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Priority to JP6815174ApriorityCriticalpatent/JPS569657B2/ja
Publication of JPS50160069ApublicationCriticalpatent/JPS50160069A/ja
Publication of JPS569657B2publicationCriticalpatent/JPS569657B2/ja
Method of monitoring article supporting state energized from high frequency induction heating coil by manipultor and responding to incorrect support and manipulator having article fine movement