DE3372681D1 - Pick-up head for moving a sheet of material - Google Patents

Pick-up head for moving a sheet of material

Info

Publication number
DE3372681D1
DE3372681D1 DE8383111346T DE3372681T DE3372681D1 DE 3372681 D1 DE3372681 D1 DE 3372681D1 DE 8383111346 T DE8383111346 T DE 8383111346T DE 3372681 T DE3372681 T DE 3372681T DE 3372681 D1 DE3372681 D1 DE 3372681D1
Authority
DE
Germany
Prior art keywords
pick
sheet
head
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383111346T
Other languages
English (en)
Inventor
Javathu Kuttikaran Hassan
John Angelo Paivanas
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of DE3372681D1 publication Critical patent/DE3372681D1/de
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Load-Engaging Elements For Cranes (AREA)
DE8383111346T 1982-11-16 1983-11-14 Pick-up head for moving a sheet of material Expired DE3372681D1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/442,206 US4474397A (en) 1982-11-16 1982-11-16 Pick-up head utilizing aspirated air flow

Publications (1)

Publication Number Publication Date
DE3372681D1 true DE3372681D1 (en) 1987-08-27

Family

ID=23755925

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383111346T Expired DE3372681D1 (en) 1982-11-16 1983-11-14 Pick-up head for moving a sheet of material

Country Status (4)

Country Link
US (1) US4474397A (de)
EP (1) EP0109080B1 (de)
JP (1) JPS5992545A (de)
DE (1) DE3372681D1 (de)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5067762A (en) * 1985-06-18 1991-11-26 Hiroshi Akashi Non-contact conveying device
DE3536432A1 (de) * 1985-10-12 1987-04-16 Telefunken Electronic Gmbh Beruehrungslose haltevorrichtung fuer halbleiterscheiben
DE3822597A1 (de) * 1988-07-04 1990-01-11 Siemens Ag Justiervorrichtung und verfahren zum justieren eines roboterarms zum einsatz in automatisierten produktionsbereichen insbesondere in der halbleitertechnik
DE3920035A1 (de) * 1988-07-04 1990-01-11 Kuttler Hans Juergen Vorrichtung zum vereinzeln und transportieren von werkstuecken
US5470420A (en) * 1992-07-31 1995-11-28 Eastman Kodak Company Apparatus for label application using Bernoulli Effect
AT1527U1 (de) * 1995-07-12 1997-06-25 Sez Semiconduct Equip Zubehoer Träger für scheibenförmige gegenstände, insbesondere siliziumscheiben
WO1997003456A1 (de) * 1995-07-12 1997-01-30 Sez Semiconductor-Equipment Zubehör Für Die Halbleiterfertigung Gesellschaft Mbh Träger für scheibenförmige gegenstände, insbesondere siliziumscheiben
US6455186B1 (en) 1998-03-05 2002-09-24 Black & Decker Inc. Battery cooling system
US6095582A (en) * 1998-03-11 2000-08-01 Trusi Technologies, Llc Article holders and holding methods
ATE305434T1 (de) * 1998-03-13 2005-10-15 Pronomic Ab Vakuum ejektor mit einer anzahl von saugnäpfen
GB9822153D0 (en) * 1998-10-09 1998-12-02 Labflax Systems Ltd Apparatus for applying labels to moving articles
JP4391655B2 (ja) 2000-02-22 2009-12-24 インターナショナル・ビジネス・マシーンズ・コーポレーション エアピンセット
US7007942B1 (en) 2003-03-25 2006-03-07 Wps Industries, Inc. Panel handling apparatus
JP3703464B2 (ja) * 2003-04-04 2005-10-05 キヤノン株式会社 マニピュレータ
WO2010108462A1 (de) * 2009-03-26 2010-09-30 Jonas & Redmann Automationstechnik Gmbh Bernoulli-greifervorrichtung mit mindestens einem bernoulli-greifer
DE102009047086A1 (de) * 2009-11-24 2011-05-26 J. Schmalz Gmbh Druckluftbetriebener Greifer
SG10201402399RA (en) * 2013-05-23 2014-12-30 Asm Tech Singapore Pte Ltd A transfer device for holding an object using a gas flow
CN107211571B (zh) * 2015-02-17 2019-11-22 株式会社富士 吸嘴
JP6651327B2 (ja) * 2015-10-15 2020-02-19 東レエンジニアリング株式会社 シート材のエアフロート装置
JP2018122381A (ja) * 2017-01-31 2018-08-09 ブラザー工業株式会社 部品保持装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3411770A (en) * 1966-08-04 1968-11-19 Sperry Rand Corp Sheet separator
US3523706A (en) * 1967-10-27 1970-08-11 Ibm Apparatus for supporting articles without structural contact and for positioning the supported articles
US3539216A (en) * 1968-01-11 1970-11-10 Sprague Electric Co Pickup device
US3648853A (en) * 1970-04-03 1972-03-14 Erie Eng Co Vacuum work pick-up attachment for work device
JPS5113308B2 (de) * 1972-07-03 1976-04-27
JPS5420963Y2 (de) * 1974-07-16 1979-07-27
GB1513444A (en) * 1974-09-06 1978-06-07 Chemical Reactor Equip As Pick-up devices for lifting and moving semiconductor wafers
DE2524916C3 (de) * 1975-06-05 1978-11-09 Reifenhaeuser Kg, 5210 Troisdorf Greifvorrichtung für feste Körper
US4029351A (en) * 1976-06-02 1977-06-14 International Business Machines Corporation Bernoulli pickup head with self-restoring anti-tilt improvement
US4185814A (en) * 1977-12-12 1980-01-29 International Business Machines Corporation Pick up and placement head for green sheet and spacer
US4257637A (en) * 1979-09-28 1981-03-24 International Business Machines Corporation Contactless air film lifting device
JPS56156580U (de) * 1980-04-18 1981-11-21
JPS58141536A (ja) * 1982-02-17 1983-08-22 Sanyo Electric Co Ltd 半導体ウエハ−の吸着ヘツド

Also Published As

Publication number Publication date
EP0109080B1 (de) 1987-07-22
JPH0353777B2 (de) 1991-08-16
EP0109080A1 (de) 1984-05-23
JPS5992545A (ja) 1984-05-28
US4474397A (en) 1984-10-02

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee