JPS6214693Y2 - - Google Patents

Info

Publication number
JPS6214693Y2
JPS6214693Y2 JP1982082398U JP8239882U JPS6214693Y2 JP S6214693 Y2 JPS6214693 Y2 JP S6214693Y2 JP 1982082398 U JP1982082398 U JP 1982082398U JP 8239882 U JP8239882 U JP 8239882U JP S6214693 Y2 JPS6214693 Y2 JP S6214693Y2
Authority
JP
Japan
Prior art keywords
wafer
light
electrode
gripping means
emitting element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982082398U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58184841U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8239882U priority Critical patent/JPS58184841U/ja
Publication of JPS58184841U publication Critical patent/JPS58184841U/ja
Application granted granted Critical
Publication of JPS6214693Y2 publication Critical patent/JPS6214693Y2/ja
Granted legal-status Critical Current

Links

JP8239882U 1982-06-04 1982-06-04 ウエ−ハ搬送装置 Granted JPS58184841U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8239882U JPS58184841U (ja) 1982-06-04 1982-06-04 ウエ−ハ搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8239882U JPS58184841U (ja) 1982-06-04 1982-06-04 ウエ−ハ搬送装置

Publications (2)

Publication Number Publication Date
JPS58184841U JPS58184841U (ja) 1983-12-08
JPS6214693Y2 true JPS6214693Y2 (enrdf_load_stackoverflow) 1987-04-15

Family

ID=30091465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8239882U Granted JPS58184841U (ja) 1982-06-04 1982-06-04 ウエ−ハ搬送装置

Country Status (1)

Country Link
JP (1) JPS58184841U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2826763B2 (ja) * 1990-05-21 1998-11-18 キヤノン株式会社 薄板検出装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49104569A (enrdf_load_stackoverflow) * 1973-02-07 1974-10-03

Also Published As

Publication number Publication date
JPS58184841U (ja) 1983-12-08

Similar Documents

Publication Publication Date Title
KR102379269B1 (ko) 통합된 얼라이너를 갖는 로봇
JP4327599B2 (ja) ウエーハ取り扱い装置及び方法
JPH11207611A (ja) 両面研磨装置におけるワークの自動搬送装置
WO2004033158A3 (en) Substrate handling system for aligning and orienting substrates during a transfer operation
JPS6214693Y2 (enrdf_load_stackoverflow)
US6873396B2 (en) Photolithography processing system
KR101039441B1 (ko) 웨이퍼 센터링 방법
EP1068936A1 (en) Grippers with ability to change wafer orientation
JPS63137448A (ja) 半導体ウエハ処理装置
JPH0636582Y2 (ja) エッチング装置
JPH05299489A (ja) ウェーハ搬送用ロボット
JP3237401B2 (ja) 真空処理装置
KR102160231B1 (ko) 다중 기판 이송로봇
JPH06244266A (ja) ウェハ搬送車
JPS60198747A (ja) 真空中におけるウエハ垂直搬送装置
JPH0523291Y2 (enrdf_load_stackoverflow)
JP2533706B2 (ja) 基板搬送方法、及びその装置
JP3091469B2 (ja) 半導体装置の製造方法
JP3023566B2 (ja) ダイシング装置
JPH06101513B2 (ja) 半導体基板処理装置
JPS6343341A (ja) 半導体装置製造装置のオ−トロ−ダ
JPH0255340B2 (enrdf_load_stackoverflow)
JPH0383325A (ja) 半導体装置の製造装置
JPH0110933Y2 (enrdf_load_stackoverflow)
JP3434014B2 (ja) スタッカロボット