TWM615084U - Air levitation suction device - Google Patents

Abstract

The present invention provides an air-floating adsorption device, which includes a base, a suction nozzle, an air supply unit, and an air extraction unit. The base is formed with an air supply channel, and the air supply channel communicates with the outside through an opening; the suction nozzle penetrates the air supply channel and a part of it is exposed through the opening. There is a gap between the wall of the opening and the suction nozzle, and a suction nozzle is formed in the suction nozzle. Air duct; the air supply unit is connected to the air supply duct; the air extraction unit is connected to the air suction duct.

Description

Air-floating adsorption device

The new creation provides an air-floating adsorption device, and particularly relates to an air-floating adsorption device that combines air flotation suction and suction adsorption.

In the manufacturing process of the semiconductor and precision electronics industries, it is often necessary to use suction devices to move objects such as chips or circuit boards to designated positions. Depending on the suction method, it can be roughly divided into two types: air suction and magnetic suction. In the suction device of the suction type, some devices will directly use the suction nozzle to inhale to generate negative pressure, which makes the object move after attaching to the suction nozzle. Some devices also pass through a specially designed air flow channel to change the flow rate of the fluid. The method generates relative negative pressure and adsorbs objects. However, when the above method is used individually, the former cannot confirm whether the object is within the negative pressure range generated by the suction nozzle, which is likely to cause empty suction and cause the suction pump to waste power needlessly; the latter is likely to cause insufficient suction. For this reason, some devices on the market combine these two methods, that is, air floatation is performed to ensure that the object enters the negative pressure range of the suction nozzle, and then the suction nozzle is used for suction. When it is small, it cannot be absorbed by the air flotation ports and suction nozzles distributed in different positions.

The creator then exhausted his mind to study carefully, and then developed an air-floating adsorption device that combines air-floatation suction and suction adsorption, in order to achieve the effect of improving the adsorption stability and adapting to objects of different sizes.

The present invention provides an air-floating adsorption device, which includes a base, a suction nozzle, an air supply unit, and an air extraction unit. The base is formed with an air supply channel, and the air supply channel is connected to the outside through an opening The suction nozzle penetrates the air supply channel and a part of it is exposed through the opening. There is a gap between the wall of the opening and the suction nozzle, and an air suction channel is formed in the suction mouth; the air supply unit is connected to the air supply channel; the air suction unit is connected Yu pumping airway.

In one embodiment, the above-mentioned base includes an outer edge portion, the outer edge portion is disposed outside the opening, and the inner diameter of the base gradually increases from the opening to the outer edge portion.

In one embodiment, the above-mentioned outer edge portion has an end surface, the normal direction of the end surface is parallel to the extending direction of the air supply channel, and the base further includes an inclined portion connected between the opening and the outer edge portion and has an inclined surface , And the normal direction of the inclined surface is inclined with respect to the extending direction of the air supply duct.

In one embodiment, the aforementioned suction nozzle has a suction surface, and the suction surface is aligned with the end surface.

In one embodiment, a guiding groove is formed on the outer edge portion, and the guiding groove is recessed relative to the end surface.

In one embodiment, the above-mentioned suction nozzle includes a body and a suction part, the suction part is fixed to the body and protrudes relative to the base, and the rigidity of the suction part is less than the rigidity of the body.

In one embodiment, the above-mentioned suction portion includes a connecting portion and a contact portion, the connecting portion is connected between the body and the contact portion, and the outer diameter of the contact portion is smaller than the outer diameter of the connecting portion.

In one embodiment, the air-floating adsorption device further includes a control unit, which is electrically connected to the air supply unit and the air extraction unit. When the air-floating adsorption device adsorbs an object through the air suction unit and the suction nozzle, the control unit controls the air supply unit to stop supplying air to the air supply channel.

In one embodiment, the above-mentioned base further includes a holding portion formed with a holding hole, the holding hole communicates with the air supply channel, the suction nozzle includes a body, and the inner diameter of the holding hole is equal to the outer diameter of the body.

In one embodiment, the above-mentioned air supply unit includes a pump and an air valve, and the pump is connected to the air supply channel through the air valve.

Thereby, the suction nozzle of the air-floating adsorption device created by the present invention is inserted into the air supply duct. Therefore, when the air supply unit supplies air to the air supply duct to provide air flotation suction, the suction unit can suck air through the suction nozzle to absorb The object not only improves the stability of adsorption, but the air flotation suction part and the suction suction part are set at the same position, so it can be applied to objects of different sizes.

In order to make the above-mentioned features and advantages of the new creation more obvious and understandable, the following specific examples are given in conjunction with the accompanying drawings to describe in detail as follows.

1, 1a, 1b: air-floating adsorption device

100, 100a, 100b: base

110: Holding Department

120: Outer edge

122, 122a, 122b: end face

124: Guiding Groove

130: Inclined part

132: Inclined surface

140: inner edge

142: inner end face

150: fixed parts

200, 200a, 200b: nozzle

210: body

220: Adsorption part

222: Connection part

224: Contact

230: contact surface

300: air supply unit

310: pump

320: Valve

400: Extraction unit

500: control unit

A: area

C: gap

H: Holding hole

O: opening

_PE : Exhaust airway

P _S : Air supply channel

X-X, Y-Y: Section

Fig. 1 is a three-dimensional schematic diagram of an embodiment of the newly created air-floating adsorption device.

Fig. 2 is a block diagram of components of the air-floating adsorption device of Fig. 1.

Fig. 3 is a schematic top view of Fig. 1.

Fig. 4 is a schematic cross-sectional view of Fig. 3 along the X-X section.

Fig. 5 is an enlarged schematic diagram of area A in Fig. 4.

Fig. 6 is a schematic front view of another embodiment of the newly created air-floating adsorption device.

Fig. 7 is a schematic cross-sectional view of Fig. 6 along the Y-Y section.

Figure 8 is a schematic front view of yet another embodiment of the newly created air-floating adsorption device.

Fig. 9 is a partial schematic front view of Fig. 8.

The aforementioned and other technical content, features, and effects of the creation of the new model will be clearly presented in the following detailed description of the preferred embodiment with reference to the drawings. It is worth mentioning that the directional terms mentioned in the following embodiments, for example: up, down, left, right, front or back, etc., are just for reference to the attached drawings. The direction of the formula. Therefore, the directional terms used are used to illustrate, not to limit the creation of the new model. In addition, in the following embodiments, the same or similar elements will use the same or similar reference numerals.

Please refer to Figures 1 to 3, where Figure 1 is a three-dimensional schematic diagram of an embodiment of the newly created air-floating adsorption device, Figure 2 is a block diagram of the air-floating adsorption device of Figure 1, and Figure 3 is a diagram 1 is a schematic top view. The air-floating adsorption device 1 of this embodiment includes a base 100, a suction nozzle 200, an air supply unit 300, and an air suction unit 400, wherein a part of the suction nozzle 200 is disposed inside the base 100, and the air supply unit 300 For example, it includes a pump 310 and an air valve 320 and is connected to the base 100, and the air extraction unit 400 includes, for example, an air extraction pump (not shown) and is connected to the suction nozzle 200. Preferably, the air-floating adsorption device 1 further includes a control unit 500, wherein the control unit 500 is, for example, a programmable logic controller (PLC) or a computer, and is electrically connected to the air supply unit 300 and the pump气 unit 400.

Please refer to FIGS. 4 and 5, where FIG. 4 is a schematic cross-sectional view of FIG. 3 along the XX section, and FIG. 5 is an enlarged schematic view of area A in FIG. Specifically, the base 100 is formed with a gas passage P _S, P _S through a gas supply path openings communicating with the outside O, and the air supply unit 300 communicates with the air supply channel P _S. Still further, the pump 310 is connected to a gas supply valve 320 through passage P _S, whereby the air supply to turn on or off the air supply channel P _S through valve 320, while the suction nozzle 200 is disposed through the gas supply passage _S P And a part is exposed through the opening O, and there is a gap C between the wall surface of the opening O and the suction nozzle 200. Preferably, the base 100 includes a retaining portion 110, retaining portion 110 is formed with a retaining hole H, the retaining hole H in communication with the air supply channel P _S, the nozzle 200 includes a portion 210, and a holder inner diameter of the hole H and body portion The outer diameters of the nozzle 210 are approximately the same. When the nozzle 200 and the base 100 are assembled, the holding hole H and the body 210 are in a tightly fitted state, so that the base 100 can hold the nozzle 200.

On the other hand, the nozzle 200 is formed with a suction passage P _E, and the communication unit 400 to the suction extraction channel P _E. Through this configuration, when the flotation adsorption apparatus 1 close to the object, the control unit 500 may control the gas supply unit 300 to supply path P _S, C through the gap when the high velocity gas nozzle 200 is exposed by the opening part of the O When spraying from the side, according to Bernoulli's theorem, a relatively low pressure will be formed around the suction nozzle 200, so objects can be attracted to the suction nozzle 200 through air flotation. At this time, the control unit 500 then controls the air extraction unit 400 to pass through the air extraction channel. _{PE is} used to pump air. Since the object is already located around the suction nozzle 200 under the action of air flotation suction, the suction nozzle 200 can easily absorb the object, thereby achieving the effect of improving the stability of suction.

It is worth mentioning that, in the above process, although the flotation adsorption apparatus 1 to take the first object for suction gas flotation, and then through the bleed passage by the suction unit evacuation P _E 400 mode of operation, but the present novel and creative Not limited to this. In other possible embodiments, the air supply unit 300 and the air extraction unit 400 can also be activated at the same time, so that the object is immediately adsorbed by the suction nozzle 200 while being subjected to air flotation, and the same effect can also be achieved.

Furthermore, as shown in FIG. 5, the base 100 includes an outer edge portion 120, an inclined portion 130, and an inner edge portion 140. The outer edge portion 120 is disposed outside the opening O, and the inclined portion 130 is connected to the opening O. And the outer edge portion 120, and the inner edge portion 140 is connected between the opening O and the inclined portion 130. As a result, the inner diameter of the base 100 from the opening O to the outer edge 120 gradually becomes larger, so that an appropriate gap C can be maintained according to the shape of the suction nozzle 200 to maintain a stable negative pressure environment.

Further, the outer edge portion 120 having a face 122, an inclined portion 130 having an inclined surface 132 and the inner edge portion 140 has an inner end surface 142, wherein the end face 122 and an inner end surface 142 extends parallel to the normal direction of the air supply channel P _S (i.e., vertical direction in FIG. 5), whereas the inclined surface 132 of the method to the extending direction of the air supply passage inclined relative to P _S, in other words, the size of the clearance C between the base 100 and the nozzle 200 by the air supply path P _S, the The edge portion 140, the inclined portion 130 and the outer edge portion 120 are substantially fixed. Through this configuration, the gas can flow from the inner end surface 142 to the end surface 122 along the inclined surface 132, and when passing through the inner end surface 142 and the end surface 122, it can flow in the horizontal direction (the direction parallel to the surface of the adsorbed object). It is easy to cause obstacles to the suction nozzle 200 to suck objects, which further improves the stability of suction.

On the other hand, in order to improve the adhesion between the suction nozzle 200 and the suction object, the suction nozzle 200 further includes a suction part 220, wherein the suction part 220 is fixed to the body 210 and protrudes relative to the base 100, and the rigidity of the suction part 220 is less than The rigidity of the body 210. Specifically, the body 210 of this embodiment is made of, for example, a metal material, and the suction part 220 is made of, for example, rubber or plastic. Through this configuration, when the suction nozzle 200 sucks an object, the suction part 220 can conform to the shape of the object compared to the body 210 and adhere to the surface of the object more closely. When the suction force is increased, the suction part 220 can appropriately Deformation prevents imprints on the surface of the object.

Furthermore, the suction portion 220 includes a connecting portion 222 and a contact portion 224, wherein the connecting portion 222 is connected between the body 210 and the contact portion 224, and the outer diameter of the contact portion 224 is smaller than the outer diameter of the connecting portion 222. In this way, when the surface size of the object is small, the inner diameter of the suction nozzle 200 can still maintain the suction force of the suction unit 400, and only the suction part 220 with the contact part 224 of the corresponding size needs to be adjusted or replaced. The air-floating adsorption device 1 has greater flexibility in use.

Please refer to FIGS. 6 and 7. FIG. 6 is a schematic front view of another embodiment of the newly created air-floating adsorption device, and FIG. 7 is a schematic cross-sectional view of FIG. 6 along the Y-Y section. The air-floating adsorption device 1a of this embodiment is similar to the air-floating adsorption device 1 of FIG. The nozzle 200a does not have the suction part 220.

In detail, due to the large area of some objects, they need to be adsorbed by multiple air-floating adsorption devices 1a. In order to maintain the adhesion between the air-floating adsorption device 1a and the object, the suction nozzle 200a of this embodiment has a The suction surface 230 is aligned with the end surface 122a of the outer edge 120a. Thereby, when the object is attracted by the air-floating suction device 1a, a part of the object can be attached to each suction surface 230 at the same time, and the other part abuts against the end surface 122a, thereby maintaining the suction The flatness of the object.

In the meantime, in order to avoid the object is attached to the rear end surface 122a, discharged through the air supply channel P _S can not be blocked by an object gas discharged smoothly, there are two guide grooves 124 are formed on an outer edge portion 120a of the present embodiment, the guide The grooves 124 are symmetrically distributed on both sides of the opening O and recessed relative to the end surface 122a. Accordingly, even when the suction nozzle sucks an object results in the object 200a is attached to the end surface 122, still can be discharged from the side of the base 100 via the gas supply unit 300 via the discharged air supply channel P _S and the guide groove 124, so that Ensure that the adsorption process goes smoothly.

Please refer to FIGS. 8 and 9. FIG. 8 is a schematic front view of still another embodiment of the newly created air-floating adsorption device, and FIG. 9 is a partial front view of FIG. 8. The air-floating adsorption device 1b of this embodiment is similar to the air-floating adsorption device 1a of FIG. groove.

Specifically, the base 1b of the flotation adsorption apparatus 100b is plate-shaped, whereby the adsorption of a large area, and the base 100b is formed with a plurality of air supply channels P _S, through these air supply path is provided with a plurality of suction P _S Since the nozzle 200b has a large area of the base 100b, in order not to affect the flatness of the end surface 122b, no guiding groove is provided on the end surface 122b. Instead, the air-floating adsorption device 1b controls the switching between air-floating suction and suction nozzle 200b through the control unit 500. When the air-floating adsorption device 1b adsorbs objects through the suction unit 400 and the suction nozzle 200b, the control unit 500 the control unit 300 stops the air supply to the gas supply channel P _S. Through this configuration, the air-floating adsorption device 1b can prevent the gas discharged from the gas supply unit 300 from being unable to be smoothly discharged without the guide groove.

It is worth mentioning that, even in the embodiment of the air-floating adsorption device 1a with the guide groove 124 in FIG. 6, the air supply unit 300 and the air extraction unit 400 can be controlled by the control unit 500 to avoid helping Pu 310 idling, this new creation does not impose restrictions on this.

The creation of the present invention has been disclosed in the above preferred embodiments. However, those familiar with the technology should understand that the above-mentioned embodiments are only used to describe the creation of the present invention, and should not be interpreted as limiting the scope of the creation of the present invention. It should be noted that all changes and replacements equivalent to the above-mentioned embodiments should be included in the scope of the creation of the new type. Therefore, the scope of protection for the creation of this new model shall be determined by the scope of the patent application.

100: base

110: Holding Department

150: fixed parts

200: Nozzle

210: body

220: Adsorption part

320: Valve

A: area

H: Holding hole

O: opening

_PE : Exhaust airway

P _S : Air supply channel

X-X: Section

Claims (10)

An air-floating adsorption device includes: a base formed with an air supply channel, and the air supply channel communicates with the outside through an opening; a suction nozzle penetrates the air supply channel and partially exposed through the opening. There is a gap between the wall surface and the suction nozzle, and an air suction channel is formed in the suction nozzle; an air supply unit communicates with the air supply channel; and an air suction unit communicates with the air suction channel. The air-floating adsorption device according to claim 1, wherein the base includes an outer edge portion, the outer edge portion is disposed outside the opening, and the inner diameter of the base gradually increases from the opening to the outer edge portion . The air-floating adsorption device according to claim 2, wherein the outer edge portion has an end surface, the normal direction of the end surface is parallel to the extending direction of the air supply channel, and the base further includes an inclined portion connected to the There is an inclined surface between the opening and the outer edge portion, and the normal direction of the inclined surface is inclined with respect to the extending direction of the air supply channel. The air-floating suction device according to claim 3, wherein the suction nozzle has a suction surface, and the suction surface is aligned with the end surface. The air-floating adsorption device according to claim 3, wherein a guiding groove is formed on the outer edge portion, and the guiding groove is recessed relative to the end surface. The air-floating suction device according to claim 1, wherein the suction nozzle includes a body and a suction part, the suction part is fixed on the body and protrudes relative to the base, and the rigidity of the suction part is less than that of the body The rigidity of the department. The air-floating adsorption device according to claim 6, wherein the adsorption part includes a connection part and a contact part, the connection part is connected between the body and the contact part, and the outer diameter of the contact part is smaller than the The outer diameter of the connecting part. The air-floating adsorption device according to claim 1, further comprising a control unit electrically connected to the air supply unit and the air extraction unit, and when the air-floating adsorption device passes through the air extraction unit and the air extraction unit When the suction nozzle sucks an object, the control unit controls the air supply unit to stop supplying air to the air supply channel. The air-floating adsorption device according to claim 1, wherein the base further includes a holding portion, the holding portion is formed with a holding hole, the holding hole communicates with the air supply channel, the suction nozzle includes a body, and the holding hole The inner diameter of the body is equal to the outer diameter of the body. The air-floating adsorption device according to claim 1, wherein the air supply unit includes a pump and an air valve, and the pump is connected to the air supply channel through the air valve.

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