JPH0255340B2 - - Google Patents
Info
- Publication number
- JPH0255340B2 JPH0255340B2 JP5742985A JP5742985A JPH0255340B2 JP H0255340 B2 JPH0255340 B2 JP H0255340B2 JP 5742985 A JP5742985 A JP 5742985A JP 5742985 A JP5742985 A JP 5742985A JP H0255340 B2 JPH0255340 B2 JP H0255340B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- magazine
- wafers
- arm
- insertion device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5742985A JPS61217442A (ja) | 1985-03-20 | 1985-03-20 | ウエ−ハ插入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5742985A JPS61217442A (ja) | 1985-03-20 | 1985-03-20 | ウエ−ハ插入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61217442A JPS61217442A (ja) | 1986-09-27 |
| JPH0255340B2 true JPH0255340B2 (enrdf_load_stackoverflow) | 1990-11-27 |
Family
ID=13055409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5742985A Granted JPS61217442A (ja) | 1985-03-20 | 1985-03-20 | ウエ−ハ插入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61217442A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0649529B2 (ja) * | 1986-11-28 | 1994-06-29 | 日本真空技術株式会社 | 真空室内における物体の搬送方法 |
| JPS63208452A (ja) * | 1987-02-20 | 1988-08-29 | Canon Inc | 基板搬送装置 |
| JPH089049Y2 (ja) * | 1987-07-27 | 1996-03-13 | 日本電気株式会社 | 自動基板供給・収納装置 |
-
1985
- 1985-03-20 JP JP5742985A patent/JPS61217442A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61217442A (ja) | 1986-09-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |