TWI758121B - Air flotation adsorption device - Google Patents

Abstract

The invention provides an air-floating adsorption device, comprising a base, a suction nozzle, an air supply unit and an air extraction unit. The base is formed with an air supply channel, and the air supply channel is communicated with the outside through an opening; the suction nozzle is penetrated in the air supply channel and a part is exposed through the opening, there is a gap between the wall surface of the opening and the suction nozzle, and a suction nozzle is formed in the suction nozzle. The air passage; the air supply unit is communicated with the air supply passage; the air extraction unit is communicated with the air extraction passage.

Description

Air flotation adsorption device

The present invention provides an air flotation adsorption device, and in particular relates to an air flotation adsorption device combining air flotation suction and suction adsorption.

In the process of semiconductor and precision electronics industry, it is often necessary to use suction devices to move objects such as chips or circuit boards to a designated position. In the suction type suction devices, some devices will directly use the suction nozzle to inhale to generate negative pressure, so that the object will move after being attached to the suction nozzle, and some devices will change the fluid flow rate through a specially designed airflow channel. way to generate relative negative pressure and adsorb objects. However, when the above methods are used individually, the former cannot confirm whether the object is within the range of negative pressure generated by the suction nozzle, which is likely to cause air suction and cause the pump to consume power uselessly; the latter is prone to insufficient suction. For this reason, some devices on the market combine these two methods, that is, air flotation suction is performed first to ensure that the object enters the negative pressure range of the suction nozzle, and then the suction nozzle is used for suction. When it is small, it cannot be adsorbed by the air flotation ports and suction nozzles distributed in different positions.

The inventor then exhausted his mind and researched it carefully, and then developed an air flotation adsorption device that combines air flotation suction and suction adsorption, in order to achieve the effect of improving adsorption stability and adapting to objects of different sizes.

The invention provides an air-floating adsorption device, comprising a base, a suction nozzle, an air supply unit and an air extraction unit. The base is formed with an air supply channel, and the air supply channel is communicated with the outside through an opening; The suction nozzle is penetrated in the air supply channel and a part is exposed through the opening. There is a gap between the wall surface of the opening and the suction nozzle, and an air suction channel is formed in the suction nozzle; the air supply unit is connected to the air supply channel; the suction unit is connected to the suction nozzle. airway.

In one embodiment, the base includes an outer edge portion, the outer edge portion is disposed outside the opening, and the inner diameter of the base gradually increases from the opening to the outer edge portion.

In one embodiment, the above-mentioned outer edge portion has an end surface, and the normal direction of the end surface is parallel to the extending direction of the air supply channel, and the base further includes an inclined portion, and the inclined portion is connected between the opening and the outer edge portion and has an inclined surface. , and the normal direction of the inclined surface is inclined with respect to the extending direction of the air supply channel.

In one embodiment, the above-mentioned suction nozzle has an adsorption surface, and the adsorption surface is aligned with the end surface.

In one embodiment, a guide groove is formed on the outer edge, and the guide groove is recessed relative to the end surface.

In one embodiment, the above-mentioned suction nozzle includes a body and an adsorption part, the adsorption part is fixed on the body and protrudes from the base, and the rigidity of the adsorption part is smaller than that of the body.

In one embodiment, the above-mentioned adsorption part includes a connecting part and a contacting part, the connecting part is connected between the body part and the contacting part, and the outer diameter of the contacting part is smaller than the outer diameter of the connecting part.

In one embodiment, the air flotation adsorption device further includes a control unit, and the control unit is electrically connected to the air supply unit and the air extraction unit. When the air flotation adsorption device adsorbs an object through the air suction unit and the suction nozzle, the control unit controls the air supply unit to stop supplying air to the air supply channel.

In one embodiment, the base further includes a holding portion, the holding portion is formed with a holding hole, the holding hole is connected to the air supply channel, the suction nozzle includes a body, and the inner diameter of the holding hole is equal to the outer diameter of the body.

In one embodiment, the above-mentioned air supply unit includes a pump and an air valve, and the pump is connected to the air supply channel through the air valve.

Thereby, the suction nozzle of the air flotation adsorption device of the present invention is penetrated in the air supply channel, so when the air supply unit supplies air to the air supply channel to provide air flotation suction, the air suction unit can suck air through the suction nozzle to adsorb objects , not only improves the stability of adsorption, but also the air flotation attraction and the suction adsorption are set in the same position, so it can be applied to objects of different sizes.

In order to make the above-mentioned features and advantages of the present invention more obvious and easy to understand, the following embodiments are given and described in detail with the accompanying drawings as follows.

1, 1a, 1b: Air flotation adsorption device

100, 100a, 100b: base

110: Retaining part

120, 120a: outer edge

122, 122a, 122b: end face

124: Guide groove

130: Inclined part

132: Inclined surface

140: inner edge

142: inner end face

150: Fixtures

200, 200a, 200b: nozzle

210: Body

220: adsorption part

222: Connector

224: Contact Department

230: adsorption surface

300: Air supply unit

310: Pump

320: Air valve

400: Extraction unit

500: Control Unit

A: area

C: gap

H: Retaining hole

O: open

P _E : exhaust duct

P _S : Air supply duct

X-X, Y-Y: Section

FIG. 1 is a schematic perspective view of an embodiment of the air-float adsorption device of the present invention.

FIG. 2 is a block diagram of components of the air-floating adsorption device of FIG. 1 .

FIG. 3 is a schematic top view of FIG. 1 .

FIG. 4 is a schematic cross-sectional view along the X-X section of FIG. 3 .

FIG. 5 is an enlarged schematic view of area A in FIG. 4 .

FIG. 6 is a schematic front view of another embodiment of the air flotation adsorption device of the present invention.

FIG. 7 is a schematic cross-sectional view along the Y-Y section of FIG. 6 .

FIG. 8 is a schematic front view of yet another embodiment of the air flotation adsorption device of the present invention.

FIG. 9 is a schematic partial front view of FIG. 8 .

The foregoing and other technical contents, features and effects of the present invention will be clearly presented in the following detailed description of the preferred embodiments with reference to the drawings. It is worth mentioning that the directional terms mentioned in the following embodiments, such as: up, down, left, right, front or rear, etc., are only for reference to the attached drawings. direction. Accordingly, the directional terms used are intended to illustrate, but not to limit the invention. Furthermore, in the following embodiments, the same or similar elements will be given the same or similar reference numerals.

Please refer to FIGS. 1 to 3 , wherein FIG. 1 is a three-dimensional schematic diagram of an embodiment of the air-floating adsorption device of the present invention, FIG. 2 is a block diagram of components of the air-floating adsorption device of FIG. 1 , and FIG. 3 is FIG. 1 Schematic top view of . The air flotation adsorption device 1 of this embodiment includes a base 100 , a suction nozzle 200 , an air supply unit 300 and an air extraction unit 400 , wherein a part of the suction nozzle 200 is disposed inside the base 100 , and the air supply unit 300 For example, it includes a pump 310 and an air valve 320 and is connected to the base 100 . The air extraction unit 400 includes, for example, an air pump (not shown) and is connected to the suction nozzle 200 . Preferably, the air flotation adsorption device 1 further includes a control unit 500, wherein the control unit 500 is, for example, a programmable logic controller (PLC) or a computer, and is electrically connected to the air supply unit 300 and the extraction unit. Gas unit 400.

Please refer to FIG. 4 and FIG. 5 , wherein FIG. 4 is a schematic cross-sectional view of FIG. 3 along the XX section, and FIG. 5 is an enlarged schematic view of the area A in FIG. 4 . In detail, the base 100 is formed with an air supply channel P _S , the air supply channel P _S communicates with the outside through an opening O, and the air supply unit 300 is communicated with the air supply channel P _S . Furthermore, the pump 310 is connected to the air supply channel PS through the air valve ₃₂₀ , whereby the air supply to the air supply channel _PS can be opened or closed through the air valve 320 , and the suction nozzle 200 is penetrated in the air supply channel _PS A part is exposed through the opening O, and there is a gap C between the wall surface of the opening O and the suction nozzle 200 . Preferably, the base 100 includes a holding portion 110, the holding portion 110 is formed with a holding hole H, the holding hole _H communicates with the air supply channel PS, and the suction nozzle 200 includes a body portion 210, and the inner diameter of the holding hole H is the same as the body portion. The outer diameters of the nozzles 210 are approximately the same. When the suction nozzle 200 and the base 100 are assembled, the holding hole H and the body 210 are in a tightly fitted state, whereby the base 100 can hold the suction nozzle 200 .

On the other hand, an air suction channel PE is formed in the suction _nozzle 200 , and the air suction unit 400 is communicated with the air suction channel _PE . Through such a configuration, when the air-floating adsorption device 1 approaches an object, the control unit 500 can control the air supply unit 300 to supply air to the air supply channel P _S . When spraying from the side, according to Bernoulli's theorem, a relatively low pressure will be formed around the suction nozzle 200, so the object can be attracted to the surrounding of the suction nozzle 200 through air flotation. At this time, the control unit 500 further controls the suction unit 400 to pass through the suction duct _PE performs air extraction. Since the object is already located around the suction nozzle 200 under the action of air flotation, the suction nozzle 200 can easily absorb the object, thereby achieving the effect of improving the adsorption stability.

It is worth mentioning that, in the above process, although the air flotation adsorption device 1 operates in the mode of firstly supplying air to attract objects, and then _pumping air by the air extraction unit 400 through the air extraction channel PE, the present invention does not limited to this. In other possible embodiments, the air supply unit 300 and the air extraction unit 400 can also be activated at the same time, so that the object is immediately adsorbed by the suction nozzle 200 while being subjected to air flotation, and the same effect can also be achieved.

Furthermore, as shown in FIG. 5 , the base 100 includes an outer edge portion 120 , an inclined portion 130 and an inner edge portion 140 , wherein the outer edge portion 120 is disposed outside the opening O, and the inclined portion 130 is connected to the opening O and between the outer edge portion 120 , and the inner edge portion 140 is connected between the opening O and the inclined portion 130 . In this way, the inner diameter of the base 100 from the opening O to the outer edge portion 120 is gradually increased, so an appropriate gap C can be maintained in accordance with the shape of the suction nozzle 200 to maintain a stable negative pressure environment.

In addition, the outer edge portion 120 has an end surface 122, the inclined portion 130 has an inclined surface 132, and the inner edge portion 140 has an inner end surface 142, wherein the normal direction of the end surface 122 and the inner end surface 142 is parallel to the extending direction of the air supply channel _PS (that is, the up-down direction in FIG. 5 ), and the normal direction of the inclined surface 132 is inclined with respect to the extending direction of the air supply channel _PS . In other words, the size of the gap _C between the base 100 and the suction nozzle 200 The edge portion 140 , the inclined portion 130 to the outer edge portion 120 remain substantially fixed. Through such a configuration, the gas can flow from the inner end surface 142 along the inclined surface 132 to the end surface 122, and can flow in the horizontal direction (the direction parallel to the surface of the adsorption object) when passing through the inner end surface 142 and the end surface 122. It is easy to hinder the suction nozzle 200 from sucking objects, which further improves the stability of suction.

On the other hand, in order to improve the adhesion between the suction nozzle 200 and the suction object, the suction nozzle 200 further includes a suction part 220 , wherein the suction part 220 is fixed on the body part 210 and protrudes relative to the base 100 , and the rigidity of the suction part 220 is less than The rigidity of the body 210 . Specifically, the body portion 210 of this embodiment is made of, for example, a metal material, and the adsorption portion 220 is made of, for example, a material such as rubber or plastic. Through such a configuration, when the suction nozzle 200 suctions an object, the suction part 220 can conform to the shape of the object and adhere more closely to the surface of the object than the body 210 , and when the suction force increases, the suction part 220 can properly The deformation thus prevents imprinting on the surface of the object.

More specifically, the suction part 220 includes a connecting part 222 and a contacting part 224 , wherein the connecting part 222 is connected between the body part 210 and the contacting part 224 , and the outer diameter of the contacting part 224 is smaller than that of the connecting part 222 . Therefore, when the surface size of the object is small, the inner diameter of the suction nozzle 200 can still be maintained to match the suction force of the suction unit 400, and it is only necessary to adjust or replace the suction part 220 having the corresponding size of the contact part 224, so that the The air-floating adsorption device 1 has greater flexibility in use.

Please refer to FIG. 6 and FIG. 7 , wherein FIG. 6 is a schematic front view of another embodiment of the air-floating adsorption device of the present invention, and FIG. 7 is a schematic cross-sectional view of FIG. 6 along the Y-Y section. The air-floating adsorption device 1a of this embodiment is similar to the air-floating adsorption device 1 of FIG. 1 , and the main difference between the two is that a guide groove 124 is formed on the outer edge 120a of the air-floating adsorption device 1a, and the suction The nozzle 200a does not have the suction part 220 .

In detail, due to the large area of some objects, it needs to be adsorbed through a plurality of air-floating adsorption devices 1a. In order to maintain the fit between the air-floating adsorption device 1a and the object, the suction nozzle 200a of this embodiment has a The suction surface 230 is aligned, and the suction surface 230 is aligned with the end surface 122a of the outer edge portion 120a. Therefore, when the object is subjected to the air-floating attraction of the plurality of air-floating adsorption devices 1a, a part of the object can be attached to each adsorption surface 230 at the same time, and the other part is abutted against the end surface 122a, thereby maintaining the suction The flatness of the object.

At the same time, in order to prevent the gas _ejected through the air supply channel PS from being blocked by the object and unable to be discharged smoothly after the object is attached to the end face 122a, two guide grooves 124 are formed on the outer edge portion 120a of this embodiment. The grooves 124 are symmetrically distributed on both sides of the opening O and are recessed relative to the end surface 122a. Thereby, even when the suction nozzle 200a adsorbs the object and causes the object to adhere to the end surface 122, the gas discharged through the air supply unit 300 can still be discharged from the side of the base 100 through the air supply channel _PS and the guide groove 124, thereby Make sure the adsorption process goes smoothly.

Please refer to FIGS. 8 and 9 , wherein FIG. 8 is a schematic front view of another embodiment of the air-floating adsorption device of the present invention, and FIG. 9 is a partial front view of FIG. 8 . The air-floating adsorption device 1b of this embodiment is similar to the air-floating adsorption device 1a in FIG. 6 , and the main difference between the two is that the base 100b of the air-floating adsorption device 1b is plate-shaped, and there is no guide on the end surface 122b groove.

In detail, the base 100b of the air-floating adsorption device 1b is plate-shaped, so that objects with a large area can be adsorbed, and the base 100b is formed with a plurality of air supply passages PS, and a plurality of suction passages P _S are _drilled in the air supply passages PS. For the nozzle 200b, due to the large area of the base 100b, in order not to affect the flatness of the end surface 122b, no guide groove is provided on the end surface 122b. Instead, the air-floating adsorption device 1b controls the switching between the air-floating suction and the suction nozzle 200b through the control unit 500. When the air-floating adsorption device 1b absorbs the object through the suction unit 400 and the suction nozzle 200b, the control unit 500 The air supply unit 300 will be controlled to stop supplying air to the air supply passage P _S . With such an arrangement, the air-floating adsorption device 1b can prevent the gas discharged from the gas supply unit 300 from being discharged smoothly when the guide groove is not provided.

It is worth mentioning that, even in the embodiment of the air flotation adsorption device 1a having the guide groove 124 in FIG. 6, the air supply unit 300 and the air extraction unit 400 can be controlled by the control unit 500, so as to avoid the help of air flotation. The Pu 310 is idling, which is not limited in the present invention.

The present invention has been disclosed above with preferred embodiments, but those skilled in the art should understand that the above embodiments are only used to describe the present invention, and should not be construed as limiting the scope of the present invention. It should be noted that all the changes and substitutions equivalent to the above-mentioned embodiments should be considered to be included in the scope of the present invention. Therefore, the protection scope of the present invention should be defined by the scope of the patent application.

100: base

110: Retaining part

150: Fixtures

200: nozzle

210: Body

220: adsorption part

320: Air valve

A: area

H: Retaining hole

O: open

P _E : exhaust duct

P _S : Air supply duct

X-X: Section

Claims (9)

An air flotation adsorption device, comprising: a base formed with an air supply channel, and the air supply channel is communicated with the outside through an opening; a suction nozzle, which is penetrated in the air supply channel and partially exposed through the opening, the opening There is a gap between the wall of the suction nozzle and the suction nozzle, an air suction channel is formed in the suction nozzle, and the suction nozzle includes: a body; and an adsorption part, which is fixed on the body and protrudes relative to the base, and the adsorption The rigidity of the body is smaller than the rigidity of the body; an air supply unit is connected to the air supply channel; and an air extraction unit is connected to the air extraction channel. The air-floating adsorption device of claim 1, wherein the base includes an outer edge portion, the outer edge portion is disposed outside the opening, and the inner diameter of the base gradually increases from the opening to the outer edge portion . The air-floating adsorption device according to claim 2, wherein the outer edge portion has an end face, the normal direction of the end face is parallel to the extending direction of the air supply channel, and the base further comprises an inclined portion, the inclined portion is connected to the There is an inclined surface between the opening and the outer edge portion, and the normal direction of the inclined surface is inclined relative to the extending direction of the air supply channel. The air-floating adsorption device according to claim 3, wherein the suction nozzle has an adsorption surface, and the adsorption surface is aligned with the end surface. The air-floating adsorption device according to claim 3, wherein a guide groove is formed on the outer edge portion, and the guide groove is recessed relative to the end surface. The air-floating adsorption device as claimed in claim 1, wherein the adsorption part comprises a connection part and a contact part, the connection part is connected between the body part and the contact part, and the outer diameter of the contact part is smaller than the outer diameter of the contact part The outer diameter of the connection. The air flotation adsorption device as claimed in claim 1, further comprising a control unit, the control unit is electrically connected to the air supply unit and the air extraction unit, when the air floatation adsorption device passes through the air extraction unit and the air extraction unit When the suction nozzle sucks an object, the control unit controls the air supply unit to stop supplying air to the air supply channel. The air-floating adsorption device according to claim 1, wherein the base further comprises a holding portion, the holding portion is formed with a holding hole, the holding hole is communicated with the air supply channel, and the inner diameter of the holding hole and the body are of the same outer diameter. The air flotation adsorption device according to claim 1, wherein the air supply unit comprises a pump and an air valve, and the pump is connected to the air supply channel through the air valve.

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