JPS6214693Y2 - - Google Patents

Info

Publication number
JPS6214693Y2
JPS6214693Y2 JP1982082398U JP8239882U JPS6214693Y2 JP S6214693 Y2 JPS6214693 Y2 JP S6214693Y2 JP 1982082398 U JP1982082398 U JP 1982082398U JP 8239882 U JP8239882 U JP 8239882U JP S6214693 Y2 JPS6214693 Y2 JP S6214693Y2
Authority
JP
Japan
Prior art keywords
wafer
light
electrode
gripping means
emitting element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982082398U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58184841U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8239882U priority Critical patent/JPS58184841U/ja
Publication of JPS58184841U publication Critical patent/JPS58184841U/ja
Application granted granted Critical
Publication of JPS6214693Y2 publication Critical patent/JPS6214693Y2/ja
Granted legal-status Critical Current

Links

JP8239882U 1982-06-04 1982-06-04 ウエ−ハ搬送装置 Granted JPS58184841U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8239882U JPS58184841U (ja) 1982-06-04 1982-06-04 ウエ−ハ搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8239882U JPS58184841U (ja) 1982-06-04 1982-06-04 ウエ−ハ搬送装置

Publications (2)

Publication Number Publication Date
JPS58184841U JPS58184841U (ja) 1983-12-08
JPS6214693Y2 true JPS6214693Y2 (enrdf_load_stackoverflow) 1987-04-15

Family

ID=30091465

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8239882U Granted JPS58184841U (ja) 1982-06-04 1982-06-04 ウエ−ハ搬送装置

Country Status (1)

Country Link
JP (1) JPS58184841U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2826763B2 (ja) * 1990-05-21 1998-11-18 キヤノン株式会社 薄板検出装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49104569A (enrdf_load_stackoverflow) * 1973-02-07 1974-10-03

Also Published As

Publication number Publication date
JPS58184841U (ja) 1983-12-08

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