CN105319224B - Glass plate manufacturing method and device for producing glass sheet - Google Patents

Glass plate manufacturing method and device for producing glass sheet Download PDF

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Publication number
CN105319224B
CN105319224B CN201510259552.9A CN201510259552A CN105319224B CN 105319224 B CN105319224 B CN 105319224B CN 201510259552 A CN201510259552 A CN 201510259552A CN 105319224 B CN105319224 B CN 105319224B
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glass plate
main surface
gas
glass
guiding
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CN105319224A (en
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辻纯弥
寺西雅和
伊势广教
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Yasu Corp
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Yasu Corp
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Abstract

The glass plate manufacturing method and device for producing glass sheet of the vibration of the glass plate in the checking step of glass plate can be reduced the purpose of the present invention is to provide one kind.Glass plate manufacturing method includes conveying step and inhibition step.Conveying step is to transport glass plate (10) to the 1st direction.Inhibiting step is the movement of the glass plate on the 2nd direction for inhibiting to intersect with the 1st direction.Inhibiting step includes the 1st gas supplying step and the 2nd gas supplying step.1st gas supplying step and will be assigned towards the power of the 1st guiding elements to glass plate by flowing the 1st gas in the 1st gap between the 1st main surface (10a) and the 1st guiding elements (118a), (118c) of glass plate along the 1st main surface.2nd gas supplying step is to flow in the 2nd gap between the 2nd main surface (10b) and the 2nd guiding elements (118b), (118d) by the back side for making the 2nd gas in the 1st main surface along the 2nd main surface, and will assign towards the power of the 2nd guiding elements to glass plate.

Description

Glass plate manufacturing method and device for producing glass sheet
Technical field
The present invention relates to a kind of glass plate manufacturing method and device for producing glass sheet.
Background technique
In the manufacturing step of glass plate, the checking step for being used to check the glass plate for being cut to specific dimensions is carried out. In checking step, such as using optical means detecting it is formed in the damage on the surface of glass plate and the defects of striped.
In patent document 1 (Japanese Patent Laid-Open 2009-236771 bulletin), the check device for having glass plate is disclosed An example.The check device includes the upper clamp unit of the top of clamping glass plate and the following lower part folder of clamping glass plate Hold unit.The check device makes upper clamp unit and lower part clamping unit deviates from and assigns up and down direction to glass plate and opens In the state of power, keep glass plate relative to the device relativity of the defect of detecting glass plate mobile.
[background technology document]
[patent document]
[patent document 1] Japanese Patent Laid-Open 2009-236771 bulletin
Summary of the invention
[problems to be solved by the invention]
However, check device disclosed in patent document 1 (Japanese Patent Laid-Open 2009-236771 bulletin) is by upper Portion's clamping unit and lower part clamping unit assign the tension of up and down direction to glass plate, therefore have in clamping such as liquid crystal display The broken worry of glass plate in the case where large-scale and relatively thin glass plate as device.
Further, since when keeping glass plate mobile with the defect of higher precision detecting glass plate, it is therefore necessary to make The stable posture of glass plate and the vibration for inhibiting glass plate.In particular, make the normal to a surface of glass plate direction stabilize and The vibration for reducing the normal to a surface direction of glass plate is more important to the raising of the inspection precision of glass plate.
The glass of the vibration of the glass plate in the checking step of glass plate can be reduced the purpose of the present invention is to provide one kind Board fabrication method and device for producing glass sheet.
[technical means to solve problem]
Glass plate manufacturing method of the invention includes conveying step and inhibition step.Conveying step is transported to the 1st direction Glass plate.Inhibiting step is to inhibit the glass plate on the 2nd direction intersected with the 1st direction when transporting glass plate to the 1st direction Movement.Inhibiting step includes the 1st gas supplying step.1st gas supplying step is by making the 1st gas the of glass plate In the 1st gap between 1 main surface and the 1st guiding elements along the 1st main surface flow, and by towards the 1st guiding elements power It assigns to glass plate, the 1st guiding elements configures in a manner of with the 1st main surface opposite direction.
In general, large-scale relatively thin glass plate in the case where being not endowed with any power in conveying, is easy because of glass The minor change of pressure around glass plate, and vibrated to the direction orthogonal with the main surface of glass plate.However, in glass of the invention In glass plate manufacturing method, power of the main surface of the glass plate transported by direction and the guiding elements of main surface opposite direction. Since gas flows between the main surface and guiding elements of glass plate, glass plate is not collided with guiding elements, so as to Stably keep the distance between glass plate and guiding elements.Therefore, the glass plate transported is not easy orthogonal with its main surface Direction on variation by power.Therefore, glass plate manufacturing method of the invention can reduce the vibration of glass plate.
Furthermore it is preferred that being, inhibiting step further includes the 2nd gas supplying step.2nd gas supplying step is by making the 2nd Gas is in the 2nd gap between the 2nd main surface and the 2nd guiding elements of the back side of the 1st main surface along the 2nd main surface stream It is dynamic, and will assign towards the power of the 2nd guiding elements to glass plate, the 2nd guiding elements is in a manner of with the 2nd main surface opposite direction Configuration.
In the glass plate manufacturing method, power of a pair of of the main surface of the glass plate transported by opposite direction each other. Under a pair of of main surface respectively identical situation of size of suffered power, glass plate is acted on the direction orthogonal with main surface Power it is balanced.Therefore, the glass plate transported is not easy the variation on the direction orthogonal with its main surface by power.Therefore, originally The glass plate manufacturing method of invention can reduce the vibration of glass plate.
In addition, end face determination step is preferably in the 1st gas supplying step, the 1st gas passes through towards the 1st guiding elements It sprays and along the surface flow of the 1st guiding elements and is directed to the 1st gap, in the 2nd gas supplying step, the 2nd gas By spraying the surface flow along the 2nd guiding elements towards the 2nd guiding elements and being directed to the 2nd gap.
Furthermore it is preferred that being, in conveying step, glass plate is in the state hung by the one end for clamping glass plate It is lower to be transported to 1st direction parallel with end.In this case, in the 1st gas supplying step, the 1st gas is along the 1st side It flows into the 1st gap slowly to narrow, in the 2nd gas supplying step, the 2nd gas is slowly narrowing along the 1st direction It is flowed in 2nd gap.
Furthermore it is preferred that being, the glass plate manufacturing method further includes the checking step for checking glass plate.In this case, Step is inhibited to carry out at least before checking step.
In the glass plate manufacturing method, by reducing the vibration of transported glass plate in conveying step, In checking step, the detection accuracy that can inhibit the defect of glass plate is reduced.
Device for producing glass sheet of the invention includes to carry out to the platform of fastening glass panels, to the end face to glass plate Chamfering grinding stone, transport mechanism and the dampening mechanism of chamfer machining.Transport mechanism is to the machine to the 1st direction conveying glass plate Structure.Dampening mechanism is to inhibit the glass plate on the 2nd direction intersected with the 1st direction when transporting glass plate to the 1st direction Movement mechanism.Dampening mechanism includes the 1st guiding elements, the 2nd guiding elements, the 1st gas emitting mechanism and the spray of the 2nd gas Mechanism out.1st guiding elements has the 1st guiding surface with the 1st main surface opposite direction of glass plate.2nd guiding elements have with 2nd guiding surface of the 2nd main surface opposite direction of the back side of the 1st main surface.1st gas emitting mechanism is sprayed towards the 1st guiding surface 1st gas out.2nd gas emitting mechanism sprays the 2nd gas towards the 2nd guiding surface.1st gas emitting mechanism makes the 1st gas It is flowed in the 1st gap between the 1st main surface and the 1st guiding surface along the 1st main surface, and will be towards the 1st guiding elements Power assign to glass plate.2nd gas emitting mechanism make the 2nd gas between the 2nd main surface and the 2nd guiding surface the 2nd between It flows, and will assign to glass plate towards the power of the 2nd guiding elements along the 2nd main surface in gap.
Furthermore it is preferred that being, the 1st guiding elements flows the 1st gas along the 1st guiding surface, and by the 1st gas guide to 1st gap, the 2nd guiding elements flows the 2nd gas along the 2nd guiding surface, and the 2nd gas is guided to the 2nd gap.
Furthermore it is preferred that be, transport mechanism in the state that an end by clamping glass plate hangs glass plate, Glass plate is transported to 1st direction parallel with end.In this case, the 1st guiding elements has slowly close along the 1st direction 1st guiding surface of the 1st main surface, the 2nd guiding elements have along the 1st direction slowly close to the 2nd lead schedule of the 2nd main surface Face.
Furthermore it is preferred that being, the device for producing glass sheet also has the inspection body for checking glass plate.In this case, Dampening mechanism is at least set up in the 1st side in the upstream side of inspection body.
Furthermore it is preferred that being, dampening mechanism is set up in the 1st side in the downstream side of inspection body in turn.
In the device for producing glass sheet, the vibration of glass plate is not only reduced in the upstream side of inspection body, is also being checked The downstream side of mechanism reduces the vibration of glass plate, thus can further decrease the vibration of the glass plate of the upstream side of inspection body. Therefore, which can more effectively inhibit inspection body to reduce the detection accuracy of the defect of glass plate.
Furthermore it is preferred that being, the device for producing glass sheet is included in the 1st side and sets up in the upstream side of inspection body Multiple dampening mechanisms.In this case, in each of multiple dampening mechanisms, between the 1st main surface and the 1st guiding surface most Minimum range between small distance and the 2nd main surface and the 2nd guiding surface slowly becomes smaller along the 1st direction.
[The effect of invention]
Glass plate manufacturing method and device for producing glass sheet of the invention can reduce the glass in the checking step of glass plate The vibration of glass plate.
Detailed description of the invention
Fig. 1 is an example for indicating the flow chart of manufacturing step of glass plate.
Fig. 2 is the perspective view of the device for producing glass sheet of embodiment.
Fig. 3 is the side view of the device for producing glass sheet from the direction of the arrow III of Fig. 2.
Fig. 4 is the top view of the device for producing glass sheet from the direction of the arrow IV of Fig. 2.
Fig. 5 is the figure to illustrate the flowing from air knife ejection and by the air of guide plate guidance.
Fig. 6 is the figure to an example for illustrating the size and location of air knife and guide plate.
Fig. 7 is the figure to an example for illustrating the size and location of air knife and guide plate.It and is from the side of the arrow VII of Fig. 6 To the figure of observation.
Fig. 8 is the top view of the device for producing glass sheet of change case B.
Fig. 9 is the top view of the device for producing glass sheet of change case C.
Specific embodiment
On one side referring to attached drawing, one is illustrated in face of one embodiment of the present invention.The glass plate of present embodiment manufactures Device 100 mainly includes: carrying device 102, to transport glass plate 10;And check device 104, it is used to check and is filled by conveying Set the glass plate 10 of 102 conveyings.
(1) summary of the manufacturing step of glass plate
Firstly, being illustrated to the manufacturing step of glass plate 10.Glass plate 10 is for manufacturing liquid crystal display, plasma The flat-panel monitors (FPD) such as display and organic EL (Electroluminescence, electroluminescent) display.Glass plate 10 Such as the thickness with 0.2mm~0.8mm, and there is the size of vertical 680mm~2200mm and horizontal 880mm~2500mm.
As an example of glass plate 10, the glass with following (a)~(j) composition is enumerated.
(a)SiO2: 50 mass of mass %~70 %,
(b)Al2O3: 10 mass of mass %~25 %,
(c)B2O3: 1 mass of mass %~18 %,
(d) mass of MgO:0 mass %~10 %,
(e) mass of CaO:0 mass %~20 %,
(f) mass of SrO:0 mass %~20 %,
(g) mass of BaO:0 mass %~10 %,
(h) mass of RO:5 mass %~20 % (R is at least one kind of in Mg, Ca, Sr and Ba),
(i)R'2The O:0 mass mass of %~2.0 % (R' is at least one kind of in Li, Na and K),
(j) it is selected from SnO2、Fe2O3And CeO2In at least one kind of metal oxide.
In addition, the glass with the composition allows the presence of other micro constitutents in the range of not up to 0.1 mass %.
Fig. 1 is an example for indicating the flow chart of manufacturing step of glass plate 10.The manufacturing step of glass plate 10 mainly includes Forming step (step S1), the 1st checking step (step S3), cuts off step (step S4), is thick at plate cutting step (step S2) Face step (step S5), end face procedure of processing (step S6), cleaning step (step S7), the 2nd checking step (step S8) and Bales packet step (step S9).
It is continuous from the melten glass for obtaining glass raw material heating by glass tube down-drawing or float method in forming step S1 Ground molding glass sheet material.To glass sheet one side formed thereby by be not deformed and warpage in a manner of carry out temperature control, one Face is cooled to glass slow cooling point or less.
In plate cutting step S2, the glass sheet shaped in forming step S1 is cut off, and is obtained with specific The plain glass sheet of size.
In the 1st checking step S3, using device for producing glass sheet 100 to the plain plate obtained in plate cutting step S2 Glass is checked.In the 1st checking step S3, main detecting is present in the translucency and non-light transmittance of the inside of plain glass sheet Foreign matter.Foreign matter is, for example, component of glass raw material, metal and small bubble.In addition, can also be detectd in the 1st checking step S3 Survey striped and the damage of the main surface for being present in plain glass sheet.
In cutting step S4, the glass sheet obtained in the 1st checking step S3 is cut off, and obtains the glass of product size Glass plate 10.Plain glass sheet is cut off with higher precision using laser.
In roughened step S5, made the rough surface of the main surface of the glass plate 10 obtained in cutting step S4 Spend increased roughened processing.The roughened processing of glass plate 10 is, for example, to be lost using the wet type of the etchant containing hydrogen fluoride It carves.
In the procedure of processing S6 of end face, the end for having carried out the glass plate 10 of roughened processing in roughened step S5 is carried out The chamfer machining in face.A part of end face through chamfer machining has R shape.
In cleaning step S7, the glass plate 10 for the chamfer machining for carrying out end face in the procedure of processing S6 of end face is carried out Cleaning.Glass plate 10 be attached with factor glass sheet cutting and glass plate 10 end face processing generate small sheet glass, Or foreign matters such as existing organic matter in the environment.By cleaning glass plate 10, these foreign matters are removed.
In the 2nd checking step S8, the glass plate 10 cleaned in cleaning step S7 is checked.Specifically, optics is surveyed Determine the main surface of glass plate 10 and detects the defect of glass plate 10.The defect of glass plate 10 is for example formed in the master of glass plate 10 The striped on surface, be present in glass plate 10 main surface damage and slight crack, be attached to glass plate 10 main surface foreign matter, with And it is present in the small bubble etc. of the inside of glass plate 10.
In Bales packet step S9, by the glass plate 10 of the passed examination in the 2nd checking step S8 and to protective glass plate 10 feeding spaced papers alternately lamination Bing Bales packet Shang supporting plate.10 shipment of glass plate of Yi Bales packet to FPD manufacturer etc..
(2) composition of device for producing glass sheet
Device for producing glass sheet 100 transports plain glass sheet by carrying device 102 on one side in the 1st checking step S3, and one Face checks the defect of plain glass sheet by check device 104 optically.Defect is mainly to be present in the inside of plain glass sheet The foreign matters such as small bubble.Fig. 2 is the perspective view of device for producing glass sheet 100.Fig. 3 is from the direction of arrow III shown in Fig. 2 The side view of the device for producing glass sheet 100 of observation.Fig. 4 is the glass plate manufacture from the direction of arrow IV shown in Fig. 2 The top view of device 100.The space controlled in such a way that pressure becomes fixed is arranged in device for producing glass sheet 100.Hereinafter, For convenience, it will be transported by carrying device 102 and glass plate be recorded as by the plain glass sheet that check device 104 checks 10。
The composition of (2-1) carrying device
Carrying device 102 transports the glass plate 10 of upright state in the horizontal direction.The glass transported by carrying device 102 The normal parallel of the main surface of plate 10 is in horizontal direction.In Fig. 2~Fig. 4, the orthogonal coordinate system for constituting three-dimensional space is indicated X-axis, Y-axis and Z axis.X-axis is parallel to the conveyance direction of glass plate 10.Y-axis is parallel to the normal of the main surface of glass plate 10.Z Axis is parallel to vertical direction, and orthogonal with the normal of the main surface of glass plate 10.
The direction of X-axis is the direction for transporting glass plate 10.Hereinafter, the negative direction of X-axis is known as upstream side, just by X-axis Direction is known as downstream side.Glass plate 10 is transported from the upstream side toward the downstream side.As shown in figure 4, from upstream side towards downstream In the case that side is observed, the right side of glass plate 10 is set as Y-axis negative direction, the left side of glass plate 10 is set as Y-axis positive direction.Z The direction of axis is towards above vertical direction.
Carrying device 102 mainly includes top guiding mechanism 110, clamp mechanism 112, lower guide mechanism 114, Duo Geqi Knife 116a ... and multiple guide plate 118a ....Hereinafter, the main surface in the left side of glass plate 10 is known as left main surface 10a, by glass The main surface on the right side of glass plate 10 is known as right main surface 10b.
The top (2-1-1) guiding mechanism
Top guiding mechanism 110 is the guide rail extended in the top of the glass plate 10 transported along X-direction.Draw on top It leads mechanism 110 and clamp mechanism 112 is installed.Top guiding mechanism 110 has to keep clamp mechanism 112 mobile to X-direction Driving mechanism (not shown).
(2-1-2) clamp mechanism
Clamp mechanism 112 clamps end, that is, upper end of the Z axis positive direction of glass plate 10.Clamp mechanism 112 mainly includes Base portion 112a and multiple clamping part 112b.Base portion 112a is the component extended along X-direction.Base portion 112a with top can draw The mode that mechanism 110 is slided together is led, top guiding mechanism 110 is mounted on.Base portion 112a can by with top guiding mechanism 110 It slides together, and it is mobile to X-direction.In the downside of base portion 112a, multiple clamping parts are equally spaced installed along X-direction 112b.Clamping part 112b clamps the upper end of glass plate 10, and glass plate 10 is fixed on clamp mechanism 112.In addition, clamping part The quantity and clamping part 112b of 112b can also be according to the size and glass plate of glass plate 10 relative to the installation site of base portion 112a 10 conveying speed etc. is suitably set.
Clamp mechanism 112 is transported by top guiding mechanism 110 to X-direction.Carrying device 102 can be to X-axis side as a result, The glass plate 10 of clamp mechanism 112 is held in conveying.
(2-1-3) lower guide mechanism
Lower guide mechanism 114 is the component extended along X-direction.In the Z axis positive direction of lower guide mechanism 114 End face is formed with slit 114a along X-direction.Slit 114a is the end of the Z axis negative direction of the glass plate 10 of collecting post's conveying Portion, that is, lower end space.The lower end of glass plate 10 is not contacted with the bottom of slit 114a.The inhibition of lower guide mechanism 114 passes through The lower end for the glass plate 10 that top guiding mechanism 110 transports is mobile to Y direction.
(2-1-4) air knife
Air knife 116a ... it is the device to blow the jet flow of air to main surface 10a, 10b of glass plate 10.Air knife 116a ... configuration is in the left and right sides of glass plate 10.
Air knife 116a ... there is the squit hole (not shown) for the jet flow for spraying air.Squit hole is formed in air knife 116a ... front end and along Z-direction extend slot.Air knife 116a ... have and is sprayed to control from squit hole Air amount adjuster (not shown).Adjuster is such as pressure-regulating valve.Air knife 116a ... have to control from spray Portal ejection air the direction on X/Y plane Wind direction regulating mechanism (not shown).Wind direction regulating mechanism is for example to control Air knife 116a ... posture mechanism.As described below, air knife 116a ... there is the Y direction for inhibiting transported glass plate 10 The stable posture for moving and making glass plate 10 effect.
As shown in figure 4, device for producing glass sheet 100 has 4 air knives 116a, 116b, 116c, 116d.Hereinafter, view needs It wants, 4 air knives 116a, 116b, 116c, 116d is referred to as the 1st left air knife 116a, the 1st right air knife 116b, the 2nd left air knife The right air knife 116d of 116c and the 2nd.
The 1st left left air knife 116c configuration of air knife 116a and the 2nd is in the left side of glass plate 10.1st right air knife 116b and the 2nd is right Air knife 116d is configured on the right side of glass plate 10.The 1st left right air knife 116b configuration of air knife 116a and the 1st is in the 2nd left air knife 116c And the 2nd right air knife 116d upstream side.In X-direction and Z-direction, the 1st left right air knife 116b configuration of air knife 116a and the 1st In same position, the 2nd left right air knife 116d configuration of air knife 116c and the 2nd is in same position.1st left air knife 116a and left main surface The right air knife 116b of the distance between 10a and the 1st is identical as the distance between right main surface 10b.2nd left air knife 116c and left main table The right air knife 116d of the distance between face 10a and the 2nd is identical as the distance between right main surface 10b.
The central portion of Z-direction of the 1st left left air knife 116c of air knife 116a and the 2nd towards left main surface 10a blows air. The central portion of Z-direction of the 1st right right air knife 116d of air knife 116b and the 2nd towards right main surface 10b blows air.
(2-1-5) guide plate
Guide plate 118a ... it is component that is opposite with main surface 10a, 10b of glass plate 10 and configuring.Guide plate 118a ... match It sets in the left and right sides of glass plate 10.Guide plate 118a ... quantity and air knife 116a ... quantity it is identical.
Guide plate 118a ... have to adjust the position adjusting mechanism (not shown) of the position of Y direction and to control The angle-adjusting mechanism (not shown) in the direction on X/Y plane.As described below, guide plate 118a ... be to will be from air knife 116a ... the air of ejection guide to guide plate 118a ... the component in the space between glass plate 10.
As shown in figure 4, device for producing glass sheet 100 has 4 guide plates 118a, 118b, 118c, 118d.Hereinafter, view needs It wants, 4 guide plates 118a, 118b, 118c, 118d is referred to as the 1st left guide plate 118a, the 1st right guide plate 118b, the 2nd left guide plate The right guide plate 118d of 118c and the 2nd.
The 1st left left guide plate 118c configuration of guide plate 118a and the 2nd is in the left side of glass plate 10.1st right guide plate 118b and the 2nd is right Guide plate 118d is configured on the right side of glass plate 10.The 1st left right guide plate 118b configuration of guide plate 118a and the 1st is in the 2nd left guide plate 118c And the 2nd right guide plate 118d upstream side.In X-direction and Z-direction, the 1st left right guide plate 118b configuration of guide plate 118a and the 1st In same position, the 2nd left right guide plate 118d configuration of guide plate 118c and the 2nd is in same position.
1st left guide plate 118a has the 1st left guiding surface 119a with left main surface 10a opposite direction.1st right guide plate 118b tool There is the 1st right guiding surface 119b with right main surface 10b opposite direction.2nd left guide plate 118c has the opposite with left main surface 10a 2 left guiding surface 119c.2nd right guide plate 118d has the 2nd right guiding surface 119d with right main surface 10b opposite direction.In X-axis side Upwards, the distance between the 1st left guiding surface 119a and left main surface 10a and the 1st right guiding surface 119b and right main surface 10b The distance between it is identical.In the X-axis direction, the distance between the 2nd left guiding surface 119c and left main surface 10a and the 2nd right side are drawn It is identical to lead the distance between surface 119d and right main surface 10b.
Secondly, one side, referring to attached drawing, the function and effect for facing the 1st left guide plate 118a are illustrated.The following description It can be applicable to other guide plates 118b, 118c, 118d.
1st left guide plate 118a, which passes through, flows the air sprayed from the 1st left air knife 116a along the 1st left guiding surface 119a It is dynamic, and air is guided to the space between the 1st left guiding surface 119a and left main surface 10a.Fig. 5 is illustrated from the 1st left gas Knife 116a sprays and the figure of the flowing by the air of the 1st left guide plate 118a guidance.Fig. 5 is top view identical with Fig. 4.Scheming In 5, the flowing of air is indicated with hollow arrow F1~F4.As shown in figure 5, the 1st left guiding surface of the 1st left guide plate 118a 119a includes guidance flexure plane 119a1 and guide plane 119a2.It is slow from the upstream side toward the downstream side for guiding flexure plane 119a1 The slow face close to left main surface 10a.Guide plane 119a2 be positioned at guidance flexure plane 119a1 downstream side and with left main surface 10a parallel face.Guidance flexure plane 119a1 and guide plane 119a2 is connected smoothly.That is, the 1st left guiding surface 119a is from upper Side is swum towards downstream side slowly close to left main surface 10a.The distance between guide plane 119a2 and left main surface 10a are the 1st left sides The minimum value of the distance between guiding surface 119a and left main surface 10a.
On one side referring to Fig. 5, the flowing of an air in face of spraying from the 1st left air knife 116a is illustrated.Firstly, air Jet flow sprays (arrow F1) from the guidance flexure plane 119a1 of squit hole towards the 1st left guide plate 118a of the 1st left air knife 116a.This When, the jet flow for the air being ejected is attracted to the 1st left guide plate 118a because of Coanda effect.As a result, air is curved along guiding Curved surface 119a1 flows (arrow F2).At this point, utilizing the stream around jet flow sucking along the air of guidance flexure plane 119a1 flowing The property of body, and the air (arrow F3) around sucking.Moreover, the air sucked surrounding air into is in guide plane (arrow F4) is flowed along X-direction in space between 119a2 and left main surface 10a.
In addition, being provided with the aspirating mechanism (not shown) of intake-gas in the downstream side of the 1st left guide plate 118a.Utilize pumping Mechanism is inhaled, the air in the space between guide plane 119a2 and left main surface 10a is aspirated through.
The composition of (2-2) check device
Check device 104 optically detects the foreign matter for being present in the inside of glass plate 10.Check device 104 is arranged Air knife 116a ... and guide plate 118a ... downstream side.
Check device 104 mainly includes light source 120 and line sensor 122.The left side of glass plate 10 is arranged in light source 120. Right side of the line sensor 122 glass plate 10 is arranged in a manner of opposite with light source 120.Light source 120 is irradiated towards Y-axis negative direction The linear light extended along Z-direction.Line sensor 122 includes the multiple camera 122a configured along Z-direction.122 benefit of line sensor The linear light for irradiating and passing through glass plate 10 from light source 120 is received with camera 122a.Line sensor 122 is based on received linear light Intensity variation and detect the deformation of glass plate 10, so that detecting is present in the foreign matter of the inside of glass plate 10.Line sensor The focal zone of 122 camera 122a is in ± 5mm or less.
(3) concrete example of device for producing glass sheet
An example of the composition of device for producing glass sheet 100 is illustrated.Fig. 6 and Fig. 7 is to illustrate the 1st left air knife The figure of the size and location of the left guide plate 118a of 116a and the 1st.Fig. 6 is side view identical with Fig. 3.Fig. 7 is bows identical with Fig. 4 A part of view, and be the figure from the direction of arrow VII shown in fig. 6.Glass plate is only indicated in Fig. 6 and Fig. 7 10, the 1st left air knife 116a, the 2nd left air knife 116c, the 1st left left guide plate 118c of guide plate 118a and the 2nd.The X-direction of glass plate 10 Size L1 be 2400mm.The size L2 of the Z-direction of glass plate 10 is 1550mm.It is removed by carrying device 102 to X-direction The conveying speed of the glass plate sent is 1200mm/s.The following description be also applicable in other air knives 116b, 116c, 116d, with And other guide plates 118b, 118c, 118d.
In Fig. 6, the size L3 of the Z-direction of the 1st left air knife 116a is 627mm.The Z-direction of 1st left guide plate 118a Size L4 be 693mm.In the center of the Z-direction of 1st left air knife 116a and the Z-direction of the 1st left guide plate 118a Heart position is identical.The distance between the upper end of glass plate 10 and the upper end of the 1st left air knife 116a L5 are 376mm.Glass plate 10 The distance between lower end and the lower end of the 1st left air knife 116a L6 are 547mm.
In Fig. 7, the size L7 of the X-direction of the 1st left guide plate 118a is 845mm.The guidance of 1st left guide plate 118a is bent Face 119a1 has R shape on X/Y plane, and diameter L8 is 300mm.The X-axis of the guide plane 119a2 of 1st left guide plate 118a The size L9 in direction is 195mm.The distance between guide plane 119a2 and left main surface 10a L10 are 10mm.1st left air knife 116a by from the upstream side toward the downstream side close to left main surface 10a in a manner of configure.1st left air knife 116a and left main surface 10a The distance between minimum value L11 be 32mm.Angle, θ between 1st left air knife 116a and left main surface 10a is 30 degree.The 1st The maximum value of the speed of the air of spatial flow between the guide plane 119a2 of left guide plate 118a and left main surface 10a is 1.0m/s~2.0m/s.The speed of the air of spatial flow between guide plane 119a2 and left main surface 10a is according to glass The conveying speed of plate 10 and adjust, the preferably greater than conveying speed of glass plate 10.
The size of the Z-direction of the 1st left left guide plate 118a of air knife 116a and the 1st is the bigger the better.1st left air knife 116a and The center of Z-direction of the center of the Z-direction of 1 left guide plate 118a closer to glass plate 10 is better.
Numerical value L3~the L11 and θ relevant to the size and location of the 1st left left guide plate 118a of air knife 116a and the 1st be An example can be suitably set according to size L1, L2 of glass plate 10 and the conveying speed of glass plate 10.
(4) feature
Device for producing glass sheet 100 transports glass to X-direction by carrying device 102 on one side in the 1st checking step S3 Glass plate 10 optically detects the foreign matter for being present in the inside of glass plate 10 using check device 104 on one side.
To main surface 10a, 10b of the glass plate 10 transported by carrying device 102 blow from air knife 116a ... ejection Air.Air by guide plate 118a ... guidance, and along X-direction guide plate 118a ... with the spatial flow between glass plate 10 It is dynamic.
On one side referring to Fig. 5, one from the 1st left air knife 116a in face of spraying and by the 1st left guide plate 118a air guided Effect is illustrated.As shown in figure 5, from the air side that the 1st left air knife 116a sprays suck surrounding air into one side along Guide flexure plane 119a1 flowing, and the spatial flow between guide plane 119a2 and left main surface 10a.1st left guide plate Space between 118a and glass plate 10 is from the flow path of the 1st left air knife 116a air sprayed, and from upstream side towards downstream Side slowly narrows.Therefore, in the space between the 1st left guide plate 118a and glass plate 10, the flow velocity of air is from upstream side direction Downstream side slowly becomes larger.In particular, the flow velocity of air becomes most in space between guide plane 119a2 and left main surface 10a Greatly.According to the theorem of Bernoulli Jacob, more increasing, the pressure of air more, is reduced for the flow velocity of air, therefore guide plane 119a2 and left Space between main surface 10a becomes negative pressure relative to the space of surrounding.As a result, glass plate 10 is by the 1st left guide plate of direction The power of the Y direction of 118a.Similarly, glass plate 10 from the 1st right air knife 116b because spraying and by the 1st right guide plate 118b guidance Air, and by towards the 1st right guide plate 118b Y direction power.In addition, glass plate 10 is by the 2nd left guide plate of direction The power of the power of the Y direction of 118c and the Y direction towards the 2nd right guide plate 118d.In this way, 10 one side of glass plate by Y-axis just The power in direction and the power of Y-axis negative direction, one transports towards X-direction.
Glass plate 10 because guide plate 118a ... effect due to the power of Y direction that is subject to becomes maximum region and is and guide plate 118a ... opposite region is the middle section in Z-direction.Middle section in the Z-direction of glass plate 10 includes such as Lower place, the place is in the Z-axis direction farthest away from the Y-axis side of the clamp mechanism 112 of clamping glass plate 10 and inhibition glass plate 10 The lower guide mechanism 114 of upward movement.Therefore, the middle section in the Z-direction of the glass plate 10 transported is not to Y In the case that axis direction is endowed any power, it is easy the minor change of the pressure around glass plate 10 due to shakes to Y direction It is dynamic.
However, in the present embodiment, the central area of the glass plate 10 transported by carrying device 102 in the Z-axis direction Domain is endowed the power of Y-axis positive direction and negative direction.It is identical as the size of the power of Y-axis negative direction in the size of the power of Y-axis positive direction In the case where, the power for acting on the Y direction of glass plate 10 is balanced.Therefore, the glass plate 10 transported is not easy in the Z-axis direction Middle section by Y direction power variation.Therefore, the vibration of the Y direction of glass plate 10 is reduced.
In addition, the power for the Y direction that the glass plate 10 that is transported is assigned can by adjusting from air knife 116a ... ejection The flow and direction or guide plate 118a of air ... position and angle, and with higher precision controlling.Therefore, glass plate system The vibration of Y direction of transported glass plate 10 can easily be reduced by making device 100.
In addition, being aspirated through the guide plane 119a2 of the 1st left guide plate 118a and a left side for glass plate 10 using aspirating mechanism The air in the space between main surface 10a.As a result, in the space between guide plane 119a2 and left main surface 10a along a left side The becoming stable of air-flow of main surface 10a, therefore the vibration of the Y direction of glass plate 10 can be reduced.
It is vibrated in addition, if passing through the glass plate 10 that carrying device 102 transports to Y direction, then the line of check device 104 The focal position of the camera 122a of sensor 122 deviates, therefore is present in the detection accuracy drop of the foreign matter of the inside of glass plate 10 It is low.In addition, it is the coke of camera 122a in ± 3mm situation below that the focal zone of the camera 122a of on-line sensor 122 is shorter The more demanding precision in point position, therefore the detection accuracy for being present in the foreign matter of the inside of glass plate 10 reduces.Therefore, because glass Glass plate manufacturing device 100 can reduce the vibration of transported glass plate 10, and by the amplitude of the vibration of the Y direction of glass plate 10 It controls in 1mm hereinafter, therefore can inhibit the detection accuracy reduction for being present in the foreign matter of inside of glass plate 10.
(5) change case
More than, the embodiment of device for producing glass sheet of the invention is illustrated, but the present invention is not limited to The embodiment can also implement various improvement and change without departing from the spirit and scope of the invention.
(5-1) change case A
The device for producing glass sheet 100 of embodiment has 4 air knives 116a, 116b, 116c, 116d and 4 guide plates 118a,118b,118c,118d.However, air knife 116a possessed by device for producing glass sheet 100 ... quantity and guide plate 118a ... quantity can also be suitably set according to size L1, L2 of glass plate 10 and the conveying speed of glass plate 10.
The air knife 116a that has in device for producing glass sheet 100 ... and guide plate 118a ... quantity it is bigger, along glass The flowing of the main surface 10, the air of 10b of glass plate 10 becomes more stable, therefore can more effectively inhibit transported glass plate 10 Y direction vibration.Therefore, even if generating the air-flow of Y direction in the space of setting device for producing glass sheet 100, The vibration of the Y direction of glass plate 10 can sufficiently be inhibited, to inhibit the detection essence for being present in the foreign matter of the inside of glass plate 10 Degree reduces.
(5-2) change case B
In the device for producing glass sheet 100 of embodiment, air knife 116a ... and guide plate 118a ... setting is checking dress Set 104 upstream side.However, air knife 116a ... and guide plate 118a ... the downstream side of check device can also be also disposed at.Fig. 8 is The top view of device for producing glass sheet 100 in this change case.Device for producing glass sheet shown in Fig. 8 100 is in check device Downstream side also has there are two air knife 116e, 116f and two guide plates 118e, 118f.Air knife 116e and guide plate 118e configuration is in glass The left side of glass plate 10.Air knife 116f and guide plate 118f configuration is on the right side of glass plate 10.
In order to inhibit check device 104 to reduce the detection accuracy of the foreign matter for the inside for being present in glass plate 10, checking The vibration that the upstream side of device 104 reduces glass plate 10 is more important.However, not only checking dress by such as this change case The vibration for setting 104 upstream side reduction glass plate 10, also reduces the vibration of glass plate 10 in the downstream side of check device 104, from And the vibration of the glass plate 10 of the upstream side of check device 104 can be further decreased.Therefore, this change case can more effectively inhibit Check device 104 reduces the detection accuracy of the foreign matter for the inside for being present in glass plate 10.
(5-3) change case C
The device for producing glass sheet 100 of embodiment has 4 air knives 116a, 116b, 116c, 116d and 4 guide plates 118a,118b,118c,118d.The left main surface 10a of glass plate 10 from the upstream side toward the downstream side, with the 1st left guide plate 118a and 2nd left guide plate 118c is opposite.So along the conveyance direction of glass plate 10 be provided with multiple guide plate 118a ... in the case where, Can also make guide plate 118a ... the distance between glass plate 10 slowly becomes smaller from the upstream side toward the downstream side.That is, guide plate can also be made 118a ... it is slowly close towards glass plate 10 along the conveyance direction of glass plate 10.
Fig. 9 is the top view of the device for producing glass sheet 100 in this change case.Glass plate 10, are only indicated in Fig. 9 1 left air knife 116a, the 2nd left air knife 116c, the 1st left left guide plate 118c of guide plate 118a and the 2nd.As shown in figure 9, the 2nd left guide plate The minimum value L20 of the distance between the left guiding surface 119c in the 2nd of 118c and left main surface 10a, guide plate 118a's left less than the 1st The minimum value L10 of the distance between 1st left guiding surface 119a and left main surface 10a.Though it is not indicated in Fig. 9, similarly, The minimum value of the 2nd right guiding surface 119d and the distance between right main surface 10b of 2nd right guide plate 118d, lead again smaller than the 1st right side The minimum value of the distance between the right guiding surface 119b in the 1st of plate 118b and right main surface 10b.
From all air knife 116a ... in the identical situation of air quantity and wind direction of the air of ejection, guide plate 118a ... more lean on Nearly glass plate 10, guide plate 118a ... the speed of the air of the spatial flow between glass plate 10 more increases, thus air Pressure more reduces.Therefore, guide plate 118a ... closer to glass plate 10, towards guide plate 118a ... and act on the Y of glass plate 10 The power of axis direction becomes bigger, therefore can more effectively reduce the vibration of the Y direction of glass plate 10.However, in upstream side Guide plate 118a ... in the case that the distance between glass plate 10 is too small, having causes because of the vibration of the Y direction of glass plate 10 Glass plate 10 and guide plate 118a ... it contacts to damaged worry.It is therefore preferable that for such as this change case, guide plate 118a ... with The distance between glass plate 10 slowly becomes smaller from the upstream side toward the downstream side.
(5-4) change case D
In the device for producing glass sheet 100 of embodiment, the left and right sides of glass plate 10 configured with air knife 116a ... And guide plate 118a ....However, can also be only in the left side of glass plate 10, or only air knife is configured on the right side of glass plate 10 116a ... and guide plate 118a ....
For example, only configured with the air knife 116a of the left main surface 10a opposite direction of glass plate 10 ... and guide plate 118a ... In the case where, glass plate 10 by towards left side guide plate 118a ... power.Since air is in the left main surface of glass plate 10 10a and guide plate 118a ... between flow, therefore glass plate 10 not with guide plate 118a ... collision, so as to stably keep glass The distance between plate 10 and guide plate 118a ....Therefore, the glass plate 10 transported is not easy the variation in Y direction by power.Cause This can also reduce the vibration of glass plate 10 in this change case.
(5-5) change case E
In the 1st checking step S3, detecting obtains the device for producing glass sheet 100 of embodiment in plate cutting step S2 The defect of the plain glass sheet, that is, glass plate 10 obtained.However, device for producing glass sheet 100 can also be detected in the 2nd checking step S8 The defect of the glass plate 10 cleaned in cleaning step S7.In this case, device for producing glass sheet 100 also may replace detecting It is present in the foreign matter of the inside of glass plate 10, and detects the striped for the main surface for being formed in glass plate 10, is present in glass plate 10 Main surface damage and slight crack and be attached to glass plate 10 main surface foreign matter etc..In addition, device for producing glass sheet 100 can also detect the foreign matter for being present in the inside of glass plate 10, and also detecting be formed in the main surface of glass plate 10 striped, Be present in the main surface of glass plate 10 damage and slight crack and be attached to glass plate 10 main surface foreign matter etc..
(5-6) change case F
The device for producing glass sheet 100 of embodiment can sufficiently be pressed down in the 1st checking step S3 by the flowing of air The vibration of the Y direction of glass plate 10 processed, so that the detection accuracy for being present in the foreign matter of the inside of glass plate 10 is inhibited to reduce, it should Air flow through from air knife 116a ... spray and by guide plate 118a ... the air of guidance is formed, and along glass plate 10 Main surface 10a, 10b.
However, device for producing glass sheet 100 can also also be removed before the 1st checking step S3 and be attached to glass plate The cleaning step of the foreign matter of 10 main surface 10a, 10b.Cleaning step is for example to blow air towards main surface 10a, 10b, will The foreign matter for being attached to main surface 10a, 10b is dispelled and is removed from main surface 10a, 10b.Specifically, being used in cleaning step Air nozzle etc. sprays the compressed air of high pressure towards main surface 10a, 10b, and the foreign matter for being attached to main surface 10a, 10b is dispelled And it removes.Thereafter, it in cleaning step, using the vacuum nozzle etc. being arranged near air nozzle, will be sprayed from air nozzle Compressed air out is aspirated together with the foreign matter that main surface 10a, 10b removes with.Foreign matter be in plate cutting step S2 from Small, glass i.e. cullet that the section of glass sheet generates and because in forming step S1 by glass sheet on one side Carrying roller that slow cooling one transports downwards and the substance etc. generated.
In this change case, by being removed the main surface for being attached to glass plate 10 before the 1st checking step S3 The cleaning step of the foreign matter of 10a, 10b can more effectively inhibit foreign matter of the check device 104 to the inside for being present in glass plate 10 Detection accuracy reduce.
(5-7) change case G
The device for producing glass sheet 100 of embodiment can sufficiently inhibit the Y-axis side of glass plate 10 by the flowing of air To vibration, the air flow through from air knife 116a ... spray and by guide plate 118a ... the air of guidance is formed, and edge Main surface 10a, 10b of glass plate 10.
However, device for producing glass sheet 100 can also be confirmed whether in the 1st checking step S3 using check device 104 Sufficiently inhibit the vibration of the Y direction of glass plate 10.In the 1st checking step S3, the line sensor 122 of check device 104 Camera 122a shoots glass plate 10 in the focal position of Y direction.Focal position is that the focus of the image of camera 122a is most aligned Position, the focal zone in camera 122a.Focal position may be set to any position of Y direction.However, in order to effective The defect that ground detection dispersion is formed on the thickness direction (Y direction) of glass plate 10, focal position are preferably located at not to Y-axis The center of the thickness direction of glass plate 10 when direction vibrates.
In the case where not inhibiting the vibration of Y direction of the glass plate 10 transported by carrying device 102 sufficiently, exist The case where glass plate 10 deviates from the focal zone of camera 122a.In particular, camera 122a focal zone it is shorter for ± 3mm with In the case where lower, glass plate 10 is easy to deviate because vibrating to Y direction from focal zone.If glass plate 10 is from camera 122a Focal zone deviate, then have the foreign matter for the inside for being present in glass plate 10 detection accuracy reduce worry.
Therefore, the device for producing glass sheet 100 of this change case can also detect glass plate 10 in 1 checking step S3 of Yu In the case where the deviation of the focal zone of camera 122a, which is determined as rejected product, is not delivered to cutting step S4 and removed from production line.In addition, in order to determine whether glass plate 10 deviates from focal zone, it is possible to use measurement is from camera The range sensor of the distance of Y direction until 122a to main surface 10a, 10b of glass plate 10.In this case, in order to The measurement timing of the shooting timing and range sensor that make camera 122a is as close as possible to preferably range sensor is arranged in phase Near machine 122a.
[symbol description]
10 glass plates
The left main surface of 10a (the 1st main surface)
The right main surface of 10b (the 2nd main surface)
100 device for producing glass sheet
102 carrying devices (transport mechanism)
104 check devices (inspection body)
The 1st left air knife (the 1st gas emitting mechanism) of 116a
The 1st right air knife (the 2nd gas emitting mechanism) of 116b
The 2nd left air knife (the 1st gas emitting mechanism) of 116c
The 2nd right air knife (the 2nd gas emitting mechanism) of 116d
The 1st left guide plate (the 1st guiding elements) of 118a
The 1st right guide plate (the 2nd guiding elements) of 118b
The 2nd left guide plate (the 1st guiding elements) of 118c
The 2nd right guide plate (the 2nd guiding elements) of 118d
The 1st left guiding surface (the 1st guiding surface) of 119a
The 1st right guiding surface (the 2nd guiding surface) of 119b
The 2nd left guiding surface (the 1st guiding surface) of 119c
The 2nd right guiding surface (the 2nd guiding surface) of 119d

Claims (11)

1. a kind of glass plate manufacturing method comprising:
Step is transported, transports glass plate to the 1st direction;And
Inhibit step, when transporting the glass plate to the 1st direction, inhibits in the 2nd direction intersected with the 1st direction On the glass plate movement;And
The inhibition step includes the 1st gas supplying step, and the 1st gas supplying step is by making the 1st gas in the glass It is flowed in the 1st gap between 1st main surface of glass plate and the 1st guiding elements along the 1st main surface, and will be towards described The power of 1st guiding elements is assigned to the glass plate, and the 1st guiding elements is matched in a manner of with the 1st main surface opposite direction It sets,
In the 1st gas supplying step, the 1st gas is sprayed towards the 1st guiding elements, as a result, the described 1st Gas along the 1st guiding elements surface flow and be directed to the 1st gap.
2. glass plate manufacturing method according to claim 1, wherein the inhibition step further includes the 2nd gas supply step Suddenly, the 2nd gas supplying step is the 2nd main surface and the 2nd guidance of the back side by making the 2nd gas in the 1st main surface It flows, and will assign to institute towards the power of the 2nd guiding elements along the 2nd main surface in the 2nd gap between component Glass plate is stated, the 2nd guiding elements configures in a manner of with the 2nd main surface opposite direction.
3. glass plate manufacturing method according to claim 2, wherein in the 2nd gas supplying step, by the described 2nd Gas is sprayed towards the 2nd guiding elements, thus the 2nd gas along the 2nd guiding elements surface flow and quilt It guides to the 2nd gap.
4. glass plate manufacturing method according to claim 2 or 3, wherein the glass plate exists in the conveying step In the state that an end by clamping the glass plate is hung, removed to 1st direction parallel with the end The glass plate is sent,
In the 1st gas supplying step, the 1st gas is in the 1st gap slowly to narrow along the 1st direction Middle flowing,
In the 2nd gas supplying step, the 2nd gas is in the 2nd gap slowly to narrow along the 1st direction Middle flowing.
5. glass plate manufacturing method according to any one of claim 1 to 3 further includes the inspection for checking the glass plate Step is looked into, and
The inhibition step at least carries out before the checking step.
6. a kind of device for producing glass sheet, it includes:
Transport mechanism, to transport glass plate to the 1st direction;And
Dampening mechanism, to inhibit in the 2nd intersected with the 1st direction when transporting the glass plate to the 1st direction The movement of the glass plate on direction;And
The dampening mechanism includes:
1st guiding elements has the 1st guiding surface with the 1st main surface opposite direction of the glass plate;
2nd guiding elements has the 2nd guiding surface with the 2nd main surface opposite direction of the back side of the 1st main surface;
1st gas emitting mechanism sprays the 1st gas towards the 1st guiding surface;And
2nd gas emitting mechanism sprays the 2nd gas towards the 2nd guiding surface;And
1st gas emitting mechanism make the 1st gas between the 1st main surface and the 1st guiding surface the 1st It flows, and will assign to the glass plate towards the power of the 1st guiding elements along the 1st main surface in gap,
2nd gas emitting mechanism make the 2nd gas between the 2nd main surface and the 2nd guiding surface the 2nd It flows, and will assign to the glass plate towards the power of the 2nd guiding elements along the 2nd main surface in gap,
1st guiding elements flows the 1st gas along the 1st guiding surface, and by the 1st gas guide to 1st gap.
7. device for producing glass sheet according to claim 6, wherein the 2nd guiding elements make the 2nd gas along The 2nd guiding surface flowing, and the 2nd gas is guided to the 2nd gap.
8. device for producing glass sheet according to claim 6 or 7, wherein the transport mechanism is by clamping the glass The one end of plate and by the state of glass plate suspension, to parallel with the end the 1st direction conveying glass Glass plate,
1st guiding elements has along the 1st direction slowly close to the 1st guiding surface of the 1st main surface,
2nd guiding elements has along the 1st direction slowly close to the 2nd guiding surface of the 2nd main surface.
9. device for producing glass sheet according to claim 6 or 7 also has the inspection body for checking the glass plate, And
The dampening mechanism is arranged at the upstream side on the 1st direction of the inspection body.
10. device for producing glass sheet according to claim 9, wherein the dampening mechanism is arranged in the check machine in turn Downstream side on the 1st direction of structure.
11. device for producing glass sheet according to claim 9, it includes set up in the 1st side in the inspection Multiple dampening mechanisms of the upstream side of mechanism,
Minimum range and institute between each of multiple dampening mechanisms, the 1st main surface and the 1st guiding surface The minimum range stated between the 2nd main surface and the 2nd guiding surface slowly becomes smaller along the 1st direction.
CN201510259552.9A 2014-06-30 2015-05-20 Glass plate manufacturing method and device for producing glass sheet Active CN105319224B (en)

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JP6631838B2 (en) * 2016-05-18 2020-01-15 日本電気硝子株式会社 Method and apparatus for manufacturing glass sheet, and apparatus for transporting glass sheet
CN108426606B (en) * 2018-03-12 2024-06-25 湖南科创信息技术股份有限公司 System for detecting cold end stress and thickness of float glass production line

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JPH09134946A (en) * 1995-11-09 1997-05-20 Shinko Electric Co Ltd Wafer carrier
JP2004099261A (en) * 2002-09-11 2004-04-02 Mitsubishi Materials Techno Corp Glass sheet handling device
CN1501075A (en) * 2002-10-31 2004-06-02 三星康宁精密琉璃株式会社 Detecting system for glass baseplate
CN103386689A (en) * 2012-05-11 2013-11-13 株式会社妙德 Conveying clamp and conveying holder

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Publication number Priority date Publication date Assignee Title
JPH09134946A (en) * 1995-11-09 1997-05-20 Shinko Electric Co Ltd Wafer carrier
JP2004099261A (en) * 2002-09-11 2004-04-02 Mitsubishi Materials Techno Corp Glass sheet handling device
CN1501075A (en) * 2002-10-31 2004-06-02 三星康宁精密琉璃株式会社 Detecting system for glass baseplate
CN103386689A (en) * 2012-05-11 2013-11-13 株式会社妙德 Conveying clamp and conveying holder

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