JP5921323B2 - Transport holding tool and transport holding device - Google Patents

Description

  The present invention relates to a conveyance holder and a conveyance holding device.

  2. Description of the Related Art Conventionally, a conveyance holder is known that holds a thin plate-like workpiece such as a semiconductor wafer or a glass substrate in a non-contact manner by generating a negative pressure using a Bernoulli effect through a fluid.

For example, Patent Document 1 discloses a carrier holder that generates a positive pressure and a negative pressure by introducing a fluid such as air gas from a gas introduction port into a cylindrical space portion of the same diameter that is formed on the body throughout. Is disclosed.
Specifically, the swirl flow generated by the transport holder passes through the gap between the open side end surface (holding surface) formed at the open side end of the cylindrical space and the workpiece in a positive pressure state. It has become. Further, a low pressure (negative pressure) region is formed in the central portion of the generated swirling flow by the Bernoulli effect, and the transport holder sucks the workpiece by the generated negative pressure. As a result, a predetermined interval is maintained between the body and the work due to the positive pressure passing between the open side end face and the work and the negative pressure at the center, so the transport holder can transport and hold the work in a non-contact manner. It is possible to do.

  Further, Patent Document 2 discloses a transport holder that introduces a fluid from a gas inlet into a cylindrical space that is gradually reduced in diameter toward the holding surface and generates a negative pressure by the Bernoulli effect.

JP 2009-119562 A JP 2010-253658 A

  However, in the configurations of Patent Documents 1 and 2, the generated swirling flow smoothly flows in the cylindrical space portion having the same inner diameter or gradually reduced diameter toward the holding surface facing the workpiece. For this reason, the residence time of the swirl flow is short, the acceleration thereof becomes insufficient, and the negative pressure cannot be generated unless the introduction speed of the gas supplied to the gas introduction port is increased.

  In view of the above facts, an object of the present invention is to provide a transport holder and a transport holder that efficiently generate negative pressure.

  The transport holder according to the first aspect of the present invention includes a plate member, a circular hole formed on the surface of the plate member, a coaxial hole formed in communication with the circular hole and coaxial with the circular hole. Formed in the inner peripheral wall of the fluid introduction circular hole and an inflow port for introducing fluid in a substantially tangential direction of the fluid introduction circular hole, and formed in the plate member, A fluid supply path for supplying fluid to the inflow port.

  In this configuration, when a fluid such as air gas supplied through the fluid supply path is introduced from the inflow port of the ejection port in a substantially tangential direction of the fluid introduction hole, the fluid swirls along the inner peripheral wall of the fluid introduction hole. Therefore, it becomes a swirl flow in the fluid introduction circular hole. This swirling flow flows while drawing a spiral from the fluid introduction circular hole toward the circular hole, and passes through the gap between the transported object installed facing the surface of the plate and the surface of the plate in a positive pressure state. . In addition, a low pressure (negative pressure) region is formed by the Bernoulli effect at the center of the generated swirling flow (near the axis of the circular hole and the fluid introduction circular hole). Aspirate the carrier. As a result, a predetermined distance is maintained between the plate material and the transported body by the positive pressure passing between the surface of the plate material and the transported body and the negative pressure at the center, so the transport holder is transported. The body can be conveyed and held in a non-contact manner.

Here, the ejection port communicates with the circular hole and is formed coaxially with the circular hole and has a fluid introduction circular hole having a diameter larger than that of the circular hole. Therefore, the inner peripheral wall of the circular hole and the inner peripheral wall of the fluid introduction circular hole In between, these walls are connected and the level | step difference surface parallel to the surface of a board | plate material is formed.
By this stepped surface, the fluid introduced from the inflow port does not flow into the circular hole but stays in the fluid introduction circular hole, and is sufficiently accelerated in the fluid introduction circular hole to become a high-speed swirling flow. In addition, since the circular hole has a smaller diameter than the fluid introduction circular hole, the high-speed swirling flow that has flowed into the fluid introduction circular hole has an increased rotational speed and is discharged from the circular hole at the jet outlet as a faster swirl flow. Is done.
Therefore, according to the transport holder according to the first aspect of the present invention, it is possible to generate a high-speed swirling flow without increasing the introduction speed of the fluid supplied to the inflow port, and to apply a negative pressure to the central portion thereof. It can be generated efficiently.

  In the transport holder according to the second aspect of the present invention, in the first aspect, the height of the inflow port is equal to or less than the height of the inner peripheral wall of the fluid introduction circular hole.

  According to this configuration, all the fluid introduced from the inflow port can be swirled in the fluid introduction circular hole. For this reason, a swirl flow can be generated efficiently.

  In the conveyance holder which concerns on the 3rd aspect of this invention, it has a disk-shaped elastic member which is provided in the surface of the said board | plate material and surrounds the circumference | surroundings of the said circular hole in a 1st aspect or a 2nd aspect.

  According to this structure, when a to-be-conveyed body moves to the board | plate material side, it contacts with an elastic member, before contacting a board | plate material. At this time, the elastic member is elastically deformed to absorb the impact force of the transported body. Therefore, it can suppress that a to-be-conveyed body and a board | plate material are damaged. Further, it is possible to prevent the position of the transported body from being displaced by the frictional force of the elastic member.

  In the transport holder according to the fourth aspect of the present invention, in the third aspect, the plate member includes a plurality of the jet outlets provided with the elastic member, and each elastic member has an opening at a central portion of the elastic member. A fluid passage is formed radially outward from the portion.

  According to this configuration, most of the swirling flow (fluid) discharged from the circular hole of the jet outlet swirls through the opening at the center of the elastic member, and then passes through the fluid passage and the surface of the conveyed object and the plate material. It is discharged outside through the gap. Thus, by forming a fluid passage in each elastic member, it becomes possible to define the direction of the swirling flow discharged to the outside from the gap between the conveyed object and the surface of the plate material.

  In the transport holder according to the fifth aspect of the present invention, in the fourth aspect, the fluid passages are formed so as not to face each other.

  According to this configuration, it is possible to prevent the swirling flows discharged from the fluid passages from interfering with each other (collision), and to convey and hold the conveyed object in a non-contact manner while maintaining a balanced state.

  In the transport holder according to the sixth aspect of the present invention, in the fifth aspect, each fluid passage is directed toward the side end of the nearest plate member.

  According to this configuration, since the swirling flow discharged from each fluid passage can be discharged from the side end portion of the plate material to the outside of the plate material, the swirling flow discharged from each fluid passage stays on the surface of the plate material. Thus, it is possible to suppress the balance of the transported body from being lost.

  A conveyance holding device according to a seventh aspect of the present invention is a conveyance holder according to any one of the first to sixth aspects, a supply device that supplies fluid to the fluid supply path, and a surface of the plate member. Suction means for sucking air from the air and detection means for detecting a change in the suction load of the suction means.

  According to this configuration, it is possible to detect the presence or absence of the transported object based on the detection result of the change in the suction load by the detection unit.

  Since this invention was set as the said structure, the conveyance holder and conveyance holding apparatus which generate | occur | produce a negative pressure efficiently can be provided.

FIG. 1A is a plan view of a transport holder according to an embodiment of the present invention, and FIG. 1B is a view of the transport holder shown in FIG. The part is a cross-sectional view taken along the line AA. FIG. 2 is a perspective view of the conveyance holding device according to the embodiment of the present invention. FIG. 3 is a perspective view of the transport holder according to the embodiment of the present invention as seen obliquely from below. FIG. 4A is a perspective view of the ejection port of the transport holder when viewed from above obliquely when the main body cover is removed. FIG. 4B is a cross-sectional view taken along the line B-B of the ejection port illustrated in FIG. FIG. 5A to FIG. 5C are views showing modifications of the transport holder shown in FIG.

  Hereinafter, a conveyance holder and a conveyance holding device according to an embodiment of the present invention will be specifically described with reference to the accompanying drawings. In the drawings, members (components) having the same or corresponding functions are denoted by the same reference numerals and description thereof is omitted as appropriate.

<First Embodiment>
As shown in FIGS. 1 (A) and 1 (B), the transfer holder 10 is replaced with a hand at the tip of an arm of a transfer robot (for example, a transfer robot using a 6-axis general-purpose robot for transfer). It has the base | substrate 12 as an attachment part attached.

The base 12 is configured such that a long plate-like base upper part 14 and a base lower part 16 sandwich one end of a two-layered body plate 18 in the lateral direction of the base upper part 14.
Here, the main body plate 18 has a main body base 32 and a main body cover 34 as will be described later. The main body base 32 is sandwiched between the base upper portion 14 and the base lower portion 16 until the end in the lateral direction. The main body cover 34 is sandwiched between the base upper part 14 and the base lower part 16 partway in the short direction. Therefore, a gap D1 is formed between the upper part 14 and the lower part 16 (main body base 32) in the short direction, and a plate-like part 11B at the tip of the arm 11A of the transfer robot 11 is formed in the gap D1. It comes in (see FIG. 2).

As shown in FIGS. 1A and 1B, the base upper portion 14 and the base lower portion 16 are formed with four bolt holes 14A and 16A having the same axis and penetrating in the plate thickness direction. These bolt holes 14A and 16A are arranged at the four corners of a substantially square region in which the central portions of the base upper portion 14 and the base lower portion 16 are the center of gravity.
Similarly, bolt holes 18A penetrating in the plate thickness direction are formed in the body base 32 of the body plate 18 at the same positions as the four bolt holes 14A and 16A. On the other hand, the body cover 34 of the body plate 18 is formed with bolt holes 18B penetrating in the thickness direction at the same positions as the two bolt holes 14A and 16A.
Bolts 20A, 16A and 18A, 18A, which are at the same position, are respectively inserted with bolts 20 from the base upper part 14 side and are tightened to nuts 22 on the base lower part 16 side. Thereby, the base | substrate upper part 14, the base | substrate lower part 16, and the main body plate 18 are mutually connected and fixed. Further, when the plate-like portion 11B of the arm 11A enters the gap D1, as shown in FIG. 2, the transport holder 10 and the arm 11A are connected and fixed to each other, and the transport holder 13 of the present embodiment as a whole. Come to compose.

  At the center of the upper part 14 of the base, it penetrates in the thickness direction, is connected to a robot or a positive pressure pump 23 (see FIG. 2) separately from the robot, and communicates with a positive pressure passage 24 described later. A connection port 26 is formed. Further, a negative pressure connection port 28 penetrating in the plate thickness direction and parallel to the positive pressure connection port 26 is formed in the base upper part 14. The negative pressure connection port 28 is connected to a robot or a negative pressure pump 29 (see FIG. 2) separately from the robot, and communicates with a negative pressure passage 30 described later. In FIG. 1B, “IN” indicates supply of air gas, and “OUT” indicates discharge of air gas.

  The main body plate 18 sandwiched between the upper portion 14 and the lower portion 16 of the base extends from between the upper portion 14 and the lower portion 16 in the direction opposite to the arm 11A (hereinafter referred to as “arm tip L direction”). Exposed.

  The main body plate 18 is a two-layered plate having a main body base 32 disposed on the base lower portion 16 side and a main body cover 34 disposed on the base upper portion 14 side. The main body base 32 and the main body cover 34 each have a substantially rectangular shape in plan view that is long in the arm tip L direction, and the size of the main body base 32 is larger in the width direction and the longitudinal direction than the size of the main body cover 34. .

  The main body base 32 is a back surface 32A that is an upper surface in the present embodiment, and a lower surface in the present embodiment, and is a holding surface 32B that transports and holds a thin plate-like workpiece W such as a semiconductor wafer or glass substrate in a non-contact manner (FIG. ))).

  A groove is formed along the longitudinal direction of the main body base 32 at the center in the width direction of the back surface 32 </ b> A of the main body base 32, and the positive pressure passage 24 is formed by closing the groove with the main body cover 34. A branch point 24 </ b> A where the passage is divided in the width direction of the main body base 32 is provided on the arm tip L side of the positive pressure passage 24. Further, after dividing in the left-right direction, the positive pressure passage 24 is provided with a branch point 24B which is divided again in the longitudinal direction. Further, after being divided in the longitudinal direction, the positive pressure passage 24 communicates with a jet outlet 50 described later at both ends thereof, and air gas as a fluid is supplied to the jet outlet 50.

  Similarly, a groove is formed along the longitudinal direction of the main body base 32 between the central portion in the width direction and the side end portion on the back surface 32 </ b> A of the main body base 32, and this groove is closed by the main body cover 34. A negative pressure passage 30 is formed. The end of the negative pressure passage 30 on the arm tip L side communicates with a negative pressure hole 36 for sucking air from the back surface 32A.

As shown in FIG. 3, the negative pressure hole 36 is formed in the holding surface 32 </ b> B of the main body base 32 around a rubber body 40 described later. The negative pressure hole 36 is provided with a pressure sensor 38 that detects a change in the suction load of the negative pressure hole 36. Here, when the workpiece W is conveyed and held by the holding surface 32B, the negative pressure in the negative pressure hole 36 rises from the atmospheric pressure, so the pressure sensor 38 detects a change (a rise change) in the suction load. When the workpiece W is no longer conveyed and held by the holding surface 32B, the negative pressure in the negative pressure hole 36 returns to the atmospheric pressure, so that the pressure sensor 38 detects a change (downward change) in the suction load.
The pressure sensor 38 is electrically connected to the robot 11 and transmits to the robot 11 the type of change in the suction load (upward change or downward change) as needed. The robot 11 detects the presence or absence of the workpiece W based on the change in the suction load. Specifically, the robot 11 determines that there is a workpiece W on the holding surface 32B if the received change in the suction load is an increase change, and if the received change in the suction load is a downward change, the robot 11 It is determined that there is no work W. The result of determining the presence / absence of the workpiece W in this way is notified to the user of the robot 11 by, for example, characters, images, sounds, vibrations, or the like.
Note that the function of detecting the presence or absence of the workpiece W may be mounted on the pressure sensor 38 instead of the robot 11. Conversely, the robot 11 detects not only the presence / absence of the workpiece W but also the change of the suction load, and the pressure sensor 38 measures the negative pressure amount of the negative pressure hole 36 and transmits the result to the robot 11 as needed. It may be.

In addition, two rubber bodies 40 are provided along the longitudinal direction at both ends in the width direction of the holding surface 32B of the main body base 32, respectively. In other words, the rubber body 40 is disposed at the four corners of the square area of the holding surface 32B centered on the branch point 24A.
Each rubber body 40 is a disc-shaped rubber having a circular opening 42 in the center, and a fluid passage 44 (notch) is formed radially outward from the opening 42. It has a shape.

  The fluid passages 44 are formed so as not to face each other. Further, each fluid passage 44 is directed toward the side end portion of the nearest main body base 32, and the downstream outlet of each fluid passage 44 is located near the side edge of the holding surface 32B. On the other hand, the upstream outlet of the fluid passage 44 communicates with the opening 42.

  The holding surface 32B located in the opening 42 of each rubber body 40 has one circular hole 52 of the jet port 50 coaxially with the opening 42 and having a smaller diameter than the opening 42 (four in total). ) And the circumference of each circular hole 52 is surrounded by the inner peripheral wall of the opening 42.

  As shown in FIGS. 4A and 4B, the four ejection ports 50 each have a circular hole 52, a fluid introduction circular hole 54, and an inflow port 56.

  The diameter of the circular hole 52 is uniform in the axial direction, and the inner peripheral wall 52A of the circular hole 52 is perpendicular to the holding surface 32B.

  A fluid introduction circular hole 54 is formed in the back part (the top part in the present embodiment) of the circular hole 52 in the main body base 32. The fluid introduction circular hole 54 communicates with the circular hole 52 and is formed coaxially with the circular hole 52. The diameter of the fluid introduction circular hole 54 is larger than the diameter of the circular hole 52 and is aligned in the axial direction, and the inner peripheral wall 54A of the fluid introduction circular hole 54 is perpendicular to the holding surface 32B.

  At the bottom of the fluid introduction circular hole 54, between the inner peripheral wall 54A of the fluid introduction circular hole 54 and the inner peripheral wall 52A of the circular hole 52, a stepped surface 58 is formed which connects these walls and is parallel to the holding surface 32B. Yes.

  An inflow port 56 is formed in the inner peripheral wall 54 </ b> A of the fluid introduction circular hole 54 so as to be perpendicular to the step surface 58. The inflow port 56 communicates with the positive pressure passage 24, and introduces air gas supplied from the positive pressure passage 24 in a direction substantially tangential to the fluid introduction circular hole 54. The “substantially tangential direction” refers to a direction having an angle of 10 degrees or less with respect to a tangential direction of a circle centered on the axis of the fluid introduction circular hole 54.

  The height h1 of the inflow port 56 is made equal to the height h2 of the inner peripheral wall 54A of the fluid introduction circular hole 54 as shown in FIG. 4B.

  Next, operations and effects of the transport holder 10 and the transport holder 13 according to the present embodiment will be described.

  In the configuration of the conveyance holder 10 and the conveyance holding device 13, air gas is supplied from the positive pressure pump 23 to the positive pressure passage 24. As shown in FIGS. 4A and 4B, the air gas that has passed through the positive pressure passage 24 is introduced from the inflow port 56 of the ejection port 50 in a substantially tangential direction of the fluid introduction circular hole 54. Since the introduced air gas swirls and flows along the inner peripheral wall 54A of the fluid introduction circular hole 54, it becomes a swirl flow F1 in the fluid introduction circular hole 54. The swirl flow F1 flows while drawing a spiral toward the circular hole 52 communicated from the fluid introduction circular hole 54, and the gap between the work W installed facing the holding surface 32B of the main body base 32 and the holding surface 32B. Pass through D2 in a positive pressure state. In addition, a low pressure (negative pressure) region is formed by the Bernoulli effect at the center of the generated swirling flow F1 (near the axis of the circular hole 52 and the fluid introduction circular hole 54). The workpiece W is sucked from the circular hole 52 of the outlet 50. As a result, a predetermined interval is maintained between the holding surface 32B and the work W by the positive pressure passing between the holding surface 32B and the work W and the negative pressure at the center. The apparatus 13 can transport and hold the workpiece W in a non-contact manner.

Here, the spout 50 communicates with the circular hole 52 and is formed coaxially with the circular hole 52 and has a fluid introduction circular hole 54 having a larger diameter than the circular hole 52. A stepped surface 58 is formed between the inner circumferential wall 54A of the introduction circular hole 54 and connecting these walls in parallel with the holding surface 32B.
By this stepped surface 58, the air gas introduced from the inlet 56 does not flow into the circular hole 52 but stays in the fluid introducing circular hole 54 for a long time, and is sufficiently accelerated in the fluid introducing circular hole 54 to be accelerated at high speed. F1. Further, since the circular hole 52 has a smaller diameter than the fluid introduction circular hole 54, the high-speed swirling flow F1 flowing into the fluid introduction circular hole 54 has an increased rotational speed and becomes a faster swirling flow F1. It is discharged from 50 circular holes 52.
Therefore, according to the conveyance holder 10 and the conveyance holding device 13 according to the present embodiment, the high-speed swirling flow F1 can be generated without increasing the introduction speed of the air gas supplied to the inflow port 56. Negative pressure can be efficiently generated in the central portion.

  Further, since the height h1 of the inflow port 56 is equal to the height of the inner peripheral wall 54A of the fluid introduction circular hole 54, a large amount of air gas can be introduced into the fluid introduction circular hole 54, and the air gas to be introduced can be introduced. All can be swung in the fluid introduction circular hole 54. For this reason, the swirl | vortex flow F1 can be generated efficiently.

  Moreover, since the conveyance holder 10 has the four disk-shaped rubber bodies 40, when the workpiece | work W moves to the holding surface 32B side, it contacts with the rubber body 40 before contacting the holding surface 32B. At this time, the rubber body 40 is elastically deformed to absorb the impact force of the workpiece W. Therefore, damage to the workpiece W and the holding surface 32B can be suppressed. Further, the position shift of the workpiece W can be prevented by the frictional force of the rubber body 40.

  Further, in these four rubber bodies 40, fluid passages 44 are respectively formed radially outward from the opening 42 in the central portion of the rubber body 40, so that the swirl discharged from the circular hole 52 of the jet outlet 50. Most of the flow F1 is swung around the opening 42 of the rubber body 40 and then discharged to the outside through the gap D2 between the workpiece W and the holding surface 32B while passing through the fluid passage 44. Therefore, as shown in FIG. 4A, the direction of the swirl flow F1 discharged to the outside from the gap D2 between the workpiece W and the holding surface 32B can be defined.

  Further, as shown in FIG. 3, these fluid passages 44 are formed so as not to face each other, so that the swirl flows F1 discharged from the fluid passages 44 are prevented from interfering with each other (collision). In addition, the workpiece W can be conveyed and held in a non-contact manner while maintaining a balanced state.

  Further, since each fluid passage 44 is directed toward the side end portion of the main body base 32 that is closest, the swirl flow F1 discharged from each fluid passage 44 is transferred from the side end portion of the main body base 32 to the outside of the main body base 32. Since it can discharge | emit, it can suppress that the swirling flow F1 discharged | emitted from each fluid channel | path 44 stays in the holding surface 32B, and the balance of the workpiece | work W is destroyed.

  Although the present invention has been described in detail with respect to specific embodiments, the present invention is not limited to such embodiments, and various other embodiments are possible within the scope of the present invention. It will be apparent to those skilled in the art, and for example, the plurality of embodiments described above can be implemented in combination as appropriate. Further, the following modifications may be combined as appropriate.

  For example, instead of the rubber body 40, a disk-like elastic body made of an elastomer other than rubber, a fluororesin, or the like may be used. Further, the shape of the rubber body 40 or other elastic body may be a triangular prism or a quadrangular prism in which an opening 42 is formed in the central portion other than the disc shape.

Moreover, although the case where the height h1 of the inflow port 56 is made equal to the height h2 of the inner peripheral wall 54A of the fluid introduction circular hole 54 has been described, the height h1 is small even if larger than the height h2. May be. However, if the height is greater than h2, air gas from the inflow port 56 is introduced not only into the fluid introduction circular hole 54 but also into the circular hole 52, and the air gas retained by the step surface 58 can be reduced. Therefore, from the viewpoint that all of the introduced air gas can be swirled in the fluid introduction circular hole 54, the height h1 is preferably not more than the height h2. Further, from the viewpoint that a large amount of air gas can be introduced into the fluid introduction circular hole 54, the height h1 is more preferably equal to the height h2 as in the above embodiment.
Further, although the case where the air introduced from the inflow port 56 is air gas has been described, other fluids such as nitrogen gas and oxygen gas may be used.

  Moreover, although the case where the diameter of the circular hole 52 was equal over the axial direction was demonstrated, as shown to FIG. 5 (A)-(C), it does not need to be equal.

  Specifically, as shown in FIG. 5A, the circular hole 52 has a first circular hole 60 formed in the holding surface 32B and a diameter larger than that of the first circular hole 60, and the first circular hole 60. And a second circular hole 62 communicating with the second circular hole 62.

In this case, the second circular hole 62 communicates with the fluid introduction circular hole 54 at the back (top) of the main body base 32 rather than the holding surface 32 </ b> B, and has a smaller diameter than the fluid introduction circular hole 54. Further, at the bottom of the fluid introduction circular hole 54, between the inner peripheral wall 54A of the fluid introduction circular hole 54 and the inner peripheral wall 62A of the second circular hole 62, these walls are connected and a step surface parallel to the holding surface 32B. 58 is formed. Further, at the bottom of the second circular hole 62, between the inner peripheral wall 62A of the second circular hole 62 and the inner peripheral wall 60A of the first circular hole 60, these walls are connected and a step surface parallel to the holding surface 32B. 64 is formed.
Thus, the residence time of the swirling flow F1 can be lengthened by using a plurality of step surfaces.

  Further, as shown in FIG. 5B, the diameter of the circular hole 52 may be gradually reduced toward the holding surface 32B.

  Furthermore, as shown in FIG. 5C, not only the diameter of the circular hole 52 is gradually reduced toward the holding surface 32B, but also the diameter of the fluid introduction circular hole 54 is gradually reduced toward the holding surface 32B. You may diameter.

  Further, in the present embodiment, the case where the holding surface 32B of the workpiece W is the lower surface has been described, but it may be the upper surface. Even in this case, the workpiece W can be conveyed and held by the jet port 50.

  Further, in the present embodiment, the configuration in which the transport holder 10 and the arm 11A are connected and fixed to each other may not be as shown in FIG. 2, and the feed holder 10 is sandwiched by claws or the like provided on the arm. Other connection fixing configurations may be used.

  4B and 5A to 5C, a gap is formed between the workpiece W and the rubber body 40, but it is preferable that this gap is not formed during use. When the gap is not formed, the workpiece W is conveyed and held in contact with the rubber body 40, but is kept in a non-contact state with the holding surface 32B, and the workpiece W flies by friction with the rubber body 40. It is because it can prevent.

DESCRIPTION OF SYMBOLS 10 Conveyance holder 13 Conveyance holding apparatus 18 Main body plate (plate material)
23 Positive pressure pump (supply device)
24 Positive pressure passage (fluid supply passage)
29 Negative pressure pump (suction means)
30 Negative pressure passage (suction means)
32B Holding surface (surface)
36 Negative pressure hole (suction means)
38 Pressure sensor (detection means)
40 Rubber body (elastic member)
42 opening 44 fluid passage 50 spout 52 circular hole 52A inner peripheral wall 54 fluid introduction circular hole 54A inner peripheral wall 56 inlet 60 first circular hole (circular hole)
62 Second circular hole (circular hole)
W Work

Claims (7)

Board material,
A circular hole formed on the surface of the plate material, a fluid introduction circular hole communicating with the circular hole and coaxially formed with the circular hole, having a diameter larger than the circular hole, and an inner peripheral wall of the fluid introduction circular hole; An injection port formed and for introducing a fluid in a substantially tangential direction of the fluid introduction circular hole, and
A fluid supply path formed in the plate material and supplying a fluid to the inlet;
A transport holder comprising: The height of the inlet is not more than the height of the inner peripheral wall of the fluid introduction circular hole.
The transport holder according to claim 1. A disc-shaped elastic member provided on the surface of the plate material and surrounding the circular hole;
The conveyance holder of Claim 1 or Claim 2 which has these. The plate member includes a plurality of the jet nozzles provided with the elastic member,
Each elastic member has a fluid passage formed radially outward from the central opening of the elastic member.
The conveyance holder according to claim 3. Each fluid passage is formed so as not to face each other,
The transport holder according to claim 4. Each fluid passage is directed to the side edge of the nearest plate,
The transport holder according to claim 5. The transport holder according to any one of claims 1 to 6,
A supply device for supplying fluid to the fluid supply path;
Suction means for sucking air from the surface of the plate material;
Detecting means for detecting a change in suction load of the suction means;
A conveyance holding device comprising:

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