JPH0342616B2 - - Google Patents

Info

Publication number
JPH0342616B2
JPH0342616B2 JP58203752A JP20375283A JPH0342616B2 JP H0342616 B2 JPH0342616 B2 JP H0342616B2 JP 58203752 A JP58203752 A JP 58203752A JP 20375283 A JP20375283 A JP 20375283A JP H0342616 B2 JPH0342616 B2 JP H0342616B2
Authority
JP
Japan
Prior art keywords
substrate
channel
flow
thermal mass
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58203752A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6050419A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS6050419A publication Critical patent/JPS6050419A/ja
Publication of JPH0342616B2 publication Critical patent/JPH0342616B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/6965—Circuits therefor, e.g. constant-current flow meters comprising means to store calibration data for flow signal calculation or correction

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
JP58203752A 1983-08-26 1983-11-01 サ−マル質量流量計 Granted JPS6050419A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/526,860 US4542650A (en) 1983-08-26 1983-08-26 Thermal mass flow meter
US526860 1990-05-22

Publications (2)

Publication Number Publication Date
JPS6050419A JPS6050419A (ja) 1985-03-20
JPH0342616B2 true JPH0342616B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-06-27

Family

ID=24099109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58203752A Granted JPS6050419A (ja) 1983-08-26 1983-11-01 サ−マル質量流量計

Country Status (4)

Country Link
US (1) US4542650A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
EP (1) EP0137687A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS6050419A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE137687T1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000506261A (ja) * 1996-02-27 2000-05-23 ニフォテク・アーエス 圧力センサ
JP2015500490A (ja) * 2011-12-12 2015-01-05 カールスルーアー・インスティトゥート・フュア・テヒノロギーＫａｒｌｓｒｕｈｅｒ Ｉｎｓｔｉｔｕｔ ｆｕｅｒ Ｔｅｃｈｎｏｌｏｇｉｅ 流体の質量流量を測定する装置および方法

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US4691566A (en) * 1984-12-07 1987-09-08 Aine Harry E Immersed thermal fluid flow sensor
US4790181A (en) * 1983-12-01 1988-12-13 Aine Harry E Thermal mass flow meter and method of making same
US4648270A (en) * 1984-02-22 1987-03-10 Sirris Flow Technology, Inc. Mass flowmeter
JPS60236024A (ja) * 1984-05-09 1985-11-22 Nippon Soken Inc 直熱型空気流量センサ
JPS61178614A (ja) * 1985-02-02 1986-08-11 Nippon Soken Inc 直熱型流量センサ
US4685331A (en) * 1985-04-10 1987-08-11 Innovus Thermal mass flowmeter and controller
JPS61274222A (ja) * 1985-05-30 1986-12-04 Sharp Corp 流量センサ
FR2586105B1 (fr) * 1985-08-06 1990-08-31 Veglia Circuit conducteur et procede de fabrication de ce circuit
JPS62123318A (ja) * 1985-08-13 1987-06-04 Nippon Soken Inc 直熱型流量センサ
GB2179748B (en) * 1985-08-20 1989-09-06 Sharp Kk Thermal flow sensor
AT396998B (de) * 1985-12-09 1994-01-25 Ottosensors Corp Messeinrichtungen und rohranschluss sowie verfahren zur herstellung einer messeinrichtung und verfahren zur verbindung von rohren mit einer messeinrichtung bzw. zur herstellung von rohranschlüssen
US4682503A (en) * 1986-05-16 1987-07-28 Honeywell Inc. Microscopic size, thermal conductivity type, air or gas absolute pressure sensor
DE3724966C3 (de) * 1986-07-29 1996-03-21 Sharp Kk Sensor
US4821997A (en) * 1986-09-24 1989-04-18 The Board Of Trustees Of The Leland Stanford Junior University Integrated, microminiature electric-to-fluidic valve and pressure/flow regulator
US4943032A (en) * 1986-09-24 1990-07-24 Stanford University Integrated, microminiature electric to fluidic valve and pressure/flow regulator
US4966646A (en) * 1986-09-24 1990-10-30 Board Of Trustees Of Leland Stanford University Method of making an integrated, microminiature electric-to-fluidic valve
US4794947A (en) * 1986-11-29 1989-01-03 Kabushiki Kaisha Nippon IC (also trading as Nippon IC, Inc.) Mass flow controller
JPH06103287B2 (ja) * 1987-10-07 1994-12-14 シャープ株式会社 センサ素子
US4909078A (en) * 1987-10-14 1990-03-20 Rosemount Inc. Fluid flow detector
US4888988A (en) * 1987-12-23 1989-12-26 Siemens-Bendix Automotive Electronics L.P. Silicon based mass airflow sensor and its fabrication method
US4870745A (en) * 1987-12-23 1989-10-03 Siemens-Bendix Automotive Electronics L.P. Methods of making silicon-based sensors
US5074629A (en) * 1988-10-26 1991-12-24 Stanford University Integrated variable focal length lens and its applications
DE3842399C2 (de) * 1988-12-16 1997-07-31 Fisher Rosemount Gmbh & Co Ges Mikroströmungsfühler für Gase
JPH06100568B2 (ja) * 1989-09-05 1994-12-12 シャープ株式会社 雰囲気センサ
DE3907209C1 (de) * 1989-01-18 1990-03-01 Danfoss A/S, Nordborg Vorrichtung zum Überwachen eines Leitungssystems für Fluid auf Leckstellen
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US5291781A (en) * 1991-04-12 1994-03-08 Yamatake-Honeywell Co., Ltd. Diaphragm-type sensor
US5193400A (en) * 1991-05-10 1993-03-16 Lew Hyok S Universal rotameter
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US5520969A (en) * 1994-02-04 1996-05-28 Applied Materials, Inc. Method for in-situ liquid flow rate estimation and verification
JP3244208B2 (ja) * 1994-02-07 2002-01-07 本田技研工業株式会社 ガスレート検出器
JP3312227B2 (ja) * 1994-02-23 2002-08-05 本田技研工業株式会社 ガス式角速度センサ
JP3281169B2 (ja) * 1994-03-24 2002-05-13 本田技研工業株式会社 多軸型ガスレートセンサ
US5786744A (en) * 1994-03-24 1998-07-28 Honda Giken Kogyo Kabushiki Kaisha Hybrid sensor
US5461910A (en) * 1994-06-16 1995-10-31 Alnor Instrument Company Fluid flow direction and velocity monitor
JP3282773B2 (ja) * 1994-12-12 2002-05-20 東京瓦斯株式会社 熱式流量計
DE19534906C2 (de) * 1995-09-20 1998-03-19 Deutsche Automobilgesellsch Sensoranordnung zum Messen der Masse eines strömenden Mediums nach dem Prinzip des Heißfilm-Anemometers
WO1997049998A1 (en) 1996-06-26 1997-12-31 Simon Fraser University Accelerometer without proof mass
US6182509B1 (en) 1996-06-26 2001-02-06 Simon Fraser University Accelerometer without proof mass
US6589433B2 (en) 1996-06-26 2003-07-08 Simon Fraser University Accelerometer without proof mass
US5868159A (en) * 1996-07-12 1999-02-09 Mks Instruments, Inc. Pressure-based mass flow controller
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DE19803186C1 (de) * 1998-01-28 1999-06-17 Bosch Gmbh Robert Verfahren zur Herstellung strukturierter Wafer
US6794981B2 (en) * 1998-12-07 2004-09-21 Honeywell International Inc. Integratable-fluid flow and property microsensor assembly
DE19906100C2 (de) * 1999-02-13 2003-07-31 Sls Micro Technology Gmbh Thermischer Durchflußsensor in Mikrosystemtechnik
JP3562712B2 (ja) * 1999-05-17 2004-09-08 松下電器産業株式会社 流量計測装置
US6367970B1 (en) * 1999-06-07 2002-04-09 The United States Of America As Represented By The Secretary Of The Navy Rapid response h-q-T sensor
JP3461469B2 (ja) * 1999-07-27 2003-10-27 株式会社日立製作所 熱式空気流量センサ及び内燃機関制御装置
DE19952055A1 (de) * 1999-10-28 2001-05-17 Bosch Gmbh Robert Massenflußsensor mit verbesserter Membranstabilität
US6526823B2 (en) * 1999-11-30 2003-03-04 California Institute Of Technology Microelectromechanical system sensor assembly
KR100447378B1 (ko) * 2000-05-19 2004-09-04 미쓰비시덴키 가부시키가이샤 감열식 유량 검출 소자 및 그 홀더
JP3825242B2 (ja) * 2000-10-17 2006-09-27 株式会社山武 フローセンサ
US6795752B1 (en) * 2000-11-03 2004-09-21 Memsic, Inc. Thermal convection accelerometer with closed-loop heater control
US6631638B2 (en) 2001-01-30 2003-10-14 Rosemount Aerospace Inc. Fluid flow sensor
GB2375401A (en) * 2001-05-03 2002-11-13 Endress & Hauser Ltd A flow meter incorporating thermal loss sensors and an installation adapter to provide known flow conditions upstream of the flow meter
JP2003035580A (ja) * 2001-07-19 2003-02-07 Denso Corp フローセンサ
US20030130624A1 (en) * 2002-01-07 2003-07-10 Kowalik Francis C. Medical infusion system with integrated power supply and pump therefor
EP1365216B1 (en) * 2002-05-10 2018-01-17 Azbil Corporation Flow sensor and method of manufacturing the same
US6796172B2 (en) * 2002-07-31 2004-09-28 Hewlett-Packard Development Company, L.P. Flow sensor
US6684695B1 (en) * 2002-10-08 2004-02-03 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Mass flow sensor utilizing a resistance bridge
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US7131766B2 (en) * 2003-07-16 2006-11-07 Delphi Technologies, Inc. Temperature sensor apparatus and method
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ITTO20130502A1 (it) * 2013-06-18 2014-12-19 St Microelectronics Asia Dispositivo elettronico con sensore di temperatura integrato e relativo metodo di fabbricazione
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JP2000506261A (ja) * 1996-02-27 2000-05-23 ニフォテク・アーエス 圧力センサ
JP2015500490A (ja) * 2011-12-12 2015-01-05 カールスルーアー・インスティトゥート・フュア・テヒノロギーＫａｒｌｓｒｕｈｅｒ Ｉｎｓｔｉｔｕｔ ｆｕｅｒ Ｔｅｃｈｎｏｌｏｇｉｅ 流体の質量流量を測定する装置および方法

Also Published As

Publication number Publication date
US4542650A (en) 1985-09-24
DE137687T1 (de) 1986-02-27
JPS6050419A (ja) 1985-03-20
EP0137687A1 (en) 1985-04-17

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