JPS6210997Y2 - - Google Patents
Info
- Publication number
- JPS6210997Y2 JPS6210997Y2 JP4126282U JP4126282U JPS6210997Y2 JP S6210997 Y2 JPS6210997 Y2 JP S6210997Y2 JP 4126282 U JP4126282 U JP 4126282U JP 4126282 U JP4126282 U JP 4126282U JP S6210997 Y2 JPS6210997 Y2 JP S6210997Y2
- Authority
- JP
- Japan
- Prior art keywords
- coating liquid
- container
- condensate
- resist
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 27
- 239000011248 coating agent Substances 0.000 claims description 20
- 238000000576 coating method Methods 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 14
- 238000000926 separation method Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4126282U JPS58144829U (ja) | 1982-03-24 | 1982-03-24 | スピンコ−タ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4126282U JPS58144829U (ja) | 1982-03-24 | 1982-03-24 | スピンコ−タ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58144829U JPS58144829U (ja) | 1983-09-29 |
| JPS6210997Y2 true JPS6210997Y2 (enrdf_load_stackoverflow) | 1987-03-16 |
Family
ID=30052448
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4126282U Granted JPS58144829U (ja) | 1982-03-24 | 1982-03-24 | スピンコ−タ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58144829U (enrdf_load_stackoverflow) |
-
1982
- 1982-03-24 JP JP4126282U patent/JPS58144829U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58144829U (ja) | 1983-09-29 |
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