JP2005059173A - Suction device and chuck table - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a suction device and a chuck table that have all main functions for sucking a sucked object, are small and excellent in portability, and have small amount of adhered dirt. <P>SOLUTION: The suction device 1 comprises a pedestal 2 and a driving mechanism 3 stored in the pedestal 2. Specifically, a suction hole 21 and a release hole 22 are punched in the ceiling 20 of the pedestal 2, and an air supply port 25 and an air exhaust port 26 are disposed in a sidewall 24. A ceramic porous 4 is placed on the ceiling 20. The driving mechanism 3 comprises a change-over apparatus 30 and a vacuum generator 31, and sucks or releases a workpiece W from the pedestal 2 using air supplied from the air supply port 25 by operation of a knob 30e. Preferably, the pedestal 2 is made of titanium, and a waveform swell 24a is formed on the sidewall 24. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a suction device and a chuck table that hold a suction target such as a workpiece by vacuum suction.

  Conventionally, this type of suction device is provided with one or more holes and grooves on a table on which an object to be sucked such as a workpiece is placed, and the inside of these holes and grooves is made negative or positive by a vacuum pump. The suction object is sucked on the table or released from the sucked state (see, for example, Patent Document 1). Then, operations such as dicing and grinding are performed in a state in which the object to be sucked is sucked and fixed.

Japanese Patent Laid-Open No. 08-125000

However, the above-described adsorption device has the following problems.
The table is used by being attached to a separate apparatus main body, and a vacuum pump, a pressure switch, a controller, and the like are provided in the apparatus main body. For this reason, every time work is performed, a work for incorporating a table corresponding to the object to be sucked into the apparatus main body is required, and a wasteful preparation work is forced. Moreover, since the apparatus main body has a structure that can be used not only for dicing but also for other operations such as grinding, it is large and expensive. Since the apparatus main body has such a structure, the table itself is considered to be a simple structure provided with holes and the like, and no contrivance has been made in consideration of attachment, removal or transportation of the table. In addition, since the table is made of aluminum or stainless steel, there is a problem that cutting powder or the like at the time of dicing work tends to adhere. Furthermore, since the suction object is suction-fixed with negative pressure inside the hole or groove, the suction force is biased against the suction object, and the suction object is suction-fixed with a uniform suction force. It was difficult.

  The present invention has been made to solve the above-described problems, and is equipped with most of the main mechanisms for adsorbing an object to be adsorbed on one apparatus, is small and excellent in portability, and has dirt attached. An object of the present invention is to provide a small number of suction devices and chuck tables.

In order to solve the above problems, the invention of claim 1 uses a pedestal having a flat top wall for placing an object to be adsorbed, and air stored in the pedestal and supplied from outside, An adsorption device comprising a drive mechanism for adsorbing or releasing an object to be adsorbed on the top wall, wherein the pedestal includes a suction hole and a release hole formed in the top wall, and an air supply provided in the side wall And a drive mechanism having an inlet connected to the air supply port of the pedestal, a first outlet, and a second outlet connected to the release hole. A switch that can selectively communicate the inlet with either the first outlet or the second outlet using the operation unit attached to the first outlet, and the first outlet of the switch It has a negative pressure generator that makes the inside of the suction hole negative by allowing the air to flow out to the air outlet side at high speed It was constructed.
With this configuration, when the suction target is placed on the top wall of the pedestal and air is supplied from the outside to the air supply port, the inlet is communicated with the first outlet using the operation unit of the switch. The air from the first outlet flows out to the air outlet side by the negative pressure generator, and the suction hole becomes negative pressure. As a result, the object to be adsorbed is adsorbed on the top wall by the negative pressure action of the suction hole. Further, when the operation part of the switching device is used to switch the communication state between the inlet and the first outlet to the communication state between the inlet and the second outlet, the air from the second outlet is released into the release hole. The adsorption object on the top wall is released from the adsorption state.

The invention according to claim 2 is the adsorption device according to claim 1, wherein a flat porous mounting plate is provided on the top wall of the pedestal.
With this configuration, when the suction hole has a negative pressure, the porous mounting plate can suck the entire object to be sucked with a uniform suction force.
In particular, the invention of claim 3 is the adsorption device according to claim 2, wherein the mounting plate is either a ceramic porous body or a metal sintered body.

  According to a fourth aspect of the present invention, in the adsorption apparatus according to any one of the first to third aspects, the pedestal is formed of titanium, and the fifth aspect of the invention is directed to the first aspect of the present invention. In any one of the suction devices, a wave-like swell corresponding to the fingertip is provided on the outer surface of the side wall of the pedestal.

  As another technical idea, the invention of claim 6 includes a pedestal having a flat top wall for placing an object to be adsorbed, and an object to be adsorbed on the top wall that is housed in the pedestal. Or a suction device including a vacuum pump for releasing the pedestal, the pedestal has a small hole formed in the top wall, and the vacuum pump is connected to the first air outflow inlet and the small communication with the outside of the pedestal A second air outflow inlet communicating with the hole, and selectively sucking air in or supplying the air into the small hole by using an operation unit attached to the outer surface of the side wall of the pedestal. It was set as the structure which can be.

  The invention of claim 7 is the adsorption device according to claim 6, wherein a flat porous mounting plate made of a ceramic porous or sintered metal material is provided on the top wall. is there. The invention according to claim 8 is the adsorption device according to claim 6 or 7, wherein the pedestal is formed of titanium. In particular, a ninth aspect of the present invention is the suction device according to any of the sixth to eighth aspects, wherein a wave-like swell corresponding to the fingertip is provided on the outer side wall of the pedestal.

  Furthermore, as another technical idea, the invention of claim 10 is directed to a flat top surface for placing an object to be adsorbed and air that opens at a portion other than the top surface in communication with a small hole opened in the top surface. Disclosed is a chuck table that includes a passage and is entirely formed of titanium.

  The invention according to claim 11 is the chuck table according to claim 10, wherein a flat porous mounting plate made of a ceramic porous material or a sintered metal body is provided on the top surface. did. In particular, the invention of claim 12 is the chuck table according to claim 10 or claim 11, wherein the tube is connected to the opening of the air passage, and air is sucked into the small hole through the tube or air into the small hole. It is set as the structure which attached the vacuum pump which can selectively supply.

  As described above, according to the first and sixth aspects of the present invention, since the drive mechanism for sucking and releasing the suction target object is housed in the pedestal, the suction target object suction function and the negative pressure can be achieved with one unit. There is an excellent effect that it is possible to provide a small-sized adsorption device having both the generation function and the adsorption / release switching function.

  In particular, according to the invention of claim 2, claim 3, claim 7 and claim 11, the entire object to be adsorbed is adsorbed on the mounting plate with a uniform suction force, so that the object to be adsorbed is firmly and reliably. Can be fixed. As a result, it is possible to provide a suction device or a chuck table having a high suction function.

  According to the inventions of claim 4, claim 8 and claim 10, since the pedestal and the chuck table are made of titanium, the weight of the suction device and the chuck table can be reduced, and dirt such as cutting powder can be obtained. Can be prevented. Furthermore, according to the invention of Claim 5 and Claim 9, since the side wall outer surface of the pedestal and the wave-like undulation are provided, the fingertip fits the undulation, and the handling and carrying of the suction device can be performed easily and safely. be able to.

  Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is an exploded perspective view of a suction device according to a first embodiment of the present invention, FIG. 2 is a plan view showing a top wall, and FIG. 3 is a bottom view of the inside of a pedestal as viewed from the bottom side. FIG. 4 is a schematic sectional view of the adsorption device.
As shown in FIG. 1, the suction device 1 includes a pedestal 2, a drive mechanism 3, and a ceramic porous 4 as a mounting plate.

The pedestal 2 is a cylindrical body on which a work W (see FIG. 5) that is an object to be sucked is placed, and includes a top wall 20 and a side wall 24.
The top wall 20 is a flat circular portion on which the ceramic porous 4 can be placed. A suction hole 21 is formed at the center of the top wall 20, and a release hole 22 is formed at a position outside the suction hole 21. Further, as shown in FIG. 2, concentric circular grooves 23a to 23c and a cross groove 23d are formed on the surface of the top wall 20, and the suction hole 21 and the release hole 22 are formed in the grooves 23a to 23d. 23d.
As shown in FIGS. 1 and 3, the side wall 24 defines a storage chamber for the drive mechanism 3 in the interior together with the top wall 20, and has an air supply port 25 and an air discharge port 26 at the lower portion thereof. ing. As shown in FIG. 4, a wave-like swell 24a corresponding to the fingertip is formed on the outside of the side wall 24, so that the suction device can be handled and carried easily and safely. ing.
The pedestal 2 as described above is all made of titanium, the outer diameter D is set to 170 mm, the outer diameter d of the top wall 20 is set to 152 mm, and the height h is set to 50 mm, thereby reducing the weight and size of the apparatus. It is illustrated.

As shown in FIGS. 1 and 3, the drive mechanism 3 is a mechanism for adsorbing or releasing the workpiece W on the pedestal 2 using air supplied from outside and housed in the pedestal 2. .
The drive mechanism 3 includes a switch 30 and a vacuum generator 31 as a negative pressure generator. Specifically, the switching device 30 has an inlet 30a, a first outlet 30b, and a second outlet 30c. The inlet 30a is connected to the air supply port 25 of the base 2 via the tube 32, the outlet 30b is connected to the vacuum generator 31 via the tube 33, and the outlet 30c is connected to the base 2 via the tube 34. Is connected to the release hole 22.
Such a switch 30 is fixed in the pedestal 2 in a state where the rotary shaft 30d is connected to a knob 30e as an operation unit attached to the outer surface of the side wall 24. There are three types of switching of the switch 30: “VACCUM”, “OFF”, and “BLOW”. When the knob 30e is set to the “VACCUM” mark, the inlet 30a and the outlet 30b communicate with each other, and “OFF” The inflow port 30a does not communicate with any of the outflow ports 30b and 30c, and the inflow port 30a and the outflow port 30c communicate with each other when aligned with the “BLOW” mark.
On the other hand, the air outlet of the vacuum generator 31 is connected to the air outlet 26 of the base 2 via the tube 35, and the suction port 31 a is connected to the suction hole 21 of the base 2 via the tube 36. The vacuum generator 31 is a known device, and sucks air in the tube 36 and the suction hole 21 by letting the air flowing in from the tube 33 flow out to the tube 35 side at high speed, and negative pressure is generated in the suction hole 21. It has a function to make.

  The ceramic porous 4 is a flat and porous disk body on which the workpiece W is placed, and the outer diameter thereof is set to be approximately equal to the outer diameter of the top wall 20.

Next, the operation and effect of the adsorption device 1 of this embodiment will be described.
FIG. 5 is a perspective view showing a state where the air pump is connected to the suction device 1.
For example, when dicing or grinding work is performed, it is necessary to transport and set the suction device 1 to a predetermined place. In the suction device 1 of this embodiment, the corrugated swell 24a corresponding to the fingertip is formed on the side wall 24 of the base 2, so that it can be easily carried by hand. Furthermore, since the entire base 2 is made of titanium, the adsorption device 1 itself is lightweight. Therefore, the adsorption device 1 can be set easily and accurately.
When the workpiece W is fixed to the suction device 1 after the suction device 1 is set, the tube 50 of the air pump 5 is connected to the air supply port 25 of the suction device 1 and an adhesive tape (not shown) is attached to the workpiece W. The workpiece W is placed on the ceramic porous 4 of the suction device 1.
In this state, air is sent from the air pump 5 to the adsorption device 1 and the knob 30e of the adsorption device 1 is set to the “VACCUM” mark.
FIG. 6 is a bottom view showing the air flow during the suction operation of the suction device 1, and FIG. 7 is a partially enlarged sectional view showing the suction operation of the suction device 1.
When the knob 30e is aligned with the “VACCUM” mark, the inlet 30a and the outlet 30b of the switching device 30 communicate with each other, and the air pump 5 through the tube 50, the air supply port 25, and the tube 32 as shown by the arrows in FIG. The air A sent into the inlet 30a of the switching device 30 is sent into the vacuum generator 31 through the tube 33 from the outlet 30b. Then, due to the function of the vacuum generator 31, the air A is quickly discharged to the tube 35 side and discharged from the air discharge port 26, and at the same time, the air A in the tube 36 and the suction hole 21 is sucked, and the suction hole 21. Inside becomes negative pressure. That is, as shown in FIG. 7, the holes A, the grooves 23a to 23d, the suction holes 21 and the air A in the tube 36 of the ceramic porous 4 are sucked, and these spaces are in a negative pressure state. As a result, the workpiece W is adsorbed on the ceramic porous 4. At this time, since the ceramic porous 4 is a porous disk, the entire workpiece W is adsorbed and fixed onto the ceramic porous 4 with a uniform suction force.
In this state, as shown in FIG. 5, dicing and grinding operations can be performed on the workpiece W fixed on the suction device 1. In such operations, cutting powder and cutting fluid of the workpiece W may be scattered and adhere to the suction device 1. However, since the pedestal 2 is entirely made of titanium, cutting powder or the like hardly adheres to the pedestal 2. Furthermore, since the thermal expansion coefficient of titanium is close to the thermal expansion coefficient of ceramics, the flatness of the top wall 20 and the ceramic porous 4 is not impaired by the outside air temperature, and as a result, highly accurate work can be performed.

After the work is completed, the workpiece W is released from the fixed state and removed, and the next workpiece W is processed.
In such a case, the knob 30e of the suction device 1 is set to the “BLOW” mark.
FIG. 8 is a bottom view showing the flow of air during the releasing operation of the suction device 1, and FIG. 9 is a partially enlarged sectional view showing the releasing operation of the suction device 1.
When the knob 30e is aligned with the “BLOW” mark, as shown by the arrow in FIG. 8, the switch 30 switches from the communication state between the inlet 30a and the outlet 30b to the communication state between the inlet 30a and the outlet 30c. Change. Then, the air A sent from the air pump 5 to the inlet 30a is sent from the outlet 30c through the tube 34 into the release hole 22 of the top wall 20.
As a result, as shown in FIG. 9, the air A passes through the release holes 22, the grooves 23 a to 23 d and the holes of the ceramic porous 4 and reaches the back surface of the work W, and these spaces are brought into a positive pressure state. The workpiece W is released and can be removed.

  As described above, the suction device 1 of this embodiment is a single lightweight and small device, which has a suction function for the workpiece W, a negative pressure generation function in the suction hole 21, and a suction / release switching function by the switch 30. It has an excellent effect of having both.

Next, an adsorption apparatus according to a second embodiment of the invention will be described.
FIG. 10 is an exploded perspective view of the adsorption device according to the second embodiment of the present invention. In this figure, the same members as those shown in FIG.
As shown in FIG. 10, the suction device 1 ′ is similar to the first embodiment in that it includes a pedestal 2 ′ having a top wall 20 ′ and a ceramic porous 4. The point which applied the vacuum pump 6 instead differs from the said 1st Example.

  The pedestal 2 'has substantially the same structure as that of the first embodiment, but the top wall 20' on which the ceramic porous 4 is placed has only a central small hole 21 '. That is, not only the work W is sucked but also the work W is released through the small hole 21 '. Circular grooves 23 a to 23 c and a cross groove 23 d are formed on the surface of the top wall 20 ′, and a swell 24 a is provided outside the side wall 24. The side wall 24 is provided only with an air supply / discharge port 25 '. The pedestal 2 'is made of titanium, as with the pedestal 2.

The vacuum pump 6 is a known pump for adsorbing or releasing the workpiece W on the ceramic porous 4 on the top wall 20 ', and is housed in the base 2'.
Specifically, the vacuum pump 6 has a first air outflow inlet 61 and a second air outflow inlet 62. The air outflow inlet 61 is connected to the air supply / exhaust port 25 ′ of the side wall 24 through the tube 63, and the air outflow inlet 62 is connected to the small hole 21 ′ of the top wall 20 ′ through the tube 64.
Such a vacuum pump 6 is fixed in the pedestal 2 'in a state where the electric switch shaft 6b is connected to a knob 6a as an operation portion. The vacuum pump 6 is electrically driven, and a built-in motor (not shown) inputs electricity through a cord 66 of a plug 65 connected to an external outlet. The vacuum pump 6 can selectively suck air through the small hole 21 ′ or supply air into the small hole 21 ′ using the knob 6 a. That is, when the knob 6 a is set to the “VACCUM” mark, the motor rotates forward and sucks the air in the small hole 21 ′ through the tube 64 and the air outlet / inlet 62. And the inside of small hole 21 'is made into a negative pressure by exhausting suction air outside through air outflow inlet 61, tube 63, and air supply / exhaust port 25'. When the knob 6a is set to the “OFF” mark, the motor stops. When the knob 6a is set to the “BLOW” mark, the motor rotates in the reverse direction, and external air is supplied to the air supply / discharge port 25 ′, the tube 63, the air. The gas is supplied into the small hole 21 ′ through the outflow inlet 61, the air outflow inlet 62, and the tube 64, and the inside of the small hole 21 ′ is set to a positive pressure.
Since other configurations, operations, and effects are the same as those of the first embodiment, description thereof is omitted.

Finally, a chuck table according to a third embodiment of the present invention will be described.
FIG. 11 is a perspective view showing a chuck table according to a third embodiment of the present invention, and FIG. 12 is a cross-sectional view of the chuck table. In this figure, the same members as those shown in FIG. 1 to FIG.
As shown in FIGS. 11 and 12, the chuck table 7 of this embodiment has a flat top surface 70 and an air passage 71, and the entire chuck table 7 is made of titanium.

The top surface 70 is a portion on which the ceramic porous 4 is placed. Like the top wall 20 'of the second embodiment, the top surface 70 has only a small hole 72 opened at the center of the top surface 70. The workpiece W is also sucked and released through 72. Further, the top surface 70 is formed with circular grooves 23a to 23c and a cross groove 23d.
On the other hand, the air passage 71 is a hollow passage formed inside the chuck table 7 and communicates with the small hole 72 at substantially the center thereof. Further, the air passage 71 is opened on the side surface of the chuck table 7 which is a portion other than the top surface 70.

A vacuum pump 6 ′ having the same function as the vacuum pump 6 is connected to the chuck table 7 as described above.
Specifically, the vacuum pump 6 is placed outside the chuck table 7, and a tube 67 extended from the air outflow / inlet 68 is connected to the opening 71 a of the air passage 71. The vacuum pump 6 'has a knob 69 on its outer surface.

With this configuration, when the knob 69 of the vacuum pump 6 ′ is set to the “VACCUM” mark, the vacuum pump 6 ′ sucks the air in the small hole 72 of the chuck table 7 through the air passage 71, the tube 67 and the air outlet / inlet 68. Thus, the inside of the small hole 72 is set to a negative pressure. Further, when the knob 69 is aligned with the “BLOW” mark, external air is supplied into the air passage 71 through the tube 67 and the inside of the small hole 72 is set to a positive pressure. That is, the vacuum pump 6 ′ can selectively suck air from the small holes 72 or supply air into the small holes 72.
Since other configurations, operations, and effects are the same as those in the first and second embodiments, description thereof is omitted.

In addition, this invention is not limited to the said Example, A various deformation | transformation and change are possible within the range of the summary of invention.
For example, in the above-described embodiment, the ceramic porous 4 is used as the mounting plate, but it is needless to say that the same effect can be obtained even if a porous flat plate such as a metal sintered body is used.
Moreover, although the example using the mounting plate has been described in the above embodiment, it does not mean that a suction device or a chuck table that does not use the mounting plate is excluded from the scope of the invention. In such a case, since the adsorption surface is made of the same material, the thermal expansion coefficient and thermal conductivity are the same in all of the ceiling walls 20, 20 ', the ceiling surface 70, and the sidewall 24, and the flatness accuracy with respect to the outside air temperature change is improved. It is thought to improve. Further, the example in which the pedestals 2 and 2 'are formed of titanium has been described. However, the adsorption device in which the pedestals 2 and 2' are formed of aluminum or stainless steel is not excluded from the scope of the invention.
Furthermore, in the said Example, although demonstrated using the case where it uses for a dicing and grinding operation as an example, the use aspect is not restricted to this. By using it on non-magnetic materials, workpieces that are weak against magnetism, or workpieces that deform when a load is applied, the functions are fully demonstrated.

It is a disassembled perspective view of the adsorption | suction apparatus based on 1st Example of this invention. It is a top view which shows a top wall. It is the bottom view which looked at the inside of a base from the bottom face side. It is a schematic sectional drawing of an adsorption | suction apparatus. It is a perspective view which shows the state which connected the air pump to the adsorption | suction apparatus. It is a bottom view which shows the flow of the air at the time of adsorption | suction operation | movement of an adsorption | suction apparatus. It is a partial expanded sectional view which shows adsorption | suction operation | movement of an adsorption | suction apparatus. It is a bottom view which shows the flow of the air at the time of the releasing operation | movement of an adsorption | suction apparatus. It is a partial expanded sectional view which shows releasing operation | movement of an adsorption | suction apparatus. It is a disassembled perspective view of the adsorption | suction apparatus based on 2nd Example of this invention. It is a perspective view which shows the chuck table which concerns on 3rd Example of this invention. It is sectional drawing of the chuck table of FIG.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1,1 '... Adsorption device 2, 2' ... Base, 3 ... Drive mechanism, 4 ... Ceramic porous, 5 ... Air pump, 6, 6 '... Vacuum pump, 6a, 69, 30e ... Pick, 7 ... Chuck table, 20, 20 '... Top wall, 21 ... Suction hole, 21', 72 ... Small hole, 22 ... Release hole, 23a-23c ... Circular groove, 23d ... Cross groove, 24 ... Side wall, 24a ... Swell, 25 ... Air supply Mouth, 25 '... Air supply / exhaust port, 26 ... Air discharge port, 30 ... Switch, 30a ... Inlet, 30b, 30c ... Outlet, 31 ... Vacuum generator, 32-36, 63, 64, 67 ... Tube 61, 62, 68 ... air outlet, 70 ... top surface, 71 ... air passage, 71a ... opening, A ... air, W ... work.

Claims (12)

In order to adsorb or release the adsorption object on the ceiling wall using a pedestal having a flat top wall for placing the adsorption object and air stored in the pedestal and supplied from the outside An adsorption device comprising:
The pedestal has a suction hole and a release hole formed in the top wall, an air supply port and an air discharge port provided in the side wall,
The drive mechanism has an inlet connected to the air supply port of the pedestal, a first outlet, and a second outlet connected to the release hole, and is attached to the outer surface of the side wall. And a switching device capable of selectively communicating the inlet with either the first outlet or the second outlet, and air from the first outlet of the switching device as described above. It has a negative pressure generator that makes the inside of the suction hole negative by letting it flow out to the air outlet side at a high speed,
An adsorption device characterized by that. The adsorption device according to claim 1,
On the top wall of the pedestal, a flat porous mounting plate was provided.
An adsorption device characterized by that. The adsorption device according to claim 2,
The mounting plate described above is either ceramic porous or sintered metal,
An adsorption device characterized by that. In the adsorption | suction apparatus in any one of Claim 1 thru | or 3,
The pedestal is made of titanium,
An adsorption device characterized by that. In the adsorption | suction apparatus in any one of Claim 1 thru | or 4,
On the outer surface of the side wall of the pedestal, a wave-shaped swell corresponding to the fingertip was provided.
An adsorption device characterized by that. An adsorption device comprising a pedestal having a flat top wall for placing an adsorption object, and a vacuum pump stored in the pedestal and adsorbing or releasing the adsorption object on the ceiling wall ,
The pedestal has a small hole drilled in the top wall,
The vacuum pump has a first air outflow inlet that communicates with the outside of the pedestal and a second air outflow inlet that communicates with the small hole, and uses an operation unit attached to the outer surface of the side wall of the pedestal. The suction of air in the small hole or the supply of air into the small hole can be performed selectively.
An adsorption device characterized by that. The adsorption device according to claim 6,
On the top wall, a flat porous mounting plate made of a ceramic porous or metal sintered body is provided.
An adsorption device characterized by that. The adsorption device according to claim 6 or 7,
The pedestal is made of titanium,
An adsorption device characterized by that. In the adsorption | suction apparatus in any one of Claim 6 thru | or 8,
On the outer surface of the side wall of the pedestal, a wave-shaped swell corresponding to the fingertip was provided.
An adsorption device characterized by that. It has a flat top surface for placing the object to be adsorbed, and an air passage that communicates with a small hole opened on the top surface and opens at a portion other than the top surface, and is entirely formed of titanium.
A chuck table characterized by that. The chuck table according to claim 10, wherein
On the top surface, provided with a flat porous mounting plate made of ceramic porous or sintered metal, etc.,
A chuck table characterized by that. The chuck table according to claim 10 or 11,
A tube was connected to the opening of the air passage, and a vacuum pump capable of selectively sucking air in the small hole or supplying air into the small hole through the tube was attached.
A chuck table characterized by that.

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