JP2990594B2 - Vacuum chuck - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum chuck for adsorbing and fixing a workpiece by vacuum pressure.

[0002]

2. Description of the Related Art Vacuum chucks include, for example, those shown in FIG. 3. The outline of the vacuum chuck is as follows.
A plurality of suction holes 2a, 2b, 2c for sucking air in the groove 3 are provided at a plurality of appropriately separated positions in the groove 3.

The plurality of suction holes 2a, 2b, 2c described above
Is generally connected to one connection port 8 to which a vacuum pressure is applied by an external vacuum pump or the like.

When using this chuck, a rubber seal cord m is fitted into the groove 3 so as to surround at least one suction hole (for example, 2a), and a base surrounded by the rubber seal cord m A workpiece w indicated by a virtual line is placed so as to cover the upper surface area, and thereafter, a vacuum pressure is applied to the connection port 8 so that air in the area is sucked from the suction hole 2a. As a result, a vacuum is created in the region, and the workpiece w is strongly attracted.

[0005]

In the conventional vacuum chuck described above, suction holes (eg, 2b, 2c) that are not used are used.
Must be closed by appropriate means to prevent the suction of air, and it is necessary to fit the rubber seal cord m along the groove 3 in a right-angled bent shape. It is.

In the case where a thick through hole is formed in the workpiece w or the periphery of the workpiece w is cut,
It is necessary to take special measures so as not to cut off the data. Further, applying a vacuum pressure from an external vacuum pump or the like remote from the base 1 has disadvantages such as an increase in a vacuum region and flow resistance, and a delay in the rise of vacuum.

[0007] It is an object of the present invention to provide a vacuum chuck which can solve such a problem.

[0008]

In order to achieve the above object, according to the present invention, a concave portion to which a vacuum pressure is applied and a plurality of annular grooves having different radii are provided on a flat upper surface of a base. Is provided in a substantially concentric arrangement surrounding the concave portion, a coupling groove is provided in a direction intersecting the plurality of annular grooves, the concave portion communicates with the plurality of annular grooves through the coupling groove, and a plurality of A rubber seal ring compatible with the annular groove is fitted into any of the annular grooves.

Thus, when a rubber seal ring is fitted into any one of the annular grooves, the upper surface of the base inside the seal ring becomes a region where vacuum is applied. Thus, a large radius rubber seal ring provides a large suction surface, while a small radius provides a small suction surface.

[0010] In the present invention, the mounting plate has a mounting plate which is attracted to the upper surface of the base. At this time, the mounting plate has a groove in which a rubber seal code is fitted on the upper surface, and a rubber seal. Ventilation passages 13 and 14 are formed to allow the upper surface area of the base surrounded by the cord to communicate with the recess.
In this way, the mounting plate provides a suction surface having a shape suitable for a workpiece of any form, and is a relatively inexpensive consumable that can be cut. Processing of the outer peripheral surface of a workpiece can be easily and easily performed.

In order to reduce the area to be evacuated, an ejector for applying a vacuum pressure to the recess is preferably built in the back surface of the base. Further, a gage for indicating the vacuum pressure of the recess is preferably mounted on the outer surface of the base.

[0012]

FIG. 1 is a perspective view showing a chuck according to the present invention, and FIG. 2 is a perspective view showing a state where a mounting plate is mounted on a base of the chuck.

In these figures, reference numeral 1 denotes a square base formed of a nonmagnetic material such as an aluminum alloy. The base 1 has an upper surface which is a flat surface, a rear surface which is a large depression except for the periphery thereof, and a step portion 1a provided on the left and right side surfaces.

Reference numeral 2 denotes a relatively small vertical hole-shaped recess provided at the center of the upper surface of the base 1. Five annular grooves 3a, 3b, 3c, 3d, 3e having different radii are provided on the upper surface of the base 1 in a region surrounding the recess 2 in a substantially concentric arrangement.

Reference numeral 4 denotes each annular groove 3a, 3b, 3c, 3d, 3
The annular groove 3a, 3b, 3c, 3d, 3e is connected to the recess 2 by a coupling groove provided on the upper surface of the base 1 so as to intersect with e. At this time, each of the annular grooves 3a, 3b, 3
c, 3d, 3e and the coupling groove 4 have the same depth, and their cross-sectional shapes are, for example, rectangular or arcuate.

Reference numeral 5 denotes an ejector provided at a concave portion on the back surface of the base 1, the suction port of which is connected to the lower end of the recess 2 through a ventilation pipe 6, and the compressed air blowing port is connected to the base 1.
An external connection port unit 7 fixed to the front face is connected via a ventilation pipe 8. Here, the external connection unit 7 is provided with a connection port 8 connected to an external compressed air source and an air inlet valve 9 for opening and closing the internal compressed air passage.

Reference numeral 10 denotes a pressure gauge for displaying the degree of vacuum in the ventilation pipe 6. Reference numeral 11 (see FIG. 2) denotes a mounting plate which is mounted on the upper surface of the base 1 as necessary, and is preferably made of a non-magnetic material such as an aluminum alloy like the base 1.

The mounting plate 11 may be of any size and shape, and a work piece w to be mounted on the
A groove 12 having an arbitrary shape adapted to the above-mentioned condition is provided, and a vertical through hole 13 communicating with the recess 2 is provided at a center portion, and a connecting groove 1 for communicating the through hole 13 with the grooves 12, 12 is provided.
4 is provided.

An example of use of the product of the present invention configured as described above and its operation will be described as follows. The operator is required to fit rubber seal rings m1, m2, m3, m4, and m5 having dimensions adapted to the respective annular grooves 3a, 3b, 3c, 3d, and 3e, and a rubber material for fitting into the grooves 12 of the mounting plate 11. Prepare a seal code. At this time, the rubber seal rings 3a, 3b,
3c, 3d, and 3e may be commercially available O-ring packings or the like.

Then, the base 1 is fixed to the upper surface of the work table of the machine tool, and the connection port 8 is connected to a compressed air source by a hose or the like.

Under this condition, a rubber seal ring (for example, m) having a size slightly smaller than the size of the lower surface of the workpiece.
Select 1) to match the annular groove (eg, 3a)
And a workpiece (eg, made of a material such as plastic, ceramic, titanium alloy, or non-magnetic stainless steel) so as to cover the rubber seal ring m1.
Put. At this time, the rubber seal rings m2, m3, m4, and m5 to be annularly fitted to the annular grooves 3b, 3c, 3d, and 3e partition the coupling groove 4 densely.
Does not partition the coupling groove 4 and forms the inner area thereof as a closed space.

Thereafter, the air inlet valve 9 is opened. As a result, the ejector 5 is supplied with compressed air to the compressed air blowing port, and from the suction port, the air in the upper surface area of the base 1 on the inner side of the annular groove 3a in which the rubber seal ring m1 is fitted is recessed into the hole 2 and The air is sucked through the ventilation pipe 6. Due to this suction, the upper surface area of the base 1 on the inner side of the rubber seal ring m1 is evacuated and sucks the lower surface of the work, so that the work is strongly fixed to the base 1.

In this fixed state, the lower surface of the workpiece and the base 1
Since the upper surface of the rubber seal ring is almost in close contact, especially when the size of the rubber seal ring fitted in the annular groove is large as shown in FIG. However, in this inner region, in addition to the coupling groove 4,
Since there is a fitting groove in which the rubber seal ring is not fitted, these act as an air suction passage, smoothly suck the air in the entire inner region, and vacuum the entire region. Is maintained stably.

After these preparations, the operator determines the suction and fixation of the workpiece by the reading of the pointer of the pressure gauge 10 or the like, and then causes the machine tool to start processing the workpiece. When the processing is completed, the air inlet valve 9 is closed. As a result, the atmosphere flows into the upper surface area of the base 1 on the inner side of the rubber seal ring m1 from the air discharge port of the ejector 5, the suction force of the vacuum is lost, and the workpiece can be easily removed from the base 1. Become.

The above-mentioned use is sufficient for the processing in which the cutting tool does not reach the base 1, but in the case other than that, a suitable rubber seal ring is fitted into any one of the annular grooves, and FIG.
The mounting plate 11 is mounted as shown in FIG. Then, a rubbery seal cord is fitted into any one of the grooves 12 on the upper surface of the mounting plate 11 formed so as to conform to the workpiece w indicated by the imaginary line, and the workpiece w is then covered so as to cover it. After mounting, the air inlet valve 9 is opened.

As a result, the ejector 5 removes air in the upper surface area of the base 1 on the inner side of the rubber seal ring and air in the upper surface area of the mounting plate 11 on the inner side of the rubber seal cord.
Suction is performed through the coupling groove 4, the annular groove, the vertical through hole 13, the coupling groove 14, and the like. By this suction, the upper surface area of the base 1 and the upper surface area of the mounting plate 11 are evacuated, and the mounting plate 11
Then, the workpiece w is fixed to the mounting plate 11 by suction, and the workpiece w is strongly fixed to the base 1 and the same body.

Thereafter, the processing of the workpiece w is started. At this time, since the mounting plate 11 is economically small even if it is discarded as a consumable, unless the vacuum suction of the workpiece w is destroyed, It is possible to perform deep processing such that the cutting tool of the machine tool reaches the mounting plate 11. Workpiece w as shown in FIG.
Examples of the deep processing include a process of forming a vertical through hole in the outer peripheral portion w1 and a process of cutting the outer peripheral end surface w2.

A plurality of the products of the present invention may be used side by side. In this way, the suction area can be arbitrarily increased, and a workpiece of any size can be fixed by suction. In this case, the base 1 shown by a solid line in FIG.
Is formed on the L-shaped stepped portion 1a, and an imaginary line k
A base having an inverted L-shaped stepped portion a at an edge portion as shown in FIG. 1 is formed, and the stepped portion a is to be fitted with the stepped portion 1a in a male and female relationship. .

[0029]

According to the present invention constructed as described above, it is possible to carry out deep machining to reach the mounting plate, for example, to drill a through hole in the workpiece, or to cut the outer periphery of the workpiece. Can be easily performed.

According to the second aspect of the present invention, the vacuum passage is shortened and the vacuum rises quickly even with a small ejector, and there is no need to provide an external vacuum generator.

According to the third aspect, the vacuum pressure displayed on the gage indicates the state of grasping the workpiece,
This contributes to safe machining of the workpiece. Further, according to the third aspect, it is possible to easily and inexpensively deal with a workpiece having an arbitrary size.

[0032]

[Brief description of the drawings]

FIG. 1 is a perspective view showing a chuck of the present invention.

FIG. 2 is a perspective view showing a chuck to which a mounting plate is added according to the present invention.

FIG. 3 is a view showing a conventional vacuum chuck.

[Explanation of symbols]

 Reference Signs List 1 base 2 recess 3a, 3b, 3c, 3d, 3e annular groove 4 coupling groove 5 ejector 11 mounting plate 12 groove 13 vertical through hole (air passage) 14 connection groove (air passage) m1, m2, m3, m4, m5 rubber seal ring

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-6-238537 (JP, A) JP-A-3-79249 (JP, A) JP-A-56-160751 (JP, U) 41467 (JP, B2) (58) Field surveyed (Int. Cl. ⁶ , DB name) B23Q 3/08

Claims (4)

(57) [Claims] 1. A flat surface of a base is provided with a concave portion to which a vacuum pressure is applied, and a plurality of annular grooves having different radii. The plurality of annular grooves are provided in a substantially concentric arrangement surrounding the concave portion. A coupling groove is provided in a direction intersecting with the annular groove, the recessed portion communicates with the plurality of annular grooves through the coupling groove, and a rubber seal adapted to any of the plurality of annular grooves is provided. In addition to the ring being fitted, the mounting plate is provided with a mounting plate that is attracted to the upper surface of the base, and the mounting plate is surrounded by a groove for fitting a rubber seal code on the upper surface and a rubber seal code. A vacuum passage having a configuration in which a ventilation path is formed to communicate the recessed region with the recessed region. 2. The vacuum chuck according to claim 1, wherein an ejector for applying a vacuum pressure to the recess is built in the back surface of the base. 3. The vacuum chuck according to claim 1, wherein a gage for displaying a vacuum pressure in the recess is mounted on an outer surface of the base. 4. The method according to claim 1, wherein the edge of the base is formed into an L-shaped step and an inverted L-shaped step so that the base can be arranged side by side. 4. The vacuum chuck according to 2 or 3.