JPS5856744A - Chuck - Google Patents

Abstract

PURPOSE:To enable a position of an attracting portion to be changed correspondingly to the shape and working portion of a workpiece without limiting the working portion by providing movably and fixedly a plurality of vacuum adsorbing portions for holding the workpiece in a chuck body. CONSTITUTION:A chuck body 11 is formed radially with dovetail grooves 14. vacuum attracting portions 12a-12d are fromed on the respective under surfaces with projections to be inserted into the dovetail grooves 14 respectively which guide the athracting portion 12a-12d. A lock screw is vertically threaded into the dovetail 14 to abut against the projection on the under surface of the vacuum attracting portions 12a-12d and fix said portions 12a-12d to the chuck body 11. The vacuum attracting portions 12a-12d are located correspondingly to the shape of a workpiece 24 and the working portion of a tool 25 to hold the workpiece 24. The vacuum attracting portions 12a-12d may be replaced by electromagnetic attracting portions if necessary.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a chuck for holding a workpiece when performing zero processing such as cutting or drilling on the workpiece.

An example of a conventional vacuum chuck will be described with reference to FIGS. 1 and 2. This chuck has a channel seal (3) provided at an appropriate position in a groove (2) to form a chamber (4) surrounded by the channel seal (1) in order to vacuum adsorb the workpiece (1). By bringing the workpiece (1) into contact with the chuck so as to cover the entire chamber (4), the workpiece (1) is connected to the outside of the air hole of the chamber (4), and ζ0!
The air in I) is discharged through the suction hole (S) and the exhaust conduit (6), and the chamber (4) is brought to a strong vacuum pressure to remove the workpiece (1).
Another example of a conventional vacuum chuck that suctions and holds the object will be explained with reference to FIGS. 3 and 4. Unlike the conventional example of this vacuum chatter pasm*, channel '/-k (3) is not used,
A plurality of grooves (9 grooves are arranged in an annular and concentric manner), and the workpiece (2) is placed so as to cover the entire groove (2).
1) by bringing it into contact with the chuck.

Similarly to the first conventional example, the workpiece D) can be held by suction.

In the second conventional example, the entire ring-shaped groove constitutes a chamber (4).

However, the conventional vacuum chuck device described above has drawbacks such as enlargement. That is, the first defect.

Since the surface of the workpiece (1) that comes into contact with the chuck surface covers the entire chamber (4) and exposes the state in which vacuum pressure suction is possible, cutting, drilling, etc. .

Processing in which the chamber (4) communicates with the atmosphere is impossible because the suction force, ie, the vacuum pressure, necessary to hold the workpiece (1) in the chamber (4) will not be generated. If the workpiece (1) is directly adsorbed and held in the chamber (4) of the chuck, the processing of the workpiece (1) is restricted to a range that does not allow communication between the chamber (4) and the atmosphere. .

In the first conventional example, the workpiece (1
) is brought into contact and held by suction, the hatched chamber (
4) Processing such as cutting and drilling can be performed in the groove located between (4). however,#! As a second drawback,
Note that the width K of the groove (2) is extremely small, several millimeters. This is indicated by diagonal lines and the workpiece (1
) to reach the groove (2).

For example, the size of a drill, cutting cutter, etc. is limited by the width K of the groove (2). In other words, the width or diameter of the tool must be smaller than the width of the groove (2). Even if you try to increase the width K of the groove (2) to solve this problem, the channel seal (3) There is a limit due to the difficulty of enclosing the chamber (4) while filling the groove (21) with the channel seal (3).
In order to make the chamber (4) a completely airtight vacuum chamber, it is necessary to slightly protrude from the chuck surface, so the width K of the groove portion (2) is
If the channel seal (3) is made larger, the curved part of the channel seal (3) not only becomes bulged in that part, which not only prevents sufficient contact between the workpiece (1) and the chuck surface, but also makes the upper part of the bulge (9) hard and strong. In this case, if the workpiece (1) is made of a thin brittle material such as ferrite or silicon, the embossed part cannot be pushed in during suction, resulting in cracking.

The third drawback is that each part (7) of the chuck surface divided by the groove (!) is fixed together with the groove (2), and the size cannot be changed arbitrarily. As mentioned in the second drawback, when performing machining in which the tool penetrates the workpiece (1) and reaches the groove (2), there are not only limitations on the width and diameter of the tool. The distance between the machining parts is also greatly limited, and the machining area is significantly restricted.

In the above-mentioned second conventional example, as shown in Fig. 5, the workpiece (1) is attached to a plate (8) made of glass or iron with good flatness with adhesive, and then the plate is (8) was suctioned and held by a vacuum chuck, and the workpiece (1) was machined together with the plate (8) by the tool (9).
Process the workpiece (1) until it reaches the relief part (8a) formed in 8). At this time, the fourth drawback is that the workpiece (1) is stuck to the plate (8). Man-hours and boards (6).

Consumable materials such as adhesives may be required, resulting in significant cost and labor losses.

In view of the above points, it is an object of the present invention to provide a chuck that can easily hold any workpiece and does not impose restrictions on the processing location.

That is, the present invention has a chuck body with a plurality of suction parts that are movably and detachably attached to hold the workpiece. The position and number of parts can be changed arbitrarily, and the shape and dimensions of the suction part and functions such as vacuum suction and electromagnetic suction can also be changed, making it possible to easily hold any workpiece and to limit the machining location. There is none.

Embodiments of the present invention will be described below based on the drawings.

Figure 6 is a plan view of the L chuck, Figure 7 is the ■ in Figure 6.
In the cross-sectional view taken along the -■ line, (2) is the chuck body.

(12g) to (12d) are adsorption parts. The chuck main body (B) has a circular through hole (2) formed in the center thereof, and a guide groove → formed along a diagonal line on the upper surface, and the suction parts (12a) to The lower surface of (12d) is provided with a protrusion into which the guide groove 14IIc is slidably fitted. The tip of - can enter the guide groove 114. The adsorption part (lZa) ~ (
12d) is movable along the guide groove H and can be fixed by firmly abutting the tip of the threaded rod, and is adjustable depending on the size of the workpiece and the drill.

It can be placed at any position depending on the size of the cutter or other tool or the processing area, and can also be removed from the chuck body (2). Note that the suction parts (12a) to (r2d)
Fixation is not limited to threaded rods, but also electromagnetic fixing force.

The shape of the guide groove I and the protruding part A may also be other shapes such as a single character shape.The through hole is provided to diversify processing. The suction parts (12a) to (12d) have a vacuum chamber door formed inside them, as shown in FIGS. 8 and 9,
This vacuum chamber (b) is connected to a second vacuum chamber (described later) via a conduit.
Connected to the vacuum pump. Adsorption part (12a) ~ (lz
A groove shaft is formed on the suction surface of d), and this groove communicates with the vacuum chamber (b) via the suction hole.

Although the chuck main body (2) is rectangular as shown in FIGS. 6 and 10, it may have another shape such as a circle. The guide groove may also be annular. Figure 11 is a circuit diagram of the vacuum system of the suction section, and the vacuum chambers (b) of each suction section (12a) to (12d) are conduits and open/close valves. (21a) to (21d) communicate with a common second vacuum chamber, and this second vacuum chamber is connected to a vacuum pump (21d).
). The on-off valves (21a) to (21d)
By opening and closing, each suction part (12a) to (tzd
) and the second vacuum chamber (2) are switched between a communicating state and a partitioned state. Namely.

Depending on the workpiece and machining situation, the suction part (X2a) ~ (
12d), it is possible to generate adsorption force in any one, a plurality of them, or all of them.

Figure 12 is a perspective view of the state of use, where ``(goods)'' is a workpiece made of a non-magnetic material such as ceramic or glass, and ``-'' is a tool for cutting the workpiece. )
are held by suction parts (XZa) to (12d). This workpiece (goods) has suction parts (12a) (12b
) formed between the processing area (A!) and the suction part (12c
) (1zd) is cut by a tool. The machining area (A1) (Ax) may be slightly wider than the width of the tool (c), and the suction part ( X
The processing area (B1) formed between Za) (12d) and the processing area O formed between suction parts (12b) (12C)
B is not necessarily the same width as the machining area (A Since (12a) to (tzd) can be moved and fixed at arbitrary positions, it is possible to easily obtain an optimal processing area for cutting, drilling, etc.

FIG. 13 is a perspective view of another state of use, in which the workpiece has protrusions (26a) and (26b) on both sides. In this case, the suction part (XZa) corresponding to the protrusion (2sa) part
Remove it from the chuck body (B) and remove the remaining suction part Qzb.
) to (12d), the protrusion (26 m) (2
6b) can be held by suction. In this way, not only can the positions of each suction part (12a) to (12d) be set arbitrarily, but also they can be freely attached to and detached from the chuck body 4, which creates situations in which it is impossible or difficult to hold them with conventional chucks. , the workpiece, etc. can be easily attracted and held, and workability and work efficiency can be significantly improved.

In addition, in the first embodiment, the suction part (12a) +-w(
Although an example has been described in which a vacuum suction function is used as 12d), any one or more of the suction parts (12a) to (12d) or the social part may also be made to have an electromagnetic suction function. Good, each suction part (12a)
~(x2d) may have both a vacuum adsorption function and an electromagnetic adsorption function.

Furthermore, it is preferable that the suction surfaces of the suction parts (12m) to (12d) be made of an elastic material such as hard rubber, since this allows the degree of vacuum in the grooves to be increased.

As explained above, according to the chuck according to the present invention, the suction part for holding the workpiece is attached to the chuck body in a movable and detachable manner, so that the shape and processing of the workpiece can be changed easily. The position and number of the suction parts can be changed arbitrarily depending on the location, and the shape and function of the suction parts can also be changed, so any workpiece can be easily held, and the workpiece can be easily Since there are no restrictions on the dimensions of the tool, machining can be performed extremely efficiently. In addition, when performing cutting, drilling, etc. that penetrates the workpiece, it is possible to provide a relief on the suction surface side that matches the machining area when the tool penetrates the workpiece, so there is no need to force the tool to hold it. It is highly safe because there are no cracks, and work efficiency can be greatly improved.

[Brief explanation of drawings]

FIG. 1 is a perspective view showing a first conventional example, FIG. 2 is a plan view thereof, and FIG. 3 is a plan view showing a second conventional example. FIG. 4 is a sectional view of the same, FIG. 5 is a sectional view of the second conventional example of the chuck in use, FIGS. 6 to 13 show an embodiment of the present invention, and FIG. 6 is a plan view, and FIG. Figure 7 is a sectional view taken along the line ■-■ in Figure 6, Figure 8 is a plan view of the suction part,
Figure 9 is the same sectional view, Figure 10 is a plan view of the chuck body,
1 is a circuit diagram of the vacuum system, and FIGS. 12 and 13 are perspective views of different usage states. αη...Chuck body, (12a) to (12d)...
・Adsorption part, I...Guide groove, (I@Pa, protruding part, 1m4
111... Workpiece agent Yoshihiro Morimoto Figure f Figure 2 Figure 3 Figure 8 Figure 7 σ Figure 8, #14 Figure 1/Figure 12

Claims (1)

[Claims] 1. A chuck comprising a plurality of suction parts for holding a workpiece, which are movably fixed and removably attached to the chuck body. i The chuck body has a guide groove for guiding the suction part,
2. The chuck according to claim 1, wherein the a-fitting portion has a protrusion that slidably fits into the guide groove. 3. The chuck according to claim 1, wherein each of the plurality of suction portions is constructed so that generation and disappearance of suction forces are controlled by being erected.