JP2009119562A - Noncontact type conveying holding tool, and noncontact type conveying holding device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a noncontact type conveying holding tool and a noncontact type conveying holding device. <P>SOLUTION: This noncontact type conveying holding tool 10 has a body 11 having a cylindrical space part 12 with a closed one end and the opened other end in its inside and having a cylindrical part 13 and a bottom part 14, a cylindrical body inner circumferential face 15 formed in the cylindrical part 13 of the body 11 and constituting a side face of the cylindrical space part 12, a flat body bottom part 16 formed in the bottom part 14 of the body and constituting a bottom face of the cylindrical space part 12, a flat body open-side end face 17 formed in an open-side end part of the cylindrical space part 12 in the body, and one or more of gas introducing ports 18 formed in a body bottom face side end part of the body inner circumferential face 15 and for introducing gas into the cylindrical space part 12 with a tangential component, negative pressure is generated in the cylindrical space part 12 when supplying the gas into the cylindrical space part 12, and an object to be conveyed is thereby suction-held. The object to be conveyed is held noncontactly, since a gas flow-out clearance exists between the object to be conveyed and the body open-side end face 17. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a non-contact type conveyance holder that holds and conveys an object to be conveyed in a contact state, and a non-contact type conveyance holding device in which the non-contact type conveyance holder is assembled.

As shown in FIG. 16, Japanese Unexamined Patent Application Publication No. 2004-059660 discloses a body 2 having a conical space portion 3 having one end closed on the inside and the other end opened, a side wall portion 4 and a bottom portion 5, A conical body inner peripheral surface 6 formed on the side wall portion and constituting the side surface of the conical space portion; a flat body bottom surface 7 formed on the bottom wall of the body 2 and constituting the bottom surface of the conical space portion 3; A flat body opening side end surface 8 formed at the opening side end of the conical space portion and a conical space portion 3 formed on the outer peripheral portion of the body bottom surface 7 radially outward and obliquely with respect to the axial direction. A non-contact type conveyance holder 1 having a gas introduction port 9 for introducing a gas inclined at an angle is disclosed.
In the non-contact type conveyance holder 1, the gas is introduced into the conical space portion 3 in the radial direction through the gas introduction port 9, and the introduced gas passes through the gap G between the body opening side end face 8 and the conveyed object 50. Let it flow outward in the radial direction. The gas is dragged away by the air in the central portion of the conical space portion 3, thereby forming a negative pressure V in the central portion of the conical space portion 3, and sucking and holding the object to be transported 50 at a negative pressure. In this suction holding, a gap G for gas outflow exists between the body opening side end face 8 and the transferred object 50, so that the transferred object 50 is not in contact with the non-contact type conveying holder 1.
A non-contact type transport holding device is configured by attaching the non-contact type transport holder 1 to a transport robot.
JP 2004-059660 A

The prior art shown in FIG. 16 has the following problems.
(I) Since the gas is introduced into the conical space portion 3 in the radial direction, a sufficient vortex flow cannot be generated in the conical space portion 3. As a result, the negative pressure formed at the central portion of the conical space 3 is weak, and the holding force for sucking and holding the object 50 is relatively small. Therefore, it is not suitable for non-contact conveyance of heavy objects.
(Ii) Since the diameter increases as the conical space portion 3 moves away from the bottom portion 5, a negative pressure region formed in the central portion in the radial direction of the conical space portion 3 and in the vicinity of the object to be conveyed Compared with the negative pressure region in the vicinity of the bottom, the pressure is expanded in the radial direction, the negative pressure is weak, and the holding force for sucking and holding the object to be conveyed is relatively small.
(iii) Since the gas introduced into the conical space portion 3 flows in the radial direction along the tapered body inner peripheral surface 6, the gas hits the holding member facing surface 50a of the conveyed object 50 with an axial component, A separation force F is applied to the conveyed object 50 in a direction away from the holder 1. This force F is smaller than the negative pressure suction force Fv generated in the conical space portion 3. However, since the separation force F of the axial component of the gas flow force and the suction holding force Fv act on the transported object 50 in opposite directions, a minute gap G between the body opening side end face 8 and the transported object 50 is present. May change in vibration, and the holding force may become unstable.
(Iv) Since the central axis of the negative pressure region generated in the central portion in the conical space portion 3 is not positioned in the radial direction, the object 50 to be conveyed is sheared with respect to the non-contact type conveyance holder 1 (non- If the position shifts (in a direction perpendicular to the axial direction of the contact-type transport holder 1), the force (radial alignment force) for returning the transported object 50 to the original position does not work or even if it works, The original position cannot be returned, and there is no radial alignment performance or the radial alignment performance is low even if there is some.
(V) When the amount of gas introduced into the conical space portion 3 is increased in order to increase the suction holding force Fv, the conveyed object separation force F due to the axial component of the gas flow increases in proportion thereto, and the holding force increases. Since it becomes unstable, the negative pressure cannot be increased while maintaining the stability of the holding force.

The first object of the present invention is to provide a non-contact type conveyance holder and a non-contact type that have a larger holding force for sucking and holding an object to be conveyed than that of a conventional apparatus and can solve the above problems (i) and (ii). It is in providing a conveyance holding device.
In addition to the first object, the second object of the present invention is a non-contact type conveying and holding that can solve the above-mentioned problem (iii) in which the holding force for sucking and holding the object to be conveyed is more stable than that of the conventional apparatus. It is in providing a tool and a non-contact type conveyance holding device.
A third object of the present invention is to provide a non-contact type transport holding tool and a non-contact type transport holding device that can solve the above-mentioned problem (iv) in addition to the first purpose, which has alignment performance. is there.
The fourth object of the present invention is to increase the object suction holding force due to negative pressure while maintaining the stability of the holding force for sucking and holding the object to be conveyed, and to improve the stationary accuracy. An object of the present invention is to provide a non-contact type conveyance holder and a non-contact type conveyance holding device that can solve the problem (v).

The non-contact type conveyance holder and non-contact type conveyance holding device of the present invention that achieve the above object are as follows.
(1) a body having a cylindrical space portion with one end closed on the inside and the other end opened, and a cylindrical portion and a bottom;
A cylindrical body inner circumferential surface that is formed in the cylindrical portion of the body and forms a side surface of the cylindrical space portion;
A flat body bottom formed on the bottom of the body and constituting the bottom of the cylindrical space;
A flat body opening side end surface formed at the opening side end of the cylindrical space of the body;
One or more gas inlets formed at the end of the body inner peripheral surface on the bottom side of the body and introducing gas into the cylindrical space with a tangential component;
A gas supply passage connected to the gas inlet;
A non-contact type transport holding tool.
(2) The non-contact type conveyance holder according to (1), wherein the axial center of the gas introduction port is parallel to the bottom surface of the body or inclined toward the open end of the cylindrical space.
(3) A non-contact type conveyance holding device according to (1) or (2), wherein a columnar convex portion extending in a direction away from the bottom portion is formed perpendicularly to the bottom portion at a center portion of the body. Ingredients.
(4) The non-contact conveyance holder according to any one of (1) to (3), wherein a height of the convex portion is equal to or less than a distance between the body bottom surface and the body opening side end surface.
(5) The height of the convex portion is equal to or less than the distance between the bottom surface of the body and the end surface on the body opening side, and the convex portion is a suction passage for sucking a part of the gas in the cylindrical space portion. The non-contact type conveyance holder according to (1) or (2), which has a hollow portion.
(6) The non-contact type transport holder according to (5), wherein the convex portion has an end surface at a tip, and has at least one groove portion communicating the hollow portion and the cylindrical space portion on the end surface of the convex portion.
(7) The non-contact type conveyance holder according to any one of (1) to (6), wherein a plurality of the gas introduction ports are provided.
(8) The non-contact type conveyance holder according to any one of (1) to (7), wherein the gas introduction ports are provided symmetrically with respect to the axis of the cylindrical space portion.
(9) A tapered surface having a diameter that increases toward the body opening side end surface is provided between the body inner peripheral surface and the body opening side end surface, and the body inner peripheral surface and the body opening side The non-contact type conveyance holder according to any one of (1) to (8), which is connected to the end surface via the tapered surface.
(10) A non-contact type in which one or more of the non-contact type conveyance holders according to any one of (1) to (9) are arranged on a transported object holding surface of a non-contact type conveyance holding device. Transport holding device.
(11) The non-contact type conveyance holding device is a conveyance robot, and the conveyance object holding surface is a surface of a hand substitution plate attached to the tip of an arm of the conveyance robot instead of the hand (10 ) Non-contact type conveyance holding device.
(12) The non-contact type transport and holding device according to (10), wherein the non-contact type transport and holding device is a transport robot, and the object holding surface is a surface of a hand of the transport robot.
(13) The non-contact type conveyance holding device is a vacuum tweezers which is a handy type conveyance device, the conveyance object holding surface is a conveyance object holding surface of vacuum tweezers, and the non-contact type conveyance holding device is The non-contact type conveyance holding device according to (10), which is provided on the conveyance object holding surface of the vacuum tweezers instead of the suction port.
(14) The non-contact type conveyance holding device includes a carriage that is reciprocated and disposed on a conveyance path of an object to be conveyed, and a slider that is movable on the carriage in a direction orthogonal to the reciprocation direction of the carriage; (10) The non-contact type conveyance holding device according to (10), wherein the conveyance object holding surface is a top surface of the hand.
(15) The non-contact type conveyance holding device is a robot hand, and a plurality of the non-contact type conveyance holding tools are disposed on a transfer object holding surface of the robot hand, and the plurality of partial non-contact type When the suction of the transport holder is turned on, the transported object is rotated only by the air flow, and when the suction of all the non-contact transport holders is turned on, the rotation of the transported object is stopped ( 10) The non-contact type conveyance holding apparatus described in the above.
(16) The non-contact type conveyance holding device includes a rotation driving unit, a rotary table rotated by the rotation driving unit, and a sensor that reads a notch provided in the conveyance target, and the conveyance target holding surface Is a transported object holding surface of the rotary table, and the non-contact transport holding device is disposed on the transported object holding surface of the rotary table.

According to the non-contact type conveyance holder of the above (1), (7), (8) and the non-contact type conveyance holding device of the above (10) to (16), the body bottom surface side end portion of the inner peripheral surface of the body Since the gas introduction port for introducing the gas with a tangential component is provided in the formed cylindrical space portion, a swirling flow can be generated in the cylindrical space portion. The pressure can be increased. As a result, the holding force for sucking and holding the object to be conveyed can be increased as compared with the conventional apparatus. Thus, the problem (i) is solved, and the first object of the present invention is achieved.
Further, since the body has a cylindrical space portion (not conical) on the inner side, the diameter does not increase as the cylindrical space portion moves away from the bottom portion, and the negative pressure region does not expand in the radial direction. As a result, the negative pressure formed near the object to be conveyed at the radial center of the cylindrical space is stronger than in the case of the conical space, and the holding force for sucking and holding the object to be conveyed is the conical space. It becomes stronger than the case. Thus, the problem (ii) is solved and the first object of the present invention is achieved.

  According to the non-contact type conveyance holder of the above (2), (7), (8) and the non-contact type conveyance holding device of the above (10) to (16), the axis of the gas inlet is parallel to the bottom surface of the body. Or the swirl flow in the cylindrical space is parallel to the bottom surface of the body or is slanted to the open end of the cylindrical space, and the surface of the conveyed object The flow component orthogonal to is small. As a result, the separation force of the conveyed object from the non-contact type conveying holder due to the flow component perpendicular to the surface of the conveyed object of the gas flow is small, and the conveyed object holding performance by the suction force is stabilized. As a result, the above problem (iii) is solved, and the second object of the present invention is achieved.

  According to the non-contact type conveyance holder of the above (3) and (4) and the non-contact type conveyance holding device of the above (10) to (16), the bottom portion is perpendicular to the bottom portion at the center of the bottom portion of the body. Since the columnar convex portion extending in the direction away from the center is formed, the center position of the swirling flow in the cylindrical space portion becomes the convex center position on the bottom side, and is stabilized. When the object to be conveyed is displaced with respect to the non-contact type conveyance holder in the direction perpendicular to the axial direction of the non-contact type conveyance holder, the axial center of the swirling flow is inclined around the convex portion, and the negative pressure suction is performed. A component in a direction perpendicular to the axial direction of the conveying holder of the force gradient acts as a force for returning the conveyed object to the original position. As a result, a force for returning the negative pressure acting point of the conveyed object to the original position (position facing the convex portion) works, and radial alignment performance is generated. This achieves the third object of the present invention.

  According to the non-contact type conveyance holder of the above (5) and (6) and the non-contact type conveyance holding device of the above (10) to (16), the convex portion has a hollow portion that becomes a negative pressure passage. The negative pressure formed in the vicinity of the object to be conveyed at the center in the radial direction of the cylindrical space by the swirling flow of gas can be increased independently of the negative pressure formation by the swirling flow. By supplementing the suction from the hollow portion of the convex portion in order to increase the suction pressure, it is possible to improve the stationary accuracy of the object to be transported and to increase the speed of the stationary operation compared to the case where only the swirling flow of the introduced gas is used. As a result, while maintaining the stability of the holding force for sucking and holding the object to be conveyed by the swirling flow of the introduced gas, due to the negative pressure at the central portion in the radial direction of the cylindrical space formed by the negative pressure passage of the convex portion, The object suction holding force can be increased. This achieves the fourth object of the present invention.

  The configuration, operation, and effect of the embodiment of the non-contact type conveyance holder of the present invention will be described with reference to FIGS.

  As shown in FIGS. 1 to 6, the non-contact type transport holder 10 of the present invention has a cylindrical space portion 12 with one axial end closed and the other axial end open. 14, a cylindrical body inner peripheral surface 15 that forms the side surface of the cylindrical space portion 12 formed on the cylindrical portion 13 of the body 11, and a cylindrical space portion 12 that is formed on the bottom portion 14 of the body 11. A flat body bottom surface 16 constituting the bottom surface, a flat body opening side end surface 17 formed at the opening side end portion of the cylindrical space 12 of the body 11, and a body bottom surface side end portion of the body inner peripheral surface 15 are formed. The cylindrical space portion 12 has one or more gas introduction ports 18 for introducing a gas with a tangential component, and a gas supply passage 19 connected to the gas introduction port 18.

  The transported object 50 has a surface facing the body opening side end surface 17, and is in non-contact with the body opening side end surface 17 by the negative pressure generated in the cylindrical space portion 12. Suction hold.

  More specifically, when gas is introduced into the cylindrical space portion 12 of the non-contact type transport holder 10 from the gas introduction port 18, a swirl flow S is generated in the cylindrical space portion 12, and the cylindrical space portion 12 is filled with the swirl flow S. A negative pressure is generated at the center of the sheet, and the object 50 is sucked and held by the non-contact type conveyance holder 10 by this negative pressure. The swirl flow S in the cylindrical space portion 12 is discharged to the outside of the cylindrical space portion 12 through the gap G between the body opening side end surface 17 and the conveyed object 50. Due to the presence of the gap G, the object to be conveyed 50 is not in contact with the non-contact type conveyance holder 10. Further, since the gas flow in the cylindrical space portion 12 is the swirl flow S, when passing through the gap G, the gas flow is substantially parallel to the body opening side end face 17.

  The body inner peripheral surface 15 is parallel or substantially parallel to the axial center of the cylindrical space portion 12. Here, “substantially parallel” includes an inclination of ± 5 degrees or less with respect to the axial center of the cylindrical space portion 12. In the case of the inclination of ± 5 degrees or less, there is almost no effect of expanding and reducing the negative pressure region as in the case of the conical surface. The body bottom surface 16 is a flat surface that is orthogonal to the axial center of the cylindrical space portion 12 except for the central convex portion 20 described later.

The axis of the gas introduction port 18 is parallel to the bottom surface 16 of the body or inclined from the bottom surface 16 of the body toward the open end of the cylindrical space portion 12. This inclination is 10 degrees or less with respect to the bottom surface 16 of the body. The reason why the angle is 10 degrees or less is that if it exceeds 10 degrees, the separation force of the conveyed object 50 due to the axial component of the flow becomes so large that it cannot be ignored.
The gas inlet 18 opens into the cylindrical space 12 with a tangential component with respect to the cylindrical space 12. “With a tangential direction component” includes a case where it is introduced in an intermediate direction between the tangential direction and the radial direction. Further quantitatively, as shown in FIG. 2, the direction of the introduced gas flow E and the radial direction line R orthogonal to the direction of the introduced gas flow are equal to or smaller than the diameter of the cylindrical inner peripheral surface 15. They are orthogonal at a point J that is equal to or greater than the outer diameter of the convex portion 20 described in (1).

  One or more gas inlets 18 are provided. FIG. 2 shows a case where one gas inlet 18 is provided, and FIGS. 4 and 6 show a case where two gas inlets 18 are provided. The number of gas inlets 18 is preferably 3 or less. Most preferably, the number of gas inlets 18 is two. For example, the gas inlets 18 are provided symmetrically with each other with the center C of the convex portion as the center of symmetry.

  The height of the gas inlet 18 in the radial direction of the inlet (the diameter of the gas inlet 18) D is preferably equal to or less than the height H of the convex portion 20. Thereby, the gas introduced into the cylindrical space portion 12 from the gas inlet 18 effectively produces a swirl flow S with the convex portion 20 as the center of swirl. The swirl flow S is parallel to the bottom surface 16 of the body or inclined toward the open end side of the cylindrical space portion 12.

  At the center of the bottom portion 14 of the body 11 in the radial direction, a cylindrical convex portion 20 extending in the direction away from the bottom portion 14 is made perpendicular to the bottom portion 14 so that the axial center of the cylindrical space portion 12 coincides with the axial center. Is formed. The front end surface 21 of the convex portion 20 may be a flat surface parallel to the body bottom surface 16, or may be a curved surface convex toward the open end side of the cylindrical space portion 12.

  The height H of the convex portion 20 (the height of the convex portion 20 in the direction orthogonal to the body bottom surface 16) is the distance B between the body bottom surface 16 and the body opening side end surface 17 in the direction orthogonal to the body bottom surface 16. It is as follows. Therefore, there is always a gap Gc between the front end surface 21 of the convex portion 20 and the transported object 50. The height of the gap Gc is equal to or higher than the height of the gap G between the body opening side end face 17 and the conveyed object 50 (FIG. 3).

As shown in FIGS. 5 and 6, the convex portion 20 may have a hollow portion 22 that serves as a suction passage for sucking a part of the gas in the cylindrical space portion 12. The hollow portion 22 is connected to a negative pressure source by a negative pressure passage 25.
When the convex portion 20 has the hollow portion 22, a plurality of groove portions 23 that connect the hollow portion 22 and the cylindrical space portion 12 are formed on the tip surface 21 of the convex portion 20. The hollow portion 22 communicates with the suction device. Due to the presence of the groove portion 23, air is rapidly advanced to the hollow portion 22 through the groove portion 23 without the object to be transported 50 adsorbing and contacting the tip surface 21 of the convex portion 20.
When the convex portion 20 has the hollow portion 22, the negative pressure at the central portion in the cylindrical space portion 12 is less negative pressure generated by suction through the hollow portion 22 than in the case of only the negative pressure generated by the swirl flow S. As it is added, negative pressure increases.

  Between the body inner peripheral surface 15 and the body opening side end surface 17, a tapered surface 24 whose diameter increases as it approaches the body opening side end surface 17 is provided, and the body inner peripheral surface 15 and the body opening side end surface 17 Are connected to each other via a tapered surface 24. The tapered surface 24 is an inclined surface that intersects the body axis at an angle of 45 ° ± 10 °. Further, the length along the surface of the tapered surface 24 is preferably 5 to 15 mm.

Next, the operation and effect of the non-contact type conveyance holder 10 of the present invention will be described.
In the non-contact type conveyance holder 10 of the present invention, the gas introduction port 18 for introducing the gas with a tangential component into the cylindrical space portion 12 is provided at the end of the body inner peripheral surface 15 on the side of the body bottom surface 16. A swirl flow S can be generated in the cylindrical space portion 12, thereby generating a strong negative pressure (pressure lower than atmospheric pressure) in the central portion of the cylindrical space portion 12. Although the swirling flow is generated in both the outer peripheral portion and the inner peripheral portion in the cylindrical space portion 12, FIGS. 1 to 6 show only the swirling flow in the portion near the inner peripheral portion of the swirling flow. The negative pressure due to the swirl flow S is higher than the negative pressure due to the conventional radial flow. As a result, the holding force for sucking and holding the conveyed object 50 by the negative pressure V becomes larger than that of the conventional apparatus. A positive pressure P (pressure higher than atmospheric pressure) acts on the gap G between the body opening side end surface 17 and the object to be conveyed 50, but the object 50 suction force due to the negative pressure V is applied to the gap G. Since the to-be-conveyed object 50 separation force by the working positive pressure P is larger, the to-be-conveyed object 50 is sucked and held by the non-contact type conveying holder 10. Since there is a gap through which gas flows out from the cylindrical space portion 12 between the body opening side end surface 17 and the object to be conveyed 50, the object to be conveyed 50 is not in contact with the end surface of the body opening side end surface 17. . Due to the non-contact, the transported object 50 does not come into contact with the non-contact transport holder 10 and is not damaged.

  This negative pressure suction conveyance is performed regardless of whether the object 50 is positioned in a horizontal state above the non-contact type conveyance holder 10 or in a horizontal state below the non-contact type conveyance holder 10. It works even in a vertical or oblique state. As a result, not only can the transported object 50 be transported in a horizontal posture, but also the transported object 50 can be transported at an arbitrary angle including a vertical posture, and can be reversely transported.

  Further, since the body 11 has the cylindrical space portion 12 (not conical) on the inner side, the diameter does not increase as the cylindrical space portion 12 moves away from the bottom portion 14, and the negative pressure region extends in the radial direction. Does not spread. As a result, the negative pressure formed in the central portion in the radial direction of the cylindrical space portion 12 in the vicinity of the object to be conveyed is stronger than in the case of the conical space portion, and the holding force for sucking and holding the object to be conveyed 50 is conical. It is stronger than in the case of space.

  Further, since the axis of the gas introduction port 18 is parallel to the bottom surface 16 of the body or inclined at an angle of 10 degrees or less toward the open end side of the cylindrical space portion, the swirl flow S in the cylindrical space portion 12 is the body flow. It is parallel to the bottom surface 16 or inclined toward the open end side of the cylindrical space portion 12. Therefore, the flow component orthogonal to the surface 50a of the swirling flow S to be conveyed 50 facing the non-contact type conveyance holder 10 is small. As a result, the separation force of the transported object 50 from the non-contact type transport holder 10 due to the flow component orthogonal to the surface 50a of the transported object 50 is small, and the negative suction force generated by the swirling flow S is small. The performance of holding the object to be conveyed is stabilized.

  In the non-contact type conveyance holder 10, the fluid that strikes the surface 50a of the object to be conveyed 50 is in a direction along the surface 50a and is continuous. In addition, horizontal shift and vertical shift are also greatly reduced. As a result, the conveyance accuracy, positioning accuracy and stationary accuracy required at the time of conveyance become extremely high, and noise (noise) is greatly reduced.

  Since the columnar convex part 20 extending in the direction away from the bottom part 14 perpendicular to the bottom part 14 is formed at the center part of the body bottom part 14, the center position of the swirling flow S in the cylindrical space part 12 is It becomes the center position of the convex part 20 on the bottom side and stabilizes. And if the to-be-conveyed object 50 shifts | deviates to the direction orthogonal to the axial direction of the non-contact-type conveyance holder 10 with respect to the non-contact-type conveyance holder 10, the axial center of the swirl | vortex flow S will protrude the convex part 20 of the bottom part 14. A component in the direction perpendicular to the axial direction of the conveyance holder 10 that is inclined about the center and has an inclination of the negative pressure suction force V acts as a force for returning the conveyed object 50 to the original position. As a result, a force is exerted to return the negative pressure acting point of the conveyed object 50 to the original position (position facing the convex part 20), and alignment performance (the center of the conveyed object 50 faces the convex part 20). Performance to return to the position) occurs. This achieves the third object of the present invention.

  Moreover, when the convex part 20 has the hollow part 22 used as a negative pressure passage, the negative pressure formed in the hollow part top surface 21 vicinity in the cylindrical space part 12 by the hollow part 22 is the swirling flow S of introduction gas. Thus, the negative pressure formed in the central portion in the radial direction of the cylindrical space portion 12 in the immediate vicinity of the conveyed object 50 can be increased independently of the negative pressure formation by the swirling flow S. By supplementing the suction from the convex hollow portion 22, the suction negative pressure by the convex hollow portion 22 increases the stationary accuracy of the transported object 50, and the stationary operation for stopping the transported object 50 causes the introduction gas to rotate. Compared to the case of using only the flow S, it can be accelerated. As a result, the central portion in the radial direction of the cylindrical space portion 12 formed by the negative pressure passage 22 of the convex portion 20 while maintaining the stability of the holding force for sucking and holding the transported object 50 by the swirl flow S of the introduced gas. Due to the negative pressure, the object suction holding force can be increased. This achieves the fourth object of the present invention. Since the groove portion 23 is present, the conveyed object 50 is not attracted to the tip surface 21 of the convex portion 20. Without the groove 23, once the object 50 is in suction contact with the tip surface 21 of the convex part 20, the object 50 is not separated from the tip surface 21 of the convex part 20 unless the negative pressure is released.

Next, various non-contact type conveyance holding devices 30 to which the above-described non-contact type conveyance holder 10 is applied will be described with reference to FIGS.
The non-contact type conveyance holding device 30 has a flat conveyance target holding surface 31 that faces the flat surface 50a of the conveyance target 50, and the non-contact type conveyance holder 10 is placed on the conveyance target holding surface 31. One or more are arranged. Usually, the non-contact type conveyance holder 10 is arranged in a state of being embedded in the non-contact type conveyance holding device 30. The flat body opening side end surface 17 of the non-contact type transport holder 10 and the flat transported object holding surface 31 are in the same plane or substantially in the same plane, and the flat surface 50a of the transported object 50 is formed on the flat surface 50a. opposite. There is a gap G between the flat body opening side end surface 17 and the flat object holding surface 31 of the non-contact type conveying holder 10 and the flat surface 50a of the object 50 to be conveyed, and the object 50 to be conveyed 50 Is sucked and held in a non-contact manner and conveyed between the object holding surface 31 and the body opening side end surface 17. The conveyed object holding surface 31 of the non-contact type conveyance holding device 30 may be directed upward or obliquely upward, may be directed downward or obliquely downward, and may have a vertical posture. .

[Example 1 of non-contact type conveyance holding device 30]
As shown in FIGS. 7 and 8, the non-contact type conveyance holding device 30 is attached to the tip of the arm of a transfer robot (for example, a transfer robot using a six-axis general-purpose robot for transfer) instead of the hand. This is a hand substitute plate 30A. The transported object holding surface 31 is a surface of the hand substitute plate 30A that faces the transported object. One or more non-contact type conveyance holders 10 are arranged on the conveyance object holding surface 31.
The hand substitute plate 30A has a U-shaped portion in plan view.
The U-shaped portion of the hand substitute plate 30A has a shape similar to the outer shape of the object to be transported 50 in plan view and slightly larger than the outer shape of the object to be transported 50 (for example, circular when the outer shape of the object to be transported 50 is circular, However, it may be a rectangle or a square (which will be described below in the case of a circle) (reverse step), and the upper surface of the step serves as the transported object holding surface 31. The side surface of the step constitutes a position regulating surface 32 that regulates the position so that the conveyed object 50 is not displaced in a direction parallel to the conveyed object holding surface 31 by a predetermined amount or more. The position regulating surface 32 extends between the conveyed object holding surface 31 and the body opening side end surface 17 and is orthogonal to the conveyed object holding surface 31 and the body opening side end surface 17. Since the air from the gas supply passage 19 flows between the position regulating surface 32 and the transported object 50, the position regulating surface 32 and the transported object 50 are not in contact with each other.
The transported object 50 is a thin plate. When the transported object 50 is a semiconductor wafer, the thickness is usually 0.8 mm for a thickness wafer, 100 microns or less for a very thin wafer, and the diameter is, for example, 15 cm-30 cm.

  Gas is supplied to the non-contact type conveyance holder 10 through the gas supply passage 19. When the non-contact type conveyance holder 10 has the convex part 20 and the hollow part 22 is formed in the convex part 20, the hollow part 22 is connected to the negative pressure source through the negative pressure passage 25. The negative pressure source may be mounted on the robot 30 or may be provided separately from the robot 30. 7 and 8, IN represents gas supply, and OUT represents connection to a negative pressure source.

In the non-contact type conveyance holding device 30, the object to be conveyed 50 can be conveyed not only horizontally but also vertically and at an arbitrary angle. As a result, it is possible to significantly reduce the conveyance space, for example, to about one fifth, as compared with the conventional conveyance in which the conveyance posture of the object to be conveyed is fixed in one direction.
In addition, because of non-contact conveyance, the object to be conveyed 50 is not damaged, contamination due to contact can be prevented, and the yield of the final product can be greatly improved.

[Example 2 of non-contact type conveyance holding device 30]
7 and 8 used in Example 1 above are applied mutatis mutandis. As shown in FIGS. 7 and 8, the non-contact type conveyance holding device 30 is a hand 30B itself of a conveyance robot (for example, a conveyance robot using a six-axis general-purpose robot for conveyance). The transported object holding surface 31 is a surface of the hand 30 </ b> B itself of the transport robot 30 that faces the transported object. One or more non-contact type conveyance holders 10 are arranged on the conveyance object holding surface 31.
The hand 30B has a U-shaped portion in plan view.
The U-shaped portion of the hand 30B is provided with a circular step (retreating step) in a plan view, and the upper surface of the circular step is a transported object holding surface 31. The side surface of the circular step constitutes a position regulating surface 32 that regulates the position so that the circular object 50 is not displaced in a direction parallel to the object holding surface 31 by a predetermined amount or more. The position regulating surface 32 extends between the conveyed object holding surface 31 and the body opening side end surface 17 and is orthogonal to the conveyed object holding surface 31 and the body opening side end surface 17. Since the air from the gas supply passage 19 flows between the position regulating surface 32 and the transported object 50, the position regulating surface 32 and the transported object 50 are not in contact with each other.
Other configurations, operations, and effects are the same as those in Example 1 above.

[Example 3 of non-contact type conveyance holding device 30]
As shown in FIGS. 9 and 10, the non-contact type conveyance holding device 30 is a handy type conveyance device (referred to as vacuum tweezers 30 </ b> C). The transported object holding surface 31 is a transported object holding surface of the vacuum tweezers 30C. One or more non-contact type conveyance holders 10 are provided on the conveyance object holding surface 31 of the vacuum tweezers 30C instead of the suction port.

As shown in FIG. 9, the vacuum tweezers 30 </ b> C has a U-shaped portion 33 in a plan view, a bridge portion 34 extending over both legs of the U-shaped portion, and extends from the U-shaped portion 33 in the opposite direction to the U-shaped portion. Having a handle portion 35 (with this portion when holding vacuum tweezers 30C by hand), or having a U-shaped portion 33 (no bridge portion 34) and handle portion 35, or an I-shaped portion (U And a handle portion 35). The U-shaped portion 33 or the I-shaped portion of the vacuum tweezers 30C has a step (recessed step) having a shape slightly larger than the outer shape of the object to be conveyed in plan view (for example, circular, but may be square or rectangular) The upper surface of the circular step is a transported object holding surface 31. The side surface of the step constitutes a position regulating surface 32 that regulates the position so that the circular object 50 is not displaced in a direction parallel to the object holding surface 31 by a predetermined amount or more. The non-contact type conveyance holder 10 is disposed symmetrically on the left and right of the center line of the conveyed object holding surface 31. When the bridge portion 34 is present, the bridge portion 34 is also disposed at the center position of the bridge portion 34 that is the center position of the transported object holding surface 31.
The transported object 50 is a circular thin plate. When the object 50 is a semiconductor wafer, the thickness is usually 0.8 mm for a thickness wafer, 100 microns or less for a very thin wafer, and the diameter is, for example, 15-30 cm.

  Gas is supplied to the non-contact type conveyance holder 10 through the gas supply passage 19. When the non-contact type conveyance holder 10 has the convex portion 20 and the hollow portion 22 is formed in the convex portion 20, the hollow portion 22 is connected to a negative pressure source via a negative pressure passage (hose) 25. The In the figure, IN indicates gas supply, and OUT indicates gas suction to the negative pressure source.

In the non-contact type conveyance holding device 30, the object to be conveyed 50 can be conveyed not only horizontally but also vertically and at an arbitrary angle.
In addition, because of non-contact conveyance, the object to be conveyed 50 is not damaged, contamination due to contact can be prevented, and the yield of the final product can be greatly improved.

[Example 4 of non-contact type conveyance holding device 30]
As shown in FIGS. 11 and 12, the non-contact type conveyance holding device 30 is a shuttle type non-contact type conveyance holding device 30 </ b> D. The shuttle type non-contact type conveyance holding device 30 </ b> D is reciprocated by a motor, a cylinder, a linear motor, or the like arranged in the conveyance path of the object to be conveyed 50, and the carriage 36 is reciprocated on the carriage 36. The slider 37 is movable in a direction orthogonal to the moving direction and is moved by a motor, a cylinder, a linear motor, or the like, and a hand 38 (a member corresponding to the hand of Example 1-3) mounted on the slider 37. . The surface of the hand 38 facing the object to be conveyed 50 constitutes the object to be conveyed holding surface 31.
The carriage 36 reciprocates between the A position 39 and the B position 30 on the conveyance path (shuttle conveyance).
The slider 37 reciprocates between the A position and the machining position 41 in the direction orthogonal to the reciprocating direction of the carriage 36 at the A position 39, and the direction orthogonal to the reciprocating direction of the carriage 36 at the B position 40. In addition, the reciprocating motion is performed between the B position and the b machining position 42.
The slider 37 transports the transported object 50 supplied from the processing position 41 to the A position 39. The carriage 36 transports the transported object 50 from the A position 39 to the B position 40 along the shuttle path. The slider 37 transports the transported object 50 from the B position 40 to the b processing position 42. The transported object 50 is sequentially processed at the a processing position 41 and the b processing position 42. The transported object 50 is transported while being held by non-contact suction on the hand 38. The hand 38 can take a horizontal, vertical and oblique posture on the slider 37.

In the non-contact type conveyance holding device 30, the object to be conveyed 50 can be conveyed not only horizontally but also vertically and at an arbitrary angle.
In addition, because of non-contact conveyance, the object to be conveyed 50 is not damaged, contamination due to contact can be prevented, and the yield of the final product can be greatly improved.

[Example 5 of non-contact type conveyance holding device 30]
As shown in FIG. 13, the non-contact type conveyance holding device 30 includes a robot hand 30 </ b> E that can align the rotational direction of the object to be conveyed 50. The surface of the robot hand 30 </ b> E facing the object to be conveyed 50 constitutes the object to be conveyed holding surface 31. The configuration of the robot hand 30E may be the same as that of the robot hands 30A-30C of Example 1 to Example 3.
A plurality of non-contact type conveyance holders 10 are arranged on the object holding surface 31 of the robot hand 30E. The direction of the swirl flow in the cylindrical space portion 12 of the plurality of part (half) of the non-contact type transport holder 10 and the cylindrical space of the non-contact type transport holder 10 other than the part (the other half). The direction of the swirl flow in the section 12 is set in reverse by reversing the direction of the gas inlet 18. As a result, when the suction of the plurality of non-contact type transport holders 10 is turned on, the object to be transported 50 is only the outflow air current from the cylindrical space portion 12 of the non-contact type transport holder, and the non-contact type transport When the center of the holder 10 is rotationally driven and the suction of all the plurality of non-contact type transport holders 10 is turned on, the rotation of the transported object 50 is stopped.

  The robot hand 30 </ b> E is provided with a sensor 33 at a position above or below the outer peripheral edge of the object to be conveyed 50, and a notch 44 is formed at the outer peripheral edge of the object to be conveyed 50. When the transported object 50 is rotated and reaches the position of the sensor 43, the rotation of the transported object 50 is stopped and the transported object 50 is positioned in the rotation direction.

  Instead of the rotation of the object to be conveyed 50 by a motor as in the prior art, the object to be conveyed 50 can be rotated only by the air flow, and alignment in the rotation direction can be performed.

[Example 6 of non-contact type conveyance holding device 30]
As shown in FIGS. 14 and 15, the non-contact type conveyance holding device 30 includes an aligner 30 </ b> F that can be positioned and centered in the rotational direction. The aligner 30 </ b> F includes a rotation drive unit 45, a rotary table 46 rotated by the rotation drive unit 45, and a sensor 47 that reads a notch 48 provided in the conveyed object 50. A plurality of non-contact type conveyance holders 10 are provided on the upper surface of the rotary table 46, and the upper surface of the rotary table 46 and / or the body opening side end surface 17 of the non-contact type conveyance holder 10 is a conveyance object holding surface. 31 is constituted. In FIG. 15, the notch 48 may be an orientation flat. Further, the outer shape of the non-conveyed object 50 may be circular or may be other than circular.

  In Example 6, the object to be conveyed 50 is sucked and held by the non-contact type conveyance holder 10 on the upper surface of the rotation table 46 rotated by the rotation driving unit 45 and rotates together with the rotation table 46. When the notch 48 provided in the transported object 50 comes to the position of the sensor 47, the rotation of the rotary table 46 is stopped and the rotation of the transported object 50 is stopped. Thereby, positioning of the conveyed product 50 in the rotation direction can be performed. Sensors 47 are provided at two locations above the peripheral edge of the object to be conveyed 50 and spaced apart in the rotational direction. When the center axis of the notch 48 is extended at each sensor 47 position, the center axes of the two notches 48 intersect at the center of rotation of the object to be conveyed 50, so that the object 50 held by suction on the rotary table 46 rotates. You can also find the center. By comparing the obtained rotation center with the center of the rotary table 46, it is possible to determine whether or not the rotation center of the transported object 50 is located at the center of the rotary table 46.

In the non-contact type conveyance holding device 30, the object to be conveyed 50 can be conveyed not only horizontally but also vertically and at an arbitrary angle.
In addition, because of non-contact conveyance, the object to be conveyed 50 is not damaged, contamination due to contact can be prevented, and the yield of the final product can be greatly improved.

It is sectional drawing in case the non-contact-type conveyance holder of this invention provides one gas inlet. It is a top view of the non-contact-type conveyance holder of FIG. In the non-contact type conveyance holder of the present invention, it is a sectional view in the case where a plurality of gas inlets are provided and the convex part does not have a hollow part. It is a top view of the non-contact-type conveyance holder of FIG. In the non-contact type conveyance holder of the present invention, it is a sectional view in the case where a plurality of gas introduction ports are provided and the convex part has a hollow part. It is a top view of the non-contact-type conveyance holder of FIG. It is a top view of the non-contact type conveyance holding device (Example 1 or Example 2) which consists of a robot hand substitute plate or the robot hand itself to which the non-contact type conveyance holder of the present invention is mounted. It is sectional drawing of the non-contact-type conveyance holding device of FIG. It is a top view of a handy type non-contact type conveyance holding device (example 3) with which the non-contact type conveyance holder of the present invention was equipped. It is sectional drawing of the non-contact-type conveyance holding apparatus of FIG. It is a top view of a shuttle conveyance type non-contact type conveyance holding device equipped with a non-contact type conveyance holder of the present invention. It is a front view of the non-contact type conveyance holding device of FIG. It is a top view of the non-contact-type conveyance holding device which can carry out the rotation direction alignment of the to-be-conveyed object on the robot hand with which the non-contact-type conveyance holder of this invention was mounted | worn. It is a front view of the non-contact type conveyance holding device which can be rotated direction alignment and center position index of a to-be-conveyed object with which the non-contact type conveyance holder of the present invention was equipped. It is a top view of the non-contact-type conveyance holding device of FIG. It is sectional drawing of the non-contact-type conveyance holding apparatus disclosed by Unexamined-Japanese-Patent No. 2004-059660.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Non-contact-type conveyance holder 11 Body 12 Cylindrical space part 13 Cylindrical part 14 Bottom part 15 Body inner peripheral surface 16 Body bottom face 17 Body open | release side end surface 18 Gas introduction port 19 Gas supply passage 20 Convex part 21 Tip surface 22 Hollow part ( Negative pressure passage)
23 Groove 24 Tapered surface 25 Negative pressure passage 30, 30A, 30B, 30C, 30D, 30E, 30F Non-contact type conveyance holding device 31 Conveyed object holding surface 32 Position regulating surface 33 U-shaped portion 34 Bridge portion 35 Handle portion 36 Carriage 37 Slider 38 Hand 39 A position 40 B position 41 a machining position 42 b machining position 43 sensor 44 notch 45 rotation drive unit 46 rotary table 47 sensor 48 notch 50 surface 50a to be conveyed

Claims (16)

A body having a cylindrical space part with one end closed on the inside and the other end opened, and a cylindrical part and a bottom part;
A cylindrical body inner circumferential surface that is formed in the cylindrical portion of the body and forms a side surface of the cylindrical space portion;
A flat body bottom formed on the bottom of the body and constituting the bottom of the cylindrical space;
A flat body opening side end surface formed at the opening side end of the cylindrical space of the body;
One or more gas inlets formed at the end of the body inner peripheral surface on the bottom side of the body and introducing gas into the cylindrical space with a tangential component;
A gas supply passage connected to the gas inlet;
A non-contact type transport holding tool.   The non-contact type transport holder according to claim 1, wherein the axis of the gas introduction port is parallel to the bottom surface of the body or inclined toward the open end of the cylindrical space.   3. The non-contact type transport holder according to claim 1, wherein a columnar convex portion extending in a direction perpendicular to the bottom portion and extending away from the bottom portion is formed at a center portion of the bottom portion of the body.   The height of the said convex part is below the distance between the said body bottom face and the said body open | release side end surface, The non-contact-type conveyance holder of any one of Claims 1-3.   The height of the convex part is equal to or less than the distance between the bottom surface of the body and the end surface on the body opening side, and the convex part is a hollow part that serves as a suction passage for sucking a part of the gas in the cylindrical space part. The non-contact type conveyance holder according to claim 1 or 2 which has these.   The non-contact type conveyance holder according to claim 5, wherein the convex portion has an end surface at a tip, and has at least one groove portion communicating the hollow portion and the cylindrical space portion on the end surface of the convex portion.   The non-contact type conveyance holder according to any one of claims 1 to 6, wherein a plurality of the gas introduction ports are provided.   The non-contact type conveyance holder according to any one of claims 1 to 7, wherein a pair of the gas introduction ports are provided symmetrically with respect to an axis of the cylindrical space portion.   Between the body inner peripheral surface and the body opening side end surface, a tapered surface whose diameter increases as it approaches the body opening side end surface is provided, and the body inner peripheral surface and the body opening side end surface are The non-contact type conveyance holder according to any one of claims 1 to 8, which is connected through the tapered surface. A non-contact type transport holding device having a transported object holding surface, wherein one or more non-contact type transport holding tools are disposed on the transported object holding surface,
The non-contact type transport holder is
A body having a cylindrical space part with one end closed on the inside and the other end opened, and a cylindrical part and a bottom part;
A cylindrical body inner circumferential surface that is formed in the cylindrical portion of the body and forms a side surface of the cylindrical space portion;
A flat body bottom formed on the bottom of the body and constituting the bottom of the cylindrical space;
A flat body opening side end surface formed at the opening side end of the cylindrical space of the body;
One or more gas inlets formed at the end of the body inner peripheral surface on the bottom side of the body and introducing gas into the cylindrical space with a tangential component;
A gas supply passage connected to the gas inlet;
A non-contact type conveyance holding device.   The said non-contact type conveyance holding device is a robot for conveyance, The said to-be-conveyed object holding surface is the surface of the hand substitute plate attached to the front-end | tip of the arm of a conveyance robot instead of a hand. Non-contact type conveyance holding device.   The non-contact type conveyance holding device according to claim 10, wherein the non-contact type conveyance holding device is a conveyance robot, and the object holding surface is a surface of a hand of the conveyance robot.   The non-contact type conveyance holding device is a vacuum tweezers which is a handy type conveyance device, the conveyance object holding surface is a conveyance object holding surface of vacuum tweezers, and the non-contact type conveyance holding device is a vacuum tweezers The non-contact type conveyance holding device according to claim 10, wherein the non-contact type conveyance holding device is provided on the conveyance object holding surface instead of the suction port.   The non-contact type conveyance holding device has a carriage that is reciprocated and disposed on a conveyance path of an object to be conveyed, and a slider that is movable on the carriage in a direction perpendicular to the reciprocation direction of the carriage. The non-contact type conveyance holding apparatus according to claim 10, wherein the conveyance object holding surface is an upper surface of the slider.   The non-contact type conveyance holding device is a robot hand, and a plurality of the non-contact type conveyance holding tools are arranged on a transfer object holding surface of the robot hand, and the plurality of non-contact type conveyance holding tools. The direction of the swirling flow in the cylindrical space portion and the direction of the swirling flow in the cylindrical space portion of the non-contact type conveyance holder other than the plurality of partial non-contact types are set in reverse, and the plurality of partial non-contact types When the suction of the transport holder is turned on, the object to be transported rotates only by the outflow air flow from the cylindrical space of the non-contact transport holder, and when the suction of all the non-contact transport holders is turned on The non-contact type conveyance holding apparatus according to claim 10, wherein rotation of the object to be conveyed is stopped.   The non-contact type conveyance holding device includes a rotation driving unit, a rotation table rotated by the rotation driving unit, and a sensor that reads a notch provided in the conveyance target, and the conveyance target holding surface is the rotation table. The non-contact type conveyance holding apparatus according to claim 10, wherein the non-contact type conveyance holder is disposed on a conveyance object holding surface of the rotary table.

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