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Priority to JP6815174ApriorityCriticalpatent/JPS569657B2/ja
Publication of JPS50160069ApublicationCriticalpatent/JPS50160069A/ja
Publication of JPS569657B2publicationCriticalpatent/JPS569657B2/ja
Method of monitoring article supporting state energized from high frequency induction heating coil by manipultor and responding to incorrect support and manipulator having article fine movement
Method of monitoring article supporting state energized from high frequency induction heating coil by manipultor and responding to incorrect support and manipulator having article fine movement