CN109877464A - Laser and air suction inlet dual-purpose laser machine probe - Google Patents
Laser and air suction inlet dual-purpose laser machine probe Download PDFInfo
- Publication number
- CN109877464A CN109877464A CN201810026831.4A CN201810026831A CN109877464A CN 109877464 A CN109877464 A CN 109877464A CN 201810026831 A CN201810026831 A CN 201810026831A CN 109877464 A CN109877464 A CN 109877464A
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- China
- Prior art keywords
- laser
- mentioned
- air
- suction
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/142—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/54—Glass
Abstract
The present invention relates to laser and air suction inlet dual-purpose to laser machine probe, in more detail, it is related to following laser and air suction inlet dual-purpose laser processing probe: during processing using laser to workpiece, prevent because laser processing when caused by smog due to generate irradiated laser scattering come so that machining object quality decline the case where, and the invention also includes: suction section, for sucking air to external vapour discharge in laser processing；And air enlarging section, it is used together with above-mentioned suction section, also supply air to suction section while laser irradiation, as the amount and speed of the smog removed increase, so as to effectively prevent generating because of smog the scattering of irradiated laser come so that machining object quality decline the case where.
Description
Technical field
The present invention relates to following laser and air suction inlet dual-purposes to laser machine probe: by by air and laser
Together while disposably to aspirating smog after the supply of laser irradiation space, when thus preventing because of laser processing caused by cigarette
Mist and generate laser light scattering cause processing aspect go wrong the case where.
Background technique
In general, various display panel substrates (glass substrate etc.) include forming the forward face of machined surface and not forming processing
The rear in face.
Wherein, it can be used and be processed to etch using marginal portion of the laser to the above-mentioned glass substrate for forming machined surface
Laser-induced thermal etching equipment, so as to become clean around machined surface and swimmingly carry out subsequent handling.
In addition, the laser drill equipment for carrying out processing perforation by required part of the laser to above-mentioned glass substrate can be used
Deng the equipment of the probe for utilizing laser etc..
In this previous scanning head apparatus, generated in the Working position of the above-mentioned workpiece of irradiation laser beam big
The smog (floating foreign body) of amount, this smog will be adsorbed onto aforesaid substrate again to pollute workpiece, meanwhile, because of this cigarette
Mist and the scattering for generating irradiated laser beam, thus there is the problem of quality decline for leading to workpiece.
Existing technical literature
Patent document
Patent document 1: Korean patent publication No. 1992-0010483 (bulletin on November 28th, 1992).
Summary of the invention
The present invention is proposed to solve the problems, such as described above, and the object of the present invention is to provide following laser
Probe is laser machined with air suction inlet dual-purpose: during processing using laser to workpiece, in order to go
It is additionally provided with while smog generated when laser machining is provided with suction section and works as irradiation laser Shi Keyu laser together
The air enlarging section for disposably injecting air, prevents the laser light scattering because of caused by smog to pass through, to prevent from going out in the past
It is existing the case where leading to workpiece quality decline due to being influenced by laser light scattering caused by smog.
Other objects of the present invention and advantage will be illustrated in the following, can through the invention embodiment reason
Solution.Also, it can be achieved the object of the present invention by the method that is presented in inventing claimed range and combination and advantage.
The present invention is to be processed using laser to workpiece P for solving the problems, such as method as described above
Probe is characterised by comprising: scanner section 10, using multiple optical units to workpiece P vertical irradiation laser；Suction
Portion 20 is spaced apart in the top of above-mentioned workpiece P, for sucking between above-mentioned scanner section 10 and workpiece P
Air is simultaneously discharged to outside, and the smog to prevent generating due to being laser machined to workpiece P causes laser light scattering；With
And air enlarging section 30, laser is correspondingly arranged in above-mentioned suction section 20 towards the workpiece P centre bore 22 penetrated through
Top supplies air to the inside of above-mentioned suction section 20 while for supplying laser to the centre bore 22 of illuminated laser, makes
The soakage and suction velocity for obtaining the smog that above-mentioned suction section 20 sucks increase, to make to prevent laser light scattering effect from increasing.
As described above, the present invention have the effect of it is as follows, that is, aspirate and remove generated smog when laser processing, from
And smog caused by can preventing in advance when laser irradiation due to, generates scattering and carrys out the feelings so that the quality decline of workpiece
Condition.
Also, the present invention has the effect of as follows, that is, can be disposable together with laser irradiation when being laser machined
Ground injects air, to aspirate and go smoke removing, increases the amount increase of sucked smog and speed, to make to prevent laser
Dispersion effect increases.
Detailed description of the invention
Fig. 1 is the main view for showing an embodiment of laser and air suction inlet dual-purpose laser processing probe of the invention
Figure.
Fig. 2 is the perspective view of Fig. 1.
Fig. 3 is the perspective view for showing an embodiment of suction section and air enlarging section of the invention.
Fig. 4 is the cross-sectional view for showing an embodiment of suction section and air enlarging section of the invention.
Fig. 5 is the bottom view of Fig. 3.
Specific embodiment
Before multiple embodiments of the invention are described in detail, it should be appreciated that its application is not limited to
The detailed content of the structure of structural element and arrangement recorded in the following detailed description or being shown in the accompanying drawings.The present invention can
It is embodied and is implemented by other embodiments, can executed by a variety of methods.Also, with the direction of device or element (for example,
" preceding (front) ", " rear (back) ", " upward (up) ", " downward (down) ", " top (top) ", " lower part (bottom) ", " a left side
(left) ", " right (right) ", " laterally (lateral) ") in terms of relevant term, it should be appreciated that institute in this application
The expression and term used is only used for simplifying explanation of the invention, is not offered as or means relevant device or element merely
With specific direction.Also, during being illustrated, the term of " first (first) ", " second (second) " etc. are used
In the application and claimed range is invented, is not offered as or means relative importance or purport.
In order to realize that purpose as described above, the present invention have following feature.
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.Before this, it should be appreciated that
The term used in specification and protection scope of the present invention and word are not limited to the meaning on conventional sense or dictionary,
Above-mentioned term and word should illustrate related invention based on inventor in optimal method and can suitably to define term general
The meaning and concept for being interpreted to be consistent with technical idea of the invention in principle read.
Therefore, in the present specification documented by embodiment and in the accompanying drawings shown in structure be only it is of the invention most preferably
One embodiment does not represent all technical ideas of the invention, it is understood, therefore, that for the application, the present invention
Can have a variety of equivalent technical solutions and variation that can replace embodiment documented in the present specification.
Referring to one embodiment of the invention, the workpiece P probe processed is characterized in that using laser,
It include: scanner section 10, using multiple optical units to workpiece P vertical irradiation laser；Suction section 20, in above-mentioned scanner section
It is spaced apart between 10 and workpiece P in the top of above-mentioned workpiece P, for sucking air and being discharged to outside,
Smog to prevent generating due to being laser machined to workpiece P causes laser light scattering；And air enlarging section 30,
It is correspondingly arranged in laser in above-mentioned suction section 20 towards the top of the workpiece P centre bore 22 penetrated through, is used for illuminated
Air is supplied to the inside of above-mentioned suction section 20 while the centre bore 22 of laser supplies laser, so that above-mentioned suction section 20 sucks
Smog soakage and suction velocity increase, come make to prevent laser light scattering effect increase.
Also, it is a feature of the present invention that above-mentioned suction section 20 includes: shell 21, inner hollow；Centre bore 22, upper
The center for stating shell 21 is perforated along up and down direction, and laser is made to penetrate through and irradiate to workpiece P；Multiple inlet holes
23, it is formed in around centre bore 22 in the bottom surface of above-mentioned shell 21；And multiple suction outlets 24, it is formed in above-mentioned shell
21 top is connected with dust collect plant 34 and suction apparatus 35, is swashed by centre bore 22 and the sucking of multiple inlet holes 23
It generated smog and air and is discharged to outside when light is processed.
Also, it is a feature of the present invention that above-mentioned inlet hole 23 is configured at above-mentioned center in a manner of in multiple Circles
Around hole 22, gradually increase hole dimension alongst with centre bore 22 is gradually distance from, in the form of long hole.
Also, it is a feature of the present invention that above-mentioned air enlarging section 30 includes: inside tube 31, laser is alongst
It irradiates and penetrates through, one end insertion is installed on the inside of the centre bore 22 of suction section 20, injection hole 32 is formed with, to make air can be to
Inside flows into；And outboard tube 33, it is spaced apart in the outside of above-mentioned inside tube 31, with inside tube 31 together in dual tubular
State is fed through the air that external air supply unit is injected by the inside side pipe 31 of above-mentioned injection hole 32.
Also, it is a feature of the present invention that above-mentioned suction section 20 includes guide portion 25, guide sections 25 are along among the above
Heart hole 22 extends preset length from the top plate of suction section 20 and forms, the bottom of guide sections 25 formed prevent with
What the bottom surfaces of suction section 20 were close to separates space 26, and guide sections 25 are for the moving direction to the air internally supplied
It guides, and makes the air including smog and foreign matter generated when laser irradiation also can be by separating space 26 come quilt
The internal suction of suction section 20.
Hereinafter, laser machining scanning referring to figs. 1 to laser and air suction inlet dual-purpose of the Fig. 5 to the preferred embodiment of the present invention
Head is described in detail.
Laser of the invention and air suction inlet dual-purpose laser processing probe include scanner section 10, suction section
(suction) 20 and air enlarging section 30.
Above-mentioned scanner section 10 utilizes multiple optical units (mirror etc.) after irradiating laser by additional laser supply unit
Angle and direction of illumination are adjusted, it can be to workpiece P (various display panels etc.) vertical irradiation laser.
Supply and transferring structure for making the laser of this laser arrival workpiece P can be according to the more of user of service
Using various structures, therefore kind embodiment is come, it is not limited to a defined structure.
Above-mentioned suction section 20 is located at the lower end of above-mentioned scanner section 10, workpiece P in the form of with ground maintenance level
Horizontality is formed with suction section 20 in the lower end of this suction section 20 and is fixed in a manner of separating configuration.
Centre bore 22 is formed in the form of the center of this suction section is above and below to penetrate through, and is passed through from above-mentioned scanner section 10 this
The laser that centre bore 22 irradiates laser machines workpiece P.
Above-mentioned suction section 20 is aspirated through the generated gas as foreign matter when laser processes workpiece P
Body, as dust smog (Fume) and to outside be discharged, to prevent laser light scattering caused by smog.
Suction section 20 for it includes shell 21, centre bore 22, inlet hole 23 and suction outlet 24.
Above-mentioned shell 21 is in four side tubular forms of inner hollow, and centre bore 22 means to hang down at the center of this shell 21
Hole made of straight perforation, to form laser perforation centre bore 22 to process to the workpiece P of 21 lower end of shell
Form.
Above-mentioned inlet hole 23 is formed in the bottom surface of shell 21 with forming round mode around centre bore 22, in the present invention
In, inlet hole 23 is configured at around centre bore 22 in a manner of in multiple Circles, is made with centre bore 22 is gradually distance from
Hole dimension alongst gradually increases, and is in long hole form.Also, each above-mentioned inlet hole 23 is in diameter when perforation under
End towards the gradually smaller form in upper end, thus, when sucking, suction velocity is increased by throttling form.
Above-mentioned suction outlet 24 is set to the top of shell 21 in a manner of being connected with the inside of shell 21, preferably
Ground, the left and right upper and lower sides on the top of shell 21 are provided with 4 in total, still, this position or quantity, it is respective using whether
Deng can also according to the embodiment of user of service carry out numerous variations.
Meanwhile above-mentioned suction outlet 24 is connected with dust collect plant 34 and suction apparatus 35, by centre bore 22 and more
A sucking of inlet hole 23 generates when being laser machined and generates the smog between workpiece P and the bottom surface of shell 21
And foreign matter air to be discharged to outside.
Also, above-mentioned suction section 20 includes guide portion 25 in inside, and guide sections 25 are along above-mentioned centre bore 22 from pumping
The top board undersurface in suction portion 20 extends preset length and forms, and being formed in the bottom of guide sections 25 prevents and suction section
What 20 bottom surfaces were close to separates space 26, and guide sections 25 are for drawing the moving direction of the air internally supplied
It leads, and makes the air including smog and foreign matter generated when laser irradiation that can also be sucked portion 20 by separating space 26
Internal suction.
Above-mentioned air enlarging section 30 is set to above-mentioned suction section 20, is correspondingly arranged in laser direction in above-mentioned suction section 20
The centre bore 22 of workpiece P perforation, is formed by the inside tube 31 and outboard tube 33 of dual pipe form.
In the present invention, before above-mentioned air enlarging section 30 is set, pass through central part
Logical arranging plate 27 is correspondingly arranged in the top of suction section 20, later, settable to be formed by above-mentioned inside tube 31 and outboard tube 33
Air enlarging section 30.
Above-mentioned inside tube 31 can make laser alongst irradiate and penetrate through, in one end to the centre bore 22 of suction section 20
Inside insertion installation form.That is, laser is irradiated along the length direction for the inside tube 31 being located in centre bore 22.Also,
In the outer peripheral edge of above-mentioned inside tube 31, perforation is formed with injection hole 32.
Above-mentioned outboard tube 33 is set to the top of above-mentioned suction section 20, is spaced apart in the form of dual pipe in towards above-mentioned pumping
The outside of the top in suction portion 20 inside tube 31 outstanding.Above-mentioned outboard tube 33 and the additional air supply unit phase for being set to outside
Connection is internally to inject air, and the air injected is by the injection hole 32 for being formed in inside tube 31 of perforating come inside side pipe 31
Injection, thus, user of service's institute's preset moment in laser processing etc., by the inside tube 31 of laser irradiation come with
Disposably coercively fed air is supplied between the inside and suction section 20 and workpiece P of the suction section 20 in the same direction of laser one.
For suction section 20, with no above-mentioned air enlarging section 30 the case where compared with, above-mentioned 20 institute of suction section
The soakage and suction velocity of the smog of sucking increase, so that increasing prevents laser light scattering effect.
Though as described above, illustrate the present invention by limited embodiment and attached drawing, the present invention is not limited to
This, general technical staff of the technical field of the invention can technical idea of the invention and invent claimed range etc.
A variety of modifications and changes are carried out in co-extensive.
Claims (5)
1. a kind of laser and air suction inlet dual-purpose laser machine probe, workpiece is processed using laser,
It is characterized in that, comprising:
Scanner section, using multiple optical units to workpiece vertical irradiation laser；
Suction section is spaced apart in the top of above-mentioned workpiece, for inhaling between above-mentioned scanner section and workpiece
Enter air and be discharged to outside, the smog to prevent generating due to being laser machined to workpiece causes laser light scattering；
And
Air enlarging section is correspondingly arranged in the top for the centre bore that laser is penetrated through towards workpiece in above-mentioned suction section,
Air is supplied to the inside of above-mentioned suction section while for supplying laser to the centre bore of illuminated laser, so that above-mentioned suction
The soakage and suction velocity of the smog of portion's sucking increase, to make to prevent laser light scattering effect from increasing.
2. laser according to claim 1 and air suction inlet dual-purpose laser machine probe, which is characterized in that above-mentioned pumping
Suction portion includes:
Shell, inner hollow；
Centre bore is perforated at the center of above-mentioned shell along up and down direction, and laser is made to penetrate through and irradiate to workpiece；
Multiple inlet holes are formed in around centre bore in the bottom surface of above-mentioned shell；And
Multiple suction outlets, are formed in the top of above-mentioned shell, are connected with dust collect plant and suction apparatus, pass through centre bore
And multiple inlet holes suck generated smog and air when being laser machined and are discharged to outside.
3. laser according to claim 2 and air suction inlet dual-purpose laser machine probe, which is characterized in that above-mentioned suction
The mode for entering the multiple Circles of Kong Yicheng is configured at around above-mentioned centre bore, makes hole dimension with centre bore is gradually distance from
It alongst gradually increases, in the form of long hole.
4. laser according to claim 1 and air suction inlet dual-purpose laser machine probe, which is characterized in that above-mentioned sky
Gas enlarging section includes:
Inside tube, laser are alongst irradiated and are penetrated through, and one end insertion is installed on the inside of the centre bore of suction section, are formed
There is injection hole, to enable air to internally flow into；And
Outboard tube is spaced apart in the outside of above-mentioned inside tube, is in dual pipe form together with inside tube, passes through above-mentioned injection hole
Inside side pipe is fed through the air that external air supply unit is injected.
5. laser according to claim 1 and air suction inlet dual-purpose laser machine probe, which is characterized in that
Above-mentioned suction section includes guide portion, and guide sections extend along above-mentioned centre bore from the top plate of suction section preset
Length forms, and being formed in the bottom of guide sections prevents from separating space with what the bottom surfaces of suction section were close to,
Guide sections make the packet generated when laser irradiation for guiding to the moving direction of the air internally supplied
Include the internal suction that the air including smog and foreign matter can also be sucked portion by separating space.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2017-0166620 | 2017-12-06 | ||
| KR1020170166620A KR101882232B1 (en) | 2017-12-06 | 2017-12-06 | Laser processing scanner head combined with laser and air suction ball |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109877464A true CN109877464A (en) | 2019-06-14 |
| CN109877464B CN109877464B (en) | 2020-10-30 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810026831.4A Active CN109877464B (en) | 2017-12-06 | 2018-01-11 | Laser processing scanning head for both laser and air suction hole |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101882232B1 (en) |
| CN (1) | CN109877464B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102100361B1 (en) * | 2018-08-22 | 2020-04-13 | 주식회사 코윈디에스티 | Apparatus for producing of metal mask |
| KR102105895B1 (en) * | 2019-03-25 | 2020-05-04 | (주)제이스텍 | Easy to clean suction box equipped with jig device |
| KR102133967B1 (en) * | 2019-03-25 | 2020-07-15 | (주)제이스텍 | Suction box for laser processing scanner head with air amplification and fume scattering prevention structure |
| KR20210004552A (en) * | 2019-07-05 | 2021-01-13 | 주식회사 엘지화학 | Welding equipment with removing fume function |
| KR102249667B1 (en) * | 2020-02-10 | 2021-05-11 | 주식회사 제이스텍 | Lens and glass contamination prevention device to fumes generated when cutting the display film with a laser |
| KR102422000B1 (en) * | 2021-07-20 | 2022-07-19 | 진명기술주식회사 | Apparatus for process processing using laser |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR101882232B1 (en) | 2018-07-26 |
| CN109877464B (en) | 2020-10-30 |
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