JPH0220139B2 - - Google Patents

Info

Publication number
JPH0220139B2
JPH0220139B2 JP58112942A JP11294283A JPH0220139B2 JP H0220139 B2 JPH0220139 B2 JP H0220139B2 JP 58112942 A JP58112942 A JP 58112942A JP 11294283 A JP11294283 A JP 11294283A JP H0220139 B2 JPH0220139 B2 JP H0220139B2
Authority
JP
Japan
Prior art keywords
grid line
oxide film
thermal oxide
insulating film
interlayer insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58112942A
Other languages
English (en)
Japanese (ja)
Other versions
JPS605543A (ja
Inventor
Yasushi Matsumi
Kazuo Matsumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP58112942A priority Critical patent/JPS605543A/ja
Publication of JPS605543A publication Critical patent/JPS605543A/ja
Publication of JPH0220139B2 publication Critical patent/JPH0220139B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • Formation Of Insulating Films (AREA)
JP58112942A 1983-06-24 1983-06-24 半導体装置の製造方法 Granted JPS605543A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58112942A JPS605543A (ja) 1983-06-24 1983-06-24 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58112942A JPS605543A (ja) 1983-06-24 1983-06-24 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS605543A JPS605543A (ja) 1985-01-12
JPH0220139B2 true JPH0220139B2 (enExample) 1990-05-08

Family

ID=14599358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58112942A Granted JPS605543A (ja) 1983-06-24 1983-06-24 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS605543A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2614045B2 (ja) * 1987-05-11 1997-05-28 大塚化学株式会社 チタン酸アルカリ金属繊維強化複合材料の製造方法
JP2591617B2 (ja) * 1987-05-11 1997-03-19 大塚化学株式会社 繊維状チタン酸アルカリ金属塩からなる多結晶体の製造法

Also Published As

Publication number Publication date
JPS605543A (ja) 1985-01-12

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