JPS58144829U - スピンコ−タ - Google Patents

スピンコ−タ

Info

Publication number
JPS58144829U
JPS58144829U JP4126282U JP4126282U JPS58144829U JP S58144829 U JPS58144829 U JP S58144829U JP 4126282 U JP4126282 U JP 4126282U JP 4126282 U JP4126282 U JP 4126282U JP S58144829 U JPS58144829 U JP S58144829U
Authority
JP
Japan
Prior art keywords
coating liquid
container
substrate
spin coater
condensate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4126282U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6210997Y2 (enrdf_load_stackoverflow
Inventor
有井　勝之
英二 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4126282U priority Critical patent/JPS58144829U/ja
Publication of JPS58144829U publication Critical patent/JPS58144829U/ja
Application granted granted Critical
Publication of JPS6210997Y2 publication Critical patent/JPS6210997Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP4126282U 1982-03-24 1982-03-24 スピンコ−タ Granted JPS58144829U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4126282U JPS58144829U (ja) 1982-03-24 1982-03-24 スピンコ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4126282U JPS58144829U (ja) 1982-03-24 1982-03-24 スピンコ−タ

Publications (2)

Publication Number Publication Date
JPS58144829U true JPS58144829U (ja) 1983-09-29
JPS6210997Y2 JPS6210997Y2 (enrdf_load_stackoverflow) 1987-03-16

Family

ID=30052448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4126282U Granted JPS58144829U (ja) 1982-03-24 1982-03-24 スピンコ−タ

Country Status (1)

Country Link
JP (1) JPS58144829U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6210997Y2 (enrdf_load_stackoverflow) 1987-03-16

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