WO2008132956A1 - 流量センサ - Google Patents
流量センサ Download PDFInfo
- Publication number
- WO2008132956A1 WO2008132956A1 PCT/JP2008/056681 JP2008056681W WO2008132956A1 WO 2008132956 A1 WO2008132956 A1 WO 2008132956A1 JP 2008056681 W JP2008056681 W JP 2008056681W WO 2008132956 A1 WO2008132956 A1 WO 2008132956A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- flow rate
- rate sensor
- substrate
- fluid
- temperature detecting
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Abstract
流体の流路に沿って配置された発熱抵抗体と温度検出部材とを用いて流体の流量に対応する信号を出力する流量センサにおいて、複数の流路を片面に形成した流路基板と、複数の流路にそれぞれ対応する位置に形成した複数の発熱抵抗体と複数の温度検出部材が流体に接するように流路基板に貼り合わせたセンサ基板と、を有し、センサ基板の隣り合う複数の発熱抵抗体の間に断熱用の貫通穴を形成することを特徴とする流量センサ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009511731A JPWO2008132956A1 (ja) | 2007-04-24 | 2008-04-03 | 流量センサ |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-113931 | 2007-04-24 | ||
JP2007113931 | 2007-04-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008132956A1 true WO2008132956A1 (ja) | 2008-11-06 |
Family
ID=39925415
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/056681 WO2008132956A1 (ja) | 2007-04-24 | 2008-04-03 | 流量センサ |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPWO2008132956A1 (ja) |
WO (1) | WO2008132956A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013175547A1 (ja) * | 2012-05-21 | 2013-11-28 | 愛知時計電機 株式会社 | 流量検出器 |
WO2016194368A1 (ja) * | 2015-06-04 | 2016-12-08 | 日本電気株式会社 | 実装基板及び蓄電池の電流検出装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6050419A (ja) * | 1983-08-26 | 1985-03-20 | イノバス | サ−マル質量流量計 |
JPH02141622A (ja) * | 1988-11-24 | 1990-05-31 | Ngk Spark Plug Co Ltd | センサのヒータ部構造 |
JPH11118542A (ja) * | 1997-10-20 | 1999-04-30 | Yamatake Corp | 燃焼ガス流量測定装置 |
JP2006275734A (ja) * | 2005-03-29 | 2006-10-12 | Konica Minolta Medical & Graphic Inc | マイクロ総合分析システム |
-
2008
- 2008-04-03 WO PCT/JP2008/056681 patent/WO2008132956A1/ja active Application Filing
- 2008-04-03 JP JP2009511731A patent/JPWO2008132956A1/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6050419A (ja) * | 1983-08-26 | 1985-03-20 | イノバス | サ−マル質量流量計 |
JPH02141622A (ja) * | 1988-11-24 | 1990-05-31 | Ngk Spark Plug Co Ltd | センサのヒータ部構造 |
JPH11118542A (ja) * | 1997-10-20 | 1999-04-30 | Yamatake Corp | 燃焼ガス流量測定装置 |
JP2006275734A (ja) * | 2005-03-29 | 2006-10-12 | Konica Minolta Medical & Graphic Inc | マイクロ総合分析システム |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013175547A1 (ja) * | 2012-05-21 | 2013-11-28 | 愛知時計電機 株式会社 | 流量検出器 |
CN104303022A (zh) * | 2012-05-21 | 2015-01-21 | 爱知时计电机株式会社 | 流量检测器 |
JPWO2013175547A1 (ja) * | 2012-05-21 | 2016-01-12 | 愛知時計電機株式会社 | 流量検出器 |
US9752906B2 (en) | 2012-05-21 | 2017-09-05 | Aichi Tokei Denki Co., Ltd. | Flow volume detector |
WO2016194368A1 (ja) * | 2015-06-04 | 2016-12-08 | 日本電気株式会社 | 実装基板及び蓄電池の電流検出装置 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2008132956A1 (ja) | 2010-07-22 |
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