SG10201402399RA - A transfer device for holding an object using a gas flow - Google Patents

A transfer device for holding an object using a gas flow

Info

Publication number
SG10201402399RA
SG10201402399RA SG10201402399RA SG10201402399RA SG10201402399RA SG 10201402399R A SG10201402399R A SG 10201402399RA SG 10201402399R A SG10201402399R A SG 10201402399RA SG 10201402399R A SG10201402399R A SG 10201402399RA SG 10201402399R A SG10201402399R A SG 10201402399RA
Authority
SG
Singapore
Prior art keywords
transfer device
outlet conduits
holding
housing surface
gas
Prior art date
Application number
SG10201402399RA
Inventor
Sathish Kumar Balakrishnan
Govindan Radhakrishnan Kumaresh
Wen Ge Tu
Hongliang Lu
Lian Hok Tan
Original Assignee
Asm Tech Singapore Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asm Tech Singapore Pte Ltd filed Critical Asm Tech Singapore Pte Ltd
Publication of SG10201402399RA publication Critical patent/SG10201402399RA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/0023—Gripper surfaces directly activated by a fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum

Abstract

Abstract A transfer device for holding an object using gas a flow Disclosed is a transfer device for holding an object. The transfer device comprises: i) a 5 housing having a housing surface; ii) at least one inlet conduit having an inlet for introducing a gas into the at least one inlet conduit; iii) a plurality of sets of outlet conduits, each set of outlet conduits being in fluid communication with the at least one inlet conduit and having a plurality of outlets for directing the gas out of the outlet conduits. In particular, the respective outlets of the sets of outlet conduits are arranged 10 in a direction along the housing surface and away from a centre region relative to the respective sets of outlet conduits, so that a laminar gas flow that is flows along the housing surface generates a pressure differential which creates a force towards the centre region to hold the object against the housing surface. A gang picker is also disclosed. 15 [FIG. 2a] 10
SG10201402399RA 2013-05-23 2014-05-16 A transfer device for holding an object using a gas flow SG10201402399RA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201361826719P 2013-05-23 2013-05-23

Publications (1)

Publication Number Publication Date
SG10201402399RA true SG10201402399RA (en) 2014-12-30

Family

ID=51935494

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201402399RA SG10201402399RA (en) 2013-05-23 2014-05-16 A transfer device for holding an object using a gas flow

Country Status (4)

Country Link
US (1) US9490156B2 (en)
CN (1) CN104176497B (en)
SG (1) SG10201402399RA (en)
TW (1) TWI541182B (en)

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3438668A (en) * 1965-08-26 1969-04-15 Gen Electric Contactless lifter
US3523706A (en) * 1967-10-27 1970-08-11 Ibm Apparatus for supporting articles without structural contact and for positioning the supported articles
DE2501487C2 (en) * 1975-01-16 1976-10-07 Hoechst Ag REMOVAL DEVICE FOR A SHEET-SHAPED COPY CARRIER
US4474397A (en) * 1982-11-16 1984-10-02 International Business Machines Corporation Pick-up head utilizing aspirated air flow
US5080549A (en) * 1987-05-11 1992-01-14 Epsilon Technology, Inc. Wafer handling system with Bernoulli pick-up
GB0522552D0 (en) * 2005-11-04 2005-12-14 Univ Salford The Handling device
JP4740414B2 (en) * 2007-04-24 2011-08-03 東京エレクトロン株式会社 Substrate transfer device
JP2008273729A (en) * 2007-05-07 2008-11-13 Myotoku Ltd Floating unit
JP4616873B2 (en) * 2007-09-28 2011-01-19 東京エレクトロン株式会社 Semiconductor manufacturing apparatus, substrate holding method, and program
JP2009119562A (en) * 2007-11-15 2009-06-04 Izumi Akiyama Noncontact type conveying holding tool, and noncontact type conveying holding device
US20110148128A1 (en) * 2009-12-23 2011-06-23 Memc Electronic Materials, Inc. Semiconductor Wafer Transport System
KR20110090027A (en) * 2010-02-02 2011-08-10 삼성모바일디스플레이주식회사 Substrate transfer robot
TW201222715A (en) * 2010-07-02 2012-06-01 Fortrend Engineering Corp Thin substrate, mass-transfer bernoulli end-effector
JP5345167B2 (en) * 2011-03-18 2013-11-20 東京エレクトロン株式会社 Substrate holding device

Also Published As

Publication number Publication date
TWI541182B (en) 2016-07-11
CN104176497B (en) 2017-01-18
US9490156B2 (en) 2016-11-08
CN104176497A (en) 2014-12-03
US20140348624A1 (en) 2014-11-27
TW201446629A (en) 2014-12-16

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