JPH0353777B2 - - Google Patents

Info

Publication number
JPH0353777B2
JPH0353777B2 JP58188583A JP18858383A JPH0353777B2 JP H0353777 B2 JPH0353777 B2 JP H0353777B2 JP 58188583 A JP58188583 A JP 58188583A JP 18858383 A JP18858383 A JP 18858383A JP H0353777 B2 JPH0353777 B2 JP H0353777B2
Authority
JP
Japan
Prior art keywords
suction
head
slot
flow
lifting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58188583A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5992545A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5992545A publication Critical patent/JPS5992545A/ja
Publication of JPH0353777B2 publication Critical patent/JPH0353777B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Load-Engaging Elements For Cranes (AREA)
JP58188583A 1982-11-16 1983-10-11 シ−ト状材料の引上げヘツド Granted JPS5992545A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US442206 1982-11-16
US06/442,206 US4474397A (en) 1982-11-16 1982-11-16 Pick-up head utilizing aspirated air flow

Publications (2)

Publication Number Publication Date
JPS5992545A JPS5992545A (ja) 1984-05-28
JPH0353777B2 true JPH0353777B2 (enExample) 1991-08-16

Family

ID=23755925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58188583A Granted JPS5992545A (ja) 1982-11-16 1983-10-11 シ−ト状材料の引上げヘツド

Country Status (4)

Country Link
US (1) US4474397A (enExample)
EP (1) EP0109080B1 (enExample)
JP (1) JPS5992545A (enExample)
DE (1) DE3372681D1 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5067762A (en) * 1985-06-18 1991-11-26 Hiroshi Akashi Non-contact conveying device
DE3536432A1 (de) * 1985-10-12 1987-04-16 Telefunken Electronic Gmbh Beruehrungslose haltevorrichtung fuer halbleiterscheiben
DE3822597A1 (de) * 1988-07-04 1990-01-11 Siemens Ag Justiervorrichtung und verfahren zum justieren eines roboterarms zum einsatz in automatisierten produktionsbereichen insbesondere in der halbleitertechnik
DE3920035A1 (de) * 1988-07-04 1990-01-11 Kuttler Hans Juergen Vorrichtung zum vereinzeln und transportieren von werkstuecken
US5470420A (en) * 1992-07-31 1995-11-28 Eastman Kodak Company Apparatus for label application using Bernoulli Effect
AT1527U1 (de) * 1995-07-12 1997-06-25 Sez Semiconduct Equip Zubehoer Träger für scheibenförmige gegenstände, insbesondere siliziumscheiben
WO1997003456A1 (de) * 1995-07-12 1997-01-30 Sez Semiconductor-Equipment Zubehör Für Die Halbleiterfertigung Gesellschaft Mbh Träger für scheibenförmige gegenstände, insbesondere siliziumscheiben
US6455186B1 (en) 1998-03-05 2002-09-24 Black & Decker Inc. Battery cooling system
US6095582A (en) * 1998-03-11 2000-08-01 Trusi Technologies, Llc Article holders and holding methods
AU6753598A (en) * 1998-03-13 1999-09-27 Ab Initio Vacuum ejector with a number of suction cups
GB9822153D0 (en) * 1998-10-09 1998-12-02 Labflax Systems Ltd Apparatus for applying labels to moving articles
JP4391655B2 (ja) 2000-02-22 2009-12-24 インターナショナル・ビジネス・マシーンズ・コーポレーション エアピンセット
US7007942B1 (en) 2003-03-25 2006-03-07 Wps Industries, Inc. Panel handling apparatus
JP3703464B2 (ja) * 2003-04-04 2005-10-05 キヤノン株式会社 マニピュレータ
WO2010108462A1 (de) * 2009-03-26 2010-09-30 Jonas & Redmann Automationstechnik Gmbh Bernoulli-greifervorrichtung mit mindestens einem bernoulli-greifer
DE102009047086A1 (de) * 2009-11-24 2011-05-26 J. Schmalz Gmbh Druckluftbetriebener Greifer
US9490156B2 (en) * 2013-05-23 2016-11-08 Asm Technology Singapore Pte Ltd Transfer device for holding an object using a gas flow
EP3261424B1 (en) * 2015-02-17 2021-03-24 FUJI Corporation Suction attachment nozzle
JP6651327B2 (ja) * 2015-10-15 2020-02-19 東レエンジニアリング株式会社 シート材のエアフロート装置
JP2018122381A (ja) * 2017-01-31 2018-08-09 ブラザー工業株式会社 部品保持装置
US12435284B2 (en) * 2021-01-11 2025-10-07 China Petroleum & Chemical Corporation Fluidized catalytic conversion method for producing low-carbon olefins from hydrocarbons

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3411770A (en) * 1966-08-04 1968-11-19 Sperry Rand Corp Sheet separator
US3523706A (en) * 1967-10-27 1970-08-11 Ibm Apparatus for supporting articles without structural contact and for positioning the supported articles
US3539216A (en) * 1968-01-11 1970-11-10 Sprague Electric Co Pickup device
US3648853A (en) * 1970-04-03 1972-03-14 Erie Eng Co Vacuum work pick-up attachment for work device
JPS5420963Y2 (enExample) * 1974-07-16 1979-07-27
GB1513444A (en) * 1974-09-06 1978-06-07 Chemical Reactor Equip As Pick-up devices for lifting and moving semiconductor wafers
DE2524916C3 (de) * 1975-06-05 1978-11-09 Reifenhaeuser Kg, 5210 Troisdorf Greifvorrichtung für feste Körper
US4029351A (en) * 1976-06-02 1977-06-14 International Business Machines Corporation Bernoulli pickup head with self-restoring anti-tilt improvement
US4185814A (en) * 1977-12-12 1980-01-29 International Business Machines Corporation Pick up and placement head for green sheet and spacer
US4257637A (en) * 1979-09-28 1981-03-24 International Business Machines Corporation Contactless air film lifting device
JPS56156580U (enExample) * 1980-04-18 1981-11-21
JPS58141536A (ja) * 1982-02-17 1983-08-22 Sanyo Electric Co Ltd 半導体ウエハ−の吸着ヘツド

Also Published As

Publication number Publication date
EP0109080B1 (en) 1987-07-22
EP0109080A1 (en) 1984-05-23
US4474397A (en) 1984-10-02
JPS5992545A (ja) 1984-05-28
DE3372681D1 (en) 1987-08-27

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