JP5239564B2 - Chuck device and suction holding hand - Google Patents

Description

  The present invention relates to a chuck device that sucks and holds a workpiece by using a negative pressure generated at the center of a swirling flow, and a suction holding hand.

Conventionally, as this type of non-contact conveyance device (chuck device), a device using a Bernoulli effect generated by an air flow is known (see Patent Document 1). This non-contact transfer device has a cylindrical recess that is open at one end, a flat end surface that is formed on the opening side of the recess and is positioned opposite to the conveyed product (work), and air is ejected along the inner circumferential direction of the recess. And a fluid passage for allowing the fluid to flow.
When air is ejected from the fluid passage along the inner peripheral direction of the concave portion, a strong swirling flow that rotates along the inner peripheral surface is generated in the concave portion. This swirl flow advances along the inner peripheral surface of the concave portion toward the opening side, and when it reaches the opening portion, it flows outward along the flat end surface.
At this time, the central part of the swirling flow and the vicinity of the opening of the flat end surface connected thereto are in a negative pressure state, and if there is a transported object facing the flat end surface, the transported object becomes flat due to the negative pressure. Suctioned to the end face side. On the other hand, the conveyed product is separated from the flat end surface by air (positive pressure) flowing outward along the flat end surface. In other words, the negative pressure due to the swirling flow and the air flowing out to the outside act against each other, so that the conveyed item is adsorbed and held in a non-contact state.
JP 2002-64130 A

  However, in such a non-contact conveyance device, the air flowing out along the flat end face flows outward as a curved flow due to centrifugal force and inertia, but is turbulent due to friction with the surrounding air. Decelerates rapidly. For this reason, there is a problem that the negative pressure generated between the workpiece and the workpiece is weakened and the negative pressure region fluctuates slightly, so that the workpiece cannot be held stably. In addition, the negative pressure is changed due to fluctuations in the negative pressure region, and the adsorbed work may pulsate, which may damage the work during delivery.

  Then, this invention makes it the subject to provide the chuck | zipper apparatus and suction holding | maintenance hand which can hold | maintain a workpiece | work stably.

The chuck device of the present invention includes a non-contact holding surface that faces the sucked workpiece in a non-contact manner, a swirl flow generation chamber that is recessed in the non-contact holding surface and generates a swirling flow of gas for suction, A swirl flow generating means for causing a swirl flow to flow into the swirl flow generation chamber and generating a swirl flow in the inflowed gas and generating a negative pressure for adsorption at the center thereof is provided on the non-contact holding surface. A spiral vortex guide channel formed in a spiral shape that guides the gas flowing out from the generation chamber along the non-contact holding surface into a vortex in the same swirling direction as the swirling flow. It is characterized by.

  According to this configuration, the gas that has flowed into the swirl flow generation chamber becomes a swirl flow in the swirl flow generation chamber by the swirl flow generation means, and eventually flows out from the non-contact holding surface. This outflowing gas is guided by the vortex guide channel provided on the non-contact holding surface, and flows out as a vortex. That is, the gas flowing out along the non-contact holding surface is guided to the vortex guide flow path and smoothly flows out as a vortex (a laminar flow). For this reason, the gas flowing out along the non-contact holding surface does not rapidly decrease in flow velocity, the negative pressure generated by the swirling flow is not weakened, and the negative pressure region is stabilized. On the other hand, since the vortex guide channel is formed in a groove shape, a part of the gas flowing out from the open portion maintains a gap between the vortex guide channel and the adsorbed workpiece. Therefore, the workpiece can be stably held with a strong suction force in a non-contact state. Moreover, since the negative pressure region is stabilized, the pulsation of the attracted workpiece is suppressed.

In this case, the vortex guide channel is composed of a back wall surface, an inner wall surface located inside the swirl direction of the vortex flow, and an outer wall surface located outside the swirl direction of the vortex flow. It is preferable that the vertical wall surface parallel to the swivel axis and the wall surface having an acute angle with respect to the back wall surface be configured.

  According to this configuration, the gas that flows out as a vortex flows along the vortex guide flow path without easily overcoming the outer wall surface. Therefore, the swirling state of the gas that has become a vortex flow can be maintained up to the downstream end.

In addition to the above-described configuration, the inner wall surface in the cross-sectional direction is preferably formed of an inclined wall surface having an obtuse angle with respect to the back wall surface .

  According to this configuration, the physical strength of the vortex guide channel can be increased, and the vortex guide channel can be configured to be difficult to damage.

In these cases, it is preferable that the vortex guide channel is configured by a single channel, or the vortex guide channel is configured by multiple channels.

  According to these configurations, when the flow resistance of the vortex guide flow path is taken into consideration, a single flow path is effective when the flow velocity of the swirl flow is relatively high, and a plurality of flow paths when the flow velocity is relatively slow. The flow path is effective.

  In this case, it is preferable that the vortex guide channel is disposed in a plane orthogonal to the swirl axis of the swirl flow.

  According to this configuration, the centrifugal force of the swirling flow that has reached the non-contact holding surface is not weakened, and this can smoothly flow out along the non-contact holding surface, that is, along the vortex guide channel. it can.

  In this case, the swirl flow generation chamber is formed in a cylindrical shape, and the swirl flow generation means is connected to the gas supply source and ejects gas from the substantially tangential direction to the swirl flow generation chamber along the inner peripheral surface. It is preferable to have a gas inflow channel to be used.

  According to this configuration, the gas inflow path connected to the gas supply source can simultaneously perform the inflow of the gas into the swirl flow generation chamber and the generation of the swirl flow in the swirl flow generation chamber. Further, since the swirl flow generating chamber is formed in a cylindrical shape, a stable swirl flow can be easily generated.

  In this case, an eddy current guide channel is formed on one end face, and an annular chuck having a through hole formed in the shaft center portion, and a closing member that is in airtight contact with the entire area of the other end face of the chuck. The chamber is configured by a through hole of the chuck whose open end on the closing member side is closed by the closing member, and the gas inflow channel is a groove formed in at least one of the contact portions between the other end surface of the chuck and the closing member. It is this that it is constituted by the shape.

  According to this structure, since it is comprised by two members, a chuck | zipper and a closure member, the shape and structure of each structural member become simple, each structural member can be formed easily, and the whole apparatus is simplified. Can be produced.

  Moreover, it is preferable that the gas inflow channel is composed of a plurality of channels that are opened at equal intervals in the circumferential direction with respect to the inner peripheral surface of the swirl flow generating chamber.

  According to these configurations, it is possible to efficiently generate a swirling flow having no distortion in shape, and it is possible to generate a stable swirling flow, that is, a stable negative pressure (with little pressure fluctuation).

  In this case, it is preferable that the swirl flow generating means further includes ionization means for ionizing the gas flowing into the swirl flow generation chamber.

  According to this configuration, when the work is charged, the charge is neutralized by the ions, so that it is possible to prevent adhesion of particles or the like due to static electricity on the work.

  In these cases, it is preferable to be formed of a conductive resin.

  According to this configuration, the chuck device itself can be easily manufactured by injection molding or the like, and static electricity generated in the chuck device can be easily grounded (static elimination) by connecting a ground to the chuck device.

The suction holding hand according to the present invention has an even number of chuck devices including at least one set of the above chuck devices in which the swirling flow swirl directions are different from each other so that the swirl guide channel is positioned in the same plane. A holder portion for holding the chuck device and an arm portion connected to the holder portion are provided.

  According to this configuration, the rotational force received by the work due to the vortex swirling in the forward direction and the rotational force received by the work due to the vortex swirling in the reverse direction cancel each other, so that the work can be stably adsorbed and held. it can. However, since the workpiece is not in contact with the chuck device, it is easy to move the chucked workpiece in the in-plane direction. The arm portion functions as a grip portion when the suction holding hand is held, and functions as an attachment portion when attached to the apparatus.

  In this case, a tube connection port connected to a gas supply source is formed in the arm portion, and an integrated gas chamber connected to the tube connection port and each gas inflow channel is formed inside the holder portion and inside the arm portion. It is preferable that it is formed.

  According to this configuration, since the gas supplied to the gas chambers uniformly flows into the swirl flow generation chambers of the chuck devices, the even number of chuck devices can have the same suction force. Thereby, a workpiece | work can be attracted | sucked and hold | maintained stably.

  Hereinafter, a suction holding hand to which a chuck device according to an embodiment of the present invention is applied will be described with reference to the accompanying drawings. This suction holding hand uses a plurality of Bernoulli chucks utilizing the Bernoulli effect generated by the flow of air (air), and sucks and holds various thin plates and films used for electronic parts in a non-contact manner. It is mounted on various transfer devices such as a transfer robot, or is used by holding it.

  As shown in FIGS. 1 and 2, the suction holding hand 1 fixes a plurality of Bernoulli chucks 2 (four in the figure) for holding the workpiece W, which is a conveyance object, and a plurality of Bernoulli chucks 2. And a horizontally long plate-like hand main body 3 including an arm portion 12 connected to the holder portion 11 (see FIG. 1). In this case, the arm portion 12 functions as a grip portion when the suction holding hand 1 is held, and functions as an attachment portion when attached to the apparatus.

  The hand body 3 is configured by forming a later-described air chamber (gas chamber) 5 connected to a plurality of Bernoulli chucks 2 in a casing 4 including a body case 13 and a lid case 14 airtightly joined thereto. 14 is bonded so as to fit into a projecting frame portion 29 provided on the peripheral edge of the main body case 13. The lid case 14 is formed in a flat plate shape without unevenness, and a tube connection port 6 communicating with the air chamber 5 is formed on the base side thereof. The tube connection port 6 is connected to an air tube (gas supply tube) 7 connected to a compressed air supply facility (gas supply device) 9. Further, the air tube 7 is provided with an ion generator (ion generator) 8 for ionizing air (see FIG. 1). Depending on the workpiece W, a high-pressure inert gas such as nitrogen may be supplied instead of air.

  As shown in FIG. 2, the holder part 11 is formed in a substantially square plate shape, closes the upper end side of each Bernoulli chuck 2 and attaches four Bernoulli chucks 2 attached so as to protrude downward. The lower surface is held so as to be positioned in the same plane (see FIG. 2B). Specifically, the Benouy chuck 2 is inserted and fixed in four fixed through holes 15 formed in a matrix in the holder portion 11. That is, the upper surface (end surface) of each Benouy chuck 2 is hermetically bonded and fixed to the lid case 14, and the peripheral surface is hermetically bonded and fixed to the inner peripheral surface of the fixed through hole 15. Of the four Bernoulli chucks 2, the two Bernoulli chucks 2 positioned diagonally generate a swirling flow in the forward rotation direction, and the two Bernoulli chucks 2 positioned in the other diagonal direction swing in the reverse rotation direction. A flow is generated.

  Inside the main body case 13 constituting the holder portion 11, a wide rectangular shallow groove 21 is provided so as to surround the four fixed Bernoulli chucks 2. The holder air chamber 26 is constituted by a portion facing the groove 21. Moreover, the code | symbols 25 and 25 in Fig.2 (a) are the spacer parts which protruded in the center part of the holder part air chamber 26, respectively.

  One end of the arm portion 12 is connected to the holder portion 11, and is formed narrower than the holder portion 11 and horizontally long. A long groove 31 that continues to the shallow groove 21 of the holder portion 11 is formed inside the main body case 13 that constitutes the arm portion 12, and the long groove 31 and the lid case 14 (the portion that faces the long groove 31), An arm part air chamber 27 connected to the holder part air chamber 26 is configured. That is, the air chamber 5 is integrally formed by the holder air chamber 26 formed in the holder 11 and the arm air chamber 27 formed in the arm 12 (see FIG. 2A). The end of the arm air chamber 27 communicates with the tube connection port 6 formed on the base side of the lid case 14. That is, the compressed air flowing in from the tube connection port 6 slowly flows through the air chamber 5 and is blown into the Bernoulli chuck 2 at a high flow rate. The lid case 14 may be formed with shallow grooves facing the shallow grooves 21 and the long grooves 31 of the main body case 13 to increase the volume of the air chamber 5. Needless to say, in this case, the spacer portion 25 corresponding to the spacer portion 25 of the main body case 13 is also formed in the lid case 14, but the fixed through hole 15 is not formed.

  The ion generator 8 ionizes the air blown into each Bernoulli chuck 2 by applying a high voltage, and ionizes the air before flowing into the air chamber 5. That is, the ion generator 8 is provided in the air tube 7, and the ionized air is sent to the Bernoulli chuck 2 through the air chamber 5. As a result, ionized air is blown onto the workpiece W, and the charged workpiece W is adsorbed and held and simultaneously removed. As will be described in detail later, the Bernoulli chuck 2 is made of a conductive resin. When the casing 4 is not made of a conductive material, the casing 4 is provided with a ground wiring that is electrically connected to the Bernoulli chuck 2. Incorporate. Note that the suction holding hand 1 of the present embodiment can also be used in a vertical orientation. In such a case, it is preferable to provide a fall prevention pin or the like so that the workpiece W does not fall under its own weight.

  Next, the Bernoulli chuck 2 will be described with reference to FIGS. 3 and 4. The Bernoulli chuck 2 has a non-contact holding surface 41 that faces the sucked workpiece W in a non-contact manner, a swirl flow generation chamber 42 that is recessed in the non-contact holding surface 41 and generates a swirling flow for suction, A swirl flow generating means 43 for causing air to flow into the swirl flow generation chamber 42 and generating a swirl flow for the air that has flowed in is provided on the non-contact holding surface 41 so that the generated swirl flow becomes a swirl flow in the same swirl direction. And a vortex guide channel 44 that leads to The Bernoulli chuck 2 is made of a member such as a conductive resin material, and is formed in a thin annular shape as a whole. The air flowing into the swirl flow generation chamber 42 becomes a swirl flow in the swirl flow generation chamber 42, and the swirl flow that has reached the non-contact holding surface 41 becomes a vortex flow by being guided by the vortex flow guide channel 44. It flows out on the non-contact holding surface 41 toward the outside.

  The swirl flow generating chamber 42 is formed in a cylindrical shape (through hole) with the lower end opened with the lid case 14 as a top surface. A pair of inflow channel grooves 51 are formed at the upper end portion of the swirl flow generation chamber 42, and the pair of inflow channel grooves 51 and the lid case 14 (portions facing the inflow channel grooves 51) are formed. A pair of air inflow channels (gas inflow channels) 52 are configured. In other words, the chuck device described in the claims includes the Bernoulli chuck 2 and the lid case 14 (the portion constituting the top surface of the swirl flow generating chamber 42 and the portion facing the inflow flow channel groove 51: a closing member). Has been. The pair of air inflow channels 52 constitutes the swirl flow generating means 43 described above, and extends in a tangential direction with respect to the inner peripheral surface 42a of the swirl flow generation chamber 42, and the flow channel ends thereof in the circumferential direction. The openings are evenly spaced. That is, the pair of air inflow channels 52 communicate with the upper end of the swirl flow generation chamber 42 from the tangential direction and are arranged symmetrically. The air that has flowed into the swirl flow generation chamber 42 from the air inflow channel 52 flows along the inner peripheral surface 42a of the swirl flow generation chamber 42, and eventually flows out from the open end as a strong swirl flow. A negative pressure is generated at the center of the swirling flow according to Bernoulli's theorem, and the workpiece W is adsorbed by the negative pressure.

  The non-contact holding surface 41 is connected to the open end of the swirl flow generation chamber 42 and is formed to be orthogonal to the swirl flow swirl axis. A vortex guide channel 44 is formed on the surface (lower surface) of the non-contact holding surface 41. The swirl flow generated in the swirl flow generating chamber 42 flows out from the inner peripheral side toward the outer peripheral side along the non-contact holding surface 41 by the centrifugal force at the next moment when the swirl flow generation chamber 42 reaches the open end. At this time, the air flowing out to the non-contact holding surface 41 maintains the gap between the workpiece W and the non-contact holding surface 41. That is, the work W is sucked and held on the non-contact holding surface 41 in a non-contact state by the competition between the suction force due to the negative pressure and the air (positive pressure) flowing along the non-contact holding surface 41. .

  As shown in FIG. 4, the vortex guide channel 44 is formed in the non-contact holding surface 41 orthogonal to the swirling axis of the swirling flow in the shape of a groove whose lower side is opened as a single channel, and the inner peripheral surface It is formed in a spiral shape from the center of the vortex toward the outer periphery so as to swirl in the same direction as the swirling flow generated along 42a (see FIG. 4A). The vortex guide channel 44 includes an inner wall surface 61 positioned on the inner side in the swirling direction of the vortex flow, an outer wall surface 62 positioned on the outer side in the swirling direction of the vortex flow, and a rear wall surface 63 connecting the inner wall surface 61 and the outer wall surface 62. (See FIG. 4B). In addition, since the vortex guide channel 44 is formed in a spiral shape, the outer wall surface 62 and the inner wall surface 61 are both surfaces of a spiral barrier that hangs down from the non-contact holding surface 41 except for the first and last turns. Is formed.

  The outer wall surface 62 is formed of a vertical wall surface parallel to the swirling axis of the swirling flow in the cross-sectional direction, and the inner wall surface 61 is formed of an inclined wall surface having a shallower angle than the vertical wall surface so as to be inclined toward the center of the vortex flow. Yes. That is, the cross section of the barrier is formed to be a substantially right triangle (however, the top is preferably chamfered) (see FIG. 4B).

  Thereby, the swirling flow of the air that has reached the open end of the swirling flow generating chamber 42 is guided by the vortex guide channel 44 and flows out from the inside to the outside. Therefore, the laminar flow state of the air flowing outward is maintained for a relatively long time, the negative pressure region in the vicinity of the opening is stabilized, and the adsorption force can be increased accordingly. On the other hand, since the vortex guide channel 44 is formed in a downward groove shape, a part of the air flows out from the open end of the vortex guide channel 44 and the vortex guide channel 44 and the workpiece W are not in contact with each other. To maintain. Furthermore, since the negative pressure region is stabilized, the negative pressure acting on the workpiece W is stabilized, and the pulsation of the attracted workpiece W can be suppressed. In addition, it is preferable that the outer wall surface 62 is formed at a height that makes it difficult for a vortex to flow toward the outer peripheral side to get over.

  Next, a first modification of the Bernoulli chuck 2 will be described with reference to FIG. Only parts that are different from the first embodiment are described in order to avoid overlapping descriptions. In this case, the vortex guide channel 44 has an outer wall surface 62 formed of a vertical wall surface parallel to the swirling axis of the swirling flow in the cross-sectional direction, an inner wall surface 61 parallel to the outer wall surface 62, and a swirling axis of the swirling flow. And a back wall 63 composed of vertical parallel walls. That is, the barrier has a square cross section (see FIG. 5B). Thereby, while being able to form the vortex guide flow path 44 easily, the physical strength can be raised.

  Next, a second modification of the Bernoulli chuck 2 will be described with reference to FIG. In this case, the vortex guide channel 44 has an overhang wall surface (outer wall surface 62) having a deeper angle than the vertical wall surface parallel to the swirl axis of the swirl flow in the cross-sectional direction, and a vertical wall surface inclined to the center of the vortex flow. It is comprised by the inner wall surface 61 formed of the inclined wall surface of a shallow angle | corner, and the back wall surface 63 which connects the overhang wall surface and the inner wall surface 61. FIG. That is, the cross section of the barrier is formed to be a triangle inclined toward the center of the vortex (however, the top is chamfered) (see FIG. 6B). Thereby, the laminar state of the air flowing through the vortex guide channel 44 is maintained for a long time. In addition, as shown to the virtual line of FIG.6 (b), the overhang wall surface may be formed with the concave curved surface.

  Next, the suction holding band 1 according to the second embodiment will be described with reference to FIGS. Only parts that are different from the first embodiment are described in order to avoid overlapping descriptions. As in the first embodiment, the suction holding band 1 includes four Bernoulli chucks 2 and a hand main body 3 including a holder portion 11 and an arm portion 12 (see FIG. 7). The Bernoulli chuck 2 is bonded and fixed to the surface of the holder portion 11. Also in this case, the hand body 3 is configured by forming an air chamber (gas chamber) 5 in a casing 4 composed of a body case 13 and a lid case 14, and the base side of the lid case 14 communicates with the air chamber 5. A tube connection port 6 (not shown) is formed.

  As shown in FIG. 8, four through holes 16 corresponding to the four Bernoulli chucks 2 are formed in the body case 13 constituting the holder portion 11, and the through holes 16 have an inner diameter of the Bernoulli chuck 2, That is, it is formed in the same shape as the diameter of the swirl flow generating chamber 42. Each Bernoulli chuck 2 is bonded to the surface of the main body case 13 (the edge where the through holes 16 are formed) while being positioned coaxially with the through holes 16. The part is configured.

  Further, a rectangular shallow groove 21 constituting the holder air chamber 26 is provided inside the main body case 13 as in the first embodiment, and each Bernoulli chuck 2 is surrounded in the shallow groove 21. Four pairs of “L” -shaped guide portions 22 are arranged in an island shape. A pair of guide grooves 23 are formed in the two boundary portions of each pair of “L” -shaped guide portions 22 by a mutual gap. Each of the pair of guide grooves 23 extends in the tangential direction with respect to the through hole 16, and the flow path ends open at equal intervals in the circumferential direction (180 ° point symmetry). The pair of guide grooves 23 and the lid case 14 (portions facing the guide grooves 23) constitute a pair of air inflow channels (gas inflow channels) 52. Also in this case, the inner peripheral surfaces of each pair of “L” -shaped guide portions 22 constitute a part of the swirl flow generating chamber 42. Similarly to the first embodiment, a long groove 31 constituting the arm portion air chamber 27 is formed inside the main body case 13 constituting the arm portion 12.

  As shown in FIG. 9, four rectangular closed portions 46 having bottomed round holes 45 corresponding to the four through holes 16 are formed inside the lid case 14 constituting the holder portion 11. . Each of the round holes 45 is formed to have the same diameter as the through hole 16 and is coaxially arranged, and together with the through hole 16 and the pair of “L” -shaped guide portions 22, a part of the swirl flow generating chamber 42, the main It constitutes the top surface. Further, the rectangular blocking portions 46 correspond to the four pairs of “L” -shaped guide portions 22, respectively, and are airtightly bonded to the four pairs of “L” -shaped guide portions 22. Thus, the pair of air inflow passages 52 connected to the holder part air chamber 26 are formed between the pair of guide grooves 23 and the rectangular blocking part 46.

  Further, on the inner side of the lid case 14, the lid side shallow groove 47 that forms the holder air chamber 26 together with the shallow groove 21 of the main body case 13, and the lid side that forms the arm portion air chamber 27 together with the long groove 31 of the main body case 13. A long groove 48 is formed, and a pair of lid-side spacer portions 28 corresponding to the spacer portions 25 of the main body case 13 are formed.

  As shown in FIG. 10, the Bernoulli chuck 2 of the second embodiment is formed in an annular shape having a through hole serving as a swirl flow generating chamber 42 in the axial center, and a vortex guide flow is provided on one end face. A path 44 is provided. Further, the other end face of the Bernoulli chuck 2 is formed flat, and is adhered to the surface of the main body case 13 (formation edge portion of the through hole 16) in an airtight manner. That is, unlike the Bernoulli chuck 2 of the second embodiment, the Bernoulli chuck 2 of the second embodiment is not provided with a pair of inflow channel grooves 51. That is, in the second embodiment, the chuck device referred to in the claims includes the Bernoulli chuck 2 (chuck), the rectangular closing portion 46 having the through hole 16, the pair of “L” -shaped guide portions 22, and the round holes 45. And a closing member.

  In this case, the through hole constituting the swirl flow generating chamber 42 is formed in a tapered shape with the lower portion somewhat expanded, but may be straight. The eddy current guide channel 44 has a number of turns of “strongly one turn”, and the cross section of the barrier constituting the eddy current guide channel 44 is formed to be a substantially right triangle like the first embodiment. Has been. But the cross-sectional shape of a barrier may be the same as that of said modification 1 and modification 2. Even in the vortex guide channel 44, the laminar state of the air flowing through the vortex guide channel 44 can be maintained for a long time.

  Note that the Bernoulli chuck 2 fixed to the suction holding hand 1 of the present invention is not limited to the present embodiment, and the number thereof may be an even number. Thereby, a larger workpiece W can be held. Further, the Bernoulli chuck 2 may be made of a metal material. Further, the vortex guide channel 44 may be formed of multiple layers such as double or triple with respect to the non-contact holding surface 41. In this case, the plurality of vortex guide channels 44 are preferably formed point-symmetrically, which is effective when the flow velocity of the swirl flow is slow. Similarly, the air inflow channel 52 may be formed of a single one.

  On the other hand, the vortex guide channel 44 may be separated and fixed to the non-contact holding surface 41. Alternatively, the non-contact holding surface 41 may have a so-called bell mouth shape, and the vortex guide channel 44 may be formed in the so-called bell mouth shape. Furthermore, the swirl flow generating means 43 may be configured by a fan or the like (however, capable of generating swirl flow efficiently) disposed above the swirl flow generation chamber 42.

It is an external appearance perspective view of the suction holding hand concerning a 1st embodiment. It is the top view and (b) side view of (a) main body case of the suction holding hand concerning a 1st embodiment. It is a front and back external perspective view of Bernoulli chuck. It is (a) top view and (b) sectional view of Bernoulli chuck concerning a 1st embodiment. It is (a) top view and (b) sectional view of the Bernoulli chuck concerning the 1st modification. It is (a) fragmentary sectional view and (b) enlarged view of Bernoulli chuck concerning the 2nd modification. It is a disassembled perspective view of the suction holding hand concerning a 2nd embodiment. It is a top view of the main body case of the suction holding hand concerning a 2nd embodiment. It is a top view of the lid case of the suction holding hand concerning a 2nd embodiment. It is (a) top view and (b) sectional view of Bernoulli chuck concerning a 2nd embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Suction holding hand 2 ... Bernoulli chuck 5 ... Air chamber 6 ... Tube connection port 7 ... Air tube 8 ... Ion generator 11 ... Holder part 12 ... Arm part 13 ... Main body case 14 ... Lid case 22 ... "L" shape Guide part 26 ... Holder part air chamber 27 ... Arm part air chamber 41 ... Non-contact holding surface 42 ... Swirl flow generating chamber 43 ... Swirl flow generating means 44 ... Swirl flow guide channel 45 ... Round hole 46 ... Square block part 52 ... Air Inflow channel 61 ... Inner wall surface 62 ... Outer wall surface 63 ... Back wall surface W ... Workpiece

Claims (13)

A non-contact holding surface that faces the sucked workpiece in a non-contact manner;
A swirl flow generating chamber that is recessed in the non-contact holding surface and generates a swirl flow of gas for adsorption;
A swirl flow generating means for causing a gas to flow into the swirl flow generation chamber, generating a swirl flow in the introduced gas, and generating a negative pressure for adsorption at the center thereof;
Provided on the non-contact holding surface, it is formed in a spiral shape that guides the gas flowing out from the swirl flow generation chamber outward along the non-contact holding surface so as to be a swirl flow in the same swirling direction as the swirl flow. And a grooved vortex guide channel. The vortex guide flow path is composed of a back wall surface, an inner wall surface located inside the swirl direction of the vortex flow, and an outer wall surface located outside the swirl direction of the vortex flow,
2. The chuck according to claim 1, wherein in the cross-sectional direction, the outer wall surface is configured by one of a vertical wall surface parallel to a swirling axis of the swirling flow and a wall surface having an acute angle with respect to the back wall surface. apparatus.   The chuck device according to claim 2, wherein the inner wall surface is an inclined wall surface having an obtuse angle with respect to the inner wall surface in the cross-sectional direction.   The chuck device according to claim 1, wherein the vortex guide channel is a single channel. The chuck device according to any one of claims 1 to 3, wherein the vortex guide channel is composed of multiple channels.   The chuck device according to claim 1, wherein the vortex guide flow path is disposed in a plane orthogonal to a swirl axis of the swirl flow. The swirl flow generation chamber is formed to be recessed in a cylindrical shape,
The swirl flow generating means includes a gas inflow channel that is connected to a gas supply source and ejects gas from the swirl flow generation chamber along a substantially tangential direction along an inner peripheral surface. The chuck device according to claim 1. The eddy current guide flow path is formed on one end face and an annular chuck having a through hole formed in the axial center portion thereof, and a closing member that is in airtight contact with the entire area of the other end face of the chuck,
The swirl flow generation chamber is configured by the through hole of the chuck whose open end on the closing member side is closed by the closing member,
8. The chuck device according to claim 7, wherein the gas inflow passage is configured by a groove formed in at least one of the contact portions between the other end face of the chuck and the closing member.   The said gas inflow flow path is comprised by the some flow path provided in the circumferential direction at equal intervals with respect to the internal peripheral surface of the said swirl | flow flow generation chamber. Chuck device.   The chuck device according to any one of claims 1 to 9, wherein the swirl flow generating means further includes ionization means for ionizing a gas flowing into the swirl flow generation chamber.   The chuck device according to claim 1, wherein the chuck device is formed of a conductive resin. The even number of chuck devices comprising at least one set of chuck devices according to any one of claims 7 to 11, wherein the swirl directions of the swirl flow are different from each other in forward and reverse directions.
A holder portion for holding an even number of the chuck devices such that the vortex guide flow path is located in the same plane;
A suction holding hand comprising: an arm portion connected to the holder portion. In the arm portion, a tube connection port connected to the gas supply source is formed,
The suction according to claim 12, wherein an integral gas chamber connected to the tube connection port and each of the gas inflow passages is formed in the holder portion and in the arm portion. Holding hand.

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