JPH02108329U - - Google Patents

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Publication number
JPH02108329U
JPH02108329U JP1572189U JP1572189U JPH02108329U JP H02108329 U JPH02108329 U JP H02108329U JP 1572189 U JP1572189 U JP 1572189U JP 1572189 U JP1572189 U JP 1572189U JP H02108329 U JPH02108329 U JP H02108329U
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JP
Japan
Prior art keywords
cassette
transporting
workpieces
processed
diagram showing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1572189U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0731539Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989015721U priority Critical patent/JPH0731539Y2/ja
Publication of JPH02108329U publication Critical patent/JPH02108329U/ja
Application granted granted Critical
Publication of JPH0731539Y2 publication Critical patent/JPH0731539Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Electron Beam Exposure (AREA)
JP1989015721U 1989-02-15 1989-02-15 基板処理装置 Expired - Lifetime JPH0731539Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989015721U JPH0731539Y2 (ja) 1989-02-15 1989-02-15 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989015721U JPH0731539Y2 (ja) 1989-02-15 1989-02-15 基板処理装置

Publications (2)

Publication Number Publication Date
JPH02108329U true JPH02108329U (enrdf_load_stackoverflow) 1990-08-29
JPH0731539Y2 JPH0731539Y2 (ja) 1995-07-19

Family

ID=31228013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989015721U Expired - Lifetime JPH0731539Y2 (ja) 1989-02-15 1989-02-15 基板処理装置

Country Status (1)

Country Link
JP (1) JPH0731539Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011128646A (ja) * 2011-02-07 2011-06-30 Canon Inc 露光装置及びデバイス製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012100929A1 (de) * 2012-02-06 2013-08-08 Roth & Rau Ag Substratbearbeitungsanlage

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS629643A (ja) * 1985-07-08 1987-01-17 Nippon Kogaku Kk <Nikon> 基板搬送装置
JPS62169327A (ja) * 1986-01-21 1987-07-25 Toshiba Mach Co Ltd 基板交換装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS629643A (ja) * 1985-07-08 1987-01-17 Nippon Kogaku Kk <Nikon> 基板搬送装置
JPS62169327A (ja) * 1986-01-21 1987-07-25 Toshiba Mach Co Ltd 基板交換装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011128646A (ja) * 2011-02-07 2011-06-30 Canon Inc 露光装置及びデバイス製造方法

Also Published As

Publication number Publication date
JPH0731539Y2 (ja) 1995-07-19

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