JPH0413847 B2 JP H0413847B2 JP 61194833 A JP61194833 A JP 61194833A JP 19483386 A JP19483386 A JP 19483386A JP H0413847 B2 JPH0413847 B2 JP H0413847B2
Authority
JP
Japan
Prior art keywords
resist
substrate
collection container
lid
collection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61194833A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6351638A (ja
Inventor
Isao Hatsutori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KURIIN SAAFUEISU GIJUTSU KK
Original Assignee
KURIIN SAAFUEISU GIJUTSU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KURIIN SAAFUEISU GIJUTSU KK filed Critical KURIIN SAAFUEISU GIJUTSU KK
Priority to JP19483386A priority Critical patent/JPS6351638A/ja
Publication of JPS6351638A publication Critical patent/JPS6351638A/ja
Publication of JPH0413847B2 publication Critical patent/JPH0413847B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP19483386A 1986-08-20 1986-08-20 フオト・エツチングのレジスト塗布回収装置 Granted JPS6351638A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19483386A JPS6351638A (ja) 1986-08-20 1986-08-20 フオト・エツチングのレジスト塗布回収装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19483386A JPS6351638A (ja) 1986-08-20 1986-08-20 フオト・エツチングのレジスト塗布回収装置

Publications (2)

Publication Number Publication Date
JPS6351638A JPS6351638A (ja) 1988-03-04
JPH0413847B2 true JPH0413847B2 (enrdf_load_stackoverflow) 1992-03-11

Family

ID=16331020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19483386A Granted JPS6351638A (ja) 1986-08-20 1986-08-20 フオト・エツチングのレジスト塗布回収装置

Country Status (1)

Country Link
JP (1) JPS6351638A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2907387B2 (ja) * 1988-04-06 1999-06-21 東京エレクトロン株式会社 回転処理装置
JPH0742000A (ja) * 1993-07-30 1995-02-10 Kawasaki Steel Corp 金属面のエッチング加工方法
JP5297658B2 (ja) * 2008-01-28 2013-09-25 東京応化工業株式会社 レジスト液供給回収システム
JP5249593B2 (ja) * 2008-01-28 2013-07-31 東京応化工業株式会社 レジスト液回収方法
JP5436028B2 (ja) * 2009-04-28 2014-03-05 東京応化工業株式会社 レジスト液回収方法
JP2011156480A (ja) * 2010-02-01 2011-08-18 Disco Abrasive Syst Ltd 液状樹脂塗布装置
JP5646956B2 (ja) 2010-11-04 2014-12-24 東京エレクトロン株式会社 液体流量制御装置、液体流量制御方法および記憶媒体
JP5715230B2 (ja) * 2013-12-09 2015-05-07 東京応化工業株式会社 レジスト液回収方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57166033A (en) * 1981-04-06 1982-10-13 Toshiba Corp Applying device for resist with adjusting mechanism for quantity of exhaust gas
JPS6052621U (ja) * 1983-09-16 1985-04-13 富士通株式会社 レジスト塗布装置

Also Published As

Publication number Publication date
JPS6351638A (ja) 1988-03-04

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