TWI749783B - Air chamber suction module - Google Patents

Abstract

The invention provides an air chamber type suction module, which includes an air suction part, a suction part and an air distribution part. A plurality of air chambers are formed in the air extraction part, and a plurality of air valves are arranged on the air extraction part, and the air chambers are connected to an air extraction pump through the air valve. The suction part is connected to the suction part and is arranged on the side of the suction part opposite to the air valve. A plurality of suction holes are formed on the suction part, and two of the suction holes are connected to one of the air chambers. The air distribution part is connected between the suction part and the suction part and is formed with a plurality of first connecting air chambers, a plurality of second connecting air chambers, and a plurality of air distribution channels.

Description

Air chamber suction module

The invention provides an air-chamber suction module, and particularly relates to an air-chamber suction module capable of distributing air through the air chamber to simplify pipeline configuration.

The suction module is a mechanism widely used in industry. Generally speaking, the suction module is connected to the suction pump through a pipeline, and sucks air through the suction pump so that the air holes connected to the suction pump form a negative pressure, thereby generating suction and sucking objects. However, when the object to be sucked needs a large number of air holes to suck, the pipeline connecting the suction pump to the suction pump will also increase, which not only occupies a huge external space, but is also easily entangled and collided with other components. Obstacles when moving. In addition, the suction power of the suction pump and the air hole has a purely positive correlation, so it is more difficult for the user to adjust the suction power for different areas of the suction module to meet practical needs.

The inventor then exhausted his mind to study carefully, and then developed an air chamber type suction module that can divide air through the air chamber, in order to achieve the effect of simplifying the pipeline configuration and partially adjusting the suction of the air hole.

The invention provides an air chamber type suction module, which includes an air suction part, a suction part and an air distribution part. A plurality of air chambers are formed in the air extraction part, and a plurality of air valves are arranged on the air extraction part, and the air chambers are connected to an air extraction pump through the air valve. The suction part is connected to the suction part and is arranged on the side of the suction part opposite to the air valve. A plurality of suction holes are formed on the suction part, and two of the suction holes are connected to one of the air chambers. The air distribution part is connected between the suction part and the suction part and is formed with a plurality of first connecting air chambers, a plurality of second connecting air chambers, and a plurality of air distribution channels. A connecting air chamber is connected to the two second connecting air chambers of the second connecting air chambers through the two divided air passages of these air connecting air chambers, the above-mentioned first connecting air chamber and the other first connecting air chamber of these first connecting air chambers The air chamber is connected to the air chamber, and the two suction holes are connected to one of the second connecting air chambers.

In one embodiment, the above-mentioned orthographic projection of the air distribution part relative to the suction part falls inside the suction part, and the orthographic projection of the suction part relative to the suction part falls inside the air distribution part and the suction part.

In one embodiment, a flange is formed on one side of the above-mentioned suction part connected to the air distribution part, the flange surrounds the air chamber, and a groove is formed on the side of the air distribution part connected to the suction part, and the groove surrounds the first connection part. The air chamber and the other first connecting air chamber, and the flange is embedded in the groove.

In one embodiment, one end of the aforementioned air splitting duct is connected to the side of the first connecting air chamber opposite to the air chamber, and the other end of the air splitting duct is connected to the side facing the suction hole of the second connecting air chamber.

In one embodiment, the above-mentioned suction part and the air distribution part are combined with each other by means of locking, welding, magnetic attraction or bonding, and the suction part is fixed on the air distribution part.

In one embodiment, the aforementioned air chamber is disposed at one end of the suction part, and the number of suction holes connected to the air chamber is smaller than the number of suction holes individually connected to other air chambers in these air chambers.

In one embodiment, the above-mentioned suction part is further provided with a connection part, and the suction part is connected to a mechanical arm or a moving mechanism through the connection part.

In an embodiment, the number of the above-mentioned air valves corresponds to the number of the air chambers, and the air valves are respectively connected to the air chambers, the suction holes are arranged at equal intervals, and the sum of the cross-sectional areas of the two suction holes is smaller than that of the air chambers. The cross-sectional area of the air hole of the valve.

In an embodiment, the rigidity of the material of the suction part is less than the rigidity of the material of the suction part.

In this way, the air chamber type suction module of the present invention can disperse air through the air chamber, so the number of external pipelines can be effectively reduced. In addition, because the connection between the suction hole and the air chamber is not a simple one-to-one Therefore, the user can adjust the suction power of the suction pump or the number of suction holes connected to the air chamber to change the suction force of the local pores and improve the applicability of the suction module.

In order to make the above-mentioned features and advantages of the present invention more comprehensible, the following specific embodiments are described in detail in conjunction with the accompanying drawings.

1: Air chamber suction module

100: Exhaust part

110: Air Room

120: Air valve

130: connecting part

140: lock hole

150: flange

200: Absorption Department

210: suction hole

300: Distributor

310: The first connecting air room

320: The second connecting air room

330: Divide the airway

340: Lock hole

350: Groove

A-A: Section

B: area

FIG. 1 is a three-dimensional schematic diagram of an embodiment of the air chamber type suction module of the present invention.

Fig. 2 is a schematic view of the right side of Fig. 1.

Fig. 3 is a perspective schematic view of the suction part in Fig. 1.

Fig. 4 is a schematic cross-sectional view of Fig. 2 along the A-A section.

FIG. 5 is a partial enlarged schematic diagram of area B in FIG. 4.

Fig. 6 is a perspective schematic view of the suction part in Fig. 1 from another angle.

Fig. 7 is a three-dimensional schematic diagram of the air distribution part in Fig. 1.

The foregoing and other technical content, features, and effects of the present invention will be clearly presented in the following detailed description of the preferred embodiment with reference to the drawings. It is worth mentioning that the directional terms mentioned in the following embodiments, for example: up, down, left, right, front or back, etc., only refer to the directions of the attached drawings. Therefore, the directional terms used are for illustration, not for limiting the present invention. In addition, in the following embodiments, the same or similar elements will use the same or similar reference numerals.

Please refer to Figures 1 to 3, in which Figure 1 is a perspective schematic view of an embodiment of the air chamber suction module of the present invention, Figure 2 is a schematic right side view of Figure 1, and Figure 3 is the suction part in Figure 1 Three-dimensional schematic diagram. The air-chamber suction module 1 of this embodiment includes a suction part 100 and a suction part 200, wherein the suction part The part 200 is connected to the suction part 100. Preferably, the air-chamber suction module 1 further includes an air distribution part 300, and the air distribution part 300 is connected between the suction part 100 and the suction part 200.

In detail, the air-chamber suction module 1 is suitable for being connected to a suction pump (not shown) to suck an object, such as a thin rubber strip used in a wafer cassette or a long length of similar size. Strip element. As shown in FIG. 1 and FIG. 2, a plurality of air valves 120 are arranged on the air extraction part 100, and the air extraction part 100 is connected to the air extraction pump through these air valves 120. Preferably, the suction part 100 is also provided with a connection part 130, and the suction part 100 is connected to a robotic arm or a moving mechanism through the connection part 130, whereby the air-chamber suction module 1 can be moved through the robotic arm or The mechanism freely moves and rotates to the top of the object to facilitate the suction operation. On the other hand, the suction part 200 and the air distribution part 300 are arranged on the side of the air suction part 100 with respect to the air valves 120. In this embodiment, the suction part 100 and the air distributing part 300 are combined with each other through a locking method, and the suction part 200 is fixed on the air distributing part 300. However, in other possible embodiments, the air discharging part 100 and The air distribution part can also be combined by welding, magnetic attraction or bonding, and moreover, it can be integrally formed by 3D printing, which is not limited by the present invention.

As shown in FIG. 2, in order to correspond to the width of the object to be sucked and avoid collision with other workpieces, the widths from the suction part 100, the distributing part 300 to the suction part 200 are gradually reduced in sequence. Therefore, the orthographic projection of the air distribution unit 300 with respect to the suction unit 100 falls inside the suction unit 100, and the orthographic projection of the suction unit 200 with respect to the suction unit 100 falls inside the air distribution unit 300 and the suction unit 100. . On the other hand, as shown in FIG. 3, the suction part 200 is a strip structure corresponding to the shape of the object to be sucked. The suction hole 210 is connected to the suction pump through the above-mentioned air valve 120 and provides suction to suck objects. In order to prevent the object from being pressed by the suction force and the suction hole 210 of the suction part 200 to produce indentation, preferably, the material rigidity of the suction part 200 is less than the material rigidity of the suction part 100. In this embodiment, the suction part 200 For example, a silicon strip made of silicon The air part 100 and the air distribution part 200 are made of metal materials, but the selection of materials in the present invention is not limited to this. In addition, in the present embodiment, the suction holes 210 are arranged at equal intervals, so as to avoid the insufficient suction of a specific part of the object and local loosening. However, in other embodiments, the user can also focus on The part of the suction force increases the distribution density of the suction holes 210.

Please refer to FIGS. 4 and 5, where FIG. 4 is a schematic cross-sectional view of FIG. 2 along the A-A section, and FIG. 5 is a partial enlarged schematic view of area B in FIG. 4. As shown in the figure, a plurality of air chambers 110 are formed in the suction part 100. These air chambers 110 are not connected to each other and are connected to the suction pump through the air valve 120, and two of the suction holes 210 on the suction part 200 are sucked The hole 210 is connected to one of the air chambers 110 (as indicated by the arrow of the suction hole 210 in FIG. 5).

In detail, in this embodiment, the number of air valves 120 corresponds to the number of air chambers 110, and the air valves 120 are respectively connected to the air chambers 110. In other words, each air chamber 110 of the suction unit 100 is connected to one air chamber. The valve 120, that is, the pumping pump, has the same contribution to the pumping volume and the pressure difference of each air chamber 110. On the other hand, since the above-mentioned two suction holes 210 are connected to the same air chamber 110, the two suction holes 210 have the same suction force for the object, that is, the air chamber type suction module 1 of this embodiment can borrow Air is divided by adjusting the number of connections between the air chamber 110 and the suction hole 210, thereby adjusting the suction force of a local area and simplifying the external pipeline. It is worth mentioning that, in order to make the suction force at the suction hole 210 greater than the suction force at the point where the air valve 120 is connected to the suction pump, the sum of the cross-sectional areas of the two suction holes 210 in this embodiment is smaller than that of the air valve connected to the corresponding air chamber 110 The cross-sectional area of the pores of 120. To be precise, for each air chamber 110 in the suction part 100, as long as the total cross-sectional area of the suction hole 210 connected to the air chamber 110 is greater than the cross-sectional area of the air valve 120 connected to the air chamber 110, according to the continuous equation, The gas flow rate of the suction hole 210 will be greater than the gas flow rate of the gas valve 120. Therefore, the gas flow rate of the gas valve 120 can be adjusted to ensure the lowest gas flow rate of the suction hole 210, so that the suction force at the suction hole 210 is greater than the setting The goal.

Furthermore, as shown in FIG. 5, the air distribution part 300 is formed with a plurality of first connecting air chambers 310, a plurality of second connecting air chambers 320, and a plurality of air distribution channels 330, and these air distribution channels 330 are connected to the first connecting air chambers. Between the air chamber 310 and the second connecting air chamber 320. Specifically, taking the above-mentioned air chamber 110 and the second suction holes 210 as an example, one of the first connecting air chambers 310 is connected to the second air passages 330 through the two air passages 330 of the air passages 330. The two second connecting air chambers 320 are connected to the air chamber 320. In other words, the first connecting air chamber 310 is connected to two different second connecting air chambers 320 through the two sub-air ducts 330; it is connected to the second connecting air chamber 320 The situation of the first connecting air chamber 310 is similar, the above-mentioned first connecting air chamber 310 is also connected to the other connecting air chamber 310 of these first connecting air chambers 310, and the above-mentioned two suction holes 210 are connected to the air chamber 110. These two second connection air chambers 320. That is to say, the air chamber 110 on the right side in FIG. 5 is connected with two first connecting air chambers 310, five sub-air ducts 330, five second connecting air chambers 320, and eight suction holes 210, representing the air distribution part. The first connecting air chamber 310 and the second connecting air chamber 320 of 300 can assist in connecting the single air chamber 110 of the suction part 100 to a plurality of suction holes 210, thereby simplifying the configuration of the external pipeline.

On the other hand, when the adhesive tape is to be adsorbed to the suction part 200, the suction hole 210 located at the end of the air-chamber suction module 1 will require a relatively large suction force to peel the adhesive tape from the adhered object. . Therefore, in this embodiment, the above-mentioned air chamber 110 is disposed at one end (for example, the right end) of the suction part 100, and the number of suction holes 210 connected to this air chamber 110 is smaller than that of the suction holes 210 connected to other air chambers individually. quantity. As shown in Figures 4 and 5, the number of suction holes 210 connected to the air chamber 110 on the right is eight, while the number of suction holes 210 connected to the air chamber 110 on the left is 36. An air valve 120 is connected. Therefore, at the same suction speed, the suction holes 210 corresponding to the air chambers 110 with a smaller number of connected suction holes 210 have a larger suction force. Through this configuration, the air-chamber suction module 1 can have strong suction The end part of the adhesive strip is peeled off, and the suction force of the suction holes 210 in other parts is maintained so as not to exceed the predetermined target.

Please refer to FIG. 6 and FIG. 7, where FIG. 6 is a perspective schematic view of the air suction part in FIG. 1 from another angle, and FIG. 7 is a perspective schematic view of the air distribution part in FIG. 1. Continuing from the above, in this embodiment, a plurality of locking holes 140 are formed on the air suction part 100, and a plurality of locking holes 340 are also formed on the air distributing part 300. When the two are combined, the rivets can be Locking members such as screws or screws are inserted through the locking hole 140 and the locking hole 340 to combine the air suction part 100 and the air distribution part 300. In addition, in order to firmly combine the suction part 100 and the gas distribution part 300 and form an airtight, the suction part 100 is formed with a flange 150 on the side connecting the gas distribution part 300, and the flange 150 is opposite to the The surface protrudes and surrounds the air chamber 110; on the other hand, the air distribution part 300 is formed with a groove 350 on the side connected to the suction part 100, wherein the groove 350 is recessed relative to the surface and surrounds the air chamber 110 Two different first connecting air chambers 310, when the suction part 100 is combined with the air distribution part 300, the flange 150 will be embedded in the groove 350. Through this configuration, even if airtight parts such as O-rings are not used to achieve airtightness, the air chamber suction module 1 can still prevent external air from entering the air chamber 110 through the interference between the flange 150 and the groove 350. And in each pipeline of the air distribution part 300.

It is worth mentioning that, as shown in FIGS. 5 and 7, one end of the air distribution channels 330 is connected to the side of the first connecting air chamber 310 opposite to the air chamber 110, and the other end of the air distribution channels 330 is connected to the second air chamber. The side of the connecting air chamber 320 opposite to the suction hole 210. In other words, the part of the air dividing duct 330 connected to the first connecting air chamber 310 and the second connecting air chamber 320 is a surface away from the air chamber 110 and the suction hole 210. Through this configuration, not only can the sub-airway 330 communicate with the first connecting air room 310 and the second connecting air room 320 in a shorter straight path, but also the gas drawn from the suction hole 210 to the second connecting air room 320 and the gas from the air-separating channel 330 The gas pumped to the first connecting air chamber 310 can be uniformly convectively mixed and then drawn out by the sub-airway 330 and the air valve 120, so that it can be further ensured to be connected to the suction holes 210 of the same second connecting air chamber 320. The suction force of the first connecting air chamber 310 connected to the same air chamber 110 is the same, so as to maintain the stability when sucking objects.

The present invention has been disclosed in preferred embodiments above, but those skilled in the art should understand that the above-mentioned embodiments are only used to describe the present invention and should not be construed as limiting the scope of the present invention. And it should be noted that all changes and substitutions equivalent to the above-mentioned embodiments should be included in the scope of the present invention. Therefore, the protection scope of the present invention should be defined by the scope of the patent application.

1: Air chamber suction module

100: Exhaust part

120: Air valve

130: connecting part

140: lock hole

200: Absorption Department

300: Distributor

Claims (9)

An air chamber type suction module includes: an air extraction part, a plurality of air chambers are formed in the air extraction part, a plurality of air valves are arranged on the air extraction part, and the plurality of air chambers pass through the plurality of air valves Connected to a suction pump; a suction part connected to the suction part and arranged on a side of the suction part opposite to the plurality of air valves; the suction part is formed with a plurality of suction holes, and the plurality Two of the suction holes are connected to one of the plurality of air chambers; and an air dividing part is connected between the suction part and the suction part and forms a plurality of first connecting air chambers and a plurality of air chambers. A second connecting air chamber and a plurality of air-split channels, one of the first connecting air chambers in the plurality of air-split chambers is connected to the second connecting air chambers through the two-part air channel of the plurality of air-split channels The two second connecting air chambers, the first connecting air chamber and the other first connecting air chamber of the plurality of first connecting air chambers are connected to the air chamber, and the two suction holes are connected to the second connecting air chambers One of the second connecting air chambers in the air chamber. The air-chamber suction module according to claim 1, wherein the orthographic projection of the air dividing portion relative to the suction portion falls inside the suction portion, and the orthographic projection of the suction portion relative to the suction portion It falls on the inside of the air distribution part and the suction part. The air chamber type suction module according to claim 1, wherein a flange is formed on a side of the suction part connected to the air dividing part, the flange surrounds the air chamber, and the air dividing part is connected to the A groove is formed on one surface of the suction part, the groove surrounds the first connecting air chamber and the other first connecting air chamber, and the flange is embedded in the groove. The air-chamber suction module according to claim 1, wherein one end of the plurality of air chambers is connected to the side of the plurality of first connecting air chambers relative to the plurality of air chambers, and the air chambers of the plurality of air chambers The other end is connected to the surface of the plurality of second connecting air chambers relative to the plurality of suction holes. The air-chamber suction module according to claim 1, wherein the suction part and the gas distribution part are combined with each other by means of locking, welding, magnetic attraction or bonding, and the suction part is fixed on the gas distribution part Ministry. The air chamber type suction module according to claim 1, wherein the air chamber is disposed at one end of the suction part, and the number of suction holes connected to the air chamber is less than that of other air chambers in the plurality of air chambers individually connected The number of suction holes. The air-chamber suction module according to claim 1, wherein the suction part is further configured with a connection part, and the suction part is connected to a mechanical arm or a moving mechanism through the connection part. The air chamber suction module according to claim 1, wherein the number of the plurality of air valves corresponds to the number of the plurality of air chambers, and the plurality of air valves are respectively connected to the plurality of air chambers, and the plurality of air valves The suction holes are arranged at equal intervals, and the total cross-sectional area of the two suction holes is smaller than the cross-sectional area of the air hole of the air valve connected to the air chamber. The air-chamber suction module according to claim 1, wherein the material rigidity of the suction part is less than the material rigidity of the suction part.

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