TWI558637B - Transfer holder and transfer holding device - Google Patents

Description

Transfer holder and transfer holder Technical field

The present invention relates to a transfer holder and a transfer holding device.

Background technique

Heretofore, there has been known a transfer holder that holds a thin plate-shaped workpiece such as a semiconductor wafer or a glass substrate in a non-contact manner. Such a transfer holder uses a fluid as a medium and uses a white Null effect to generate a negative pressure to hold the workpiece.

Japanese Laid-Open Patent Publication No. 2009-119562 discloses a transfer holder that introduces a fluid such as wind gas into a cylindrical space formed in a main body from a gas introduction port, and generates a positive pressure and a negative pressure. Pressure.

Specifically, a swirling flow is generated in the cylindrical space, and the swirling flow passes through the gap between the holding surface and the workpiece in a positive pressure state. Further, a low pressure (negative pressure) field is formed in the central portion of the swirl by the white Null effect, and the transfer holder sucks the workpiece by the negative pressure. Accordingly, by maintaining a positive pressure in the gap between the holding surface and the working piece and a negative pressure formed in the central portion of the swirling flow, The space between the main body and the work piece, therefore, the transfer holder can carry the work piece by non-contact transfer.

Further, Japanese Laid-Open Patent Publication No. 2010-253658 discloses a transfer holder which introduces a fluid into a cylindrical space which is gradually reduced in diameter toward a holding surface, and generates a negative pressure by a white Null effect.

Summary of invention

However, the residence time of the swirl is short. Further, since the acceleration of the swirling flow is insufficient, the negative pressure cannot be generated unless the introduction speed of the gas supplied to the gas introduction port is raised.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a conveying and holding device and a conveying and holding device which can effectively generate a negative pressure.

A conveyance holder according to a first aspect of the present invention includes: a plate; a discharge port having a circular hole, a fluid introduction hole, and an inflow port, wherein the circular hole is formed on a surface of the plate, and the fluid is introduced into the hole and The circular holes are connected to be coaxial with the circular hole, and have a diameter larger than the circular hole. The flow inlet is formed in the inner peripheral wall of the fluid introduction circular hole, and the fluid is introduced into the circular hole in a direction slightly tangential to the fluid. And a fluid supply path formed on the plate material and supplying a fluid to the inflow port.

In this configuration, when a fluid such as wind gas supplied through the fluid supply path is introduced into the tangential direction of the fluid introduction circular hole from the discharge port of the discharge port, the fluid flows around the inner peripheral wall of the fluid introduction circular hole and flows. Therefore, The swirling flow is formed when the fluid is introduced into the circular hole. The swirl flows from the fluid introduction circular hole toward the circular hole while spiraling. Further, the swirling flow passes through the gap between the conveyed body and the surface of the plate material in a positive pressure state. Moreover, by the effect of the Cannulli effect, a low pressure (negative pressure) field is formed in the central portion of the swirling flow (near the circular hole and the axis of the fluid introduction circular hole), and the generated negative pressure is attracted from the circular hole of the discharge outlet. Being transported. Thereby, the predetermined distance between the sheet material and the object to be conveyed is maintained by the positive pressure between the surface of the sheet material and the conveyance body and the negative pressure at the center portion. Therefore, the conveyance holder can be conveyed and held by the non-contact method. body.

Here, the discharge port has a fluid introduction circular hole, and the fluid is introduced into the circle The hole is connected to the circular hole and formed to be coaxial with the circular hole, and the diameter is larger than the circular hole. Therefore, between the inner peripheral wall of the circular hole and the inner peripheral wall of the fluid introduction circular hole, the wall and the plate are formed. The surface is parallel to the falling surface.

With this drop surface, the fluid introduced from the inflow port does not flow into the circular hole and stays in the fluid introduction hole, and is sufficiently accelerated in the fluid introduction hole to constitute a high-speed swirl. Further, since the diameter of the circular hole is smaller than the diameter of the fluid introduction hole, the rotation speed of the high-speed swirling flow into the circular hole is increased, and a higher-speed swirling flow is formed and discharged from the circular hole of the discharge port.

Therefore, according to the conveyance holder according to the first aspect of the present invention, even if the introduction speed of the fluid supplied to the inflow port is not increased, a high-speed swirling flow can be generated, and a negative portion can be effectively generated in the central portion thereof. Pressure.

In the first embodiment, the height of the inflow port is equal to or lower than the height of the inner peripheral wall of the fluid introduction circular hole.

According to this configuration, the fluid introduced into the self-flow inlet can be made entirely Rotating inside the fluid introduction hole. Therefore, the swirl can be effectively generated.

In the transport holder according to the third aspect of the present invention, in the first In the aspect or the second aspect, the disk-shaped elastic member is provided on the surface of the plate material and surrounds the circumference of the circular hole.

According to this configuration, when the conveyed body moves toward the sheet side, It will come into contact with the elastic member before coming into contact with the sheet. At this time, the elastic member is elastically deformed to absorb the impact force of the conveyed body. Therefore, damage to the conveyed body or the sheet material can be suppressed. Moreover, the displacement of the conveyed body can be prevented by the frictional force of the elastic member.

In the transport holder according to the fourth aspect of the present invention, in the third In the aspect, the plate material includes the plurality of discharge ports in which the elastic members are provided, and each of the elastic members forms a fluid passage radially outward from an opening portion at a central portion of the elastic member.

According to this configuration, the swirling flow from the circular hole of the discharge port is discharged Most of the (fluid) is wound around the opening of the central portion of the elastic member, and is discharged to the outside from the gap between the surface of the conveyed body and the plate by the fluid passage. Accordingly, since the fluid passages are formed by the respective elastic members, the direction of the swirl flow discharged from the gap between the surface of the conveyed body and the sheet material to the outside can be defined.

In the transport holder according to the fifth aspect of the present invention, in the fourth aspect, each of the fluid passages is formed so as not to face each other.

According to this configuration, the swirling flows discharged from the respective fluid passages can be prevented from interfering with each other (collision), and the conveyed body can be conveyed by the non-contact method while maintaining the balance.

In the transport holder according to the sixth aspect of the present invention, in the fifth In the aspect, each fluid passage is a side end portion of the aforementioned plate material facing the nearest.

By this configuration, the swirling flow from each fluid passage can be Since the side end portion of the sheet is discharged toward the outer side of the sheet material, it is possible to suppress the swirling flow discharged from each fluid passage from remaining on the surface of the sheet material and to break the balance of the object to be conveyed.

A transport holding device according to a seventh aspect of the present invention includes: A transporting device according to a first aspect; a supply device that supplies a fluid to the fluid supply path; a suction mechanism that sucks air from a surface of the plate material; and a detecting mechanism that detects a change in a suction load of the suction mechanism.

According to this configuration, the presence or absence of the conveyed body can be detected based on the detection result of the change in the suction load by the detecting means.

Since the present invention has the above configuration, it is possible to provide a transport holder and a transport holding device capable of efficiently generating a negative pressure.

10‧‧‧Transporting holder

11‧‧‧Transporting robot

11A‧‧‧ Arm

11B‧‧‧ Board

12‧‧‧ base

13‧‧‧Transportation device

14‧‧‧ Upper part of the base

14A, 16A, 18A, 18B‧‧‧ bolt holes

16‧‧‧ Lower part of the base

18‧‧‧ body board

20‧‧‧ bolt

22‧‧‧ Nuts

23‧‧‧ positive pressure pump

24‧‧‧ positive pressure path

24A, 24B‧‧ bis points

26‧‧‧Connecting port for positive pressure

28‧‧‧Negative pressure connection port

29‧‧‧Negative pressure pump

30‧‧‧Negative pressure path

32‧‧‧ body base

32A‧‧‧Back

32B‧‧‧ Keep face

34‧‧‧ body cover

36‧‧‧ Negative pressure hole

38‧‧‧ Pressure Sensor

40‧‧‧Rubber body

42‧‧‧ openings

44‧‧‧ Fluid access

50‧‧‧Spray outlet

52‧‧‧round hole

52A, 54A, 60A, 62A‧‧‧ inner perimeter wall

54‧‧‧ fluid introduction round hole

56‧‧‧Inlet

58,64‧‧‧fall surface

60‧‧‧1st round hole

62‧‧‧2nd circular hole

D1, D2‧‧‧ gap

F1‧‧Swirl

F2‧‧‧Negative pressure flow

H1, h2‧‧‧ height

W‧‧‧Workpieces

Fig. 1(A) is a plan view showing a conveying holder according to an embodiment of the present invention, and Fig. 1(B) is a view showing the conveying holder shown in Fig. 1(A) in a front end direction of the arm, and partially showing an AA arrow. Sectional view.

Fig. 2 is a perspective view of a conveying and holding device according to an embodiment of the present invention.

Fig. 3 is a perspective view of the transport holder according to the embodiment of the present invention as seen obliquely from below.

Fig. 4 (A) is a perspective view of the discharge port of the transfer holder when the body cover is removed from the upper squint. Figure 4 (B) is a B-B arrow of the discharge port shown in Figure 4 (A) Surface map.

5(A) to 5(C) are views showing a modification of the transport holder shown in Fig. 4(B), particularly the discharge port.

Form for implementing the invention

Hereinafter, the conveyance holder and the conveyance holding device according to the embodiment of the present invention will be specifically described with reference to the drawings. In the drawings, members (components) having the same or corresponding functions are denoted by the same reference numerals, and the description thereof will be appropriately omitted.

As shown in Fig. 1 (A) and (B), the transport holder 10 is attached to the transport robot (for example, a 6-axis general-purpose robot is used for the transport robot for transport). The front end serves as the base 12 of the mounting portion.

The base body 12 is a base body upper portion 14 and a base body lower portion 16 having a long plate shape, and is formed in a structure in which one end portion of the base body upper portion 14 is sandwiched into one end portion of the body plate 18.

The body plate 18 has a body base 32 and a body cover 34. Further, the body base 32 is the short-term terminal that is sandwiched between the upper portion 14 of the base and the lower portion 16 of the base. On the other hand, the body cover 34 is sandwiched between the short upper portion of the upper portion 14 of the base and the lower portion 16 of the base. Therefore, a gap D1 is formed between the upper portion 14 of the base body and the lower portion 16 of the base body (the main body base 32) in the short direction, and the plate-like portion 11B of the tip end of the arm 11A of the transfer robot 11 enters the gap D1 ( Refer to Figure 2).

As shown in Figure 1 (A) and (B), in the upper part of the base 14 and the lower part of the base 16A bolt hole 14A and a bolt hole 16A having the same axial center and penetrating in the plate thickness direction are formed. The bolt holes 14A and 16A are the four corners of a substantially square field in which the central portion of the base upper portion 14 and the lower portion 16 of the base body constitute the center of gravity.

Similarly, the body base 32 of the main body plate 18 is formed with a bolt hole 18A penetrating in the thickness direction at the same position as the four bolt holes 14A and 16A. On the other hand, the body cover 34 of the main body plate 18 is formed with a bolt hole 18B penetrating in the thickness direction at the same position as the two bolt holes 14A and 16A.

The bolts 20 are inserted into the bolt holes 14A, 16A, 18A, and 18A which are respectively located at the same position from the upper portion 14 side of the base body, and are screwed by the nut 22 on the side of the lower portion 16 of the base. Thereby, the base upper portion 14 and the base lower portion 16 and the body plate 18 are connected to each other. Further, when the plate-like portion 11B of the arm 11A enters the gap D1, as shown in Fig. 2, the transfer holder 10 and the arm 11A are connected and fixed to each other. Therefore, the entire assembly constitutes the transport holding device 13 of the present embodiment.

A positive pressure connection port 26 penetrating in the thickness direction of the upper portion 14 of the base body is formed at a central portion of the upper portion 14 of the base body. The positive pressure connection port 26 is connected to a robot or a positive pressure pump 23 (see FIG. 2) which is different from the robot, and communicates with a positive pressure passage 24 which will be described later. Further, the base upper portion 14 is formed with a negative pressure connection port 28 that penetrates in the thickness direction of the upper portion 14 of the base and is juxtaposed with the positive pressure connection port 26. The negative pressure connection port 28 is connected to a robot or a negative pressure pump 29 (see FIG. 2) which is different from the robot, and communicates with a negative pressure passage 30 which will be described later. In addition, "IN" in Fig. 1(B) indicates supply of wind gas, and "OUT" indicates discharge of wind gas.

The body plate 18 sandwiched by the base upper portion 14 and the base lower portion 16 is opposite to the arm 11A from between the upper portion 14 of the base and the lower portion 16 of the base. (hereinafter referred to as "arm front end L direction") is extended and exposed.

The body plate 18 has a body base disposed on a side of the lower portion 16 of the base body The seat 32 and the two-layer structural plate of the body cover 34 disposed on the upper portion 14 of the base body. The main body base 32 and the main body cover 34 are each formed in a substantially rectangular shape which is flat in the L direction of the arm, and the size of the main body base 32 is larger in the width direction and the longitudinal direction than the size of the main body cover 34.

The body base 32 has a back surface 32A, which is in this embodiment. In the present embodiment, the holding surface 32B (see FIG. 1(B)) is configured as follows, and a thin plate-shaped workpiece W such as a semiconductor wafer or a glass substrate is conveyed by a non-contact method.

In the center in the width direction of the back surface 32A of the body base 32 The groove is formed along the longitudinal direction of the body base 32, and the groove is closed by the body cover 34 to form a positive pressure passage 24. On the arm front end L side of the positive pressure passage 24, a branch point 24A in which the passage is opened in the width direction of the body base 32 is provided. Further, after being opened in the left-right direction, the positive pressure passage 24 is again provided at the divergent point 24B of the long-direction split. Further, after the long direction is opened, the positive pressure passage 24 communicates with the discharge port 50, which will be described later, at both ends thereof, and supplies the fluid gas as the fluid to the discharge port 50.

Similarly, the width direction in the back surface 32A of the body base 32 A groove is formed between the central portion and the side end portion along the longitudinal direction of the body base 32, and the groove is closed by the body cover 34 to form a negative pressure passage 30. The end of the arm end L side of the negative pressure passage 30 communicates with the negative pressure hole 36 that sucks air from the rear surface 32A.

As shown in FIG. 3, the negative pressure hole 36 is formed on the body base 32. Hold face 32B. A pressure sensor 38 that detects a change in the suction load of the negative pressure hole 36 is provided in the negative pressure hole 36. Here, when the holding workpiece W is conveyed by the holding surface 32B, the negative pressure of the negative pressure hole 36 rises from the atmospheric pressure, and therefore, the pressure sensor 38 detects the change (rise change) of the suction load. Further, when the holding workpiece W is not conveyed by the holding surface 32B, the negative pressure of the negative pressure hole 36 returns to the atmospheric pressure, and therefore, the pressure sensor 38 detects the change (decreased change) of the suction load.

The pressure sensor 38 is electrically connected to the robot 11, and transmits the type of change (rising change or falling change) of the suction load to the robot 11 at any time. The robot 11 detects the presence or absence of the work piece W based on the change in the suction load. Specifically, when the change in the received suction load is a change in the rise, the robot 11 determines that the workpiece W is present on the holding surface 32B. Moreover, if the change in the received suction load is a downward change, it is determined that there is no workpiece W on the holding surface 32B. The result of judging whether or not the work piece W is present is to notify the user of the robot 11 by, for example, text, video, sound, vibration, or the like.

Further, the function of detecting the presence or absence of the workpiece W may be mounted on the pressure sensor 38 instead of the robot 11. Further, the robot 11 can detect the presence or absence of the workpiece W and the change in the suction load. At this time, the pressure sensor 38 measures the negative pressure of the negative pressure hole 36, and transmits the result to the robot 11.

Moreover, two rubber bodies 40 are respectively provided along the longitudinal direction at both end portions in the width direction of the holding surface 32B of the main body base 32. In other words, the rubber body 40 is disposed at the four corners of the square field of the holding surface 32B constituting the center of the branch point 24A.

Each of the rubber bodies 40 is a disk-shaped rubber having a circular opening 42 in the center portion, and a fluid passage 44 is formed radially outward from the opening 42 (cut mouth).

Each of the fluid passages 44 is formed so as not to face each other. Again, each The fluid passage 44 is toward the proximal end of the body base 32, and the downstream outlet of each fluid passage 44 is located near the side edge of the retaining surface 32B. On the other hand, the upstream outlet of the fluid passage 44 communicates with the opening portion 42.

The holding surface 32B located in the opening portion 42 of each rubber body 40 The circular holes 52 that are coaxial with the opening 42 and have a diameter smaller than the discharge port 50 of the opening 42 are formed one by one, and the circumference of each circular hole 52 is surrounded by the inner peripheral wall of the opening 42.

As shown in FIGS. 4(A) and 4(B), the four discharge ports 50 each have a circular hole 52, a fluid introduction circular hole 54, and an inflow port 56.

The diameter of the circular hole 52 is uniform throughout its axial direction, and the inner peripheral wall 52A of the circular hole 52 forms a right angle with the holding surface 32B.

A fluid introduction circular hole 54 is formed inside the circular hole 52 in the body base 32 (top portion in this embodiment). The fluid introduction circular hole 54 is formed in communication with the circular hole 52 so as to be coaxial with the circular hole 52. The diameter of the fluid introduction circular hole 54 is made larger than the diameter of the circular hole 52. Further, the inner peripheral wall 54A of the fluid introduction circular hole 54 forms a right angle with the holding surface 32B.

At the bottom of the fluid introduction circular hole 54, a drop surface 58 is formed in parallel with the holding surface 32B. The falling surface 58 is an inner peripheral wall 52A that connects the inner peripheral wall 54A of the fluid introduction circular hole 54 and the circular hole 52.

The fluid inlet is introduced into the inner peripheral wall 54A of the circular hole 54, and the inflow port 56 is formed to form a right angle with the drop surface 58. The inflow port 56 is in communication with the positive pressure passage 24, and the wind gas supplied from the positive pressure passage 24 is introduced into the circular hole 54 toward the fluid. Imported in a roughly tangential direction. In addition, the "significant tangential direction" means a direction having an angle of 10 degrees or less with respect to a tangential direction of a circle having a center in which the fluid is introduced into the circular hole 54 as a center.

As shown in FIG. 4(B), the height h1 of the inflow port 56 is made with a fluid. The height h2 of the inner peripheral wall 54A of the introduction circular hole 54 is equal.

Next, the transfer holder 10 and the transfer according to the embodiment will be described. The action and effect of the holding device 13 are transmitted.

The transfer holder 10 and the transfer holding device 13 are self-pressure pumps 23 The wind gas is supplied to the positive pressure passage 24. As shown in Figs. 4(A) and (B), the wind gas that has passed through the positive pressure passage 24 is introduced from the inlet 56 of the discharge port 50 toward the substantially tangential direction of the fluid introduction circular hole 54. Further, since the wind gas flows along the inner peripheral wall 54A of the fluid introduction circular hole 54, the swirling flow F1 is formed in the fluid introduction circular hole 54. The swirling flow F1 flows from the fluid introduction circular hole 54 toward the communicating circular hole 52 while spirally flowing, and in a positive pressure state, passes through the working piece W and the holding surface 32B which is disposed to face the body base 32. The gap D2 of the face 32B. Further, by the white Null effect, a low pressure (negative pressure) field is formed in the central portion of the generated swirl F1 (near the circular hole 52 and the axis of the fluid introduction circular hole 54), and the negative force generated by the The flow F2 attracts the workpiece W from the circular hole 52 of the discharge port 50. Thereby, a predetermined interval is maintained between the holding surface 32B and the workpiece W by the positive pressure between the holding surface 32B and the workpiece W and the negative pressure of the central portion. Therefore, the conveyance holder 10 and the conveyance holding device 13 can convey and hold the workpiece W by a non-contact method.

Here, the discharge port 50 is in communication with the circular hole 52 to form a circle The shaped holes 52 are coaxial. Also, the air outlet 50 is a flow having a diameter larger than the circular hole 52. The body is introduced into the circular hole 54. Therefore, a gap surface 58 parallel to the holding surface 32B is formed between the inner peripheral wall 52A of the circular hole 52 and the inner peripheral wall 54A of the fluid introduction circular hole 54.

Here, the wind gas introduced from the inflow port 56 is retained in the fluid introduction hole 54 for a long time. Further, the fluid is introduced into the circular hole 54 to be sufficiently accelerated to constitute a high-speed swirl F1. Further, the circular hole 52 has a smaller diameter than the fluid introduction circular hole 54. Therefore, the rotational speed of the high-speed swirling flow F1 flowing into the fluid introduction circular hole 54 is increased, and a higher-speed swirling flow F1 is formed and discharged from the circular hole 52 of the discharge outlet 50.

Therefore, according to the conveyance holder 10 and the conveyance holding device 13 of the present embodiment, the high-speed swirling flow F1 can be generated without increasing the introduction speed of the wind gas supplied to the inflow port 56. Further, a negative pressure can be efficiently generated at the central portion thereof.

Further, the height h1 of the inflow port 56 is equal to the height of the inner peripheral wall 54A of the fluid introduction circular hole 54. Therefore, a large amount of the wind gas can be introduced into the circular hole 54 and the entire gas gas introduced into the circular hole 54 can be swirled in the fluid introduction circular hole 54. Therefore, the swirl F1 can be efficiently generated.

Further, since the conveyance holder 10 has the four rubber bodies 40 having a disk shape, when the workpiece W moves toward the holding surface 32B side, it comes into contact with the rubber body 40 before coming into contact with the holding surface 32B. At this time, the rubber body 40 is elastically deformed to absorb the impact force of the work piece W. Therefore, damage to the work piece W or the holding surface 32B can be suppressed. Further, by the frictional force of the rubber body 40, the displacement of the workpiece W can be prevented.

Further, the rubber body 40 is formed with a fluid passage 44 radially outward from the opening portion 42 of the central portion of the rubber body 40. Therefore, the swirling flow F1 discharged from the circular hole 52 of the discharge port 50 is mostly rotated around the opening portion 42 of the rubber body 40, The surface is discharged to the outside from the gap D2 between the workpiece W and the holding surface 32B through the fluid passage 44. Therefore, as shown in FIG. 4(A), the direction of the swirling flow F1 discharged from the gap D2 between the workpiece W and the holding surface 32B to the outside can be specified.

Moreover, as shown in FIG. 3, the fluid passages 44 are formed so as not to Face to face. Therefore, it is possible to suppress the swirling flow F1 discharged from the respective fluid passages 44 from interfering with each other (collision), and to convey the holding workpiece W by the non-contact method while maintaining the balance.

Moreover, each fluid passage 44 is the body body 32 that faces the nearest body. Side end. Therefore, the swirling flow F1 discharged from each fluid passage 44 can be discharged from the side end portion of the body base 32 toward the outside of the body base 32. Further, it is possible to suppress the swirling flow F1 discharged from each fluid passage 44 from remaining on the holding surface 32B and to break the balance of the workpiece W.

In addition, although the present invention will be described in detail with respect to specific embodiments, However, the present invention is not limited to the embodiments described above, and various other embodiments can be made without departing from the scope of the invention. It can be implemented by combining suitably. Further, the following modifications may be combined as appropriate.

For example, the rubber body 40 can also be replaced by using rubber. A disk-shaped elastic body composed of an outer elastic material or a fluororesin or the like. Further, the shape of the rubber body 40 or other elastic body may be a triangular prism or a quadrangular prism in which the opening portion 42 is formed in the center portion other than the disk shape.

Further, the height h1 of the inflow port 56 is a case where the height h2 of the inner peripheral wall 54A of the fluid introduction hole 54 is made equal, however, the height h1 may be Made greater than or less than height h2. However, if it is made larger than the height h2, not only the fluid is introduced into the circular hole 54, but also the wind gas from the inflow port 56 is introduced into the circular hole 52, and the wind gas retained by the falling surface 58 may be reduced. Therefore, the height h1 is preferably equal to or less than the height h2 from the viewpoint of the entire wind gas that can be introduced into the circular hole 54. Further, in view of the fact that a large amount of the gas-introducing fluid can be introduced into the circular hole 54, it is preferable that the height h1 is equal to the height h2 as in the above embodiment.

Further, the introduction of the self-flow inlet 56 is a description of the wind gas, but it may be another fluid such as nitrogen or oxygen.

Further, the diameter of the circular hole 52 is a case in which the axial direction is uniform, but it may not be the same as shown in Figs. 5(A) to (C).

Specifically, as shown in FIG. 5(A), the circular hole 52 may have a first circular hole 60 formed in the holding surface 32B and a second circular hole 62 having a larger diameter than the first one. The circular hole 60 is connected to the first circular hole 60.

At this time, the second circular hole 62 is inside (top) of the body base 32 with respect to the holding surface 32B, and is also in communication with the fluid introduction circular hole 54, and has a smaller diameter than the fluid introduction circular hole 54. Further, a gap surface 58 parallel to the holding surface 32B is formed between the inner peripheral wall 54A of the fluid introduction circular hole 54 and the inner peripheral wall 62A of the second circular hole 62 at the bottom of the fluid introduction circular hole 54. Further, a falling surface 64 parallel to the holding surface 32B at the bottom of the second circular hole 62 is formed between the inner peripheral wall 62A of the second circular hole 62 and the inner peripheral wall 60A of the first circular hole 60.

Accordingly, the residence time of the swirl F1 can be extended by creating a complex drop surface.

Further, as shown in FIG. 5(B), the diameter of the circular hole 52 may be gradually reduced toward the holding surface 32B.

Further, as shown in Fig. 5(C), not only the diameter of the circular hole 52 is gradually reduced toward the holding surface 32B, but also the diameter of the fluid introduction circular hole 54 is gradually reduced toward the holding surface 32B.

Further, in the present embodiment, the case where the holding surface 32B of the workpiece W is formed as follows is described. However, the upper surface may be formed. At this time, the holding work piece W can also be conveyed by the discharge port 50.

Further, in the present embodiment, the structure in which the transfer holder 10 and the arm 11A are connected to each other may be different from that shown in Fig. 2, and the carrier 10 may be held by the claws or the like provided on the arm. Other structures that are fixed by connections.

Further, in Fig. 4(B) and Figs. 5(A) to (C), the gap is formed between the workpiece W and the rubber body 40. However, it is preferable that the gap is not formed during use. This is because when the gap is not formed, the workpiece W is conveyed and held in contact with the rubber body 40. However, the holding surface 32B is maintained in a non-contact state, and can be prevented by friction with the rubber body 40. The reason why the work piece W flies away.

18‧‧‧ body board

24‧‧‧ positive pressure path

32‧‧‧ body base

32A‧‧‧Back

32B‧‧‧ Keep face

34‧‧‧ body cover

40‧‧‧Rubber body

50‧‧‧Spray outlet

52‧‧‧round hole

52A, 54A‧‧‧ inner wall

54‧‧‧ fluid introduction round hole

56‧‧‧Inlet

58‧‧‧fall surface

D2‧‧‧ gap

F1‧‧Swirl

F2‧‧‧Negative pressure flow

H1, h2‧‧‧ height

W‧‧‧Workpieces

Claims (7)

A transfer holder comprising: a plate; a discharge port having a circular hole, a fluid introduction hole and an inflow port, wherein the circular hole is formed on a surface of the plate, and the fluid introduction hole is in communication with the circular hole Formed to be coaxial with the circular hole and having a diameter larger than the circular hole, the inflow port being formed on the inner peripheral wall of the fluid introduction circular hole, and introducing a fluid into a substantially tangential direction of the fluid introduction circular hole; and a fluid supply path It is formed on the aforementioned plate material and supplies fluid to the aforementioned inflow port. The transfer holder of claim 1, wherein the height of the inflow port is equal to or less than a height of an inner peripheral wall of the fluid introduction circular hole. A transfer holder according to claim 1 or 2, comprising a disk-shaped elastic member provided on a surface of the plate material and surrounding the circumference of the circular hole. The transfer holder according to the third aspect of the invention, wherein the plate material includes a plurality of discharge ports in which the elastic members are provided, and each of the elastic members forms a fluid passage radially outward from an opening portion of a central portion of the elastic member. A transfer holder according to item 4 of the patent application, wherein the fluid passages are formed so as not to face each other. Such as the transfer holder of claim 5, wherein each fluid passage It is the side end of the aforementioned plate which is closest to the front. A transfer holding device comprising: a transfer holder according to claim 1; a supply device that supplies a fluid to the fluid supply path; a suction mechanism that sucks air from a surface of the plate; and a detection mechanism that detects The change in the attraction load of the aforementioned attraction mechanism.